CN105417493A - Pneumatic micro-displacement corrugated-pipe driver - Google Patents
Pneumatic micro-displacement corrugated-pipe driver Download PDFInfo
- Publication number
- CN105417493A CN105417493A CN201510764500.7A CN201510764500A CN105417493A CN 105417493 A CN105417493 A CN 105417493A CN 201510764500 A CN201510764500 A CN 201510764500A CN 105417493 A CN105417493 A CN 105417493A
- Authority
- CN
- China
- Prior art keywords
- flange
- drive rod
- ladder
- driver
- pneumatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Diaphragms And Bellows (AREA)
Abstract
The invention discloses a pneumatic micro-displacement corrugated-pipe driver, belongs to the technical field of precision machinery, and solves the technical problems of high heat, short travel, large occupied space, environmental pollution and the like of a micro-displacement control driver in the prior art. The pneumatic micro-displacement corrugated-pipe driver mainly comprises a flange, a driver shell, a driving rod, a quick connector, a welded corrugated pipe, a flexible hinge and a bulb, wherein the top end of the driver shell and the flange are fixed hermetically; the bottom end of the driver shell is connected with a gas source through the quick connector; the lower portion of the driving rod is arranged in a cavity formed by the flange, the driver shell and the quick connector; the upper end of the driving rod penetrates through and extends out of a central through hole of the flange; the top end of the driving rod is used for fixing the bulb; the top end edge of the welded corrugated pipe and the flange are fixed hermetically; the bottom end edge of the welded corrugated pipe and the driving rod are fixed hermetically; and the flexible hinge sleeves the upper end of the driving rod and is fixed on the flange. The pneumatic micro-displacement corrugated-pipe driver, has the advantages of high-precision displacement output, heat-free property, high response speed, long travel, small size and the like and is particularly applicable to high-precision nanometer drive and high-precision positioning systems.
Description
Technical field
The invention belongs to precision machinery technology field, being specifically related to a kind of pneumatic micrometric displacement bellows-driver, for carrying out nano-grade displacement control.
Background technology
Along with the development of modern industrial technology, increasing industry is had higher requirement to Bit andits control, as proposed nanoscale control overflow to micrometric displacement in micro-nano process equipment, nanoscale checkout equipment and other optical precision fields.
Micrometric displacement control and drive system of the prior art is mainly divided into two classes, and a class is the inverse piezoelectric effect work based on crystal, such as piezoelectric ceramic actuator.This kind of driver has that precision is high, frequency is high, respond fast advantage, but is difficult to the shortcoming overcoming high heating and low stroke, and use cost is higher simultaneously.Another kind of such as, based on hydraulic-driven technical work, hydraulic unit driver.This kind of driver has the advantage of high accuracy, Long Distances, but there is ultra-clean requirement at a lot of precision optical machinery to environment, hydraulic-driven can be brought a part to pollute and be that pollution is irreversible, volume simultaneously shared by hydraulic-driven is also larger, and most of precision mechanism small volume, be spatially difficult to realize.Also having some precision optical machineries to adopt has cylinder to carry out fine motion control, but due to the restriction of this body structure of cylinder, so be mainly used in point-to-point control, the micrometric displacement that cannot complete continuously in certain stroke range controls.
Given this, a kind of high accuracy, fast response, Long Distances, volume is little, spatter property is good micro-displacement driver is needed badly.
Summary of the invention
The object of the invention is to solve micrometric displacement control and drive system high heating, low stroke in prior art, take up room greatly, the technical problem such as contaminated environment, a kind of pneumatic micrometric displacement bellows-driver is provided.
It is as follows that the present invention solves the problems of the technologies described above adopted technical scheme:
Pneumatic micrometric displacement bellows-driver of the present invention, mainly comprises: flange, drive enclosure, drive rod, snap joint, welding bellows, flexible hinge and bulb;
Described drive enclosure top end opening, bottom is provided with installing hole;
Described flange is provided with central through hole and multiple passage, and flange seal is fixed on the top end face of drive enclosure;
Described snap joint sealing is fixed on the installing hole of drive enclosure;
The upper end of described drive rod is provided with the 3rd ladder, lower end is provided with the first ladder, lower surface has groove, in the cavity that drive rod is placed in drive enclosure, flange and snap joint are formed, the central through hole of flange is run through in the upper end of drive rod, and lubricate with flange seal and be connected, groove is positioned at the top of snap joint;
Described welding bellows is sleeved on the middle part of drive rod, and first of bottom edge and drive rod is stepped sealedly connected, and tip edge is connected with flange seal, and the cavity that welding bellows, drive rod and flange are formed is communicated with air vent;
Described flexible hinge is made up of inner ring, outer shroud and multiple gussets of connecting inner ring and outer shroud, described outer shroud is fixed on flange, described inner ring sleeve is contained in the upper end of drive rod, and the inward flange of inner ring bottom surface contacts with the 3rd ladder of drive rod, and flexible hinge only has axial freedom;
Described bulb is fixed on the top of drive rod.
