CN105427897B - A kind of small energy continuously adjustabe is united without harmonic wave grenz ray without harmonic optcial beam linear system - Google Patents
A kind of small energy continuously adjustabe is united without harmonic wave grenz ray without harmonic optcial beam linear system Download PDFInfo
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- CN105427897B CN105427897B CN201510717057.8A CN201510717057A CN105427897B CN 105427897 B CN105427897 B CN 105427897B CN 201510717057 A CN201510717057 A CN 201510717057A CN 105427897 B CN105427897 B CN 105427897B
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/23—Optical systems, e.g. for irradiating targets, for heating plasma or for plasma diagnostics
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/067—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators using surface reflection, e.g. grazing incidence mirrors, gratings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
United the invention discloses a kind of small energy continuously adjustabe without harmonic wave grenz ray without harmonic optcial beam linear system, including：The quasi-continuous output continuous spectrum soft X_ray source that focusing system, a set of vacuum target chamber system and a set of automatically controlled regulation rotating disk target system are constituted is expanded by a quasi-continuous output table top laser, a set of laser beam；The grenz ray being made up of the reflective single diffraction order grating of grenz ray, a set of automatically controlled regulating system, a set of automatically controlled regulating system software and the rearmounted slit of a preposition slit, one piece of horizontal focusing grenz ray speculum, one piece of vertical focusing grenz ray speculum, one piece of grenz ray plane mirror, four pieces of different line densities is without harmonic wave grating monochromator.Floor space of the present invention is small, and construction, operating cost are low；Without higher hamonic wave pollution, output beam spectral purity is high, without being equipped with harmonic suppression technique facility.
Description
Technical field
The invention belongs to soft x-ray optics field, more particularly to a kind of small energy continuously adjustabe without harmonic wave grenz ray without
Harmonic optcial beam linear system is united.
Background technology
In laser indirect driving inertial confinement fusion (ICF) research, the grenz ray of Hohlraum radiation is driving DT fuel pellets
The direct energy source of implosion.Soft x-ray laser probe bea and radiation temperature temporal evolution process are the most important feature physics in Hohlraum radiation source
Amount, is to understand laser cavity target coupling physical process, laser driving force, optimizes black cavity configuration, the master data of size design.
ICF experiment before, it is necessary to soft x-ray optics element and detector spectrum response curve carry out absolute calibration, such as diffraction grating,
XRD, speculum, multilayer film, crystal, imaging plate, filter disc, CCD etc..The stated accuracy of these optical elements and detector, will be straight
Connect the confidence level that decide ICF datas and precise treatment degree.
Grenz ray monochromatization bunch is significant in Soft X-ray spectrum diagnostic work, is that soft X is penetrated
Line optics element and the important instrument of detector spectral response Sensitivity Calibration work.It carries out light splitting to wide range soft X-ray source,
And monochromatic light is exported after bunch goes out seam, there should be flexible and convenient to use, the features such as monochromatic light output is stable.Prior art
In, soft x-ray optics element and the work of detector spectral response Sensitivity Calibration mainly using synchrotron radiation as primary light source,
Carried out on monochromatization bunch using reflective gratings as beam splitter.Because Synchrotron Radiation is huge, operating cost
Costliness, this kind of monochromator is only applicable to several national indivedual laboratories of Synchrotron Radiation, it is impossible to extensive use.Simultaneously
Due to being limited when Synchrotron Radiation is by machine, only regular time carries out concentration staking-out work every year, for each what is ground
The real-time debugging for planting equipment is inconvenient；In addition, what grenz ray monochromatization bunch used is conventional reflector formula grating so that
It is different degrees of in the monochromatic light of output to include higher harmonic component, calibration result is brought error because of harmonic wave interference, most
The confidence level of the low ICF experimental datas of final decline.It is general using extra devices such as harmonics restraint mirror, filter disc group, air chambers on bunch
To suppress higher hamonic wave, but these extra devices can increase the overall complexity of bunch, while can only also be directed to some spies
Fixed wave band carries out parameter designing, it is impossible to tackle the problem at its root.
Using laser irradiation solid target as soft X-ray source alternative synchronization radiating light source, with small volume, brightness height, arteries and veins
The features such as rushing short, is more suitable for using in laboratory, had been applied at present soft X-ray lithography technology, medical imaging and
The fields such as materials detection, become the focus studied both at home and abroad.Because the repeatable accuracy of laser solid target light source is poor, therefore it is based on
The x-ray source that Laser Driven solid target is produced is poor in repeatability, brightness constancy and spatial stability, far from reaching work
The demand of industry application.
