CN105427871A - 一种硬磁/软磁巨磁阻抗效应复合丝及其制备方法 - Google Patents
一种硬磁/软磁巨磁阻抗效应复合丝及其制备方法 Download PDFInfo
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Abstract
本发明涉及一种硬磁/软磁巨磁阻抗效应复合丝及其制备方法,属于磁敏感传感器和磁敏功能材料及其制备的技术领域。一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于由软磁合金微丝、pyrex玻璃层、黄金镀膜层、CoNi合金层组成,软磁合金微丝由Pyrex玻璃层包裹,黄金镀层镀在Pyrex玻璃层上,在黄金镀层上电镀CoNi合金层。该方法工艺简单,成本低,产品灵敏度高。
Description
技术领域
本发明涉及一种硬磁/软磁巨磁阻抗效应复合丝及其制备方法,属于磁敏感传感器和磁敏功能材料及其制备的技术领域。
背景技术
巨磁阻抗效应是指磁性材料的交流阻抗随着外加直流磁场的变化而发生显著变化的效应。由于巨磁阻抗(GMI)效应具有灵敏度高、反应快和稳定性好等特点,所以其在传感器技术和磁记录技术中具有巨大的应用潜能,特别是研制灵敏度高、稳定性好、低功耗、微型化的磁敏传感器。
发明内容
本发明的目的是提出一种硬磁/软磁巨磁阻抗效应复合丝及其制备方法,该方法工艺简单,成本低,产品灵敏度高。
为实现上述目的,本发明所采取的技术方案是:
一种硬磁/软磁巨磁阻抗效应复合丝(或称一种硬磁/软磁双相合金微丝),其特征在于由软磁合金微丝1、pyrex玻璃层2、黄金镀膜层3、CoNi合金层4组成,软磁合金微丝1由Pyrex玻璃层2包裹,黄金镀层3镀在Pyrex玻璃层2上,在黄金镀层3上电镀CoNi合金层4。
所述的软磁合金微丝1为CoFeNiSiB软磁合金,Pyrex玻璃层2为绝缘层,黄金镀层3采用磁控溅射法制备的薄膜,CoNi合金层4采用电镀方法制备。
所述软磁合金微丝1的直径为15-25μm。pyrex玻璃层2的厚度为2~5μm。黄金镀层(为导电层)3的厚度为200~300nm。CoNi合金层4的厚度为1~20μm。
一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,其特征在于包括如下步骤:在Pyrex玻璃层2包覆软磁合金微丝1表面磁控溅射一层黄金镀层(黄金层)3,再在黄金镀层3上用电镀法电镀CoNi合金层4,得到硬磁/软磁巨磁阻抗效应复合丝(成品)。
具体包括如下步骤:
第一步,在Pyrex玻璃层2包覆软磁合金微丝1表面磁控溅射一层黄金镀层3:采用物理气象沉积法,持续5~7分钟,得到镀层厚度约为200~300nm的黄金镀层;
第二步,在黄金镀层3上电镀(电化学镀)CoNi合金层4:
镀液温度为35~50℃,pH值在3.5~5.6之间,镀层厚度由电镀时间控制,厚度介于1~20μm,施镀时间为1~30min;电镀液配方为:
电镀电流密度为8~20mA/cm2。
本发明的有益效果是:
1)、用电镀方法电镀CoNi合金层(CoNi硬磁合金层),工艺简单,成本低,产品性能稳定。
2)、一定频率的驱动电流流过所述的复合丝时,由软磁合金微丝和CoNi合金层之间形成相互作用,在此情况下,如外加一弱磁场,共振频率略有变化,产生较大的巨磁阻抗效应,灵敏度高。
3)、通过改变所述复合丝的长度、镀层厚度、Pyrex玻璃层厚度等可改变复合丝的共振频率,以适应不同的应用场合。由于所述的复合丝工作在共振区,可通过控制巨磁阻抗效应的频率范围,增加了其抗干扰能力。
4)用本发明的方法可以把所述的复合丝的体积做的较小,不需要外加电容,能适应小型化、集成化的技术要求。
附图说明
图1是本发明硬磁/软磁巨磁阻抗效应复合丝的结构示意图。
图中,1为软磁合金微丝,2为pyrex玻璃层,3为黄金镀层,4为CoNi合金镀层。
具体实施方式
现结合附图和实施例详细说明本发明的技术方案。所有的实施例按上述的制备方法的操作步骤操作。每个实施例仅罗列关键的技术数据。
实施例1:
如图1所示,一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,包括如下步骤:
第一步,软磁合金微丝1为CoFeNiB,直径15μm,长度50mm;Pyrex玻璃层2的厚度为5μm;在Pyrex玻璃层2包覆软磁合金微丝1表面磁控溅射一层黄金镀层3:采用物理气象沉积法,持续5分钟,得到镀层厚度约为200nm的黄金镀层;
第二步,在黄金镀层3上电镀(电化学镀)CoNi合金层4,得到硬磁/软磁巨磁阻抗效应复合丝(成品);
镀液温度为35~50℃,pH值在3.5~5.6之间,镀层厚度由电镀时间控制(施镀时间为5min),厚度为3μm;电镀液配方为:
电镀电流密度为8~20mA/cm2。
当外加磁场为0~500奥斯特和驱动电流频率为2.24GHz时,阻抗效应幅值为283%,灵敏度为0.57%/奥斯特。
实施例2:
如图1所示,一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,包括如下步骤:
第一步,软磁合金微丝1为CoFeNiB,直径25μm,长度50mm;Pyrex玻璃层2的厚度为2μm;在Pyrex玻璃层2包覆软磁合金微丝1表面磁控溅射一层黄金镀层3:采用物理气象沉积法,持续5分钟,得到镀层厚度约为200nm的黄金镀层;
第二步,在黄金镀层3上电镀(电化学镀)CoNi合金层4,得到硬磁/软磁巨磁阻抗效应复合丝(成品);
镀液温度为35~50℃,pH值在3.5~5.6之间,镀层厚度由电镀时间控制(施镀时间为10min),厚度为5μm;电镀液配方为:
电镀电流密度为8~20mA/cm2。
当外加磁场为0~500奥斯特和驱动电流频率为1.44GHz时,阻抗效应幅值为360%,灵敏度为0.72%/奥斯特。
实施例3:
如图1所示,一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,包括如下步骤:
第一步,软磁合金微丝1为CoFeNiB,直径20μm,长度50mm;Pyrex玻璃层2的厚度为3μm;在Pyrex玻璃层2包覆软磁合金微丝1表面磁控溅射一层黄金镀层3:采用物理气象沉积法,持续5分钟,得到镀层厚度约为200nm的黄金镀层;
第二步,在黄金镀层3上电镀(电化学镀)CoNi合金层4,得到硬磁/软磁巨磁阻抗效应复合丝(成品);
镀液温度为35~50℃,pH值在3.5~5.6之间,镀层厚度由电镀时间控制(施镀时间为10min),厚度为5μm;电镀液配方为:
电镀电流密度为8~20mA/cm2。
当外加磁场为0~500奥斯特和驱动电流频率为1.87GHz时,阻抗效应幅值为310%,灵敏度为0.62%/奥斯特。
Claims (8)
1.一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于由软磁合金微丝(1)、pyrex玻璃层(2)、黄金镀膜层(3)、CoNi合金层(4)组成,软磁合金微丝(1)由Pyrex玻璃层(2)包裹,黄金镀层(3)镀在Pyrex玻璃层(2)上,在黄金镀层(3)上电镀CoNi合金层(4)。
2.根据权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于:所述的软磁合金微丝(1)为CoFeNiSiB软磁合金,Pyrex玻璃层(2)为绝缘层,黄金镀层(3)采用磁控溅射法制备的薄膜,CoNi合金层(4)采用电镀方法制备。
3.根据权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于:所述软磁合金微丝(1)的直径为15-25μm。
4.根据权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于:pyrex玻璃层(2)的厚度为2~5μm。
5.根据权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于:黄金镀层(3)的厚度为200~300nm。
6.根据权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝,其特征在于:CoNi合金层(4)的厚度为1~20μm。
7.如权利要求1所述的一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,其特征在于包括如下步骤:在Pyrex玻璃层(2)包覆软磁合金微丝(1)表面磁控溅射一层黄金镀层(3),再在黄金镀层(3)上用电镀法电镀CoNi合金层(4),得到硬磁/软磁巨磁阻抗效应复合丝。