Further, the edge of described flange protrudes drive enclosure, and edge is provided with multiple mesopore.
Further, the stepped structure of described flange, is above stepped sealedly fixed on the top end face of drive enclosure, and the size of downstairs coordinates with drive enclosure top end opening and the inwall close contact of side and drive enclosure.
Further, described upper ladder and downstairs are cylindrical, and upper ladder and downstairs have identical central shaft, and the diameter of upper ladder is greater than downstairs.
Further, described drive enclosure is cylindrical shape.
Further, the middle part of described drive rod is provided with the second ladder, and the second ladder is in the cavity of welding bellows, drive rod and flange formation, and the Breadth Maximum of the second ladder is greater than the diameter of the central through hole of flange.
Further, described groove is yi word pattern, and the width of groove is less than the diameter of snap joint.
Further, the inner ring of described flexible hinge and outer shroud are coaxial, and the thickness of inner ring is less than the thickness of outer shroud.
Further, described gusset is fan-shaped, and quantity is four, and is circumferentially uniformly distributed.
The invention has the beneficial effects as follows:
Pneumatic micrometric displacement bellows-driver of the present invention adopts the welding bellows with good sealing, retractility and fatigue resistance as main pressure restraining element, adopt the flexible hinge of single-degree-of-freedom as guiding mechanism, cooperatively interacting again in conjunction with other structure, changed the power output of drive rod by the change of seal chamber pressure, and then the micrometric displacement completing bulb controls.This driver has high-precision displacement and exports, without heating, the advantages such as high response speed, Long Distances, small size, be easy to realize and processing, with low cost, nano-grade displacement Bit andits control can be realized, be applicable in high-accuracy plant equipment, high-precision optical equipment, high precision test equipment, be specially adapted to high-accuracy nanometer and drive and high-accuracy navigation system.
Accompanying drawing explanation
Fig. 1 is the sectional view of pneumatic micrometric displacement bellows-driver of the present invention;
Fig. 2 is the top view of pneumatic micrometric displacement bellows-driver of the present invention;
Fig. 3 is the sectional view of flange of the present invention;
Fig. 4 is the top view of flexible hinge of the present invention;
Fig. 5 is the revolved sectional view of flexible hinge of the present invention;
Fig. 6 is the axonometric drawing of flexible hinge of the present invention;
Fig. 7 is the axonometric drawing of pneumatic micrometric displacement bellows-driver of the present invention.
In figure, 1, flange, 2, drive enclosure, 3, drive rod, 4, snap joint, 5, welding bellows, 6, flexible hinge, 7, trip bolt, 8, bulb, 9, mesopore, 10, screwed hole, 11, passage, 12, central through hole.
Detailed description of the invention
The present invention is further illustrated below in conjunction with accompanying drawing 1-7.
As depicted in figs. 1 and 2, pneumatic micrometric displacement bellows-driver of the present invention forms primarily of flange 1, drive enclosure 2, drive rod 3, snap joint 4, welding bellows 5, flexible hinge 6 and bulb 8.Wherein:
As shown in Figure 3, the stepped structure of flange 1, is columniform upper ladder by structure and downstairs forms, and upper ladder and downstairs have identical central shaft, and the diameter of upper ladder is greater than downstairs, can integrated molding both general.The edge of upper ladder has multiple mesopore 9, is generally six, and circumferentially uniform, for the fixing of driver and the connection with miscellaneous part.The inner side of mesopore 9 is provided with multiple screwed hole 10, is generally four, and circumferentially uniform, for installing flexible hinge 6.The center of flange 1 is provided with central through hole 12, and the center of flange 1 is passed through in the upper end for drive rod 3.The outside of central through hole 12 is provided with multiple passage 11, is generally four, and circumferentially uniform, and passage 11 runs through ladder and downstairs, for the inside of driver and ambient outside air set up circulation passage.
