CN105444879A - Laser energy acquisition method and laser energy acquisition device - Google Patents
Laser energy acquisition method and laser energy acquisition device Download PDFInfo
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- CN105444879A CN105444879A CN201510944389.XA CN201510944389A CN105444879A CN 105444879 A CN105444879 A CN 105444879A CN 201510944389 A CN201510944389 A CN 201510944389A CN 105444879 A CN105444879 A CN 105444879A
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention provides a laser energy acquisition method and a laser energy acquisition device, and belongs to the photoetching technology field, and the laser energy acquisition method can be used for the laser imaging system. The laser energy acquisition method is characterized in that a light sampling module can be used to acquire light energy signals of a laser beam transmitted through a holophote, and can be used to send the acquired light energy signals to a signal processing module; the signal processing module can be used to eliminate the inherent base signals of the received light energy signal, and can be used to send the light energy signals without the inherent base signals to a main control module; the main control module can be used to acquire the actual energy of the laser beam transmitted by the laser device after processing the light energy signals without the inherent base signals. The laser energy acquisition method is advantageous in that the relatively accurate energy value of the laser beam actually output by the laser device can be effectively acquired without affecting the imaging and the energy utilization rate of the laser imaging system, and then the accuracy and the reliability of the energy control of the laser device can be effectively improved.
Description
Technical field
The present invention relates to technical field of lithography, in particular to a kind of laser energy acquisition method and device.
Background technology
In present semicon industry and printed circuit board industry, dynamic Laser imaging technique (the LaserDynamicImaging mostly used in exposure link, LDI) equipment, LDI equipment generally uses purple light or ultraviolet light to expose dry film or wet film, due to the performance requirement of dry film or wet film, make in exposure process very strict to the control of energy, therefore need to monitor the energy of laser.In addition, laser instrument in the market or laser diode after a certain period of use time energy there will be decay, when after energy attenuation to critical value, can impact exposure and development, make the circuit board produced easily occur the phenomenon such as short circuit or open circuit, cause very large economic loss, therefore, also need to monitor energy further, so that control the actual energy that laser instrument or laser diode export.But, due to the feature of LDI equipment itself, when gathering the actual energy of the laser beam that laser instrument or laser diode export in LDI equipment, if directly with in energy acquisition probe acquires LDI equipment for the energy of the main optical path of exposure image to monitor the actual energy of LDI equipment Output of laser light beam, imaging and the capacity usage ratio of LDI equipment will be had influence on.
Summary of the invention
The object of the present invention is to provide a kind of laser energy acquisition method and device, when not affecting imaging and capacity usage ratio, have effectively achieved the collection of laser energy, to improve the problems referred to above.
To achieve these goals, the technical scheme of embodiment of the present invention employing is as follows:
First aspect, embodiments provide a kind of laser energy acquisition method, be applied to laser imaging system, described laser imaging system comprises laser instrument, the laser beam part that described laser instrument sends according to predetermined power through completely reflecting mirror reflect focalization in image planes, another part light beam is by described completely reflecting mirror transmission, and described method comprises:
The described luminous energy signal collected through the luminous energy signal of the laser beam of described completely reflecting mirror transmission, and is sent to signal processing module by Optical Sampling module acquires;
Intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is sent to main control module;
Described main control module obtains the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal.
In conjunction with first aspect, the embodiment of the present invention additionally provides the first possibility embodiment of first aspect, and wherein, the described luminous energy letter signal that described Optical Sampling module exports is analog current signal; Intrinsic basis signal in received described luminous energy signal is removed by described described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is sent to main control module, specifically comprises:
Intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is converted to voltage signal is sent to main control module.
In conjunction with first aspect, the embodiment of the present invention additionally provides the second possibility embodiment of first aspect, wherein, described described main control module obtains the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal, specifically comprise:
After described main control module receives described voltage signal, obtain the actual energy of the laser beam that described laser instrument sends according to the demarcation relational expression pre-set.
In conjunction with first aspect, the embodiment of the present invention additionally provides the third possibility embodiment of first aspect, wherein, the described demarcation relational expression pre-set is: P=aU+b, wherein, P is the actual energy of the laser beam that described laser instrument sends, U is described voltage signal, a is the slope of the actual energy of the laser beam that described laser instrument sends and the relation curve of described voltage signal, b is when the luminous energy size of the laser beam through completely reflecting mirror transmission exceeds the resolution of described Optical Sampling module, the actual energy of the laser beam that described laser instrument sends.
