CN105411572A - Electrocardiograph monitoring device and system and preparation method of MEMS spherical cap dry electrode array - Google Patents
Electrocardiograph monitoring device and system and preparation method of MEMS spherical cap dry electrode array Download PDFInfo
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- CN105411572A CN105411572A CN201610008012.8A CN201610008012A CN105411572A CN 105411572 A CN105411572 A CN 105411572A CN 201610008012 A CN201610008012 A CN 201610008012A CN 105411572 A CN105411572 A CN 105411572A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/316—Modalities, i.e. specific diagnostic methods
- A61B5/318—Heart-related electrical modalities, e.g. electrocardiography [ECG]
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0004—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by the type of physiological signal transmitted
- A61B5/0006—ECG or EEG signals
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0015—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by features of the telemetry system
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/72—Signal processing specially adapted for physiological signals or for diagnostic purposes
- A61B5/7203—Signal processing specially adapted for physiological signals or for diagnostic purposes for noise prevention, reduction or removal
Abstract
The invention discloses an electrocardiograph monitoring device and system and a preparation method of an MEMS spherical cap dry electrode array. The electrocardiograph monitoring device comprises the MEMS spherical cap dry electrode array and an electrocardiograph signal collection and control module. The MEMS spherical cap dry electrode array is used for extracting a body surface electrocardiograph signal and transmitting the body surface electrocardiograph signal to the electrocardiograph signal collection and control module through a lead wire. The electrocardiograph signal collection and control module is used for performing preprocessing including conditioning filtering on the obtained body surface electrocardiograph signal, converting an analog electrocardiograph signal into a digital electrocardiograph signal and filtering away power frequency interference. By the adoption of an MEMS technology, the flexible spherical cap dry electrode array is processed to serve as a collecting electrode of the electrocardiograph signal without conducting resin and skin stimulation. The electrocardiograph monitoring device is suitable for long-term electrocardiograph monitoring and can collect multiple pieces of physiological information; meanwhile, the utilization rate of a mobile terminal is increased, a feedback result of a doctor is obtained in time, and the distance between doctors and patients is closer.
Description
Technical field
The present invention relates to the dry electrod-array preparation method of a kind of electrocardio-monitor, system and MEMS spherical crown, particularly a kind of electrocardio-monitor of the dry electrod-array of MEMS spherical crown based on flexible PDMS substrate, system and the dry electrod-array preparation method of MEMS spherical crown.
Background technology
The fast development of economy and medical and health care system impels people further to pay attention to the health status of self, and the health idea of people also changes into from simple " passive treatment " " utilizing the initiatively prevention of multiple health promotion means " gradually.China marches toward aging society just gradually.In all old peoples are easily ill, cardiovascular disease is the disease that sickness rate is the highest, mortality rate is the highest, disability rate is the highest, complication is maximum.Cardiovascular disease is a kind of chronic disease, and evolution slowly, disguise is strong, certain danger coefficient is high.Find the sign of heart change as early as possible, heart disease is diagnosed in time, understand the development of the heart state of an illness in time, for minimizing cardiovascular death rate, safeguard that the life security of patient is significant.
At present, electrocardiogram (Electrocardiogram, ECG) is the main foundation of clinical diagnosis and treatment heart disease, assisted diagnosis arrhythmia, the position of myocardial damage and heart whether can expand the multiple cardiac function pathological changes such as plump.By electrocardiogram, can also judge that medicine or electrolyte are on the impact of heart.Medical research shows, the heart patient of sudden death, and its early stage electrocardiogram there will be exception.Obtain Electrocardiographic conventional method Shi Qu hospital to detect, but the limited amount of hospital's electrocardiograph, cannot meet and each potential cardiac is effectively guarded simultaneously; The cost of monitoring of being admitted to hospital is high, and average family is difficult to bear for a long time expensive medical expense.In addition, medical electrocardiograph volume is comparatively large, not easily carries with, and only can realize monitoring in fixing ward, and can only record the electrocardiogram in the short time.Usually, the limited time of an Electrocardioscopy, can not react the active situation of heart comprehensively, is difficult to effectively capture anomalous ecg.To state of an illness Real-Time Monitoring, patient has to stay in hospital for a long time or frequently runs in hospital and inter-household, and pole affects daily life.Therefore, change into gradually from traditional idea of being hospitalized for treatment and prevent at home, set up and improve the intelligent cardiac monitor system extending to community and family, monitor at any time for patient's ecg information and provide effective solution with sudden cardiac Disease Warning Mechanism.Intelligent cardiac monitor system can reduce the sufferer flow of hospital, reduces and guards cost for a long time, also can improve the quality of life of patient to a certain extent simultaneously, reduces life and property loss.