Drive enclosure 2 is cylinder type, and top end opening, bottom is provided with installing hole.The dimensional fits of the top end opening of drive enclosure 2 and the downstairs of flange 1, the side of downstairs and the inwall close contact of drive enclosure 2, together with the top end face of drive enclosure 2 is welded and fixed with the lower surface of upper ladder, and the edge of upper ladder protrudes drive enclosure 2.Gas thread structure is provided with, for connecting snap joint 4 in the installing hole of bottom.Itself do not deform under making high-pressure work, drive enclosure 2 need possess stronger can bearing capacity.
Snap joint 4 is well known structure, for connecting source of the gas, sets up air ventilation passage, and plays the effect of the cavity that sealing flange 1, drive enclosure 2 and snap joint 4 are formed.
Drive rod 3 presents three hierarchic structures, and namely lower end is provided with the first ladder, and middle part is provided with the second ladder, and upper end is provided with the 3rd ladder, and being of three ladders is cylindrical and coaxial, and the diameter of the first ladder, the second ladder, the 3rd ladder reduces successively.First ladder and the second ladder are positioned at the cavity (hereinafter referred to as annular seal space) that flange 1, drive enclosure 2 and snap joint 4 are formed, the bottom surface of the first ladder is provided with yi word pattern groove, groove is positioned at the top of snap joint 4, directly over being generally, this groove enables source gas enter fast in seal chamber, and be convenient to the circulation of long-time gas, prevent initial drive force excessive.The diameter of the second ladder be greater than central through hole 12 diameter; and distance flange 1 has certain distance; second ladder mainly plays the effect of position limitation protection; more atmospheric input may be had when the air pressure in annular seal space is out of control; like this after having ladder position limiting structure; namely the mobile maximum displacement of drive rod 3 is limited, and can prevent from destroying driver.3rd ladder, after the central through hole guiding of flange 1, stretching out flange 1, moving for promoting flexible hinge 6.The top outer wall of drive rod 3 is processed with external screw thread, for connecting ball head 8.
Welding bellows 5 is welded successively by multiple single ripple diaphragm, and the inward flange of two single ripple diaphragms of arbitrary neighborhood is connected with outward flange.The bottom edge seal welding of welding bellows 5 is on the upper surface of the first ladder of drive rod 4; The tip edge seal welding of welding bellows 5 is on the lower surface of the downstairs of flange 1, and welding position is in the outside of passage 11.Like this, drive rod 3 and welding bellows 5 define one by the cavity of passage 11 with external environment connect.Welding bellows 5 plays the effect of Packing spring and power output, and its major effect the linearity, the stroke of driver.Welding bellows can have difform single wave component, as V-type, U-shaped or S type, specifically determines different bellows fashion according to user demand, and the account form equivalence of its power output is as follows:
F＝A*P
A＝π(d
1+d
2)
2/16
F is power output size; A is effective area; P is output pressure size, d
1for the exradius of welding bellows 5, d
2for the inner circle radius of welding bellows 5.The specification of welding bellows 5 decides the stroke of driver, volume and resolution ratio to a great extent.
As shown in Fig. 4, Fig. 5, Fig. 6, flexible hinge 6 is threaded fixing with flange 1, and flexible hinge 6 is made up of inner ring, outer shroud and gusset, and inner ring and outer shroud are coaxial, and the thickness of inner ring is generally less than the thickness of outer shroud.Stretch out flexible hinge 6 after the through hole of inner ring is run through in the upper end of drive rod 3, the inward flange of the lower surface of inner ring contacts with the 3rd ladder of drive rod 3, and namely inner ring is stuck on the 3rd ladder, moves under the promotion of the 3rd ladder.Outer shroud is provided with screwed hole, and flexible hinge 6 is fixedly connected with by trip bolt 7 with flange 1.The shape of gusset is not particularly limited, and general employing is fan-shaped, and number is generally four, and is circumferentially uniformly distributed.It should be noted that, flexible hinge 6 only has axial freedom, and in another both direction, rigidity is comparatively large, has both limited the direction of displacement of drive rod 3, playing stabilization again, avoiding the generation of unstable phenomenon when sealing cavity pressure change.The rigidity of this flexible hinge 6 is not unique, can carry out Quantitative design according to user demand.
Bulb 8 is fixed on the top of drive rod 3, and bulb 8 is final output member, possesses higher rigidity, in driving process, directly contact driven member.
In the present invention, flange 1 and welding bellows 5 adopt welding manner to fix, both ensured that the stability connected also ensure that the sealing of driver simultaneously, flange 1 is made to reach 1e-12mbar.L/s with the leak rate welding ripple 5 junction, so to a certain extent for the linearity of driver reduces nonlinear introducing.
