The application is the applying date for August in 2012 16 days, Application No. 201210291218.8 and entitled
The divisional application of the Chinese invention patent application of " diffractive pigment manufactured by fluidized-bed chemical vapor deposition method ".
Specific embodiment
Multilayer optical piece can provide diffraction optics effect due to the diffraction micro structural formed on the surface of the piece;
And the optical interference caused by layer structure, it is capable of providing gamut effect.The diffraction micro structural can be in dielectric core
It is then packaged by middle formation with one or more layers encapsulated layer.So that need coat all or at least to the greatest extent can be more
Ground and the micro-structure of diffraction core are conformal, to generate based on the film interference for combining stratiform coating and as caused by the micro-structure
The optical effect of the needs of diffraction interference.
When all dielectric optical design is formed rather than formed in the plane on raster-like surface, thus
The micro-structural piece generated shows the color change occurred with visual angle change, this is because film interference and diffraction interference
Caused by simultaneously.Only when all interfaces between high index of refraction and the dielectric material layer of low-refraction have raster-like
Micro-structure, the combination of interference effect just can effectively occur.In the case of encapsulated layer is not conformal, diffraction effect lose or
Person's at least effect is seriously attenuated, and pigment only or largely shows film interference.Therefore, selection is for can be with
The encapsulation technology for replicating the diffraction core sheet of the micro-structure in encapsulated layer is important.In other words, sedimentary should be with the core
The original microstructure of lamination is highly conformable.
When the border between light wave runs into the trnaslucent materials with different refractive index, film interference occurs, so as to
Light wave is caused to be divided into back wave and transmitted wave.When second of material has the refractive index higher than the first material, the reflected beams
It experienced the phase shift of 180 degree.Typical example is soap bubble.Cross section lathery (n=1.33), the fertilizer is shown in Fig. 1
Soap bubble is filled by air and surrounded (n=1) by air.First transmitted wave is transferred to internal bubble/Air Interface, so as to again
It is divided into back wave and transmitted wave.It repeats the process and generates an infinite number of back wave and transmitted wave.For anti-by soap bubble
The different wave length of the white incident light for the charming color of generation observed in the light penetrated, constructive and destructive interference condition are
Different.
When transmission light wave runs into the obstacle similarly sized with its wavelength, diffraction interference or diffraction occurs.If the obstacle
It is periodic, the energy of some wavelength is dispersed to different discrete direction (diffraction progression).This optical device is referred to as
" diffraction grating ".
Diffraction grating is a kind of optical module, the reflecting element that it is separated by the distance of the wavelength by being equivalent to incident light
Or the component of transmissive element is made.When monochromatic light is when incident on grating, it is diffraction in discrete direction.As shown in Figure 2,
In grating, diffraction light sources of each grating groove as one small slit shape.It combines to be formed by the light of each groove diffraction
Before diffracted wave.As shown in Fig. 2, to be not orthogonal to, the angle of grating surface generates zero level in the light of grating surface incidence or minute surface is anti-
It penetrates.Diffraction grating generates first order diffracted beam (negative one grade to positive level-one) in the both sides of the zero order reflection.Similarly, higher
Angle, the diffraction light of the second level and higher level can be generated.As shown in figure 3, diffraction can also occur in transmission.
Compared with schematical three layers full dielectric pigment of the HLH types surrounded by air, film is further discussed and is spread out
The combination of interference effect is penetrated, wherein H represents high refractive index layer and L expression tools with the refractive index more than 1.65 and less than 2.7
There is the low-index layer of the refractive index less than or equal to 1.65 and more than 1.3.Fig. 4 schematically show pigment air/
The minute surface light beam and some diffracted beams that high index of refraction and high index of refraction/low-refraction interface boundary are reflected and/or transmitted.It is real
On border, incident beam is reflected according to the law of reflection or diffraction, and the transmitted light beam can be in layer with minute surface direction
Or passed through with diffraction direction.Only consider the first transmitted light beam, it is then reflected by high index of refraction and low-index layer by height
Rate/low-refraction interface reflection.Second internal reflection from low-refraction/high index of refraction interface as the dotted line arrows,
Without considering their track.Subscript " s " and " d " refer respectively to the light beam of mirror-reflection and diffraction reflection or transmission.R and T refer to
Reflection or transmitted light beam, H and L refer to high index of refraction dielectric layer and low-refraction dielectric layer.For example, this term, RLs tables
Show by the minute surface light beam of the boundary layer reflection of high index of refraction/low-refraction, and THd-expression is saturating by air/high index of refraction interface
The diffracted beam penetrated.
