CN105437052B - A kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device - Google Patents
A kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device Download PDFInfo
- Publication number
- CN105437052B CN105437052B CN201510841444.2A CN201510841444A CN105437052B CN 105437052 B CN105437052 B CN 105437052B CN 201510841444 A CN201510841444 A CN 201510841444A CN 105437052 B CN105437052 B CN 105437052B
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- abrasive disk
- abrasive
- rack
- fixed
- workpiece
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- 238000000227 grinding Methods 0.000 title claims abstract description 40
- 238000005498 polishing Methods 0.000 title claims abstract description 37
- 150000001875 compounds Chemical class 0.000 title claims abstract description 10
- 238000012552 review Methods 0.000 title claims abstract description 10
- 239000006061 abrasive grain Substances 0.000 claims abstract description 30
- 239000002245 particle Substances 0.000 claims abstract description 18
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 15
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 239000002699 waste material Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 21
- 230000008569 process Effects 0.000 abstract description 14
- 238000001723 curing Methods 0.000 abstract description 2
- 238000005304 joining Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000016 photochemical curing Methods 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- 230000003746 surface roughness Effects 0.000 description 4
- 238000003672 processing method Methods 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a kind of Continuous machings to review one's lessons by oneself compound grinding and polishing device, including abrasive disk, central axis, rack, rotating electric machine, driving cylinder, clamping workpiece device, UV light irradiation module and abrasive particle injection module；Abrasive disk passes through center axis connection rotating electric machine, the bottom connection driving cylinder of rotating electric machine；The abrasive disk is equipped with four layers of ring baffle, and the abrasive disk is divided into four annular regions；The configuration of the present invention is simple is compact, easy to operate, production easy to process；High degree of automation can successively roughly grind workpiece, be refined, the processing of rough polishing and essence four procedures of throwing, realizing from the quick joining for being ground to polishing, avoid more exchange device or tool in process；It is extremely simple to the reparation of abrasive disk quick, without dismantling abrasive disk；It realizes that abrasive disk reparation is synchronous with work pieces process to carry out, greatly improves work pieces process efficiency；Using UV photocuring abrasive grain, curing rate is fast, ensure that processing efficiency and pollution is small.
Description
Technical field
The present invention relates to grinding and polishing fields, and more specifically more particularly to a kind of Continuous maching reviews one's lessons by oneself compound polishing dress
It sets.
Background technique
Grinding is using coating or to be press-fitted the abrasive grain on lap tool, the phase by lap tool with workpiece under a certain pressure
The finished machined (such as machining) that movement carries out finished surface.Grinding can be used for processing various metals and non-metallic material
Material, the surface shape of processing have plane, inside and outside cylindrical surface and circular conical surface, convex, concave spherical surface, screw thread, the flank of tooth and its alloytype face.Add
Work precision is up to IT5~01, and surface roughness is up to Ra0.63~0.01 micron.Polishing, which refers to, utilizes mechanical, chemistry or electrification
Effect, reduces workpiece surface roughness, the processing method to obtain bright, flat surface.Utilize flexible polishing tool
The modification that workpiece surface carries out is processed with abrasive grain or other polishing mediums.Polishing cannot improve workpiece dimensional accuracy or
Geometrical precision, but for the purpose of obtaining smooth surface or bright luster, sometimes also to eliminate gloss (delustring).
When we need to carry out skin processing to for workpieces processing, to improve workpiece surface roughness or strengthen its surface
Process, usually simultaneously using grinding and polishing.Traditional will be ground using the finishing system of abrasive disk or polishing disk
It is separated with polishing process, so that needing abrasive disk being changed to polishing disk to system when polishing by overgrinding, is difficult promotion and adds
Work efficiency rate.Even single attrition process, it is required that the abrasive disk of single wear particle size can not also be such that workpiece is fully achieved
Surface roughness or the process time for needing to grow very much.
Ultraprecision grinding polishing is a kind of main processing method in Ultra-precision Turning field, superfinishing developed in recent years
Close grinding and polishing is a kind of method that advanced material workpiece high quality, high-precision processing may be implemented.General grinding and polishing side
The processing method that method uses is: being laid with fixation abrasive grain on the uniform abrasive disk of surfacing, workpieces processing is installed on abrasive disk
In the workpiece mounting head of top, when grinding, applies pressure in workpiece mounting head, and abrasive disk rotation makes between workpiece and fixation abrasive grain
There is relative motion to carry out grinding to complete attrition process.Because grinding panel surface adheres to a large amount of abrasive grain, and due to abrasive disk
Manufacture craft it is limited, cause grind panel surface will appear groove caused by abrasive grain is unevenly distributed, while in process by
It will cause part so that grinding panel surface different parts abrasive grain is different from the grinding degree between workpiece in external factor such as pressure
Abrasive wear accelerates, and further results in the local dent of grinding panel surface and grinds the out-of-flatness of panel surface, makes workpiece mounting head
During being contacted with workpiece with abrasive disk, vibration and bounce are generated, workpiece processing quality and precision are endangered.
