CN105444892A - Ellipsoidal cavity pyroelectric sensor system - Google Patents
Ellipsoidal cavity pyroelectric sensor system Download PDFInfo
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- CN105444892A CN105444892A CN201510759414.7A CN201510759414A CN105444892A CN 105444892 A CN105444892 A CN 105444892A CN 201510759414 A CN201510759414 A CN 201510759414A CN 105444892 A CN105444892 A CN 105444892A
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- pyroelectric sensor
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- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 23
- 238000012360 testing method Methods 0.000 abstract description 13
- 230000005855 radiation Effects 0.000 abstract description 7
- 238000001228 spectrum Methods 0.000 abstract description 3
- 238000001914 filtration Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 description 9
- 241000736800 Vernonia Species 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005616 pyroelectricity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910001561 spheroidite Inorganic materials 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention provides an ellipsoidal cavity pyroelectric sensor system, and relates to the field of near-infrared and wide-spectrum sensor systems. According to the technical scheme of the invention, the system solves the problem in the prior art that the absorption efficiency of existing cavity pyroelectric sensors is greatly reduced to cause the poor accuracy of the radiation strength testing operation when the incident light is large in divergence angle to shoot into the existing cavity pyroelectric sensors. The system comprises a chopper modulator arranged in front of a converging lens, an ellipsoidal cavity used for fully collecting the incident light and provided with a light inlet, a pyroelectric sensor chip arranged inside the ellipsoidal cavity and used for absorbing the radiation energy of the incident light and converting the radiation energy into the thermal energy, a current preamplifier connected with the pyroelectric sensor chip and used for amplifying weak electrical signals at the output end of a sensor, and a phase-locked amplifier connected with the current preamplifier and used for filtering out the noise and extracting effective electric signals. The converging lens is arranged between the chopper modulator and the light inlet of the ellipsoidal cavity. Based on the system, the radiation strength test accuracy problem when the incident light is large in divergence angle can be solved.
Description
Technical field
The present invention relates to ultraviolet, visible and near infrared wide spectrum sensor field, be specifically related to the pyroelectric sensor system of the Vernonia parishii Hook. F. angle incident light in 200 ~ 800nm wavelength band being carried out to caloradiance test.
Background technology
Pyroelectric sensor is a kind of sensor very with application potential.As far back as 1938, just someone proposed to utilize pyroelectric effect to detect infrared radiation, but did not come into one's own at that time.Until the sixties in 20th century, along with laser, the developing rapidly of infrared technique, the research to pyroelectric effect and the application and development to pyroelectric crystal are just promoted again.The application of pyroelectric sensor is mostly around the test to infrared spectral coverage caloradiance, and in the test of ultraviolet spectral coverage, application is less.At present, conventional silicon detector carries out the test of ultraviolet spectral coverage, but limits due to the material properties of silicon detector self, and it is lower in the test accuracy of 240nm ~ 280nm day blind ultraviolet spectral coverage, and uncertainty is generally it 5 times of visible spectral coverage test uncertainty.Pyroelectric sensor is applied in after plated film the test of ultraviolet spectral coverage and well solves the problems referred to above.
For obtaining stablizing wavelength response, measuring the also stable pyroelectric sensor of band spectrum responsiveness, pyroelectricity chip can be sealed in inside cavity, the cavity pyroelectric sensor that document is openly recorded mainly contains spheroidite and triangular prism, its shortcoming is that the absorption efficiency of cavity pyroelectric sensor will reduce greatly when incident light is with when comparatively Vernonia parishii Hook. F. angle is incident.
Summary of the invention
The present invention exists when incident light is with when comparatively Vernonia parishii Hook. F. angle is incident for solving existing cavity pyroelectric sensor, the absorption efficiency of cavity pyroelectric sensor reduces the problem causing radiation intensity test accuracy difference greatly, provides a kind of ellipsoidal cavity body pyroelectric sensor system.
Ellipsoidal cavity body pyroelectric sensor system, this system comprises chopping modulation device, convergent lens, pyroelectric sensor chip, galvo-preamplifier and lock-in amplifier; Ellipsoid cavity is provided with light inlet, it is characterized in that, described pyroelectric sensor chip is positioned at ellipsoidal cavity body, and galvo-preamplifier is connected with described pyroelectric sensor chip, and lock-in amplifier is connected with described galvo-preamplifier; The major axis of described ellipsoid cavity, AL are two times of ellipsoid cavity focal length, and the axis of described pyroelectric sensor chip is positioned on described ellipsoidal cavity long axis of body, pyroelectric sensor chip center and described ellipsoidal cavity long axis of body center superposition;
Incident light is successively after chopping modulation device and convergent lens, ellipsoid cavity is entered through light inlet, described pyroelectric sensor chip absorbs incident light, and be that electric signal exports galvo-preamplifier to by thermal energy, described galvo-preamplifier amplifies the electric signal of pyroelectric sensor chip and exports lock-in amplifier to, and lock-in amplifier extracts effective electric signal.