The assembling of the present invention's pneumatic micrometric displacement bellows-driver: wave number and the effective area of first determining welding bellows 5 according to different user demands (such as stroke, maximum power output etc.), by high-precision laser welding manner, single ripple diaphragm is coupled together the welding bellows 5 of a composition effective travel, then welding bellows 5 welds together composition transmission mechanism with flange 1 and drive rod 3 respectively, again flange 1 is connected by laser weld with drive enclosure 2, at the afterbody processing tube screw thread of driver for installing snap joint 4, be used for connecting source of the gas.Then flexible hinge 6 is installed on flange 1, the direction of displacement of Constraints driven bar 3 on the one hand, on the other hand by the displacement size of the integral rigidity restriction driver of flexible hinge 6, finally bulb 8 and drive rod 3 are threaded connection fixing, complete the assembling of this driver.
The course of work of the pneumatic micrometric displacement bellows-driver of the present invention: in drive operation process, gas enters annular seal space from snap joint 4, along with annular seal space internal pressure increases, the pressure acted on drive rod 3 increases thereupon, and then promotion drive rod 3 advances jointly with flexible hinge 6, flexible hinge 6 is with rigidity restriction, and then the micrometric displacement completing drive rod bulb controls.
Claims (9)
1. pneumatic micrometric displacement bellows-driver, it is characterized in that, mainly comprise: flange (1), drive enclosure (2), drive rod (3), snap joint (4), welding bellows (5), flexible hinge (6) and bulb (8);
Described drive enclosure (2) top end opening, bottom is provided with installing hole;
Described flange (1) is provided with central through hole and multiple passage, and flange (1) sealing is fixed on the top end face of drive enclosure (2);
Described snap joint (4) sealing is fixed on the installing hole of drive enclosure (2);
The upper end of described drive rod (3) is provided with the 3rd ladder, lower end is provided with the first ladder, lower surface has groove, drive rod (3) is placed in the cavity that drive enclosure (2), flange (1) and snap joint (4) formed, the central through hole of flange (1) is run through in the upper end of drive rod (3), and be connected with flange (1) seal lubrication, groove is positioned at the top of snap joint (4);
Described welding bellows (5) is sleeved on the middle part of drive rod (3), first of bottom edge and drive rod (3) is stepped sealedly connected, tip edge and flange (1) are tightly connected, and the cavity that welding bellows (5), drive rod (3) are formed with flange (1) is communicated with air vent;
Described flexible hinge (6) is made up of inner ring, outer shroud and multiple gussets of connecting inner ring and outer shroud, described outer shroud is fixed on flange (1), described inner ring sleeve is contained in the upper end of drive rod (3), the inward flange of inner ring bottom surface contacts with the 3rd ladder of drive rod (3), and flexible hinge (6) only has axial freedom;
Described bulb (8) is fixed on the top of drive rod (3).
2. pneumatic micrometric displacement bellows-driver according to claim 1, is characterized in that, the edge of described flange (1) protrudes drive enclosure (2), and edge is provided with multiple mesopore.
3. pneumatic micrometric displacement bellows-driver according to claim 1, it is characterized in that, described flange (1) stepped structure, on the upper stepped sealed top end face being fixed on drive enclosure (2), the size of downstairs coordinates with drive enclosure (2) top end opening and the inwall close contact of side and drive enclosure (2).
4. pneumatic micrometric displacement bellows-driver according to claim 3, is characterized in that, described upper ladder and downstairs are cylindrical, and upper ladder and downstairs have identical central shaft, and the diameter of upper ladder is greater than downstairs.
5. pneumatic micrometric displacement bellows-driver according to claim 1, is characterized in that, described drive enclosure (2) is cylindrical shape.
6. pneumatic micrometric displacement bellows-driver according to claim 1, it is characterized in that, the middle part of described drive rod (3) is provided with the second ladder, and the second ladder is in the cavity that welding bellows (5), drive rod (3) and flange (1) formed, the Breadth Maximum of the second ladder is greater than the diameter of the central through hole of flange (1).
7. pneumatic micrometric displacement bellows-driver according to claim 1, is characterized in that, described groove is yi word pattern, and the width of groove is less than the diameter of snap joint (4).
8. pneumatic micrometric displacement bellows-driver according to claim 1, is characterized in that, the inner ring of described flexible hinge (6) and outer shroud are coaxial, and the thickness of inner ring is less than the thickness of outer shroud.