Existing conventional abrasive disk restorative procedure is to disassemble abrasive disk, and according to the rate of wear of abrasive disk one
As be need 5 talentes can repair successively, using traditional restorative procedure, not only repair cumbersome trouble, what is spent human and material resources is same
When can also take a substantial amount of time, and repair materials used can have pollution to environment, and repairing effect is bad.
Summary of the invention
It is an object of the invention to overcome, processing efficiency is low, the degree of automation is not high, throws present in prior art processing
Light and attrition process need the shortcomings that separating, can not being automatically repaired to abrasive disk, and corase grinding, essence can be collected by providing one kind
Mill, rough polishing and essence throw Continuous maching that is in one and being able to carry out abrasive disk selfreparing and are automatically repaired formula grinding and polishing device.
The technical scheme of the present invention is realized as follows: a kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device, including abrasive disk,
Central axis, rack, rotating electric machine, driving cylinder, clamping workpiece device, UV light irradiation module and abrasive particle injection module；It is described to grind
Mill bottom connects central axis, and the central axis is connect with rotating electric machine by shaft coupling, the bottom connection of the rotating electric machine
The piston rod end of cylinder is driven, the driving cylinder is fixed in the rack, and driving cylinder is by driving the electric rotating
For machine linear motion to drive the lifting of the abrasive disk, the rotating electric machine is used to drive the rotation of the abrasive disk；It is described
Abrasive disk is equipped with four layers of ring baffle, and the abrasive disk is divided into corase grinding area, fine grinding area, rough polishing area and essence from outside to inside and is thrown
Four, area annular region, the wear particle size that panel surface is ground in the annular region of grinding disk center are thinner；Four annulars
Region is equipped with diversion trench, four diversion trenches and four annular waste liquids for being located at abrasive disk lower end close to the position of inner side baffle
Slot connection；The abrasive particle injection mould set gradually along the abrasive disk rotation direction is fixed in rack above the abrasive disk
Block, UV light irradiation module and clamping workpiece device, the abrasive particle injection module include being respectively provided at corase grinding area, fine grinding area, rough polishing
The coating material solidified mixed liquor injector head of four abrasive grains above area and the area Jing Pao is sprayed with the coating material solidified mixed liquor of four abrasive grains is fixed
The fixed link of head, the fixed link are fixed on the rack；The UV light irradiation module includes fan-shaped light barrier and is located at fan
UV light lamp tube in shape light barrier, the light barrier of the sector is for preventing the UV light lamp tube to be irradiated to except below light barrier
Region other than abrasive disk carries out reviewing one's lessons by oneself for the grinding panel surface in the fan-shaped region of the abrasive disk below light barrier
It is multiple；The clamping workpiece device includes linear guide, ball-screw, spindle motor, sliding block, driving motor, workpiece fixing seat, power
Sensor and Workpiece fixing plate, the driving motor are inversely installed by motor cabinet in the bottom of the sliding block, the driving electricity
The motor head of machine connects workpiece fixing seat, is equipped with Workpiece fixing plate, the workpiece fixing seat and work below the workpiece fixing seat
Force snesor is equipped between part fixed plate；The slide block set is in horizontally disposed linear guide and ball-screw, the straight line
The both ends of guide rail are fixed on the rack, and the both ends of linear guide are fixed on the rack, and the both ends of ball-screw are fixed by bearing
On the rack and the connection of one end of ball-screw is for driving the spindle motor of the lead screw rotation.
Further, the coating material solidified mixed liquor injector head of four abrasive grains connects four abrasive Flows by pipeline respectively and occurs
Device, the interior wear particle size generated of four abrasive grain flow-generators are corresponding annular with below the coating material solidified mixed liquor injector head of four abrasive grains
Wear particle size in region is consistent.
Further, the spindle motor is fixed in the rack by motor cabinet.
Further, the rack is equipped with level table, and central axis passes through the level table and passes through bearing and institute
Level table connection is stated, polishing disk is located at the top of the level table, and rotating electric machine, driving cylinder are located at the level table
In the rack of lower section.