Beneficial effect of the present invention: the ellipsoidal cavity body pyroelectric sensor that the present invention relates to, cavity inner wall aluminizer, pyroelectricity chip plating gold-black coating, is applied to the high precision measurement of ultraviolet spectral coverage; And proposing new ellipsoidal cavity body structure, when efficiently solving the incidence of incident light Vernonia parishii Hook. F. angle, sensor absorption efficiency obviously reduces the problem causing test uncertainty greatly to increase.Adopt pyroelectric sensor system of the present invention, solve the problem that the test uncertainty of 240nm ~ 280nm day blind ultraviolet spectral coverage is higher.
Accompanying drawing explanation
Fig. 1 is the vertical view of ellipsoidal cavity body pyroelectric sensor system architecture of the present invention;
In Fig. 2, Fig. 2 a to Fig. 2 d is the analogous diagram of ellipsoidal cavity body pyroelectric sensor system of the present invention; Wherein, Fig. 2 a is the ray tracing figure of pyroelectric sensor, Fig. 2 b is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor first time, Fig. 2 c is the absorption efficiency figure that incident light is absorbed by pyroelectric sensor second time, Fig. 2 d is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor third time.
In Fig. 3, Fig. 3 a to Fig. 3 d is existing ball chamber pyroelectric sensor analogous diagram; Wherein, the ray tracing figure of Fig. 3 a pyroelectric sensor, Fig. 3 b is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor first time, Fig. 3 c is the absorption efficiency figure that incident light is absorbed by pyroelectric sensor second time, Fig. 3 d is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor third time.
Embodiment
Embodiment one, composition graphs 1 to Fig. 3 illustrate present embodiment, and ellipsoidal cavity body pyroelectric sensor system, comprises chopping modulation device 1, before being placed in convergent lens, eliminating parasitic light, play chopping modulation effect to incident light; Convergent lens 2, is placed between described chopping modulation device 1 and the light inlet of ellipsoid cavity 3, makes incident light all focus on light inlet place; Ellipsoid cavity 3, cavity is opened a light inlet, for fully collecting incident light, improves the spectral selectivity of pyroelectric sensor chip 4;
Pyroelectric sensor chip 4, is positioned at described ellipsoid cavity, for absorbing incident optical radiation and being converted into heat energy; Galvo-preamplifier 5, is connected with described pyroelectric sensor chip 4, for the ultra-weak electronic signal of amplification sensor output terminal, mates the impedance between subsequent process circuit and detection means simultaneously;
Lock-in amplifier 6, is connected with described galvo-preamplifier 5, for filtering noise, extracts effective electric signal.
The focal position of the convergent lens 2 described in present embodiment is positioned at the light inlet place of described ellipsoid cavity 3 just, and the major axis of described ellipsoid cavity 3, AL are two times of focal length, and the light inlet of described ellipsoid cavity 3 is of a size of φ 2mm.Described ellipsoid cavity 3 inwall aluminising film.Described pyroelectric sensor chip 4 selects surface to scribble the product of gold-black coating.
Pyroelectric sensor chip 4 axis described in present embodiment is positioned on described ellipsoid cavity 3 major axis, described pyroelectric sensor chip 4 center and described ellipsoid cavity 3 major axis center superposition, described pyroelectric sensor chip 4 size is not less than the focal length of described ellipsoid cavity 3, as preferably, described pyroelectric sensor chip 4 is of a size of 6mm × 6mm.
Composition graphs 2 illustrates present embodiment, when providing the incident light angle of divergence to be 30 ° in Fig. 2, and the zemax analogous diagram of ellipsoidal cavity body pyroelectric sensor.Wherein Fig. 2 a to Fig. 2 d is respectively, and Fig. 2 a is the zemax ray tracing figure of ellipsoidal cavity body pyroelectric sensor.Fig. 2 b is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor first time, and showing absorption efficiency for the first time in figure is 1.Fig. 2 c is the absorption efficiency figure that incident light is absorbed by pyroelectric sensor second time, and showing second time absorption efficiency in figure is 0.9884.Fig. 2 d is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor third time, and showing absorption efficiency for the third time in figure is 0.8780.
When providing the incident light angle of divergence 30 ° in composition graphs 3, Fig. 3, the analogous diagram of ball chamber pyroelectric sensor.Wherein Fig. 3 a is the ray tracing figure of ball chamber pyroelectric sensor.Fig. 3 b is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor first time, and showing absorption efficiency for the first time in figure is 1.Fig. 3 c is the absorption efficiency figure that incident light is absorbed by pyroelectric sensor second time, and showing second time absorption efficiency in figure is 0.6734.Fig. 3 d is the absorption efficiency figure that incident light was absorbed by pyroelectric sensor third time, and showing absorption efficiency for the third time in figure is 0.3021.