Second aspect, embodiments provide a kind of laser energy harvester, be applied to laser imaging system, described laser imaging system comprises laser instrument, the laser beam part that described laser instrument sends according to predetermined power through completely reflecting mirror reflect focalization in image planes, another part light beam is by described completely reflecting mirror transmission, described laser energy harvester comprises Optical Sampling module, signal processing module and main control module, the output terminal of described Optical Sampling module is coupled with the input end of described signal processing module, the output terminal of described signal processing module is coupled with described main control module,
The described luminous energy signal collected for gathering the luminous energy signal of the laser beam through described completely reflecting mirror transmission, and is sent to signal processing module by described Optical Sampling module;
Described signal processing module is used for the intrinsic basis signal in received described luminous energy signal to remove, and the luminous energy signal after removing described intrinsic basis signal is sent to described main control module;
The actual energy of the laser beam that described laser instrument sends is obtained after described main control module is used for processing the luminous energy signal after the described intrinsic basis signal of described removal.
In conjunction with second aspect, the embodiment of the present invention additionally provides the first possibility embodiment of second aspect, wherein, described signal processing module comprises differential amplifier circuit and voltage regulator circuit, described differential amplifier circuit comprises first input end, the second input end and output terminal, described first input end is coupled with the output terminal of described Optical Sampling module, and described second input end is coupled with the output terminal of described voltage regulator circuit, and described output terminal is coupled with described main control module.
In conjunction with the first possibility embodiment of second aspect, the embodiment of the present invention additionally provides the second possibility embodiment of second aspect, wherein, described device also comprises voltage amplification module and analog-to-digital conversion module, the input end of described voltage amplification module is coupled with the output terminal of described differential amplifier circuit, the input end of described analog-to-digital conversion module is coupled with the output terminal of described voltage amplification module, and the output terminal of described analog-to-digital conversion module is coupled with described main control module.
In conjunction with the second possibility embodiment of second aspect, the embodiment of the present invention additionally provides the third possibility embodiment of second aspect, wherein, described device also comprises the voltage follower for reducing output impedance, the input end of described voltage follower is coupled with the output terminal of described voltage amplification module, and the output terminal of described voltage follower is coupled with the input end of described analog-to-digital conversion module.
In conjunction with second aspect or second aspect the first may embodiment or second aspect the second may the third of embodiment or second aspect may embodiment, the embodiment of the present invention additionally provides the 4th kind of possibility embodiment of second aspect, wherein, described Optical Sampling module comprises light signal collection face, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light signal collection face.
In conjunction with the 4th kind of possibility embodiment of second aspect, the embodiment of the present invention additionally provides the 5th kind of possibility embodiment of second aspect, wherein, described Optical Sampling module comprises photoelectric sensor, described photoelectric sensor comprises light activated element, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light activated element.
In laser imaging system, the laser beam part that laser instrument sends according to predetermined power is through completely reflecting mirror reflect focalization in image planes, and another part light beam is by described completely reflecting mirror transmission.The embodiment of the present invention is by gathering the luminous energy signal of this part transmission completely reflecting mirror transmission, and the actual energy value obtaining laser instrument Output of laser light beam is processed to it, when not affecting imaging and the capacity usage ratio of laser imaging system, effectively obtain the energy value more accurately of the actual Output of laser light beam of laser instrument, so that effectively improve accuracy and the reliability of energy of lasers control.
Other features and advantages of the present invention are set forth at instructions subsequently, and, partly become apparent from instructions, or understand by implementing the embodiment of the present invention.Object of the present invention and other advantages realize by structure specifically noted in write instructions, claims and accompanying drawing and obtain.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing by physical size equal proportion convergent-divergent, focus on purport of the present invention is shown.