Display only by air/high index of refraction interface (RHs) first specular reflectance beam and be marked as
The specular transmission (H) of THsRLsTHs/reflection (L)/transmission (H) works to mirror-reflection.It note that this light path is equivalent to
The path of pure film interference.
As for the ripple in terms of diffraction, considering diffraction interaction of experience.The reflected beams labeled as RHd are unique one
A light beam from air/high index of refraction interface.It is through this layer and other three ripples for having been subjected to a diffraction
THdRLsTHs, THsRLdTHs and THsRLsTHd.These three ripples interfere with each other and with the wave interference labeled as RHd.It please note
The light path of meaning, the involved light path of definition interference and minute surface light beam is different.
Specular transmission light beam (shown in double-head arrow) from high/low refractive index interfaces, follows air/high index of refraction before
The minute surface and diffraction interference of interface, are respectively labeled as THsTLsAnd THdTLs。
Diffraction transmitted light beam (shown in double-head arrow) from high/low refractive index interfaces, follows air/high index of refraction before
The minute surface and diffraction interference of interface, are respectively labeled as THsTLdAnd THdTLd。
Even if the considerations of some initial to these ripples is complicated.For example, it only shows anti-from antiradar reflectivity/height
First the reflected beams at rate interface are penetrated, follow the minute surface from low-index layer and high refractive index layer and diffraction transmission before.
When light beam is by transmission and with the interface of air and/or at low high refractive index interfaces, second high rolled over into and out this
When penetrating rate material, each in these light beams itself will follow multiple compound interlayers and layer from minute surface and diffraction interference
Internal reflection and transmission.
Fig. 4 is shown if the laminated coating meets the light path occurred during the rasterisation micro-structure of core thin slice very much.
When encapsulated layer and the not conformal situation of the diffraction structure of core, diffraction effect does not occur, and pigment mainly shows film interference.
It has been observed that traditional encapsulation technology, such as sol-gel method or wet chemistry method, the colloidal sol-solidifying
Glue method includes the decomposition of metal alkoxide and subsequent drying and annealing in presence of water;The wet chemistry method is based on from gold
Belong to the precipitation in the aqueous solution of salt, be then dried and roast;The above method cannot all generate fully conformal coating.We
Experiment show that fluidized-bed chemical vapor deposition technology (FBCVD) improves micro-structural dielectric prefabricated film (core)
The conformal performance of encapsulated layer.Result of the test is further discussed with reference to figure 7A-10.
With reference to figure 5A, forming the method for micro-structural pigment flakes includes core offer step 210 and encapsulation step 220,
Step 210 wherein is provided in core, micro-structural dielectric core is provided into fluidized bed, wherein in encapsulation step 220,
Micro-structural dielectric core is packaged with one or more layers encapsulated layer for encapsulating the micro-structural dielectric core;
Using chemical vapour deposition technique, while micro-structural core is in fluid bed.Core offer step 210 can be included in micro-
The step of step 212 of deposit dielectrics coating in the deposition substrate of structuring, disengaging (removing) dielectric coating
214, and the dielectric coating is broken into the step 216 of the multiple cores including the micro-structural dielectric core.
Micro-structural pigment flakes can include dielectric core and one or more encapsulated layers.Piece core can have shape
Into micro-structure wherein, and by depositing one or more dielectric film layer (examples in micro-structural deposition substrate
Such as plastic film) deposition step 212 manufactured, by the film layer from substrate separation 214, and process the separated film
Layer, such as pass through milling and the destruction step 216 for being divided into prefabricated film.In encapsulation step 220, with film layer to prefabricated film
Or core is packaged.It is alternatively possible to additional encapsulation step 222 is carried out, to generate more than one encapsulated layer.Thus produce
Raw pigment flakes are generally about 5-100 microns wide, and generally about 20-100 microns wide.