Further, ball sleeve is cased on the outside of the workpiece fixing seat.
Compared with prior art, the beneficial effects of the present invention are: the configuration of the present invention is simple is compact, easy to operate, is convenient for
Processing；High degree of automation can successively roughly grind workpiece, be refined, the processing of rough polishing and essence four procedures of throwing, real
Now from the quick joining for being ground to polishing, more exchange device or tool in process are avoided；Force snesor can real-time detection add
Work process applies pressure, convenient for the pressure applied in time by driving cylinder adjustment, to improve processing efficiency and processing quality；
It is extremely simple to the reparation of abrasive disk quick, without dismantling abrasive disk；It realizes that abrasive disk reparation is synchronous with work pieces process to carry out, pole
Work pieces process efficiency is improved greatly；Using UV photocuring abrasive grain, curing rate is fast, ensure that processing efficiency and pollution is small.
Detailed description of the invention
The present invention is described in further detail for embodiment in reference to the accompanying drawing, but does not constitute to of the invention
Any restrictions.
Fig. 1 is the structural schematic diagram that a kind of Continuous maching of the present invention reviews one's lessons by oneself compound grinding and polishing device.
In figure, 1- abrasive disk, 2- central axis, 3- rack, 4- rotating electric machine, 5- driving cylinder, 6- shaft coupling, 7- annular gear
The coating material solidified mixed liquor injector head of plate, 8- diversion trench, 9- waste liquid tank, 10- abrasive grain, 11- fixed link, 12-UV light irradiation module,
13- linear guide, 14- ball-screw, 15- spindle motor, 16- sliding block, 17- driving motor, 18- workpiece fixing seat, 19- workpiece
Fixed plate, 20- force snesor.
Specific embodiment
As shown in fig.1, a kind of Continuous maching of the invention reviews one's lessons by oneself compound grinding and polishing device, including abrasive disk 1, central axis 2,
Rack 3, rotating electric machine 4, driving cylinder 5, clamping workpiece device, UV light irradiation module 12 and abrasive particle injection module；The grinding
1 bottom of disk connects central axis 2, and the central axis 2 is connect with rotating electric machine 4 by shaft coupling 6, the bottom of the rotating electric machine 4
The piston rod end of connection driving cylinder 5, the driving cylinder 5 are fixed in the rack 3, and driving cylinder 5 is by driving institute
The linear motion of rotating electric machine 4 is stated to drive the lifting of the abrasive disk 1, the rotating electric machine 4 is for driving the abrasive disk 1
Rotation；The abrasive disk 1 is equipped with four layers of ring baffle 7, and the abrasive disk 1 is divided into corase grinding area from outside to inside, fine grinding
Area, rough polishing area and four, the area Jing Pao annular region, the abrasive grain on 1 surface of abrasive disk in the annular region at 1 center of abrasive disk
Granularity is thinner；Four annular regions are equipped with diversion trench 8 close to the position of inner side baffle, four diversion trenches 8 and are located at abrasive disk 1
The annular waste liquid tank 9 of four of lower end is connected to；It is fixed in the rack 3 of 1 top of abrasive disk along 1 side of rotation of abrasive disk
To the abrasive particle injection module, UV light irradiation module 12 and clamping workpiece device set gradually, the abrasive particle injection module includes point
It is not located at corase grinding area, refines the coating material solidified mixed liquor injector head 10 of four abrasive grains above area, rough polishing area and the area Jing Pao and fixes
The fixed link 11 of the coating material solidified mixed liquor injector head 10 of four abrasive grains, the fixed link 11 are fixed in rack 3；The UV illumination
The UV light lamp tube that module 12 includes fan-shaped light barrier and is located in fan-shaped light barrier is penetrated, the light barrier of the sector is for preventing
Only the UV light lamp tube is irradiated to the region in addition to the abrasive disk 1 below light barrier, i.e., the abrasive disk 1 below light barrier
The selfreparing on 1 surface of abrasive disk is carried out in fan-shaped region；The clamping workpiece device includes linear guide 13, ball-screw
14, spindle motor 15, sliding block 16, driving motor 17, workpiece fixing seat 18, force snesor 20 and Workpiece fixing plate 19, the drive
Dynamic motor 17 is inversely installed by motor cabinet in the bottom of the sliding block 16, and the motor head connection workpiece of the driving motor 17 is solid
Reservation 18 is equipped with Workpiece fixing plate 19 below the workpiece fixing seat 18, between the workpiece fixing seat 18 and Workpiece fixing plate 19
Equipped with force snesor 20；The sliding block 16 is sleeved on horizontally disposed linear guide 13 and ball-screw 14, and the straight line is led
The both ends of rail 13 are fixed in rack 3, and the both ends of linear guide 13 are fixed in rack 3, and the both ends of ball-screw 14 pass through axis
It holds and is fixed in rack 3 and the connection of one end of ball-screw 14 is for driving the spindle motor 15 of lead screw rotation.