Fig. 1 shows the module frame chart of a kind of laser energy harvester that first embodiment of the invention provides;
Fig. 2 shows the method flow diagram of a kind of laser energy acquisition method that second embodiment of the invention provides;
Fig. 3 shows the method flow diagram of a kind of laser energy acquisition method that third embodiment of the invention provides;
Fig. 4 shows the data fitting curve demarcating relational expression in a kind of laser energy acquisition method that third embodiment of the invention provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, carry out clear, complete description to the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
In present semicon industry and printed circuit board industry, dynamic Laser imaging technique (LaserDynamicImaging, the LDI) equipment mostly used in exposure link, LDI equipment comprises laser imaging system.In order under the prerequisite of the imaging and capacity usage ratio that do not affect described laser imaging system, effectively gather the actual energy of the laser beam that laser instrument sends, the invention provides a kind of laser energy acquisition method and device, be applied in this laser imaging system.Described laser imaging system comprises laser instrument, and the laser beam part that described laser instrument sends according to predetermined power focuses in image planes after completely reflecting mirror reflection, and another part light beam is by described completely reflecting mirror transmission.Described completely reflecting mirror be a kind of can up to the optical texture of 99% for the light reflectance in particular range of wavelengths, therefore, the luminous energy signal through the laser beam of completely reflecting mirror transmission is fainter.
First embodiment
Embodiments provide a kind of laser energy harvester, comprise Optical Sampling module 100, signal processing module 200 and main control module 500, the output terminal of described Optical Sampling module 100 is coupled with the input end of described signal processing module 200, and the output terminal of described signal processing module 200 is coupled with described main control module 500.
Wherein, the described luminous energy signal collected for gathering the luminous energy signal of the laser beam through described completely reflecting mirror transmission, and is sent to signal processing module by described Optical Sampling module 100.Therefore, the installation site of Optical Sampling module 100 can be the rear of described completely reflecting mirror, due to completely reflecting mirror be a kind of can up to the optical texture of 99% for the light reflectance in particular range of wavelengths, therefore, described Optical Sampling module 100 is for receiving the luminous energy signal of small part through completely reflecting mirror.
Owing to also there is other intrinsic lighting source in laser imaging system, in the light that these lighting sources send, the light of part wavelength is had also to be positioned at the operating wavelength range of described Optical Sampling module 100.Therefore, the luminous energy signal that described Optical Sampling module 100 collects, except the luminous energy signal comprising the described laser beam through completely reflecting mirror transmission, also comprises the intrinsic luminous energy signal that above-mentioned lighting source sends.Because the luminous energy signal of the described laser beam through completely reflecting mirror transmission is more weak relative to described intrinsic luminous energy signal, easily covered by described intrinsic luminous energy signal, therefore conveniently in processing the luminous energy signal of the required laser beam through completely reflecting mirror transmission, reduce follow-up intractability, the intrinsic basis signal that the described intrinsic luminous energy signal comprised in the luminous energy signal that Optical Sampling module 100 need be exported is transformed is removed.
Therefore, the luminous energy signal after removing described intrinsic basis signal for the intrinsic basis signal in received described luminous energy signal being removed, and is sent to described main control module 500 by described signal processing module 200.Described main control module 500 is for obtaining the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal.
Such as, the predetermined power of described laser instrument is 10W, and the time used due to laser instrument is longer, and the actual laser energy sent may be decayed, and the actual energy of the laser beam causing described laser instrument to send is less than 10W.Therefore the laser energy harvester that the embodiment of the present invention provides is needed, can when not affecting imaging and the capacity usage ratio of laser imaging system, effectively obtain the energy value more accurately of the actual Output of laser light beam of laser instrument, thus be conducive to accuracy and the reliability of the energy hole improving laser instrument Output of laser light beam.
In the embodiment of the present invention, described main control module 500 can adopt single-chip microcomputer, DSP, ARM or FPGA etc., and other have the chip of data processing function.
Specific works flow process is: Optical Sampling module 100 collects the luminous energy signal of the laser beam through completely reflecting mirror transmission in laser imaging system, and described luminous energy signal is converted into current signal exports signal processing module 200 to, intrinsic basis signal in described current signal is removed by described signal processing module 200, and current signal is converted into voltage signal, described voltage signal is sent to main control module 500, main control module 500 processes described voltage signal, obtains the actual energy of the laser beam that laser instrument sends.
Described Optical Sampling module 100 comprises light signal collection face, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light signal collection face.Preferably, described Optical Sampling module 100 adopts photoelectric sensor, and described photoelectric sensor comprises light activated element, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light activated element.Photoelectric sensor has the light in operating wavelength range very responsive, and to the insensitive characteristic of the light outside operating wavelength range.Therefore, the consistent wavelength of laser beam that as far as possible sends with the laser instrument that will gather of the operation wavelength of described photoelectric sensor.Such as, when the wavelength of the laser beam that laser instrument sends is 405nm, model can be adopted to be the purple light sensor of G5645.
