CN105428297A - 一种用于pss衬底晶片快速分裂承载装置及其方法 - Google Patents
一种用于pss衬底晶片快速分裂承载装置及其方法 Download PDFInfo
- Publication number
- CN105428297A CN105428297A CN201510944736.9A CN201510944736A CN105428297A CN 105428297 A CN105428297 A CN 105428297A CN 201510944736 A CN201510944736 A CN 201510944736A CN 105428297 A CN105428297 A CN 105428297A
- Authority
- CN
- China
- Prior art keywords
- longitudinal rod
- bogey
- wafer
- transverse bar
- pss substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910052594 sapphire Inorganic materials 0.000 title abstract 2
- 239000010980 sapphire Substances 0.000 title abstract 2
- OANVFVBYPNXRLD-UHFFFAOYSA-M propyromazine bromide Chemical compound [Br-].C12=CC=CC=C2SC2=CC=CC=C2N1C(=O)C(C)[N+]1(C)CCCC1 OANVFVBYPNXRLD-UHFFFAOYSA-M 0.000 claims description 12
- 239000011505 plaster Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 abstract description 8
- 230000007547 defect Effects 0.000 abstract 1
- 238000005070 sampling Methods 0.000 abstract 1
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 101100008048 Caenorhabditis elegans cut-4 gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510944736.9A CN105428297B (zh) | 2015-12-16 | 2015-12-16 | 一种用于pss衬底晶片快速分裂承载装置及其方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510944736.9A CN105428297B (zh) | 2015-12-16 | 2015-12-16 | 一种用于pss衬底晶片快速分裂承载装置及其方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105428297A true CN105428297A (zh) | 2016-03-23 |
CN105428297B CN105428297B (zh) | 2018-11-09 |
Family
ID=55506402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510944736.9A Active CN105428297B (zh) | 2015-12-16 | 2015-12-16 | 一种用于pss衬底晶片快速分裂承载装置及其方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105428297B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1700412A (zh) * | 2004-05-11 | 2005-11-23 | 先进自动器材有限公司 | 用于半导体芯片分离的装置和方法 |
CN102751398A (zh) * | 2012-06-21 | 2012-10-24 | 华灿光电股份有限公司 | 一种倒三角形发光二极管芯片的制作方法 |
CN103178007A (zh) * | 2011-12-20 | 2013-06-26 | 杭州士兰集成电路有限公司 | 划片方法、芯片制作方法及凸点玻璃封装二极管 |
CN203839355U (zh) * | 2014-04-17 | 2014-09-17 | 广东先导半导体材料有限公司 | 一种晶片支架 |
-
2015
- 2015-12-16 CN CN201510944736.9A patent/CN105428297B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1700412A (zh) * | 2004-05-11 | 2005-11-23 | 先进自动器材有限公司 | 用于半导体芯片分离的装置和方法 |
CN103178007A (zh) * | 2011-12-20 | 2013-06-26 | 杭州士兰集成电路有限公司 | 划片方法、芯片制作方法及凸点玻璃封装二极管 |
CN102751398A (zh) * | 2012-06-21 | 2012-10-24 | 华灿光电股份有限公司 | 一种倒三角形发光二极管芯片的制作方法 |
CN203839355U (zh) * | 2014-04-17 | 2014-09-17 | 广东先导半导体材料有限公司 | 一种晶片支架 |
Also Published As
Publication number | Publication date |
---|---|
CN105428297B (zh) | 2018-11-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20181008 Address after: 264000 Room 215, Yuhuangding West Road, Zhifu District, Yantai, Shandong, 14 Applicant after: Yantai Zhixing intellectual property consulting service Co., Ltd. Address before: 266600 Qingdao Road, Laixi City, Qingdao, Shandong Province, No. 138 Applicant before: Wang Yongyan |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191211 Address after: 314200 floor 2, building 3, No.2 Chuangye Road, Xindai Town, Pinghu City, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Meibao Digital Technology Co., Ltd. Address before: 264000 Room 215, Yuhuangding West Road, Zhifu District, Yantai, Shandong, 14 Patentee before: Yantai Zhixing intellectual property consulting service Co., Ltd. |