Along with popularizing of smart mobile phone, utilize mobile phone to carry out intelligent cardiac and guard the focus becoming research gradually.Advantage based on the electrocardiogram monitor system of smart mobile phone is: first, does not need extra display screen, and mobile phone can show ecg wave form, reduces the cost of cardiac monitoring; Secondly, the processing system of smart mobile phone is powerful, and ECG signal processing and simple feature identification can be carried out in mobile phone, reduce further volume and the cost of system; Again, smart mobile phone has several data transmission means, as bluetooth, wifi and 3G etc., facilitates patient to upload electrocardiogram (ECG) data whenever and wherever possible to diagnosis.
Application number is that the Chinese patent of CN201310647724.0 discloses a kind of portable intelligent electrocardiogram monitor system, it comprises data acquisition box, for gathering the finger clamping structure of electrocardiogram (ECG) data, wrist clamping structure and electrode paste, wherein, described finger clamping structure, described wrist clamping structure, described electrode paste all with described data acquisition box connection, described finger clamping structure, described wrist clamping structure and described electrode paste adopt five to lead mode, for will gather ECG Data Transmission Based to described data acquisition box
Application number is that the Chinese patent of CN201410012151.9 discloses a kind of wearable fetal ECG Monitoring System based on smart mobile phone, comprise signal picker, signal processor, Fetal ECG wireless data transmission device, with the smart mobile phone of user side Fetal ECG monitoring module, with the smart mobile phone of doctor terminal Fetal ECG monitoring module, power management module, the signal output part of described signal picker is connected with the input of described signal processor, the outfan of described signal processor is connected with described Fetal ECG wireless data transmission device, described power management module respectively with described signal picker, signal processor, Fetal ECG wireless data transmission device.
But above-mentioned disclosed electrocardiogram monitor system still has the following disadvantages:
(1) what electrocardiogram acquisition was used is still Ag/Agcl wet electrode, chafe, and the electrocardiosignal quality of measurement increases in time and is deteriorated gradually, and wet electrode is not easy of integration.
(2) electrocardiosignal gathered passes to doctor merely through simple filtering and noise reduction process, ecg characteristics analysis can not be carried out, be not easy to the heart state that patient understands self in time, too increase the workload of doctor on the other hand, be unfavorable for the timely treatment of critical patient.
(3) smart mobile phone has only used Bluetooth transmission function, is used for transmitting electrocardiogram (ECG) data, the wasting of resources.
Summary of the invention
For overcoming the deficiency that above-mentioned prior art exists, one of the present invention object is to provide a kind of electrocardio-monitor, system and MEMS spherical crown dry electrod-array preparation method, it adopts the dry electrod-array of MEMS technology processing flexibility spherical crown as the acquisition electrode of electrocardiosignal, without the need to conducting resinl, not chafe, is applicable to long-term cardioelectric monitor.
Another object of the present invention is to provide a kind of electrocardio-monitor, system and MEMS spherical crown dry electrod-array preparation method, and its mobile phone not only as electrocardiosignal display screen, also compresses electrocardiosignal in mobile phone, improves the utilization rate of mobile phone.
An object again of the present invention is to provide a kind of electrocardio-monitor, system and MEMS spherical crown dry electrod-array preparation method, its electrocardiosignal gathered can upload onto the server in time, doctor is given to process, and the feedback information very first time of doctor is by mobile phones enquiring, avoiding patient hurries back and forth between family and hospital, facilitates patient to understand heart whenever and wherever possible and carries out heart health.
For reaching above-mentioned and other object, the present invention proposes a kind of electrocardio-monitor, comprising:
MEMS spherical crown electrocardiograph dry electrode array, for extracting body surface ecg and being sent to ecg signal acquiring and control module by conducting wire;
Ecg signal acquiring and control module, after carrying out the pretreatment such as conditioning filtering, be converted to digital electrocardiosignal to the body surface ecg obtained by analog electrocardiogram signal, and its Hz noise of filtering.