So, the monochromatization bunch of prior art has larger improvement in terms of light-source structure, spatial volume, harmonic controling
Leeway.
The content of the invention
It is an object of the invention to provide a kind of small energy continuously adjustabe without harmonic wave grenz ray without harmonic optcial beam linear system
System, it is intended to solve the x-ray source that is produced based on Laser Driven solid target repeatability, brightness constancy and spatial stability compared with
Poor the problem of.
The present invention is achieved in that a kind of small energy continuously adjustabe is united without harmonic wave grenz ray without harmonic optcial beam linear system
Including mechanical component, optical module and control system three parts；
Mechanical component includes：Target vertical motion component, target rotary motion component, target holder, four-dimensional adjustment component, target chamber, water
It is flat to focus on mirror cell, horizontal focusing mirror holder, mirror cell is focused on vertically, mirror holder, monochromator room, monochromator is focused on vertically；
Optical module is followed successively by laser along light path, include Shu Jing, focus lamp, rotating disk target, filter disc, enter seam, horizontal focusing
Mirror, vertical focus lamp, level crossing, grating, go out seam；
Control system includes rotating disk target kinetic control system and monochromator length scanning control system；
The light-source system of bunch is laser harp target plasma light source；The light beam G of laser output, in direction of advance
On, it is disposed with and includes Shu Jing, focus lamp, laser is focused on after including beam on rotating disk target；Rotating disk target is arranged in target chamber；
Target rotary motion component, its rotor shaft direction is vertical direction, and the rotating shaft of rotating disk target is changed into water after being changed through target holder
Square to；Target rotary motion component is fixed on the vertically movable component of target；Target holder is fixed on four-dimensional adjustment component, after vibration isolation
It is connected with target chamber, by adjusting four-dimensional adjustment component, the two-dimensional level direction of integrally-regulated target holder and luffing angle；Pass through control
The aggregate motion of the vertically movable component of target rotary motion component and target processed, control rotating disk target is spinned motion；
The beam splitting system of bunch include into seam, horizontal focusing mirror, vertical focus lamp, level crossing, grating, go out seam；
Horizontal focusing mirror is arranged on horizontal focusing mirror holder, and mirror holder is one 6 dimension adjustment component, is fixed on horizontal focusing mirror
Interior, can adjust 3-dimensional locus and the 3-dimensional rotation attitude of horizontal focusing mirror；
Vertical focus lamp is arranged on vertical focusing mirror holder, and mirror holder is one 6 dimension adjustment component, is fixed on vertical focus lamp
Interior, can adjust 3-dimensional locus and the 3-dimensional rotation attitude of vertical focus lamp；
The optical element of monochromator includes level crossing and four blocks of gratings, and grating is rotated around own central axis line, and level crossing is around flat
Row is rotated off axis in another axis of grating pivot center.
Further, described rotating disk target, for the target on soft ground, carries out being transferred to target holder by a stainless steel base
On；To the target on hard ground, it is machined directly on the installation of rotating disk target and target holder；The depth of parallelism of rotating disk target is less than 20 μm, flatness
Less than 10 μm.
Further, the effect of horizontal focusing mirror is to focus on out the incident light entered at seam at seam in the horizontal direction；Its into
As process meets focusing equation and plane grating groove direction disappears defocus condition：
Wherein R1For the radius of curvature of horizontal focusing mirror；phTo enter to be sewn to the center light path of horizontal focusing mirror；qhFor horizontal focusing
The image distance of burnt mirror；r1hRepresent horizontal focusing mirror to entering the horizontal focusing picture of seam to the horizontal imaging thing of the light path of grating, i.e. grating
Away from r2hRepresent the horizontal imaging image distance of grating.