Core can include single dielectric layer or multiple electricity including having the diffraction structure formed in core surfaces
Dielectric layer.The color and effect of light as needed select suitable rasterisation micro-structure, for having the diffraction of diffraction effect
The production of piece.For example, pigment flakes can include grating frequency scope from every millimeter of about 400 grid stroke (ln/ millimeters) to
4000ln/ millimeters of diffraction grating microstructure, to generate extensive optical effect.
In one embodiment, prefabricated film includes micro-structural mark, such as symbol, is typically diameter about 0.5-20
Micron.In a specific embodiment, symbol is about 700 nanometers of diameter, and in another embodiment, symbol is that diameter is big
About 15 microns.
Such as the micro-structure of symbol or grating is typically embossment or pours into a mould on the deposition substrate, and in the deposition of embossment
Deposition film dielectric layer in substrate.At least the first film layer of the micro-structure on the substrate is deposited on substrate surface
In, it is replicated with positive embossment or negative embossment.Then, the coating of film layer is separated from the deposition substrate, and is formed to use
The micro-structural prefabricated film of core in encapsulation step 220.
Preferably, micro-structural core is formed by one or more dielectric substances, opaque when using to generate
Irrealizable translucent dichroic pigments during metallic core.
Micro-structural dielectric piece can be mixed with the carrier of such as ink vehicle or coating link stuff, to form group
Object is closed, such as ink or coating or its mixture paint in transparent carrier to be formed.The example of carrier includes polyvinyl alcohol,
Polyvinyl acetate, polyvinylpyrrolidone, poly- (ethoxy ethylene), poly- (methoxy-ethylene), poly- (propylene) acid, poly- (propylene
Amide), poly- (ethylene oxide), poly- (cis-butenedioic anhydride), hydroxyethyl cellulose, cellulose acetate, such as gum arabic and pectin is poly- (more
Sugar), such as poly- (acetal) of polyvinyl butyral, such as polyvinyl chloride and polyvinylidene chloride (polyvinylene) are poly-
(vinyl halide), such as poly- (diene) of polybutadiene, such as poly- (alkene) of polyethylene, such as poly-methyl methacrylate
Poly- (acrylate) of ester, such as poly- (methacrylate) of polymethyl methacrylate, such as poly- (hydroxycarbonyl
(oxycarbonyl) poly- (carbonate) of hydroxyhexen (oxyhexamethylene), such as poly- (ester) of poly terephthalic acid,
Poly- (urethane), poly- (siloxanes), polythiaether (sulphides), poly- (sulfone), polyethylene nitrile (vinylnitriles), polyacrylonitrile
(acrylonitriles), poly- (styrene), such as 2,5 dihydroxy-Isosorbide-5-Nitrae-phenylene vinylene (phenyleneethylene)
Polyhenylene (phenylenes), poly- (amide), natural rubber, formaldehyde (formaldahyde) resin and other polymer.
In one embodiment, deposition substrate is subjected to embossment with diffraction grating pattern.Therefore, by by thin dielectric film
Layer deposits to the tablet core that rasterisation surface is formed also has grating pattern in its one or both sides.Alternatively, dielectric
Core can include more than one dielectric layer, before departing from the coating and being separated into individual prefabricated film, pass through
On the deposition substrate deposition film layer and form the dielectric layer.
The micro-structural deposition substrate of micro-structure including such as diffraction grating and/or symbol can be by such as polychlorostyrene second
The plastic material manufacture of alkene, makrolon, polypropylene and polyester-type G.It can be used for forming surface relief figure in deposition substrate
The method of case is that those skilled in the art is well-known.It for example, can be by the nickel that heats its face contact under high pressure
Embossing shim to carry out embossment to the surface of substrate.Other methods include the light to the plastic-substrates for abutting patterned surface
It carves and moulds.