Further, this ecg signal acquiring and control module comprise further:
ECG signal processing module, for obtaining the body surface ecg that each electrode of this MEMS spherical crown electrocardiograph dry electrode array extracts, and carries out the pretreatment such as conditioning filtering;
Analog-to-digital conversion module, for being converted to digital electrocardiosignal by analog electrocardiogram signal after pretreatment;
Controller, for the Hz noise of the digital electrocardiosignal after filtering analog digital conversion, and controls this digital electrocardiosignal to be sent to destination device.
Further, this ECG signal processing module 110 comprises single order passive low-pass filter circuit, single order passive high three-way filter and diode clamping circuit.
For achieving the above object, the present invention also provides a kind of electrocardiogram monitor system, comprising:
MEMS spherical crown electrocardiograph dry electrode array, extracts body surface ecg and is sent to ecg signal acquiring and control module by conducting wire;
Ecg signal acquiring and control module, after carrying out the pretreatment such as conditioning filtering, be converted to digital electrocardiosignal to the body surface ecg obtained by analog electrocardiogram signal, and filtering Hz noise;
Wireless transport module, is sent to mobile terminal by the electrocardiogram data wireless after filtering interfering;
Mobile terminal, after receiving electrocardiogram (ECG) data, denoising is carried out to electrocardiosignal, and carry out ecg characteristics identification, ecg wave form is shown, and electrocardiogram (ECG) data is uploaded to given server by wireless network, simultaneously, this mobile terminal also, when remote electrocardiogram monitor end transmits feedback result to given server, obtains this feedback result from given server;
Remote electrocardiogram monitor end, connects this given server by wired or wireless network, is sent to given server to obtain electrocardiogram (ECG) data and to receive feedback result.
Further, this wireless transport module is bluetooth communication.
For achieving the above object, the present invention also provides a kind of preparation method of MEMS spherical crown electrocardiograph dry electrode array of electrocardio-monitor, comprises the steps:
Step one, cleans substrate and dries;
Step 2, on the substrate cleaned up, spin coating positive photoresist, obtains cylindrical-array after exposure imaging;
Step 3, puts into baking oven by substrate and dries the some time, cylindrical-array is converted into spherical crown array, then through twice PDMS revolving die, is copied to by photoresist spherical crown array on PDMS substrate and forms PDMS spherical crown array;
Step 4, it is Seed Layer that PDMS substrate sputters layer of metal, then electroplates other metals certain thickness to strengthen metal film strength.
Further, in step one, substrate is successively put into three kinds of solution ultrasonic cleaning some times of acetone, dehydrated alcohol and isopropyl alcohol, after cleaning terminates, photoresist spinner rotates and dries.
Further, in step 2, adopting photoresist spinner certain thickness positive photoresist of spin coating on the substrate cleaned up, in order to prevent the positive glue of spin coating in uneven thickness, taking the method for multiple spin coating.
Further, in step 3, in twice PDMS revolving die process, in order to prevent PDMS mould and the adhesion of PDMS substrate, after revolving die terminates for the first time, need to carry out silanization treatment to PDMS mould, namely with the recessed ball array mould that trichloromethyl silane process obtains.
Further, in step 4, finally on Ni, sputter one deck inert metal.
Compared with prior art, a kind of electrocardio-monitor of the present invention, system and MEMS spherical crown dry electrod-array preparation method adopt the dry electrod-array of MEMS technology processing flexibility spherical crown as the acquisition electrode of electrocardiosignal, without the need to conducting resinl, not chafe, is applicable to long-term cardioelectric monitor, and can realize many physiology information detecting, simultaneously, invention increases the utilization rate of mobile terminal, obtain the feedback result of doctor in time, the distance furthered between doctors and patients.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of electrocardio-monitor;
Fig. 2 is the detail structure chart of present pre-ferred embodiments center telecommunications data acquisition and controlling module 11;
Fig. 3 is the system architecture diagram of a kind of electrocardiogram monitor system of the present invention;
Fig. 4 is the structure chart of the preferred embodiment of a kind of electrocardiogram monitor system of the present invention;
Fig. 5 is the structural representation of mobile terminal in the specific embodiment of the invention, server and remote electrocardiogram monitor end;
Fig. 6 is the flow chart of steps of the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor of the present invention.
Detailed description of the invention
Below by way of specific instantiation and accompanying drawings embodiments of the present invention, those skilled in the art can understand other advantage of the present invention and effect easily by content disclosed in the present specification.The present invention is also implemented by other different instantiation or is applied, and the every details in this description also can based on different viewpoints and application, carries out various modification and change not deviating under spirit of the present invention.
