CN105422413A - Cryogenic pump - Google Patents
Cryogenic pump Download PDFInfo
- Publication number
- CN105422413A CN105422413A CN201510827117.1A CN201510827117A CN105422413A CN 105422413 A CN105422413 A CN 105422413A CN 201510827117 A CN201510827117 A CN 201510827117A CN 105422413 A CN105422413 A CN 105422413A
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- CN
- China
- Prior art keywords
- separation sleeve
- cryopump
- magnet coupler
- nitrogen
- magnetic coupler
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Structures Of Non-Positive Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides a cryogenic pump. The cryogenic pump comprises a motor, a pump shell body, a driving shaft, a driven shaft, an inner magnetic coupler, an outer magnetic coupler and a separation sleeve, wherein the pump shell body is provided with an accommodating space. The driving shaft is connected with the motor and sleeved with the outer magnetic coupler. The driven shaft is sleeved with the inner magnetic coupler. The separation sleeve is arranged between the outer magnetic coupler and the inner magnetic coupler, and one end of the separation sleeve is connected with the pump shell body. An air cavity is formed between the outer wall of the separation sleeve and the pump shell body and filled with nitrogen. Compared with related technologies, the air cavity formed between the outer wall of the separation sleeve and the pump shell body is filled with the nitrogen, and a nitrogen protective layer is formed, so that it is ensured that parts outside the separation sleeve are not affected by the internal low temperature to be frozen and lose efficacy; meanwhile, parts inside the separation sleeve are kept to be at the low temperature continuously, and the heat preservation effect is good.
Description
Technical field
The present invention relates to pump technical field, particularly relate to a kind of cryopump.
Background technique
Cryopump is that gas molecule is caught the vacuum pump be exhausted on the cryopanel being cooled to ultralow temperature by condensation or absorption, and its application is comparatively extensive.
In correlation technique, during this body running of pump of cryopump, temperature is generally lower than subzero more than 100 degrees Celsius, within low-temperature region is positioned at magnet coupler, in real work, pass through energy transferring, make the operating temperature of low-temperature region can not reach job requirement all the time, namely the temperature of working zone has the trend of rising; Meanwhile, the temperature by low-temperature region affects, and the component beyond outer magnet coupler are vulnerable to low temperature effect and freezing, thus reduces the working efficiency of cryopump, and affects the service behaviour of cryopump.
Therefore, be necessary to provide a kind of new cryopump to solve the problems of the technologies described above.
Summary of the invention
For solving the problems of the technologies described above, to the invention provides between a kind of separation sleeve and pump case inflated with nitrogen to reach the cryopump of insulation, antifreezing effect.
The invention provides a kind of cryopump, it comprises motor, have the pump case of containing space, driving shaft, driven shaft, interior magnet coupler, outer magnet coupler and separation sleeve, described driving shaft is connected with described motor, described outer magnet coupler is sheathed on described driving shaft, described interior magnet coupler is sheathed on described driven shaft, described separation sleeve is located between described outer magnet coupler and described interior magnet coupler, and one end of described separation sleeve is connected with described pump case, form an air cavity between the outer wall of described separation sleeve and described pump case, described air cavity is filled with nitrogen.
Preferably, the density of described nitrogen is 1.25gdm
-3.
Preferably, the operating temperature of described cryopump is less than or equal to ﹣ 196 DEG C.
Preferably, the material of described separation sleeve is non-magnet material.
Preferably, described pump case comprises pump cover, and described pump cover and described outer magnet coupler are tightly connected.
Preferably, described cryopump comprises lip packing, and described pump cover is connected by described lip packing with described outer magnet coupler.
Compared with correlation technique, cryopump provided by the invention, is filled with nitrogen in the air cavity formed between the outer wall and described pump case of described separation sleeve, forms nitrogen blanket, effectively can reduce the energy transferring of both sides inside and outside described separation sleeve.Therefore, cryopump provided by the invention, effectively ensure that the part outside described separation sleeve was not lost efficacy by freezing by the impact of inner cryogenic, it has protective action for the part outside described separation sleeve; Meanwhile, nitrogen blanket makes the part time job constant temperature inside described separation sleeve keep low temperature, and it has good heat insulation effect for the part inside described separation sleeve.
Accompanying drawing explanation
Fig. 1 is the sectional view of cryopump of the present invention.
Embodiment
Below in conjunction with drawings and embodiments, the invention will be further described.
Referring to Fig. 1, is the sectional view of cryopump of the present invention.Described cryopump 1 comprises motor 11, pump case 12, driving shaft 13, driven shaft 14, interior magnet coupler 15, outer magnet coupler 16, separation sleeve 17 and lip seal glue 18.
Described driving shaft 13 is connected with described motor 11, described interior magnet coupler 15 is sheathed on described driven shaft 14, described outer magnet coupler 16 is sheathed on described driving shaft 13, described separation sleeve 17 is located between described outer magnet coupler 16 and described interior magnet coupler 15, and one end of described separation sleeve 17 is connected with described pump case 12, between described separation sleeve 17 and described pump case 12, form an air cavity 121.
Described pump case 12 has a containing space, described pump case 12 comprises air cavity 121 and pump cover 122, described air cavity 121 is enclosed by the outer wall of described separation sleeve 17 and the inwall of described pump case 12 and is formed, sealed by described lip packing 18 between described pump cover 122 and described outer magnet coupler 16, described air cavity 121 is made to be the cavity sealed, the containing space realizing described pump case 12 is equally isolated from the outside, and leakproof is dust-proof, makes described cryopump 1 run more stable.Described air cavity 121 is filled with nitrogen.The density of described nitrogen is 1.25gdm
-3.