The coating material solidified mixed liquor injector head 10 of four abrasive grains connects four abrasive grain flow-generators, four mills by pipeline respectively
It is corresponded in annular region below the wear particle size and the coating material solidified mixed liquor injector head 10 of four abrasive grains generated in grain flow-generator
Wear particle size it is consistent.It can be by the coating material solidified uniformly mixed merga pass abrasive grain solidification of abrasive grain and UV light in abrasive grain flow-generator
Coating mixed liquor injector head 10 is ejected into grinding panel surface.
The spindle motor 15 is fixed in the rack 3 by motor cabinet.
The rack 3 is equipped with level table, and central axis 2 passes through the level table and by bearing and the horizontal platform
Face connection, polishing disk are located at the top of the level table, and rotating electric machine 4, driving cylinder 5 are located at below the level table
In rack 3.
The outside of the workpiece fixing seat 18 is cased with ball sleeve.It is fixedly connected on the inside of ball sleeve with workpiece fixing seat 18, outside
Side is equipped with the ball that can be freely rotated, and is contacted when workpiece fixing seat 18 is contacted with ring baffle 7 by ball, prevents the two from connecing
Friction is generated when touching to have an impact to processing.
Embodiment provided above is better embodiment of the invention, only is used to facilitate to illustrate the present invention, not to this hair
It is bright to make any form of restriction, any those of ordinary skill in the art, if not departing from the proposed skill of the present invention
In the range of art feature, using the equivalent embodiment for locally changing or modifying made by disclosed technology contents, and
Without departing from technical feature content of the invention, in the range of still falling within the technology of the present invention feature.
Claims (3)
1. a kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device, it is characterised in that: including abrasive disk (1), central axis (2), rack
(3), rotating electric machine (4), driving cylinder (5), clamping workpiece device, UV light irradiation module (12) and abrasive particle injection module；It is described
Abrasive disk (1) bottom connects central axis (2), and the central axis (2) is connect with rotating electric machine (4) by shaft coupling (6), the rotation
The piston rod end of bottom connection driving cylinder (5) of rotating motor (4), the driving cylinder (5) are fixed on the rack (3)
On, driving cylinder (5) drives the lifting of the abrasive disk (1) by driving rotating electric machine (4) linear motion, described
Rotating electric machine (4) is used to drive the rotation of the abrasive disk (1)；The abrasive disk (1) is equipped with four layers of ring baffle (7), will
The abrasive disk (1) is divided into corase grinding area from outside to inside, fine grinding area, rough polishing area and four, the area Jing Pao annular region, closer to grinding
The wear particle size on abrasive disk (1) surface is thinner in the annular region at mill (1) center；Four annular regions are close to inner side baffle
Position is equipped with diversion trench (8), and four diversion trenches (8) connect with four annular waste liquid tanks (9) for being located at abrasive disk (1) lower end
It is logical；The abrasive grain spray set gradually along the abrasive disk (1) rotation direction is fixed in rack (3) above the abrasive disk (1)
Module, UV light irradiation module (12) and clamping workpiece device are penetrated, the abrasive particle injection module includes being respectively provided at corase grinding area, fine grinding
The coating material solidified mixed liquor injector head (10) of four abrasive grains above area, rough polishing area and the area Jing Pao and to fix four abrasive grains coating material solidified
The fixed link (11) of mixed liquor injector head (10), the fixed link (11) are fixed on rack (3)；The UV light irradiation module
(12) the UV light lamp tube for including fan-shaped light barrier and being located in fan-shaped light barrier, the light barrier of the sector is for preventing institute
It states UV light lamp tube and is irradiated to region in addition to the abrasive disk (1) below light barrier, i.e., the abrasive disk (1) below light barrier
The selfreparing on abrasive disk (1) surface is carried out in fan-shaped region；The clamping workpiece device includes linear guide (13), ball
Lead screw (14), spindle motor (15), sliding block (16), driving motor (17), workpiece fixing seat (18), force snesor (20) and workpiece
Fixed plate (19), the driving motor (17) are inversely installed by motor cabinet in the bottom of the sliding block (16), the driving electricity
The motor head of machine (17) connects workpiece fixing seat (18), is equipped with Workpiece fixing plate (19) below the workpiece fixing seat (18), institute
It states and is equipped with force snesor (20) between workpiece fixing seat (18) and Workpiece fixing plate (19)；The sliding block (16) is sleeved on horizontally disposed
Linear guide (13) and ball-screw (14) on, the both ends of the linear guide (13) are fixed on rack (3), linear guide
(13) both ends are fixed on rack (3), and the both ends of ball-screw (14) are fixed on rack (3) by bearing and ball-screw
(14) one end connection is for driving the spindle motor (15) of the lead screw rotation；The coating material solidified mixed liquor injector head of four abrasive grains
(10) four abrasive grain flow-generators, the wear particle size generated in four abrasive grain flow-generators and four mills are connected by pipeline respectively
Wear particle size below the coating material solidified mixed liquor injector head (10) of grain in corresponding annular region is consistent；The spindle motor (15) is logical
Motor cabinet is crossed to be fixed on the rack (3).