Various routine techniques can be used to deposit the layer of micro-structural tablet core, these technologies are for example using electron beam
Or the physical vaporous deposition of resistance heating evaporation, reactive d.c.magnetron sputtering method, radio frequency (RF) magnetron sputtering method, magnetron sputtering
Method, chemical vapour deposition technique (CVD), plasma enhanced chemical vapor deposition (PECVD) method etc..
Including those there is " height " refractive index (to be defined herein as being greater than about for the suitable material of dielectric tablet core
1.65) material and those there is the material of " low " refractive index (be defined herein as about 1.65 or smaller).
For dielectric core suitable high-index material example include zinc sulphide (ZnS), zinc oxide (ZnO),
Zirconium oxide (ZrO2), titanium dioxide (TiO2), carbon (C), indium oxide (In2O3), indium tin oxide (ITO), tantalum pentoxide
(Ta2O5), cerium oxide (CeO2), yttrium oxide (Y2O3), europium oxide (Eu2O3), such as the ferroso-ferric oxide of (II) and (III) valency
(Fe3O4) and (III) valency di-iron trioxide (Fe2O3) ferriferous oxide, hafnium nitride (HfN), hafnium carbide (HfC), hafnium oxide
(HfO2), lanthana (La2O3), magnesia (MgO), neodymium oxides (Nd2O3), praseodymium oxide (Pr6O11), samarium oxide (Sm2O3), three
Aoxidize two antimony (Sb2O3), carborundum (SiC), silicon nitride (Si3N4), silica ((SiO), selenium arsenic trioxide (Se2O3), oxidation
Tin (SnO2), tungstic acid (WO3) and their compositions etc..
Include silica (SiO for the low-index material of dielectric core2), aluminium oxide (Al2O3), such as be fluorinated
Magnesium (MgF2), aluminum fluoride (AlF3), cerium fluoride (CeF3), lanthanum fluoride (LaF3) metal fluoride, sodium aluminium fluoride (for example,
Na3AlF6Or Na5Al3F14), neodymium fluoride (NdF3), samaric fluoride (SmF3), barium fluoride ((BaF2), calcirm-fluoride (CaF2), fluorination
Lithium (LiF) and their composition or any other low-index material with about 1.65 or more low-refraction.
Fig. 5 B show by encased core diffraction plate obtain have symmetric design by high index of refraction and low-refraction
The manufacture for the micro-structural pigment flakes that material is formed.Preferably, core sheet is manufactured by the dielectric substance of individual layer, can be had
There are high index of refraction or low-refraction.In the specific example shown in Fig. 5 B, with high-index material titanium dioxide to by dioxy
The electric dielectric core for the low-refraction that SiClx is formed is packaged, so as to generate 3 layers (HLH) design.The encapsulation of titanium dioxide
Layer is obtained by chemical vapour deposition technique, and this method uses titanium tetrachloride as precursor, in presence of water, in vapour form
200 DEG C about 1 it is small when carry out following reaction:
Titanium tetrachloride (TiCl4) (gas)+2H2O (gas) → titanium dioxide (TiO2)+4 hydrochloric acid (HCl)
Include the identical dielectric substance that can be used for core for the suitable material of encapsulated layer.By way of example, 5 layers
(HLHLH) design can deposited layer of silicon dioxide by encapsulation, then deposited the titanium dioxide core of layer of titanium dioxide
Heart prefabricated film obtains.In another example, by using continuous titanium dioxide layer, silicon dioxide layer and titanium dioxide layer envelope
The silica diffraction core sheet of low-refraction is filled to obtain 7 layers of design (HLHLHLH).
In the art, it is known that for example alternate high index of refraction and the full dielectric design of low-index layer can be provided and taken
Certainly in layer thickness optical variable effect.