In the embodiment of the present invention, signal processing module 200 preferably can comprise differential amplifier circuit and voltage regulator circuit, described differential amplifier circuit comprises first input end, the second input end and output terminal, described first input end is coupled with the output terminal of described Optical Sampling module 100, described second input end is coupled with the output terminal of described voltage regulator circuit, and described output terminal is coupled with described main control module 500.Luminous energy signal Optical Sampling module 100 exported is by an input end of the method access differential amplifying circuit of current sampling circuit, and another input end of differential amplifier circuit, i.e. comparative voltage input end, adopt adjustable input mode.The comparative voltage of described differential amplifier circuit is regulated by voltage regulator circuit, effectively described intrinsic basis signal can be removed, and luminous energy signal Optical Sampling module 100 exported is converted to voltage signal output, wherein, described luminous energy signal is current signal.
The voltage signal exported due to signal processing module 200 is less, is unfavorable for that main control module 500 processes.Therefore, the laser energy harvester that the embodiment of the present invention provides also comprises voltage amplification module 300 and analog-to-digital conversion module 400, the input end of described voltage amplification module 300 is coupled with the output terminal of described differential amplifier circuit, the input end of described analog-to-digital conversion module 400 is coupled with the output terminal of described voltage amplification module 300, and the output terminal of described analog-to-digital conversion module 400 is coupled with described main control module 500.Voltage amplification module 300 carries out distortionless amplification for the voltage signal of the output terminal by described differential amplifier circuit according to default enlargement factor, and the voltage signal after amplifying is inputted analog-to-digital conversion module 400.Analog-to-digital conversion module 400 is sent to main control module 500 after the voltage signal after described amplification is converted to digital voltage signal.Wherein, described analog-to-digital conversion module 400 comprises modulus conversion chip, and the voltage signal after described amplification is in 10% ~ 80% scope of the reference voltage of modulus conversion chip.Certainly, if main control module 500 itself has analog-digital conversion function, also directly the voltage signal after described amplification can be sent to main control module 500, now, the voltage signal after described amplification is in 10% ~ 80% scope of the reference voltage of main control module 500.
Further, in order to reduce the output impedance of circuit, described laser energy harvester also comprises voltage follower, the input end of described voltage follower is coupled with the output terminal of described voltage amplification module 300, and the output terminal of described voltage follower is coupled with the input end of described analog-to-digital conversion module 400.Accordingly, when main control module 500 itself has analog-digital conversion function, the output terminal of described voltage follower can directly be coupled with described main control module 500.
As shown in Figure 1, Optical Sampling module 100 collects the luminous energy signal of the laser beam through completely reflecting mirror transmission in laser imaging system, and described luminous energy signal is converted into current signal exports signal processing module 200 to, intrinsic basis signal in described current signal is removed by described signal processing module 200, and current signal is converted into voltage signal, described voltage signal is sent to voltage amplification module 300, after described voltage amplification module 300 is amplified described voltage signal with default enlargement factor, analog-to-digital conversion module 400 is input to through voltage follower, analog-to-digital conversion module 400 is sent to main control module 500 after the voltage signal after described amplification is converted to digital voltage signal, main control module 500 processes described voltage signal, obtain the actual energy of the laser beam that laser instrument sends.
Second embodiment
As shown in Figure 2, embodiments provide a kind of laser energy acquisition method, described laser energy acquisition method, be applied to the actual energy gathering the laser beam that laser instrument sends in laser imaging system, described method comprises:
S110: the described luminous energy signal collected through the luminous energy signal of the laser beam of described completely reflecting mirror transmission, and is sent to signal processing module by Optical Sampling module acquires;
S120: the intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is sent to main control module;
Owing to also there is other intrinsic lighting source in laser imaging system, in the light that these lighting sources send, the light of part wavelength is had also to be positioned at the operating wavelength range of described Optical Sampling module.Therefore, the luminous energy signal that described Optical Sampling module acquires arrives, except the luminous energy signal comprising the described laser beam through completely reflecting mirror transmission, also comprises the intrinsic luminous energy signal that above-mentioned lighting source sends.Because the luminous energy signal of the described laser beam through completely reflecting mirror transmission is more weak relative to described intrinsic luminous energy signal, easily covered by described intrinsic luminous energy signal, therefore conveniently in processing the luminous energy signal of the required laser beam through completely reflecting mirror transmission, reduce follow-up intractability, the intrinsic basis signal that the described intrinsic luminous energy signal comprised in the luminous energy signal that Optical Sampling module need be exported is transformed is removed.