Further, the effect of vertical focus lamp is to carry out vertical direction focusing to incident light, and vertical direction is also the bunch
Dispersion direction, plane grating is to the picture re-imaging of vertical focus lamp at exit slit；Its imaging process meets focusing side
Journey, plane grating dispersion direction disappear defocus condition and grating equation：
Wherein R2For the radius of curvature of vertical focus lamp；pvTo enter the light path for being sewn to vertical focus lamp；qvFor vertical focus lamp
Image distance；r1vRepresent vertical imaging thing of the vertical focus lamp to the vertical focusing picture of entrance slit to the light path, i.e. grating of grating
Away from r2vRepresent the vertical imaging image distance of grating, r2v=r2h；α, β are the incidence angle and the angle of diffraction of grating；λ is lambda1-wavelength,
d0For the cycle of grating.
Further, the effect of grating translation switching mechanism is to enter line raster switching between different spectral coverages, and the mechanism is maximum
4 blocks of gratings can be installed in grating adjustment seat, grating adjustment seat has independent 3-dimensional rotation and 1 dimension translation to each block of grating
Mechanism, by vacuum outside servomotor driving leading screw promote straight-bar motion in vacuum, leading screw and straight-bar are using flexible
Sylphon seal, straight-bar promotes grating adjustment seat integrally to do translational motion.
Further, level crossing rotating mechanism takes sin-bar structure, it by vacuum outside servomotor driving leading screw
The straight-bar motion in a vacuum is promoted, the flexible corrugation seal of tube is used between leading screw and straight-bar, is led between straight-bar and sine bar
Cross ball and carry out a point contact, disappeared gap using spring；Straight-bar promotes position that sine bar installed around its rotating shaft rotation but level crossing not
On the rotary shaft, its radius of turn is RM。
Further, the laser plasma light source used is laser harp target light source, and target disc movement locus is Archimedes
Helical.
Further, target is copper, tin, iron.
Further, the reflective gratings used are quantum dot array grating or " it " font grating, spectroscopy photon screen, amendment chess
Disk lattice grating, trapezoidal primitive grating.
Advantages of the present invention is：
1. the present invention uses ns the or fs lasers of small-size laboratory scale repetition as the pumping source of plasma source,
Have the advantages that condition flexibly, compact conformation, low-cost, expensive compared to bulky, operating cost Synchrotron Radiation
Have larger superiority, with it is superior easy to operate and practical the characteristics of.
2. the present invention uses laser harp target plasma light source, output light source is stable, meets the light source need of calibration experiment
Ask.
3. the present invention using quantum lattice raster or " it " font grating or spectroscopy photon screen or amendment gridiron pattern grating or
Trapezoidal primitive grating can effectively suppress Advanced Diffraction as beam splitter, and limitation of high harmonics ratio is better than 1%.
Brief description of the drawings
Fig. 1 is that small energy continuously adjustabe grenz ray provided in an embodiment of the present invention shows without harmonic optcial beam line general structure
It is intended to；
Fig. 2 is light channel structure of the small energy continuously adjustabe grenz ray without harmonic optcial beam line provided in an embodiment of the present invention
Schematic diagram；
Fig. 3 is rotating disk target structure schematic diagram provided in an embodiment of the present invention；
Fig. 4 provides the movement locus of 3 target practice laser spot on target for the embodiment of the present invention；
Fig. 5 is the focusing schematic diagram of horizontal focusing mirror provided in an embodiment of the present invention；
Fig. 6 is the focusing schematic diagram of vertical focus lamp provided in an embodiment of the present invention；
Fig. 7 is monochromator light channel structure schematic diagram provided in an embodiment of the present invention；
Fig. 8 is monochromator mechanical structure schematic diagram provided in an embodiment of the present invention；
Fig. 9 is that bunch provided in an embodiment of the present invention uses spectroscopy photon screen and conventional reflector formula grating as light splitting respectively
Element exports monochromatic comparison or purity figure；
In figure：1st, the vertically movable component of target；2nd, target rotary motion component；3rd, target holder；4th, four-dimensional adjustment component；5th, target chamber；
6th, horizontal focusing mirror cell；7th, horizontal focusing mirror holder；8th, mirror cell is focused on vertically；9th, mirror holder is focused on vertically；10th, monochromator room；11st, it is single
Color device；12nd, laser；13rd, Shu Jing is included；14th, focus lamp；15th, rotating disk target；16th, filter disc；17th, seam is entered；18th, horizontal focusing mirror；
19th, vertical focus lamp；20th, level crossing；21st, grating；22nd, seam is gone out；23rd, kinetic control system；24th, monochromator length scanning is controlled
System；1101st, grating rotating mechanism；1102nd, level crossing rotating mechanism；1103rd, grating translation switching mechanism；1104th, grating is adjusted
Save seat；1105th, the first leading screw；1106th, the first straight-bar；1107th, the second leading screw；1108th, the second straight-bar；1109th, the first sine bar；
1110th, ball；1111st, spring；1112nd, the second sine bar.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
Below in conjunction with the accompanying drawings and specific embodiment to the present invention application principle be further described.