Alternatively, encapsulated layer can include one or more metal absorption layers, can be due to the interference of light so as to be formed
The inter metal dielectric design of the multilayer of gamut effect is provided.By way of example, formed by silica and use such as W, Ti,
The dielectric core of the Metal absorption body encapsulation of Cr, Mo forms and can provide gamut effect due to the metallic dielectric stack
Micro-structural pigment.The optical design of the high index of refraction dielectric core encapsulated using Metal absorption body generates similary tool
There are very gay colours but the pigment of less gamut effect.Can also use Metal absorption body encapsulation alternately low-index layer and
The Multi-layer design of high refractive index layer, such as HLH, LHL, HLHLH, LHLHL.If micro-structure is diffraction grating, pigment can be by
Optical variable effect is provided in diffraction interference.In the case where micro-structure includes mark, pigment can be used for anti-fake purpose, because
Mark provides hidden security feature and color change-apparent security feature.
In diffraction plate, encapsulated layer is as conformal with the micro-structure of core as possible, is regarded with generating required based on diffraction
Feel optical effect, therefore we use fluidized-bed chemical vapor deposition (FBCVD) technology.Chemical vapor deposition (CVD) causes
Single-layer or multi-layer coating is deposited on core granule surface;The material of deposition is formed from gaseous state, liquid or solid precursor.
CVD technology obtains the conformal encapsulating film for the surface micro-structure for replicating core sheet.The efficiency of this process depend on particle and
Contact between film precursor surface.The technical solution for allowing the good contact between particle and gaseous precursors is to use fluid bed skill
Art.
FBCVD methods are based on the chemical reaction between precursor and reactant.In most cases, in the association of reactant
It helps down, precursor is aoxidized, so as to obtain oxide covering on particle.Respective nitridation can be formed by providing the reactant of nitrogen and carbon
Object and carbide coating.It can be used for the mixture such as carbonitride of the reactant of the deposition of compound
(carbonitrides), oxycarbide (oxycarbides), nitrogen oxides (oxinitrides) and carbon nitrogen oxide
(oxicarbonitrides).Precursor and reactant can be gas, the form of liquid or solid material.Preferably, with it is preceding
Body flows opposite direction and provides reactant.Preferably, this method includes the use of the non-reactive fluidizing gas for hybrid particles.Have
Sharp ground, chemical vapour deposition technique can carry out at atmosheric pressure.But depending on core sheet material and to be deposited it is thin
Film can use low pressure or plasma to activate.
A variety of geometries can be used for fluidized-bed reactor;The fluid bed should meet due to grain fluidized and chemical gas
The limitation that phase sedimentation generates.The fluid bed can the reaction gas precursor suitable for grain type to be processed heat or wait
It works under gas ions activation condition.
The optical effect of special effects pigment with film and diffraction interference combination is to be highly dependent upon core diffraction face
Expect the smooth duplication of the diffraction micro structural of prefabricated film, become FBCVD technologies for manufacturing the spy with optical diffraction characteristic
The perfect solution of different effect pigment.
With reference to figure 6, fluidized-bed reactor can be hydrostatic column 100, have to keep particle 180 and in container
Transverse area be uniformly distributed the Porous Base of air-flow or perforation plate 170, it is uniform so as to be obtained in the particle of fluid bed
It suspends.In operation, the gas provided by fluid bed moves, and particle is supported in part so that and the volume of particle expands, and
Diffusion becomes fluid everywhere in a reservoir.In fluid bed, air-flow is turbulent flow, obtains good quality and biography between particle
Heat, these are very important for the uniform encapsulation of the chemical vapor deposition of pigment flakes.
Compared with other such as physical vapour deposition (PVD) (PVD) deposition techniques, FBCVD methods provide a variety of advantages.PVD master
By coating material deposition to the surface of the particle towards flow of vapor, and FBCVD provides the uniform fold of particle.With PVD
It compares, FBCVD provides higher growth rate not only due to its three-dimensional growth characteristics, also on micro-structural core granule
More good uniformity and conformal performance are provided for encapsulated layer.This is very important in the encapsulation of diffractive pigment piece, this
It is because the surface of the piece has a groove of symmetric arrays, the groove is with can be from several microns of low-frequency grating to high-frequency
Grating down to 250 nanometers of spacing, i.e. grating has the frequency range of the lines per millimeter from 400 to 4000.