8.根据权利要求7所述的一种硬磁/软磁巨磁阻抗效应复合丝的制备方法,其特征在于:具体包括如下步骤:
第一步,在Pyrex玻璃层(2)包覆软磁合金微丝(1)表面磁控溅射一层黄金镀层(3):采用物理气象沉积法,持续5~7分钟,得到镀层厚度约为200~300nm的黄金镀层;
第二步,在黄金镀层(3)上电镀CoNi合金层(4):
镀液温度为35~50℃,pH值在3.5~5.6之间,镀层厚度由电镀时间控制,厚度介于1~20μm,施镀时间为1~30min;电镀液配方为:
余量为水;
电镀电流密度为8~20mA/cm2。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109082660A (zh) * | 2017-06-13 | 2018-12-25 | 刘志红 | 一种铜/玻璃/铜包覆复合丝及制备方法 |
CN110565139A (zh) * | 2019-09-17 | 2019-12-13 | 哈尔滨工业大学 | 一种具有高阻抗性能的复合结构微丝及其制备方法与应用 |
WO2021047105A1 (zh) * | 2019-09-11 | 2021-03-18 | 昆山航磁微电子科技有限公司 | Gmi传感器灵敏度改进结构及其操作方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1555048A (zh) * | 2003-12-19 | 2004-12-15 | 华东师范大学 | 一种带阻挡层巨磁阻抗效应复合丝及其制备方法 |
CN101105944A (zh) * | 2007-06-01 | 2008-01-16 | 华东师范大学 | Lc共振巨磁阻抗效应复合丝及其制备方法 |
CN101526590A (zh) * | 2008-03-06 | 2009-09-09 | 安徽大学 | 一种基于巨磁阻技术的高精度弱磁场传感器及其制备方法 |
-
2016
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1555048A (zh) * | 2003-12-19 | 2004-12-15 | 华东师范大学 | 一种带阻挡层巨磁阻抗效应复合丝及其制备方法 |
CN101105944A (zh) * | 2007-06-01 | 2008-01-16 | 华东师范大学 | Lc共振巨磁阻抗效应复合丝及其制备方法 |
CN101526590A (zh) * | 2008-03-06 | 2009-09-09 | 安徽大学 | 一种基于巨磁阻技术的高精度弱磁场传感器及其制备方法 |
Non-Patent Citations (2)
Title |
---|
BIN TIAN,MANUEL VAZQUEZ: "LC and ferromagnetic resonance in soft/hard magnetic microwires", 《JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS》 * |
DIYONGJIANG,JIANGJIANJUN,DUGANG,TIANBIN,BIESHAOWEI,HEHUAHUI: "Magnetic and microwave properties of glass-coated amorphous ferromagnetic microwires", 《TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109082660A (zh) * | 2017-06-13 | 2018-12-25 | 刘志红 | 一种铜/玻璃/铜包覆复合丝及制备方法 |
WO2021047105A1 (zh) * | 2019-09-11 | 2021-03-18 | 昆山航磁微电子科技有限公司 | Gmi传感器灵敏度改进结构及其操作方法 |
CN110565139A (zh) * | 2019-09-17 | 2019-12-13 | 哈尔滨工业大学 | 一种具有高阻抗性能的复合结构微丝及其制备方法与应用 |
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