The simulation result contrast of composition graphs 2 and Fig. 3 shows, when the present invention can solve the incidence of incident light Vernonia parishii Hook. F. angle, sensor absorption efficiency obviously reduces the problem causing test uncertainty greatly to increase.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent to substitute and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. ellipsoidal cavity body pyroelectric sensor system, this system comprises chopping modulation device (1), convergent lens (2), pyroelectric sensor chip (4), galvo-preamplifier (5) and lock-in amplifier (6); Ellipsoid cavity is provided with light inlet, it is characterized in that, described pyroelectric sensor chip (4) is positioned at ellipsoid cavity (3), galvo-preamplifier (5) is connected with described pyroelectric sensor chip (4), and lock-in amplifier (6) is connected with described galvo-preamplifier (5); The major axis of described ellipsoid cavity (3), AL are two times of ellipsoid cavity (3) focal length, the axis of described pyroelectric sensor chip (4) is positioned on described ellipsoid cavity (3) major axis, pyroelectric sensor chip (4) center and described ellipsoid cavity (3) major axis center superposition;
Incident light is successively after chopping modulation device (1) and convergent lens (2), ellipsoid cavity (3) is entered through light inlet, described pyroelectric sensor chip (4) absorbs incident light, and be that electric signal exports galvo-preamplifier (5) to by thermal energy, described galvo-preamplifier (5) amplifies the electric signal of pyroelectric sensor chip (4) and exports lock-in amplifier (6) to, and lock-in amplifier (6) extracts effective electric signal.
2. ellipsoidal cavity body pyroelectric sensor system according to claim 1, it is characterized in that, described convergent lens (2) is positioned between described chopping modulation device (1) and the light inlet of ellipsoid cavity (3), and focus is positioned at the light inlet place of ellipsoid cavity (3).
3. ellipsoidal cavity body pyroelectric sensor system according to claim 1 and 2, is characterized in that, the light inlet of described ellipsoid cavity (3) is of a size of φ 2mm.
4. ellipsoidal cavity body pyroelectric sensor system according to claim 3, is characterized in that, described ellipsoid cavity (3) inwall aluminising film.
5. ellipsoidal cavity body pyroelectric sensor system according to claim 1, is characterized in that, described pyroelectric sensor chip (4) selects surface to scribble gold-black coating.
6. ellipsoidal cavity body pyroelectric sensor system according to claim 1 or 5, it is characterized in that, described pyroelectric sensor chip (4) size is more than or equal to the focal length of ellipsoid cavity (3).
7. ellipsoidal cavity body pyroelectric sensor system according to claim 6, is characterized in that, described pyroelectric sensor chip (4) is of a size of 6mm × 6mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510759414.7A CN105444892B (en) | 2015-11-10 | 2015-11-10 | Ellipsoidal cavity body pyroelectric sensor system |
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| CN201510759414.7A CN105444892B (en) | 2015-11-10 | 2015-11-10 | Ellipsoidal cavity body pyroelectric sensor system |
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| CN105444892A true CN105444892A (en) | 2016-03-30 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004010757A1 (en) * | 2004-03-05 | 2005-09-22 | Robert Bosch Gmbh | Infrared sensor for measurement of gas concentration, has ellipsoidal reflector chamber with IR source and IR detector mounted on base plate at focii of ellipsoid |
| US20060289767A1 (en) * | 2005-06-13 | 2006-12-28 | Everspring Industry Co., Ltd. | Reflective mirror structure |
| CN101408512A (en) * | 2008-09-02 | 2009-04-15 | 河南汉威电子股份有限公司 | Multi-channel heat release electric detector |
| CN204064464U (en) * | 2014-07-11 | 2014-12-31 | 上海鸿宝照明有限公司 | A kind of infrared inductor for changing refractive index |
-
2015
- 2015-11-10 CN CN201510759414.7A patent/CN105444892B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004010757A1 (en) * | 2004-03-05 | 2005-09-22 | Robert Bosch Gmbh | Infrared sensor for measurement of gas concentration, has ellipsoidal reflector chamber with IR source and IR detector mounted on base plate at focii of ellipsoid |
| US20060289767A1 (en) * | 2005-06-13 | 2006-12-28 | Everspring Industry Co., Ltd. | Reflective mirror structure |
| CN101408512A (en) * | 2008-09-02 | 2009-04-15 | 河南汉威电子股份有限公司 | Multi-channel heat release electric detector |
| CN204064464U (en) * | 2014-07-11 | 2014-12-31 | 上海鸿宝照明有限公司 | A kind of infrared inductor for changing refractive index |
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| CN105444892B (en) | 2018-05-01 |
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