The reactor used in our experiment is manufactured by quartz.One example of fluidized-bed reactor is as in Fig. 6
Shown.The reactor has dismountable top surface (not shown), has for instrument, gas and liquid introducing and volume
The access interface of outer vibration.Arrow 110 shows such as nitrogen, ammonia, water, carbon dioxide, hydrogen and/or for injection
The passage of the introducing of the reactant gas of the Liquid precursor of above-mentioned gas.Alternatively, argon gas, helium or other inert gases are drawn
Enter, to dilute or transmit reactant.Precursor and/or reactant can be the forms of liquid or solid.Liquid or solid can be
It is heated in container and (is referred to as the bubble for Liquid precursor);Inert gas is introduced in container, to shift the steam of precursor.
In general, solid has low-vapor pressure, and must be heated at a higher temperature using stove.Fluidization conditions can basis
The visual observation of fluid bed adjusts flow velocity by using flow controller and is changed.Top surface can also have for example mechanical
The vibrating device 160 of vibrator and the exhaust apparatus of such as waste gas filter or washer;Arrow 120 is shown from exhaust apparatus
Waste gas flow direction.Instrument 130 can include thermocouple and for extracting particle to control the extraction system of its optical property and its
Its sensor device.
According to the physical property (density, vapour pressure etc.) of coating precursor, in the aluminium oxide that the bottom of reactor passes through sintering
Grid 170, the precursor 150 can be introduced into upstream with fluidizing gas (argon gas, nitrogen, helium etc.).Into before reactor
Allow to control the fluidization conditions of fluid bed to the independent control of fluidizing gas and precursor gases.Precursor can come from bubble,
Such as silicon tetrachloride, titanium tetrachloride, trichlorosilane (SiHCl3) precursor or from different precursor vapor sources, such as six carbonyls
Tungsten (W (CO)6), six carbonyl nickels (Ni (CO)6), for the low vapor pressure solid precursor of W and Ni metals or compound, can distinguish
It is heated at high temperature using enclosed furnace.Fluidizing gas can be provided from for the flow controller of fluidizing gas.Preceding
In the case that body has low-vapor pressure, such as some include (ethyl orthosilicate) TEOS and 2,3,5- Triiodobenzoic acids (TIBA)
Organic metal, it can use metering liquid syringe by being introduced directly at the top of the reactor;In this case, lead to
The bottom for crossing the reactor provides reactant and fluidizing gas.
FBCVD reactors can work under conditions of heat or plasma activation.For hot activation, cylinder can be passed through
Type resistance furnace 150 carries out external heating or uses graphite base (susceptor) and external radio-frequency (RF) line of induction
Circle carries out internal heating.External Rf coils are can also use, for the plasma of the chemical vapor deposition of plasmaassisted
Activation, the advantage with nonequilibrium plasma, the nonequilibrium plasma can lower temperature activate gaseous state object
Kind.In some cases, FB reactors can have the vacuum pump for low-pressure chemical vapor deposition (LPCVD);Vacuum pump can
Using as or exhaust apparatus a part;Filter can be used to avoid damage vacuum pump.
Possible precursor includes metal halide (chloride, iodide and bromide).Hydrogen halide is hydrolytic process
In by-product.
FBCVD based on following can be chemically reacted:
Titanium tetrachloride (TiCl4)+water (H2O) → titanium dioxide (TiO2)+hydrochloric acid (HCl)
- for titanium dioxide deposition and
Silicon tetrachloride (SiCl4)+water (H2O) → silica (SiO2)+hydrochloric acid (HCl)
- for the deposition of silica.
Using oxygen or ozone water can be replaced to form oxide.In order to change oxidizing condition, and avoid in gas phase
Rather than the homogeneous coring on the surface of piece, H can be used2And CO2Mixture replace water or oxygen.In this case, gas
The chemical reaction of body can be:
H2+CO→H2O+CO
Other possible precursors can be used for SiO2Such as trichlorosilane (the SiHCl of encapsulation3) alkyl silane.In addition,
In some cases, original precursor reaction in the gas phase, to form other chemical gas, such as titanium trichloride, when using
When titanium tetrachloride is used for the deposition of titanium dioxide as precursor, titanium trichloride is generally observed in the gas phase.