Fig. 1 is a kind of structural representation of electrocardio-monitor.As shown in Figure 1, a kind of electrocardio-monitor of the present invention, comprising: MEMS spherical crown electrocardiograph dry electrode array 10 and ecg signal acquiring and control module 11.
Wherein, MEMS spherical crown electrocardiograph dry electrode array 10 is for extracting body surface ecg and being sent to ecg signal acquiring and control module 11 by conducting wire; After ecg signal acquiring and control module 11 carry out the pretreatment such as conditioning filtering to the body surface ecg obtained, analog electrocardiogram signal is converted to digital electrocardiosignal, and its Hz noise of filtering.
Fig. 2 is the detail structure chart of present pre-ferred embodiments center telecommunications data acquisition and controlling module 11.As shown in Figure 2, ecg signal acquiring and control module 11 comprise: ECG signal processing module 110, analog-to-digital conversion module 111 and controller 112.
Wherein, the body surface ecg that ECG signal processing module 110 is extracted for obtaining each electrode of MEMS spherical crown electrocardiograph dry electrode array 10, and carry out the pretreatment such as conditioning filtering, in present pre-ferred embodiments, ECG signal processing module 110 comprises single order passive low-pass filter circuit, single order passive high three-way filter, wherein, the cut-off frequency of low pass filter is 100Hz, and the cut-off frequency of high pass filter is 0.16Hz.Preferably, ECG signal processing module 110 also can comprise a diode clamping circuit, the voltage pulsation caused to prevent noise, protects follow-up analog-to-digital conversion module 111; Analog to digital conversion circuit 111 is for being converted to digital electrocardiosignal by analog electrocardiogram signal after pretreatment, in present pre-ferred embodiments, analog to digital conversion circuit 111 adopts ADS1299 chip, it utilizes the A/D converter carried that analog electrocardiogram signal is converted to digital electrocardiosignal, adopt dual power supply, produce needed number+2.5V (DVDD), simulation 2.5V (AVDD) and simulation-2.5V (AVSS) voltage, reference voltage is set to 4.5V, amplification is 12 times, and utilizes built-in driven-right-leg circuit to reduce the common mode disturbances of electrocardiosignal; Controller 112 is for the Hz noise of the digital electrocardiosignal after filtering analog digital conversion, and control this digital electrocardiosignal to be sent to destination device, in present pre-ferred embodiments, controller 112 adopts ArduinoUNO controller, and the ADS1299 chip of analog-to-digital conversion module 111 is communicated with ArduinoUNO controller by SPI mouth.
Fig. 3 is the system architecture diagram of a kind of electrocardiogram monitor system of the present invention.As shown in Figure 3, a kind of electrocardiogram monitor system of the present invention, comprising: MEMS spherical crown electrocardiograph dry electrode array 30, ecg signal acquiring and control module 31, wireless transport module 32, mobile terminal 33 and remote electrocardiogram monitor end 34
Wherein, body surface ecg is extracted into ecg signal acquiring and control module 31 by MEMS spherical crown electrocardiograph dry electrode array 30 and conducting wire; After ecg signal acquiring and control module 31 carry out the pretreatment such as conditioning filtering to the body surface ecg obtained, analog electrocardiogram signal is converted to digital electrocardiosignal, and filtering Hz noise; Electrocardiogram data wireless after filtering interfering is sent to mobile terminal 33 by wireless transport module 32; Mobile terminal 33, after receiving electrocardiogram (ECG) data, software denoising is carried out to electrocardiosignal, and carry out ecg characteristics identification, ecg wave form is shown, and electrocardiogram (ECG) data is uploaded to given server by wireless network, simultaneously, mobile terminal 33 also when remote electrocardiogram monitor end 34 transmits feedback result to given server, can obtain this feedback result from given server; Remote electrocardiogram monitor end 34 connects this given server by wired or wireless network, given server is sent to obtain electrocardiogram (ECG) data and to receive feedback result, that is, doctor can Telnet cardiac monitoring webpage, check ecg wave form in given server and provide corresponding diagnosis and suggestion, finally by given server, the feedback result of doctor being synchronized in mobile terminal 33.