Refer to Fig. 1-Fig. 9：
The present invention is achieved in that a kind of small energy continuously adjustabe is united without harmonic wave grenz ray without harmonic optcial beam linear system
Including mechanical component, optical module and control system three parts, Fig. 1, Fig. 2 and Fig. 3 are seen.
Mechanical component includes：Target vertical motion component 1, target rotary motion component 2, target holder 3, four-dimensional adjustment component 4, target chamber
5th, horizontal focusing mirror cell 6, horizontal focusing mirror holder 7, vertical focusing mirror cell 8, vertical focusing mirror holder 9, monochromator room 10, monochromator
11；
Optical module is followed successively by laser 12 along light path, include beam mirror 13, focus lamp 14, rotating disk target 15, filter disc 16, enter seam
17th, horizontal focusing mirror 18, vertical focus lamp 19, level crossing 20, grating 21, go out seam 22；
Control system includes rotating disk target kinetic control system 23 and monochromator length scanning control system 24；
The light-source system of bunch is laser harp target plasma light source, sees Fig. 1 and Fig. 3；The light beam that laser 12 is exported
G, in a forward direction, is disposed with and includes beam mirror 13, focus lamp 14, laser is focused on after including beam on rotating disk target 15；Rotating disk
Target 15 is arranged in target chamber 5；
As shown in figure 3, target rotary motion component 2, its rotor shaft direction is vertical direction, rotating disk target after being changed through target holder 3
Rotating shaft is changed into horizontal direction；Target rotary motion component 2 is fixed on the vertically movable component 1 of target；Target holder 3 is fixed on four-dimensional adjustment
Component 4, is connected after vibration isolation with target chamber 5, by adjusting four-dimensional adjustment component 4, the two-dimensional level direction of integrally-regulated target holder 3
And luffing angle；By controlling the aggregate motion of target rotary motion component 2 and the vertically movable component 1 of target, control rotating disk target 15
Spin motion；
Further, described rotating disk target 15, for the target on soft ground, carries out being transferred to target by a stainless steel base
On frame 3；To the target on hard ground, it is machined directly to rotating disk target 15 and installs and on target holder 3；The depth of parallelism of rotating disk target 15 is less than 20 μ
M, flatness is less than 10 μm.
The laser exported from laser 12 is focused on target after including beam mirror 13 and including beam, then by focus lamp 14.By adjusting
Save focus lamp 14 so that laser peak power maximum is in target surface all the time.When vacuum is sufficiently high, target vertical motion component
1 and target rotary motion component 2 start working, by controlling the vertically movable component 1 of the rotary speed of target rotary motion component 2 and target
Vertically movable speed, forms uniform focal spot, the track of focal spot formation is Archimedes's spiral shell on rotating disk target 15 during laser target shooting
Spin line, sufficiently utilizes target.The grenz ray exit direction that laser is produced with the interaction of rotating disk target 5, with laser light incident direction
Angle be 21 °, it is ensured that the photon of radiation is more in unit solid angle.The soft X-ray source given off is filtered out visible through filter
Light and scattering laser, seam 17 is entered into bunch.
The beam splitting system of bunch includes into seam 17, horizontal focusing mirror 18, vertical focus lamp 19, level crossing 20, grating 21, gone out
Seam 22, is shown in Fig. 1 and Fig. 2；Through entering the wide range grenz ray that seam 17 enters, horizontal focusing mirror cell 6, glancing incidence to level are initially entered
On focus lamp 18, its optical surface is placed vertically, and face type can select sphere or cylinder, and the size in usual optical pathway direction is larger, with
Cover the hot spot that glancing incidence is elongated to minute surface；
Horizontal focusing mirror 18 is arranged on 7 on horizontal focusing mirror holder, and mirror holder is one 6 dimension adjustment component, is fixed on horizontal focusing
In burnt mirror cell 6,3-dimensional locus and the 3-dimensional rotation attitude of horizontal focusing mirror 18 can be adjusted, it is accurately placed on light path
Design attitude.