Such as aluminium chloride AlCl3It can be used for depositing their own oxide with other chlorides of zirconium chloride.
With N2Or NH3The reaction of reactant generates corresponding metal nitride.With providing carbon (such as methane) for reaction
The reaction of reactant gas results in the formation of metal carbides.
Halide can be used for providing oxygen, the reactant gas combination of nitrogen and/or carbon, with deposition oxide, nitrogen
Compound, such as carbide or nitrogen oxides, carbonitride, oxycarbide (oxycarbides) and carbon nitrogen oxide
(oxycarbonitrides) compound combination.
Alkoxide precursor can contain enough oxygen, to form oxide without additional oxygen.It is but usually used
O2, the possibility that carbon is introduced in sedimentary is minimized.Water can be used to replace oxygen as reactant, to reduce reaction
Temperature.
Example for the Organometallic precursor of silica deposition includes ethyl orthosilicate (TEOS) silicic acid ([Si
(OC2H5) 4]), dimethyl diethoxysilane (DMDEOS) dimethyl diethoxysilane ([(CH3) 2SI (OC2H5) 2]),
Hexamethyldisiloxane (HMDSO) hexamethyldisiloxane ([(CH 3) 3SiOSi (CH3) 3]), tetramethyl disiloxane
(TMDSO), 1,1,3,3- tetramethyl disiloxane ([(CH3) 2HSiOSiH (CH3) 2)]), trichloroethyl silane (ETEOS) second
Ethyl triethoxy silicane alkane ([C2H5Si (OC2H5) 3]), trimethylethoxysilane (TMEOS) trimethylethoxysilane
([(CH3)3SiOC2H5)])。
Example for the Organometallic precursor of deposition of titanium oxide includes tetraethyl titanate, isopropanol and the tert-butyl alcohol.
The decomposition of titanium isopropanol titanium tetraisopropylate (Ti iso-propoxide Ti { OCH (CH 3) 2 } 4) can be used for
FBCVD:
Titanium tetraisopropylate Ti { OCH (CH3) 2 } 4 → titanium dioxide (TiO2)+propane (C3H8)+propyl alcohol (C3H7OH)+water is high
In 450 DEG C.
Ethanol tantalum (Ta (OC2H5) 5) can be used together with oxygen, for another high-index material Ta2O5Life
It is long.
Triisobutyl aluminium (TIBA) is the liquid of igniting decomposed in the temperature higher than 200 DEG C on aluminium and isobutene, and
It can be used for the alundum (Al2O3) layer for depositing medium refractive index (refractive index n is about 1.65).
It is worth noting that, the encapsulated layer of deposition can be fully oxidized (such as metal hydroxides), and because
This may need the high annealing in the range of 400 DEG C to 900 DEG C, to reach the stoichiometry of needs.
Such as other precursors of carbonyl are decomposed in relative low temperature, and deposition oxide.By way of example, iron carbonyl can be used
Iron Fe (CO)5Carry out deposition of iron oxide:
2Fe(CO)5+O2→Fe2O3+5CO2
Fig. 7 A-10 show dielectric diffraction plate, by providing micro-structural silica core to fluid bed, and
And micro- knot in the fluid bed is encapsulated by using the chemical vapour deposition technique of the titanium tetrachloride precursor reacted with vapor
The dielectric core of structure encapsulates the titanium dioxide encapsulated layer of the micro-structural dielectric core to form the electricity with formation
Medium diffraction plate.
Fig. 7 A-7D are shown under the various amplification factors from 250 times (Fig. 7 A) to 25000 times (Fig. 7 D) using scanning electricity
The microphoto for the diffractive pigment piece that sub- microscope (SEM) obtains;Microphoto in Fig. 7 A-7C is shown in next width picture
The middle small rectangle further amplified.The piece has symmetrical three layers of TiO2/SiO2/TiO2Structure is sealed by using titanium dioxide
The micro-structural single-layer core formed by silica is packaged by dress layer forms the structure.The core be shaping 25 ×
25 microns of prefabricated film has the diffraction grating of 1400l/mm frequencies.