Fig. 4 is the structure chart of the preferred embodiment of a kind of electrocardiogram monitor system of the present invention.In present pre-ferred embodiments, ecg signal acquiring and control module comprise ECG signal processing module, analog-to-digital conversion module and controller, ECG signal processing module comprises single order passive low-pass filter circuit, single order passive high three-way filter, wherein, the cut-off frequency of low pass filter is 100Hz, and the cut-off frequency of high pass filter is 0.16Hz.Preferably, ECG signal processing module also can comprise a diode clamping circuit (not shown), and follow-up analog-to-digital conversion module is protected in the voltage pulsation caused to prevent noise; Analog to digital conversion circuit 111 adopts ADS1299 chip, it utilizes the A/D converter carried that analog electrocardiogram signal is converted to digital electrocardiosignal, adopt dual power supply, produce needed number+2.5V (DVDD), simulation 2.5V (AVDD) and simulation-2.5V (AVSS) voltage, reference voltage is set to 4.5V, amplification is 12 times, and utilizes built-in driven-right-leg circuit to reduce the common mode disturbances of electrocardiosignal; Controller adopts ArduinoUNO controller, ADS1299 chip is communicated with ArduinoUNO controller by SPI mouth, ArduinoUNO controller controls bluetooth module HC-06 by the SPI mouth carried and sends electrocardiogram (ECG) data, adopt buffer and NC7WZ17 digital isolator, keep the integrity of Received signal strength, and prevent ADS1299 to be subject to high-tension harm.
Fig. 5 is the structural representation of mobile terminal in the specific embodiment of the invention, server and remote electrocardiogram monitor end.In the specific embodiment of the invention, mobile terminal adopts Android intelligent terminal, and its basic function, for keeping in, compress and uploading electrocardiogram (ECG) data, stores the personal information of user, receives electrocardio feedback result and display ecg wave form; The basic function of server is for storing electrocardiogram (ECG) data, carrying out denoising and feature identification to electrocardiosignal; Basic function patient information belonging to display ecg wave form and electrocardiogram (ECG) data of remote electrocardiogram monitor end, doctor logins network system and diagnoses in conjunction with the heart state of preliminary processing results to patient of server and provide feedback result.Specifically describe as follows:
(1) bluetooth communication.This module primary responsibility transmission electrocardiogram (ECG) data, searches for target Bluetooth devices and connection of matching.The present invention uses bluetooth 2.0 agreement when transmitting electrocardiosignal, and this is the most widely used Bluetooth protocol in the market.Android development platform provides Bluetooth AP I to realize the communication between bluetooth equipment, by calling these API, realizes the operation to various bluetooth equipment.
(2) user profile and electrocardiogram (ECG) data administration module (mobile terminal).The major function of this module is essential information and the electrocardiogram (ECG) data of leading subscriber, as added deletion new user, amendment personal information, checking or delete a certain electrocardiogram (ECG) data etc.Usage data storehouse SQLite in user profile and electrocardiogram (ECG) data management, it is a nested relations type data base management system that increases income, fast response time, can commonly use control bundle, facilitate the interface display of database information with the Android such as Gallery, ListView.
(3) ECG data compression and upper transmission module (mobile terminal).The electrocardiogram (ECG) data of this module primary responsibility to Bluetooth receptions compresses and is uploaded to given server for doctor's remote diagnosis, and the object of electrocardio compression is the memory space, the quickening uploading speed that reduce electrocardiogram (ECG) data.Compress the electrocardiogram (ECG) data acquiescence after uploading deleted, to discharge memory space.
(4) doctor's feedback module (remote electrocardiogram monitor end).This module mainly checks the diagnostic feedback information of doctor for user, comparatively comprehensively understand, facilitate user to take suitable hygienic measures to have the health of oneself.Also can carry out playback to the electrocardiogram (ECG) data uploaded, support is slided and is checked and two function referring to stretching convergent-divergent, conveniently does comprehensively careful observation to ecg wave form.
(5) Telediagnosis of Electrocardiogram Signals module (server).Telemonitoring center adopts B/S (browser/server) framework, and using browser as general purpose client, server is then responsible for the Core Feature of the system that realizes, and possesses the advantage that exploitation is simple, easy to maintenance.On the one hand, structure http agreement, the method transmission electrocardiogram (ECG) data of simulation webpage POST, server end adopts PHP to receive data.The electrocardiosignal measuring gained, by mobile phone wifi or mobile network, is uploaded to corresponding server by user.On the other hand, with reference to Framework Development Framework, adopt the large implementation language of HTML, CSS and JavaScript tri-, development and Design electrocardio long distance monitoring webpage.Doctor by the electrocardiogram (ECG) data of browser access user, can carry out diagnosing and analyzing, and provides individual suggestions.