Further, the effect of horizontal focusing mirror 18 is to focus on out the incident light entered at seam at seam in the horizontal direction；Its
Imaging process meets focusing equation and plane grating groove direction disappears defocus condition：
Wherein R1For the radius of curvature of horizontal focusing mirror 18；phTo enter to be sewn to the center light path of horizontal focusing mirror 18；qhFor water
The image distance of flat focus lamp 18；r1hRepresent that 18 pairs of horizontal focusing mirror enters the horizontal focusing picture of seam to the water of the light path, i.e. grating of grating
Heisei is as object distance, r2hThe horizontal imaging image distance of grating is represented, Fig. 5 is seen.
After upper deflecting, mirror cell 8 is focused on into vertical in the horizontal direction for wide range grenz ray through the reflection of horizontal focusing mirror 18,
Glancing incidence is on vertical focus lamp 19, and its optics is placed upwardly, and face type can select sphere or cylinder, its same light path side
To size it is larger, to cover the hot spot that glancing incidence is elongated to minute surface.
Vertical focus lamp 19 is arranged on 9 on vertical focusing mirror holder, and mirror holder is one 6 dimension adjustment component, is fixed on vertical poly-
In burnt mirror cell 8,3-dimensional locus and the 3-dimensional rotation attitude of vertical focus lamp 19 can be adjusted, it is accurately placed on light path
Design attitude；
Further, the effect of vertical focus lamp 19 is to carry out vertical direction focusing to incident light, and vertical direction is also the beam
The dispersion direction of line, the picture re-imaging of the vertical focus lamp 19 of 21 pairs of plane grating is at exit slit；Its imaging process is met
Focusing equation, plane grating dispersion direction disappear defocus condition and grating equation：
Wherein R2For the radius of curvature of vertical focus lamp 19；pvTo enter the light path for being sewn to vertical focus lamp 19；qvFor spherical mirror
2 image distance；r1vVertical imaging object distance of the spherical mirror 2 to the vertical focusing picture of entrance slit to the light path, i.e. grating of grating is represented,
r2vRepresent the vertical imaging image distance of grating, r2v=r2h；α, β are the incidence angle and the angle of diffraction of grating；λ is lambda1-wavelength, d0For
The cycle of grating, vertical focus lamp 19 focuses on schematic diagram and sees Fig. 6；
The wide range grenz ray reflected through vertical focus lamp 19 is after vertical direction is upward deflected, into monochromator room 10, warp
After the light splitting of monochromator 11, the monochromatic light of required specific wavelength is exported by going out the gating of seam 22.The optical element bag of monochromator 11
Level crossing 20 and four blocks of gratings 21 are included, grating is rotated around own central axis line, and level crossing quotes Riemer kinematics Analytic principle
[F.RiemerandR.Torge, Nucl.Instrum.Methods208,313-314], around parallel to the another of grating pivot center
One axis rotates (see Fig. 7) off axis, when length scanning, and in order to ensure to disappear, defocus condition can be met, it is necessary to make diffraction
The cosine ratio of angle and incidence angle is a constant, i.e.,The phase of grating and level crossing for convenience of explanation in Fig. 7
Mutual relation, using raster center as the origin of coordinates, sets up coordinate system by X-direction of incident light direction, α, β,Respectively grating 21
Incidence angle and the angle of emergence and level crossing 20 grazing angle,XM,YMFor the seat of level crossing rotary shaft
Mark, RMFor its radius of turn, XIFor incident light axis and the abscissa of level crossing intersection point, YHFor emergent light axis and the incident light axis discrepancy in elevation.
Level crossing 20 reflect light be in the coordinate of grating surface:
The wherein parameter Y of monochromator 11HIt can be chosen according to actual light beam width and mechanical structure.And parameter XM,YM,RM
By choosing the α corresponding to three different wavelengthi,βi,Substitute into above formula and make WG=0 tries to achieve.Three wavelength one
As choose the upper limit, lower limit and the intermediate value of the covering of monolithic grating.Set up the letter that wavelength changes with the incidence angle of grating 21 accordingly
Number relational expression：
sinα-sin(a cos(cffCos α))=λ/d, the corresponding grating of each wavelength is assured that by this relation
The grazing angle of 21 incidence angles and level crossing 20.