9. pneumatic micrometric displacement bellows-driver according to claim 1, is characterized in that, described gusset is fan-shaped, and quantity is four, and is circumferentially uniformly distributed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510764500.7A CN105417493B (en) | 2015-11-11 | 2015-11-11 | Pneumatic micro-displacement bellows-driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510764500.7A CN105417493B (en) | 2015-11-11 | 2015-11-11 | Pneumatic micro-displacement bellows-driver |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105417493A true CN105417493A (en) | 2016-03-23 |
| CN105417493B CN105417493B (en) | 2017-07-25 |
Family
ID=55496115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510764500.7A Expired - Fee Related CN105417493B (en) | 2015-11-11 | 2015-11-11 | Pneumatic micro-displacement bellows-driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105417493B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109625651A (en) * | 2018-12-03 | 2019-04-16 | 中国石油集团川庆钻探工程有限公司工程技术研究院 | A kind of tank body discharge port blockage-clearing device and application method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101469780A (en) * | 2007-12-27 | 2009-07-01 | 上海海星阀门总厂 | Pneumatic flange type high temperature resistant bellows gate valve |
| CN203560325U (en) * | 2013-11-04 | 2014-04-23 | 中国科学院苏州生物医学工程技术研究所 | Ultra-precise aerostatic connecting section device |
| CN104201931A (en) * | 2014-09-28 | 2014-12-10 | 郑州轻工业学院 | Micro-displacement driver based on piezoelectric stack |
-
2015
- 2015-11-11 CN CN201510764500.7A patent/CN105417493B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101469780A (en) * | 2007-12-27 | 2009-07-01 | 上海海星阀门总厂 | Pneumatic flange type high temperature resistant bellows gate valve |
| CN203560325U (en) * | 2013-11-04 | 2014-04-23 | 中国科学院苏州生物医学工程技术研究所 | Ultra-precise aerostatic connecting section device |
| CN104201931A (en) * | 2014-09-28 | 2014-12-10 | 郑州轻工业学院 | Micro-displacement driver based on piezoelectric stack |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109625651A (en) * | 2018-12-03 | 2019-04-16 | 中国石油集团川庆钻探工程有限公司工程技术研究院 | A kind of tank body discharge port blockage-clearing device and application method |
| CN109625651B (en) * | 2018-12-03 | 2023-09-19 | 中国石油天然气集团有限公司 | Tank discharge opening blockage removing device and use method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105417493B (en) | 2017-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2021022866A1 (en) | Long-stroke high-precision micro-nano motion servo feed system and control method | |
| CN103511772B (en) | A kind of scalable rotatable metallic pipe coupling | |
| CN104863924A (en) | Three-cavity power hydraulic cylinder | |
| CN105417493A (en) | Pneumatic micro-displacement corrugated-pipe driver | |
| CN105202288A (en) | Pipe connector | |
| CN106965133A (en) | A kind of Three Degree Of Freedom locating platform of stiffness variable | |
| CN104162874A (en) | Vacuum air suction head and vacuum adsorption device | |
| CN110671460A (en) | Shear type viscous damper | |
| CN206694690U (en) | A kind of single-wall corrugated pipe connector | |
| CN103362888B (en) | Gas-liquid medium microspur actuator | |
| CN204493846U (en) | A kind of compact type valve driving machine structure | |
| CN205173113U (en) | Oil pressure corner jar | |
| CN109114063A (en) | A kind of piston and piston rod make the cylinder apparatus of arc trajectory movement | |
| CN203413221U (en) | Electronic expansion valve | |
| CN104676079A (en) | Compact valve driving mechanism | |
| CN103244502B (en) | Double-acting piston oil hydraulic cylinder | |
| CN205715033U (en) | A kind of digital control valve controlling oil cylinder speed ring and position ring | |
| CN204942533U (en) | A kind of oil hydraulic cylinder cylinder head sealing configuration | |
| CN109578624B (en) | Fluid automatic control reversing device | |
| CN218717854U (en) | High-precision oil cylinder of external diameter grinding machine instrument mechanism | |
| CN208812034U (en) | A kind of nanopositioning stage | |
| CN105715809A (en) | External pressure corrugated pipe control valve | |
| CN205298131U (en) | Both ends damping variable leads accuse type 2D electric -hydraulic proportional reversing valve | |
| CN101235790B (en) | Corrugated pipe elastic element based precision micro- displacement hydraulic scaling device | |
| CN204900388U (en) | Pneumatic cylinder cylinder end |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170725 Termination date: 20181111 |