Fig. 6 is the flow chart of steps of the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor of the present invention.As shown in Figure 6, the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor of the present invention, comprises the steps:
Step 601, substrate cleans.Si sheet is successively put into each 5 minutes of acetone, dehydrated alcohol and isopropyl alcohol three kinds of solution ultrasonic cleaning, after cleaning terminates, photoresist spinner rotates and dries.
Step 602, adopts the positive photoresist AZ50XT of RC8 type photoresist spinner spin coating 30 μm on the Si sheet cleaned up of KarlSuss company, obtains cylindrical-array after exposure imaging.In order to prevent the positive glue of 30 μm in uneven thickness, take the method for multiple spin coating, each spin coating 5 μm, corotation is coated with 6 times.
Step 603, puts into baking oven by Si sheet, and 120 DEG C are dried 30min, and because photoresist is by hot reflux, cylindrical-array is converted into spherical crown array.In order to prevent the photoresist of molten state from producing bubble, must evacuation while heating.Then through twice PDMS revolving die, photoresist spherical crown array is copied on PDMS substrate and form PDMS spherical crown array.In order to obtain high-quality metal film at electrode surface, when second time transferring film, material therefor is through nano-TiO
2pDMS (the PDMS:TiO of modification
2=4:1).In addition, in twice PDMS revolving die process, in order to prevent PDMS mould and the adhesion of PDMS substrate, after revolving die terminates for the first time, need to carry out silanization treatment to PDMS mould, namely with the recessed ball array mould that trichloromethyl silane process obtains.Concrete operations are: dropped in the culture dish filling PDMS mould by trichloromethyl silane, put into vacuum drying oven evacuation, and 75 DEG C are dried 5min.In order to obtain good silanization effect, PDMS mould need be put into baking oven in advance and toasting, to reduce the moisture in mould.
Step 604, PDMS substrate sputters one deck Cu as Seed Layer, then electroplates the Ni of 2 μm to strengthen metal film strength.In order to prevent skin allergy, on Ni, finally sputter one deck inert metal platinum (Pt).It should be noted that at this, the present invention is not restricted to Ni metal and Ni, also can be other metals.
Compared with prior art, tool of the present invention has the following advantages:
1) adopt the dry electrod-array of MEMS technology processing flexibility spherical crown, as the acquisition electrode of electrocardiosignal, without the need to conducting resinl, not chafe, is applicable to long-term cardioelectric monitor.
(2) the dry electrod-array of flexible spherical crown can adopt MEMS technology to process with other sensor such as temperature sensor, pulse transducer etc. integrate, and form many physiological information sensors, realize many physiology information detecting.
(3) mobile phone is not only as electrocardiosignal display screen, also in mobile phone, compresses electrocardiosignal, improves the utilization rate of mobile phone.
(4) electrocardiosignal gathered can upload onto the server in time, doctor is given to process, and the feedback information very first time of doctor is by mobile phones enquiring, avoids patient and hurry back and forth between family and hospital, facilitate patient to understand heart whenever and wherever possible and carry out heart health.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any those skilled in the art all without prejudice under spirit of the present invention and category, can carry out modifying to above-described embodiment and change.Therefore, the scope of the present invention, should listed by claims.
Claims (10)
1. an electrocardio-monitor, comprising:
MEMS spherical crown electrocardiograph dry electrode array, for extracting body surface ecg and being sent to ecg signal acquiring and control module by conducting wire;
Ecg signal acquiring and control module, after carrying out the pretreatment such as conditioning filtering, be converted to digital electrocardiosignal to the body surface ecg obtained by analog electrocardiogram signal, and its Hz noise of filtering.
2. a kind of electrocardio-monitor as claimed in claim 1, is characterized in that, this ecg signal acquiring and control module comprise further:
ECG signal processing module, for obtaining the body surface ecg that each electrode of this MEMS spherical crown electrocardiograph dry electrode array extracts, and carries out the pretreatment such as conditioning filtering;
Analog-to-digital conversion module, for being converted to digital electrocardiosignal by analog electrocardiogram signal after pretreatment;
Controller, for the Hz noise of the digital electrocardiosignal after filtering analog digital conversion, and controls this digital electrocardiosignal to be sent to destination device.