The mechanical structure of monochromator 11 includes the level crossing rotating mechanism 1102 of grating rotating mechanism 1101, and grating is translated
Switching mechanism 1102, is shown in Fig. 8.
Further, the effect of the translation of grating 21 switching mechanism is to enter line raster 21 between different spectral coverages to switch, the mechanism
Maximum can install 4 blocks of gratings 21 in grating adjustment seat 1104, and grating adjustment seat 1104 has independent 3-dimensional rotation to each block of grating
Turn and 1 dimension translation mechanism, it is ensured that grating can be accurately placed in grating rotating shaft.Servomotor driving the outside by vacuum
One leading screw 1105 promotes first straight-bar 1106 in vacuum to move, and the first leading screw 1105 and the first straight-bar 1106 are using flexible
Sylphon seal, straight-bar promotes grating adjustment seat 1104 is overall to do translational motion, so as to realize the function that grating 21 switches.
Further, level crossing rotating mechanism 1102 takes sin-bar structure, it by vacuum outside servomotor driving
Second leading screw 1107 promotes the second straight-bar 1108 in a vacuum to move, and is adopted between the second leading screw 1107 and the second straight-bar 1108
The flexible corrugation seal of tube is used, carrying out point by ball 1110 between the second straight-bar 1108 and the first sine bar 1109 contacts, and uses
Spring 1111 disappears gap；Second straight-bar 1108 promotes position that the first sine bar 1109 installed around its rotating shaft rotation but level crossing 20 not
On the rotary shaft, its radius of turn is RM.Grating rotating mechanism 1101 is identical with the type of drive of level crossing rotating mechanism 1102, only
It is with the axle unitary rotation for bypassing grating limit parallel grating groove with the coaxial mounted grating adjustment seat of the second sine bar 1112.
When carrying out length scanning, it is only necessary to required wavelength X, monochromator length scanning are inputted in computation interface
Control system 24 just can directly control grating translation switching mechanism according to the structure and grating parameter of the monochromator being previously entered
1103, required grating is moved on in light path, while grating rotating mechanism 1101 and level crossing rotating mechanism 1102 are controlled, regulation
The incidence angle of grating 21 and level crossing 20 so that the dispersed light beam of wavelength X is exported from seam 22 is gone out.
Embodiment
Beamline construction is as shown in Figure 1.Laser uses Nd:YAG laser, wavelength 532nm, pulsewidth 10ns, pulse energy
700mJ, repetition rate 10Hz.Using tin rotating disk target as soft X-ray source, while laser pulse is practiced shooting, target surface is A Ji
Mead screw motion, when making continuous practice shooting, the laser pulse of each hair time is all acted on new target surface, it is ensured that entirely using process
The uniformity of middle target practice condition.
The horizontal focusing mirror and the radius of curvature of vertical focus lamp that the present embodiment is used are respectively 26516mm and 21867mm,
Collection solid angle is 4mrad (vertical direction) * 15mrad (horizontal direction), and two pieces of spherical mirror reflectings surface are gold-plated, grazing angle point
Wei not be 3.11 ° and 4 °.Level crossing and optical grating constitution variable-included-angle monochromator, the optical amplifier of the monochromator is normal in the present embodiment
NumberThe grating used is the reflective spectroscopy of 2000lp/mm, 1000lp/mm, 250lp/mm
Photon screen, and 1000lp/mm common grating as a comparison, effective area is 15mm*50mm.
Go out behind seam to connect a transmission grating spectrometer in bunch in embodiment, for detecting that the monochromatic light of monochromator output is pure
Degree.We are contrasted to two ways：Bunch uses conventional reflector formula grating as beam splitter；Monochromator uses reflection
Formula spectroscopy photon screen is used as beam splitter.Two kinds of situations of contrast are shown in Fig. 9, it is found that at 15.9nm, use conventional reflector formula
There are 15.9nm 2 order diffraction peaks (7.95nm) in the monochromator output monochromatic light of grating, intensity is basic with fundamental wave (15.9nm)
Quite；And there is no Advanced Diffraction peak in the monochromator output spectrum using reflective spectroscopy photon screen, illustrate of the present invention
Laser plasma soft X-ray can effectively suppress higher hamonic wave without harmonic wave grating monochromator, improve the spectral purity of output.