S130: described main control module obtains the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal.
Can be well understood to those skilled in the art, for convenience and simplicity of description, the specific works process of the method for foregoing description, with reference to the corresponding process in above device embodiment, can not repeat them here.
3rd embodiment
Embodiments provide another kind of laser energy acquisition method, as shown in Figure 3, described laser energy acquisition method, be applied to the actual energy gathering the laser beam that laser instrument sends in laser imaging system, described method comprises:
S210: the described luminous energy signal collected through the luminous energy signal of the laser beam of described completely reflecting mirror transmission, and is sent to signal processing module by Optical Sampling module acquires;
Wherein, the described luminous energy signal that described Optical Sampling module exports is analog current signal.
S220: the intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is converted to voltage signal is sent to main control module;
S230: after described main control module receives described voltage signal, obtains the actual energy of the laser beam that described laser instrument sends according to the demarcation relational expression pre-set.
Wherein, the described demarcation relational expression pre-set can be: P=aU+b, wherein, P is the actual energy of the laser beam that described laser instrument sends, U is described voltage signal, a is the slope of the actual energy of the laser beam that described laser instrument sends and the relation curve of described voltage signal, and b is when the luminous energy size of the laser beam through completely reflecting mirror transmission exceeds the resolution of described Optical Sampling module, the actual energy of the laser beam that described laser instrument sends.For the laser instrument of different model or different wave length, described demarcation relational expression is different.And described in the demarcation relational expression that pre-sets can be obtained by the mode of multipoint acquisition and curve.The laser energy acquisition method provided by the embodiment of the present invention, carries out multipoint acquisition to described standard laser.There is not the laser instrument of decaying in the actual energy that what described standard laser represented is can be approximated to be Output of laser light beam, such as, and the laser instrument that can be energy attenuation rate be within 0.5%.Such as, model is the standard laser of NUV101E-E, and output wavelength is 405nm, and under different output power, the magnitude of voltage that the laser energy acquisition method provided by the embodiment of the present invention collects corresponding described voltage signal is as shown in table 1.
Under the different output power of table 1. standard laser, the magnitude of voltage of the voltage signal of the correspondence that the laser energy acquisition method provided by the embodiment of the present invention is collected
Wherein, the unit of the actual energy value P of the laser beam that laser instrument sends is watt (W), and the unit of voltage signal U is millivolt (mV).Above-mentioned 7 groups of data to be carried out curve fitting the data fitting curve that can obtain as shown in Figure 4 with preset algorithm, obtains described voltage signal and the actual demarcation relational expression exporting energy of described laser instrument is: P=(6.81U-2470)/1000.Wherein, the slope of the actual energy of laser beam that sends of described laser instrument and the relation curve of described voltage signal is 6.81 × 10
-3.It should be noted that, in this demarcation relational expression, when the luminous energy size of the laser beam through completely reflecting mirror transmission exceeds the resolution of described Optical Sampling module, the actual energy of the laser beam that described laser instrument sends is negative value, this is due to when the luminous energy size of the laser beam through completely reflecting mirror transmission exceeds the resolution of described Optical Sampling module, the laser energy acquisition method that can not be provided by the embodiment of the present invention collect, therefore this point is as critical value, does not pay attention to.
Can be well understood to those skilled in the art, for convenience and simplicity of description, the specific works process of the method for foregoing description, with reference to the corresponding process in above device embodiment, can not repeat them here.
In embodiment provided by the present invention, should be understood that disclosed module can realize by another way.Embodiment described above is only schematic, such as, the division of described module, be only a kind of logic function to divide, actual can have other dividing mode when realizing, again such as, multiple module or assembly can in conjunction with or another system can be integrated into, or some features can be ignored, or do not perform.Another point, shown or discussed coupling each other or direct-coupling or communication connection can be indirect coupling by some communication interfaces or module or communication connection, can be electrical, machinery or other form.
The described module illustrated as separating component can or may not be physically separates, and the parts as module display can be or may not be physical location, namely can be positioned at a place, or also can be distributed in multiple network element.Some or all of module wherein can be selected according to the actual needs to realize the object of the present embodiment scheme.