3. a kind of electrocardio-monitor as claimed in claim 2, is characterized in that: this ECG signal processing module 110 comprises single order passive low-pass filter circuit, single order passive high three-way filter and diode clamping circuit.
4. an electrocardiogram monitor system, comprising:
MEMS spherical crown electrocardiograph dry electrode array, extracts body surface ecg and is sent to ecg signal acquiring and control module by conducting wire;
Ecg signal acquiring and control module, after carrying out the pretreatment such as conditioning filtering, be converted to digital electrocardiosignal to the body surface ecg obtained by analog electrocardiogram signal, and filtering Hz noise;
Wireless transport module, is sent to mobile terminal by the electrocardiogram data wireless after filtering interfering;
Mobile terminal, after receiving electrocardiogram (ECG) data, denoising is carried out to electrocardiosignal, and carry out ecg characteristics identification, ecg wave form is shown, and electrocardiogram (ECG) data is uploaded to given server by wireless network, simultaneously, this mobile terminal also, when remote electrocardiogram monitor end transmits feedback result to given server, obtains this feedback result from given server;
Remote electrocardiogram monitor end, connects this given server by wired or wireless network, is sent to given server to obtain electrocardiogram (ECG) data and to receive feedback result.
5. a kind of electrocardiogram monitor system as claimed in claim 4, is characterized in that: this wireless transport module is bluetooth communication.
6. a preparation method for the MEMS spherical crown electrocardiograph dry electrode array of electrocardio-monitor, comprises the steps:
Step one, cleans substrate and dries;
Step 2, on the substrate cleaned up, spin coating positive photoresist, obtains cylindrical-array after exposure imaging;
Step 3, puts into baking oven by substrate and dries the some time, cylindrical-array is converted into spherical crown array, then through twice PDMS revolving die, is copied to by photoresist spherical crown array on PDMS substrate and forms PDMS spherical crown array;
Step 4, PDMS substrate sputters layer of metal as Seed Layer, then electroplates other metals certain thickness to strengthen metal film strength.
7. the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor as claimed in claim 6, it is characterized in that: in step one, substrate is successively put into three kinds of solution ultrasonic cleaning some times of acetone, dehydrated alcohol and isopropyl alcohol, after cleaning terminates, photoresist spinner rotates and dries.
8. the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor as claimed in claim 6, it is characterized in that: in step 2, adopt photoresist spinner certain thickness positive photoresist of spin coating on the substrate cleaned up, in order to prevent the positive glue of spin coating in uneven thickness, take the method for multiple spin coating.
9. the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor as claimed in claim 6, it is characterized in that: in step 3, in twice PDMS revolving die process, in order to prevent PDMS mould and the adhesion of PDMS substrate, after revolving die terminates for the first time, need to carry out silanization treatment to PDMS mould, namely with the recessed ball array mould that trichloromethyl silane process obtains.
10. the preparation method of the MEMS spherical crown electrocardiograph dry electrode array of a kind of electrocardio-monitor as claimed in claim 6, is characterized in that: in step 4, finally on Ni, sputters one deck inert metal.
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| CN201610008012.8A CN105411572A (en) | 2016-01-06 | 2016-01-06 | Electrocardiograph monitoring device and system and preparation method of MEMS spherical cap dry electrode array |
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| CN201610008012.8A CN105411572A (en) | 2016-01-06 | 2016-01-06 | Electrocardiograph monitoring device and system and preparation method of MEMS spherical cap dry electrode array |
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| CN106236086A (en) * | 2016-08-19 | 2016-12-21 | 京东方科技集团股份有限公司 | Biological electric wave detection equipment, identification sensor, its dryness electrode and manufacture method |
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| CN108334736A (en) * | 2017-09-18 | 2018-07-27 | 山东正心医疗科技有限公司 | A kind of data interactive method |
| CN109171709A (en) * | 2018-07-23 | 2019-01-11 | 京东方科技集团股份有限公司 | A kind of dry electrode and preparation method thereof |
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| CN106236086A (en) * | 2016-08-19 | 2016-12-21 | 京东方科技集团股份有限公司 | Biological electric wave detection equipment, identification sensor, its dryness electrode and manufacture method |
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| CN109171709A (en) * | 2018-07-23 | 2019-01-11 | 京东方科技集团股份有限公司 | A kind of dry electrode and preparation method thereof |
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