The present invention is used as the pumping source of plasma source, tool using ns the or fs lasers of small-size laboratory scale repetition
Have ready conditions flexibly, compact conformation, it is low-cost the advantages of, the Synchrotron Radiation expensive compared to bulky, operating cost has
Larger superiority, with it is superior easy to operate and practical the characteristics of.The present invention is used as plasma using laser harp target
Light source, output light source is stable, meets the light source requirements of calibration experiment.The present invention using quantum lattice raster, " it " font grating,
Spectroscopy photon screen, amendment gridiron pattern grating, trapezoidal primitive grating can effectively suppress Advanced Diffraction, high order as beam splitter
Harmonics restraint ratio is better than 1%.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.
Claims (7)
1. a kind of small energy continuously adjustabe is united without harmonic wave grenz ray without harmonic optcial beam linear system, it is characterised in that described is small-sized
It is big that energy continuously adjustabe includes mechanical component, optical module and control system three without harmonic wave grenz ray without harmonic optcial beam linear system system
Part；
Mechanical component includes：Target vertical motion component (1), target rotary motion component (2), target holder (3), four-dimensional adjustment component (4),
Target chamber (5), horizontal focusing mirror cell (6), vertically horizontal focusing mirror holder (7), focusing mirror cell (8), vertically focusing mirror holder (9), monochrome
Device room (10) and monochromator (11)；
Optical module is followed successively by laser (12) along light path, includes Shu Jing (13), focus lamp (14), rotating disk target (15), filter disc
(16), enter seam (17), horizontal focusing mirror (18), vertical focus lamp (19), level crossing (20), grating (21) and go out seam (22)；
Control system includes rotating disk target kinetic control system (23) and monochromator length scanning control system (24)；
The light-source system of bunch is laser harp target plasma light source；The light beam (G) of laser (12) output, in direction of advance
On, it is disposed with and includes Shu Jing (13), focus lamp (14), laser is focused on after including beam on rotating disk target (15)；Rotating disk target (15)
In target chamber (5)；
Target rotary motion component (2), its rotor shaft direction is vertical direction, and the rotating shaft of rotating disk target is changed into after being changed through target holder (3)
Horizontal direction；Target rotary motion component (2) is fixed on the vertically movable component (1) of target；Target holder (3) is fixed on four-dimensional adjustment component
(4) on, it is connected after vibration isolation with target chamber (5), by adjusting four-dimensional adjustment component (4), the two-dimentional water of integrally-regulated target holder (3)
Square to and luffing angle；By controlling the aggregate motion of target rotary motion component (2) and the vertically movable component (1) of target, control
Rotating disk target (15) processed is spinned motion；
The beam splitting system of bunch is included into seam (17), horizontal focusing mirror (18), vertical focus lamp (19), level crossing (20), grating
(21) seam (22), is gone out；
Horizontal focusing mirror (18) is arranged on horizontal focusing mirror holder (7), and mirror holder is one 6 dimension adjustment component, is fixed on horizontal focusing
In burnt mirror cell (6), 3-dimensional locus and the 3-dimensional rotation attitude of horizontal focusing mirror (18) can be adjusted；
Vertical focus lamp (19) is arranged on vertical focusing mirror holder (9), and mirror holder is one 6 dimension adjustment component, is fixed on vertical poly-
In burnt mirror cell (8), 3-dimensional locus and the 3-dimensional rotation attitude of vertical focus lamp (19) can be adjusted；
The optical element of monochromator (11) includes level crossing (20) and four pieces of gratings (21), and grating is rotated around own central axis line, is put down
Face mirror is around another axis rotation parallel to grating pivot center.
2. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In described rotating disk target (15), for the target on soft ground, by a stainless steel base be transferred on target holder (3)；It is right
The target on hard ground, is machined directly to rotating disk target (15) and is installed on target holder (3)；The depth of parallelism of rotating disk target (15) is less than 20 μm,
Flatness is less than 10 μm.
3. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In the effect of horizontal focusing mirror (18) is to focus on out the incident light entered at seam at seam in the horizontal direction；Its imaging process expires
Sufficient focusing equation and plane grating groove direction disappear defocus condition：
<mrow>
<mfrac>
<mn>1</mn>
<msub>
<mi>p</mi>
<mi>h</mi>
</msub>
</mfrac>
<mo>+</mo>
<mfrac>
<mn>1</mn>
<msub>
<mi>q</mi>
<mi>h</mi>
</msub>
</mfrac>
<mo>=</mo>
<mfrac>
<mn>2</mn>
<mrow>
<msub>
<mi>R</mi>
<mn>1</mn>
</msub>
<msub>
<mi>sin&theta;</mi>
<mn>1</mn>
</msub>
</mrow>
</mfrac>
</mrow>
<mrow>
<mfrac>
<mn>1</mn>
<msub>
<mi>r</mi>
<mrow>
<mn>1</mn>
<mi>h</mi>
</mrow>
</msub>
</mfrac>
<mo>+</mo>
<mfrac>
<mn>1</mn>
<msub>
<mi>r</mi>
<mrow>
<mn>2</mn>
<mi>h</mi>
</mrow>
</msub>
</mfrac>
<mo>=</mo>
<mn>0</mn>
</mrow>
Wherein R1For the radius of curvature of horizontal focusing mirror (18)；phTo enter to be sewn to the center light path of horizontal focusing mirror (18)；qhFor water
The image distance of flat focus lamp (18)；r1hRepresent horizontal focusing mirror (18) to entering the horizontal focusing picture of seam to the light path of grating, i.e. grating
Horizontal imaging object distance, r2hRepresent the horizontal imaging image distance of grating.
4. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In the effect of vertical focus lamp (19) is to carry out vertical direction focusing to incident light, and vertical direction is also the dispersion side of the bunch
To plane grating (21) is to the picture re-imaging of vertical focus lamp (19) at exit slit；Its imaging process meets focusing side
Journey, plane grating dispersion direction disappear defocus condition and grating equation：
<mrow>
<mfrac>
<mn>1</mn>
<msub>
<mi>p</mi>
<mi>v</mi>
</msub>
</mfrac>
<mo>+</mo>
<mfrac>
<mn>1</mn>
<msub>
<mi>q</mi>
<mi>v</mi>
</msub>
</mfrac>
<mo>=</mo>
<mfrac>
<mn>2</mn>
<mrow>
<msub>
<mi>R</mi>
<mn>2</mn>
</msub>
<msub>
<mi>sin&theta;</mi>
<mn>2</mn>
</msub>
</mrow>
</mfrac>
</mrow>
<mrow>
<mfrac>
<mrow>
<msup>
<mi>cos</mi>
<mn>2</mn>
</msup>
<mi>&alpha;</mi>
</mrow>
<msub>
<mi>r</mi>
<mrow>
<mn>1</mn>
<mi>v</mi>
</mrow>
</msub>
</mfrac>
<mo>+</mo>
<mfrac>
<mrow>
<msup>
<mi>cos</mi>
<mn>2</mn>
</msup>
<mi>&beta;</mi>
</mrow>
<msub>
<mi>r</mi>
<mrow>
<mn>2</mn>
<mi>v</mi>
</mrow>
</msub>
</mfrac>
<mo>=</mo>
<mn>0</mn>
</mrow>
<mrow>
<mi>s</mi>
<mi>i</mi>
<mi>n</mi>
<mi>&alpha;</mi>
<mo>-</mo>
<mi>s</mi>
<mi>i</mi>
<mi>n</mi>
<mi>&beta;</mi>
<mo>=</mo>
<mfrac>
<mi>&lambda;</mi>
<msub>
<mi>d</mi>
<mn>0</mn>
</msub>
</mfrac>
</mrow>
Wherein R2For the radius of curvature of vertical focus lamp (19)；pvTo enter the light path for being sewn to vertical focus lamp (19)；qvGather to be vertical
The image distance of burnt mirror；r1vRepresent light path of the vertical focus lamp to the vertical focusing picture of entrance slit to grating, i.e. grating it is vertical into
As object distance, r2vRepresent the vertical imaging image distance of grating, r2v=r2h；α, β are the incidence angle and the angle of diffraction of grating；λ is incident light wave
It is long, d0For the cycle of grating.
5. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In the light source used is laser harp target plasma light source, turns target disc movement locus for Archimedes spiral.
6. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In target is copper or tin or iron.
7. small energy continuously adjustabe as claimed in claim 1 is united without harmonic wave grenz ray without harmonic optcial beam linear system, its feature exists
In, reflective gratings used be quantum dot array grating or " it " font grating or spectroscopy photon screen or amendment gridiron pattern grating or
Trapezoidal primitive grating.
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