Fig. 8 A-8C show the cross sectional image of the typical case chip shown in such as Fig. 7 A-7D, for by using
The ultrathin sectioning of transmission electron microscope (TEM) with 25000 times of amplification factor analyzes the image.Titanium dioxide
The thickness of silicon core is about 120nm;The titanium dioxide layer of the encapsulation has about 30 nanometers of thickness, and preferably with core
The micro-structure of piece is very conformal.
Fig. 9 shows the image at the piece edge obtained with scanning transmission electron microscope (STEM);It shows to come with Figure 10
From energy dispersion X-ray spectrometer (EDS) elemental analysis of the spectrum of the marked region 1,2,3 and 4 in STEM images.Table 1 with
The form of atomic percent shows corresponding quantitative elemental analysis.Chlorine is in TiOxLayer is detected.V signal is in most of Ti films
In be found.Ti and O2Presence confirm encapsulation titanium dioxide layer essence.
Table 1
Spectrum |
O |
Si |
Cl |
Ti |
V |
Spectrum 1 |
23.45 |
|
7.69 |
67.13 |
1.72 |
Spectrum 2 |
30.00 |
|
7.34 |
60.97 |
1.69 |
Spectrum 3 |
53.20 |
40.37 |
|
6.44 |
|
Spectrum 4 |
57.08 |
37.50 |
|
5.42 |
|
In the presence of titanium tetrachloride precursor, it is packaged using fluidized-bed chemical vapor deposition method.It is however possible to use
Other precursors.By way of example, such as the organic metal of titanium-isopropanol (TI (OC3H7) 4) can be used for titanium dioxide
The deposition of encapsulated layer.
In another embodiment, full dielectric piece can have more than one encapsulated layer.For example, alternating is passed through
By titanium dioxide, silica and titanium dioxide deposition to the micro-structural core of silica symmetrical set obtain 7 layers
Meter.The silicon halide precursors such as SiCl of SiCl4 can be used4Or use such as tetraethoxysilane TEOS (Si (OC2H5) 4
Or hexamethyldisiloxane HMDSO (Si2O(C2H3)3) deposit SiO2Layer;Titanium dioxide layer and core can be as described above by shapes
Into.
Alternatively possible design can originate in high refractive index layer (such as titanium dioxide), the dioxy deposited with post package
SiClx and titanium dioxide.Silica and titanic oxide material have the advantage compatible with cosmetic industry.However, it is possible to complete
The other materials with high and low-refraction are used in dielectric design.
Fluidized-bed chemical vapor deposition (FBCVD) and chemical precipitation are to coat two kinds of skills being more suitable for of core granule
Art.But such as the wet chemistry method disclosed in the patent of the U.S. the 6th, 241,858 need it is extensive between solid core lamination
Separation so that reaction solution can to the greatest extent can be mostly contacted with the surface of piece.In addition, it needs the piece after dry and drying steps
Disintegrate (disagglomeration).As similar techniques, FBCVD avoids these additional steps.Due to mass transfer and biography
Heat and solid mixing, FBCVD technologies avoid and the relevant agglomeration problems of wet chemistry methods.Advantageously, using FBCVD skills
The layer and the surface micro-structure of diffraction core sheet of art coating are completely conformal, so that piece has higher performance.When conventional method is used
When micro-structural piece is coated, the relatively low conformal performance of encapsulated layer causes the diffraction as caused by the micro-structure of the diffractive pigment
Effect degenerating or even losing completely.Conformal layer by the wet chemistry method of chemical precipitation or any other form all very
It is difficult to obtain, on the contrary, often generating the coat of not conformal planarization.In addition, FBCVD technologies can be used for high metal
The deposition of absorbed layer --- metal layer i.e. containing high percentage ---, and general chemical precipitation cannot generate high percentage and contain
The metal layer of amount.