It should be noted that, in this article, the such as relational terms of first and second grades and so on is only used for an entity or operation to separate with another entity or operational zone, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a laser energy acquisition method, be applied to laser imaging system, it is characterized in that, described laser imaging system comprises laser instrument, the laser beam part that described laser instrument sends according to predetermined power through completely reflecting mirror reflect focalization in image planes, another part light beam is by described completely reflecting mirror transmission, and described method comprises:
The described luminous energy signal collected through the luminous energy signal of the laser beam of described completely reflecting mirror transmission, and is sent to signal processing module by Optical Sampling module acquires;
Intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is sent to main control module;
Described main control module obtains the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal.
2. method according to claim 1, is characterized in that, the described luminous energy letter signal that described Optical Sampling module exports is analog current signal;
Intrinsic basis signal in received described luminous energy signal is removed by described described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is sent to main control module, specifically comprises:
Intrinsic basis signal in received described luminous energy signal is removed by described signal processing module, and the luminous energy signal after removing described intrinsic basis signal is converted to voltage signal is sent to main control module.
3. method according to claim 2, is characterized in that, described described main control module obtains the actual energy of the laser beam that described laser instrument sends after processing the luminous energy signal after the described intrinsic basis signal of described removal, specifically comprise:
After described main control module receives described voltage signal, obtain the actual energy of the laser beam that described laser instrument sends according to the demarcation relational expression pre-set.
4. method according to claim 3, it is characterized in that, the described demarcation relational expression pre-set is: P=aU+b, wherein, P is the actual energy of the laser beam that described laser instrument sends, U is described voltage signal, a is the slope of the actual energy of the laser beam that described laser instrument sends and the relation curve of described voltage signal, b is when the luminous energy size of the laser beam through completely reflecting mirror transmission exceeds the resolution of described Optical Sampling module, the actual energy of the laser beam that described laser instrument sends.
5. a laser energy harvester, be applied to laser imaging system, it is characterized in that, described laser imaging system comprises laser instrument, the laser beam part that described laser instrument sends according to predetermined power through completely reflecting mirror reflect focalization in image planes, another part light beam is by described completely reflecting mirror transmission, described laser energy harvester comprises Optical Sampling module, signal processing module and main control module, the output terminal of described Optical Sampling module is coupled with the input end of described signal processing module, and the output terminal of described signal processing module is coupled with described main control module;
The described luminous energy signal collected for gathering the luminous energy signal of the laser beam through described completely reflecting mirror transmission, and is sent to signal processing module by described Optical Sampling module;
Described signal processing module is used for the intrinsic basis signal in received described luminous energy signal to remove, and the luminous energy signal after removing described intrinsic basis signal is sent to described main control module;
The actual energy of the laser beam that described laser instrument sends is obtained after described main control module is used for processing the luminous energy signal after the described intrinsic basis signal of described removal.
6. device according to claim 5, it is characterized in that, described signal processing module comprises differential amplifier circuit and voltage regulator circuit, described differential amplifier circuit comprises first input end, the second input end and output terminal, described first input end is coupled with the output terminal of described Optical Sampling module, described second input end is coupled with the output terminal of described voltage regulator circuit, and described output terminal is coupled with described main control module.
7. device according to claim 6, it is characterized in that, described device also comprises voltage amplification module and analog-to-digital conversion module, the input end of described voltage amplification module is coupled with the output terminal of described differential amplifier circuit, the input end of described analog-to-digital conversion module is coupled with the output terminal of described voltage amplification module, and the output terminal of described analog-to-digital conversion module is coupled with described main control module.
8. device according to claim 7, it is characterized in that, described device also comprises the voltage follower for reducing output impedance, the input end of described voltage follower is coupled with the output terminal of described voltage amplification module, and the output terminal of described voltage follower is coupled with the input end of described analog-to-digital conversion module.
9. the device according to any one of claim 5-8, is characterized in that, described Optical Sampling module comprises light signal collection face, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light signal collection face.
10. device according to claim 9, is characterized in that, described Optical Sampling module comprises photoelectric sensor, and described photoelectric sensor comprises light activated element, and the described laser beam through completely reflecting mirror transmission impinges perpendicularly on described light activated element.
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Application publication date: 20160330 |