Described outer magnet coupler 16 one end is suspended in the containing space of described pump case 12, and the other end extends to outside described pump case 12, and is connected with described motor 11.Described outer magnet coupler 16 part be located in described pump case 12 is placed in the air cavity 121 that the outer wall of described separation sleeve 17 and described pump case 12 inwall are formed, and described outer magnet coupler 16 is not connected with described separation sleeve 17, described air cavity 121 is made to be a through fluid passage.
Described separation sleeve 17 is located between described interior magnet coupler 15 and described outer magnet coupler 16, when described interior magnet coupler 15 and outer magnet coupler 16 rotate relative to described separation sleeve 17, described separation sleeve 17 is just in the alternating magnetic field of intimate sinusoidal variations, produce magnetic eddy current, seal fed sheet of a media simultaneously and there is pressure.The material of described separation sleeve 17 is non-magnet material, and magnetic conduction could driving torque.
The operating temperature of described cryopump 1 is less than or equal to ﹣ 196 DEG C.
Compared with correlation technique, cryopump provided by the invention, is filled with nitrogen in the air cavity formed between the outer wall and described pump case of described separation sleeve, forms nitrogen blanket, effectively can reduce the energy transferring of both sides inside and outside described separation sleeve.Therefore, cryopump provided by the invention effectively ensure that the component outside described separation sleeve were not lost efficacy by freezing by the impact of inner cryogenic, and it has protective action for the part outside described separation sleeve; Meanwhile, nitrogen blanket makes the part time job constant temperature inside described separation sleeve keep low temperature, and it has good heat insulation effect for the part inside described separation sleeve.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize specification of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.
Claims (6)
1. a cryopump, it is characterized in that, comprise motor, there is the pump case of containing space, driving shaft, driven shaft, interior magnet coupler, outer magnet coupler and separation sleeve, described driving shaft is connected with described motor, described outer magnet coupler is sheathed on described driving shaft, described interior magnet coupler is sheathed on described driven shaft, described separation sleeve is located between described outer magnet coupler and described interior magnet coupler, and one end of described separation sleeve is connected with described pump case, form an air cavity between the outer wall of described separation sleeve and described pump case, described air cavity is filled with nitrogen.
2. cryopump according to claim 1, is characterized in that, the density of described nitrogen is 1.25gdm
-3.
3. cryopump according to claim 1, is characterized in that, the operating temperature of described cryopump is less than or equal to ﹣ 196 DEG C.
4. cryopump according to claim 1, is characterized in that, the material of described separation sleeve is non-magnet material.
5. cryopump according to claim 4, is characterized in that, described pump case comprises pump cover, and described pump cover and described outer magnet coupler are tightly connected.
6. cryopump according to claim 5, is characterized in that, described cryopump comprises lip packing, and described pump cover is connected by described lip packing with described outer magnet coupler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510827117.1A CN105422413B (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510827117.1A CN105422413B (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105422413A true CN105422413A (en) | 2016-03-23 |
| CN105422413B CN105422413B (en) | 2018-11-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510827117.1A Active CN105422413B (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105422413B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10240562B2 (en) | 2016-10-24 | 2019-03-26 | Progress Rail Locomotive Inc. | Machine system having submersible pumping system, and method |
| US10240722B2 (en) | 2016-10-24 | 2019-03-26 | Progress Rail Locomotive Inc. | Cryogenic fluid system and method of operating same |
| US10626856B2 (en) | 2017-01-12 | 2020-04-21 | Caterpillar Inc. | Cryogenic fluid pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020094286A1 (en) * | 1995-12-04 | 2002-07-18 | Dan Nguyen | Bearings with hardened rolling filements and polymeric cages for use submerged in very low temperature fluids |
| US20090191074A1 (en) * | 2008-01-29 | 2009-07-30 | Denso Corporation | Electrically powered pump |
| CN203717363U (en) * | 2013-12-17 | 2014-07-16 | 无锡华盛橡胶新材料科技股份有限公司 | Explosion-proof solid-liquid magnetic pump |
| CN104105875A (en) * | 2011-11-29 | 2014-10-15 | 克里奥斯塔股份有限公司 | Cryogenic pump |
-
2015
- 2015-11-25 CN CN201510827117.1A patent/CN105422413B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020094286A1 (en) * | 1995-12-04 | 2002-07-18 | Dan Nguyen | Bearings with hardened rolling filements and polymeric cages for use submerged in very low temperature fluids |
| US20090191074A1 (en) * | 2008-01-29 | 2009-07-30 | Denso Corporation | Electrically powered pump |
| CN104105875A (en) * | 2011-11-29 | 2014-10-15 | 克里奥斯塔股份有限公司 | Cryogenic pump |
| CN203717363U (en) * | 2013-12-17 | 2014-07-16 | 无锡华盛橡胶新材料科技股份有限公司 | Explosion-proof solid-liquid magnetic pump |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10240562B2 (en) | 2016-10-24 | 2019-03-26 | Progress Rail Locomotive Inc. | Machine system having submersible pumping system, and method |
| US10240722B2 (en) | 2016-10-24 | 2019-03-26 | Progress Rail Locomotive Inc. | Cryogenic fluid system and method of operating same |
| US10626856B2 (en) | 2017-01-12 | 2020-04-21 | Caterpillar Inc. | Cryogenic fluid pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105422413B (en) | 2018-11-20 |
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