2. a kind of Continuous maching according to claim 1 reviews one's lessons by oneself compound grinding and polishing device, it is characterised in that: the rack (3)
It is equipped with level table, central axis (2) passes through the level table and connect by bearing with the level table, and polishing disk is set
In the top of the level table, rotating electric machine (4), driving cylinder (5) are located at the rack (3) below the level table Nei.
3. a kind of Continuous maching according to claim 1 reviews one's lessons by oneself compound grinding and polishing device, it is characterised in that: the workpiece is fixed
Ball sleeve is cased on the outside of seat (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510841444.2A CN105437052B (en) | 2015-11-28 | 2015-11-28 | A kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510841444.2A CN105437052B (en) | 2015-11-28 | 2015-11-28 | A kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105437052A CN105437052A (en) | 2016-03-30 |
| CN105437052B true CN105437052B (en) | 2019-02-05 |
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|---|---|---|---|
| CN201510841444.2A Active CN105437052B (en) | 2015-11-28 | 2015-11-28 | A kind of Continuous maching reviews one's lessons by oneself compound grinding and polishing device |
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| CN (1) | CN105437052B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107053026B (en) * | 2017-01-06 | 2023-06-27 | 浙江工业大学 | Method for preparing gradient function polishing disc and preparation device thereof |
| CN112025418A (en) * | 2020-08-24 | 2020-12-04 | 博罗县何氏模具制造有限公司 | Central disc polishing method and central disc polishing device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2985490B2 (en) * | 1992-02-28 | 1999-11-29 | 信越半導体株式会社 | Heat removal method of polishing machine |
| WO2000076723A1 (en) * | 1999-06-15 | 2000-12-21 | Ibiden Co., Ltd. | Table of wafer polisher, method of polishing wafer, and method of manufacturing semiconductor wafer |
| US6599175B2 (en) * | 2001-08-06 | 2003-07-29 | Speedfam-Ipeca Corporation | Apparatus for distributing a fluid through a polishing pad |
| CN103846779B (en) * | 2014-03-06 | 2016-04-06 | 浙江工商大学 | A kind of can the lapping device of Continuous maching |
| CN104858787B (en) * | 2015-06-18 | 2017-04-12 | 浙江工商大学 | Grinding disc surface self-growing grinding mechanism |
| CN104907918B (en) * | 2015-06-18 | 2017-04-12 | 浙江工商大学 | Continuous grinding mechanism based on grinding belt surface self-growth |
| CN104875113B (en) * | 2015-06-18 | 2017-03-01 | 浙江工商大学 | A kind of quick reparation grinding mechanism of abrasive disk surface self-grown |
| CN104907919B (en) * | 2015-06-18 | 2017-07-07 | 浙江工商大学 | A kind of continuously grinding mechanism based on abrasive disk surface self-grown |
| CN205290654U (en) * | 2015-11-28 | 2016-06-08 | 郑臣钏 | Continuous processing reviews one's lessons by oneself double entry and grinds throwing device |
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2015
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Effective date of registration: 20190823 Address after: 221700 East Fenghuang Road, Songlou Town, Fengxian County, Xuzhou City, Jiangsu Province Patentee after: Fengxian Feiyang Metal Products Co., Ltd. Address before: 516000 Huizhou City, Huicheng Province, the main floor of the road up to the number of cubic meters on the floor of the building, No. 12, Patentee before: Zheng Chenchuan |