CN105403291B - Ultraviolet photosensitive sensor of zinc oxide nano fiber QCM and preparation method thereof - Google Patents
Ultraviolet photosensitive sensor of zinc oxide nano fiber QCM and preparation method thereof Download PDFInfo
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- CN105403291B CN105403291B CN201510724578.6A CN201510724578A CN105403291B CN 105403291 B CN105403291 B CN 105403291B CN 201510724578 A CN201510724578 A CN 201510724578A CN 105403291 B CN105403291 B CN 105403291B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
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Abstract
The invention discloses a kind of ultraviolet photosensitive sensors of zinc oxide nano fiber QCM and preparation method thereof, which is QCM mass type sensor, using electrospun nanofiber zinc oxide fiber film as the sensitive material of quartz crystal microbalance QCM mass type sensor.The sensor without preparing electrode on the photosensitive material, overcome the disadvantage that the ultraviolet photosensitive sensor preparation process of existing resistor-type is complicated, cost is high, the device also has preparation method simple simultaneously, response time is short, high sensitivity, simple operation and other advantages provide new method to make high performance ultraviolet light transducer.
Description
Technical field
The invention belongs to quartz crystal microbalance (QCM) sensor fields, and in particular to a kind of zinc oxide nano fiber QCM
Ultraviolet photosensitive sensor and preparation method thereof.
Background technique
Photosensitive sensor is one of most common sensor, and optical sensor is the sensing that current production rate is most, most widely used
One of device, it is automatically controlling and is playing a very important role in non-electrical quantity measurement technology.Its main element photo resistance by
Electric property under light illumination can changed light-sensitive material be made, zinc oxide is a kind of wide bandgap semiconductor materials, and forbidden band is wide
Degree is 3.37eV, is not responded in visible light and infrared region, all has very high absorptivity below wavelength 370nm, this
To ultraviolet photosensitive sensor can under visible light and infrared light background sensitive detection uitraviolet intensity it is particularly important, therefore often quilt
It is used to prepare the ultraviolet photosensitive sensor of resistor-type.In recent years, since nano material has, size was small, specific surface area is biggish excellent
Point, people are gradually dedicated to the light sensitive material of preparation synthesis nanostructure, and are applied in photosensitive sensor, to improve
Its light sensor characteristic.The test of photosensitive sensor at present generally uses the resis tance method of surveying, such as Chinese patent (application number:
201110004415.2) disclose a kind of Hydrothermal Growth zinc oxide nano array ultraviolet light detector, Chinese patent (application
Number: 201310655536.2) preparing zinc oxide nanometer film for disclosing a kind of method of electrostatic spinning preparation is crossed on interdigital electrode, with
Ultraviolet light applied voltage increase cause export electric current increase.But these require to make electrode on sensitive material, for
The nano material of small size, it is also necessary to which micro-processing technology processes metal microelectrode, and preparation process is complicated, involves great expense.
Quartz crystal microbalance (Quartz Crystal Microbalance, QCM) is that a kind of very sensitive quality is quick
Propagated sensation sensor, the basic principle is that the piezoelectric property of quartz-crystal resonator is utilized, by quartz crystal oscillator electrode surface substance
Mass change is converted into the frequency variation of quartz crystal oscillator circuit output electric signal, and theoretical research shows the micro- day of quartz crystal
Flat resonance frequency variation is directly proportional to additional quality, currently, qcm sensor is just being widely used in air-sensitive and wet sensitive detection dress
Set, for example, Chinese patent (application number: 20131023419.3) disclose method of electrostatic spinning prepare conductive polymer nanometer fiber with
Quartz crystal microbalance technology, which combines, is prepared for gas sensing device.But due to still stopping to the research of light-sensitive material at present
It stays in the variation of its electric property under illumination condition, existing light-sensitive material can not be combined with mass sensitive sensor, QCM
Not yet it is applied to photosensitive sensor field.
Summary of the invention
The purpose of the present invention is to provide a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM and preparation method thereof,
The device overcomes the ultraviolet photosensitive sensor of existing resistor-type without preparing electrode on the photosensitive material for mass type sensor
The disadvantage that preparation process is complicated, cost is high, the device have preparation method simple simultaneously, and the response time is short, high sensitivity, operation
The advantages that simple, provides new method to make high performance ultraviolet light transducer.
To achieve the goals above, technical solution provided by the invention is as follows:
A kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, which is QCM mass type sensor, with electrospinning
Sensitive material of the nano zinc oxide fiber film as quartz crystal microbalance QCM mass type sensor.
Inventor is had found electrospun nanofiber zinc oxide fiber film in long-term experiment not only it is electric under the conditions of ultraviolet light
Learning performance can change, and quality can also change, and inventor thinks by studying for a long period of time to be combined with the theoretical analysis of, this property
When can be due to ultraviolet light, electronics-double-void be generated in zinc oxide nano fiber, some vacancy are reacted with Lattice Oxygen,
Surface oxygen vacancies is formed, these defects, which are more biased towards, enhances the hydrophily of zinc oxide surface in the absorption to hydroxy, makes it more
The hydrone being easy in absorption air, causes the gross mass of material to increase, while electrospun nanofiber zinc oxide fiber film is compared to it
His zinc oxide material has the characteristics that enhance the contact probability of moisture in air and material with large specific surface area, have
Effect enhances the ability that material absorbs moisture in air.Using this performance of material, pass it with highly sensitive mass type
Sensor QCM is combined, and using electrospun nanofiber zinc oxide fiber film as the sensitive material of quartz crystal microbalance, passes through ultraviolet light pair
The irradiation of sensitive material causes the absorption of sensitive material Yu moisture in air so that sensitive material electronic state changes,
Cause its quality to change, to influence the variation of QCM resonance frequency, that is, can be made into highly sensitive ultraviolet photosensitive sensor.
Further, the avarage fiber diameter of the electrospun nanofiber zinc oxide fiber film is 100~400 nanometers.
The invention also discloses the preparation method of the above-mentioned ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, including it is following
Step:
(1) prepared by zinc oxide nano fiber sensitive layer: high molecular material is dissolved in the solution A matched in solvent, the solvent
It is miscible with water, then zinc acetate, deionized water are mixed with solution A, heating stirring to zinc acetate is completely dissolved, and zinc oxide is made
Precursor spinning solution, As-deposited state zinc oxide nano fiber is made with method of electrostatic spinning, is then sintered and is obtained using Muffle furnace
Obtain zinc oxide nano fiber film, as zinc oxide nano fiber sensitive layer；
(2) assembly of the ultraviolet photosensitive sensor of QCM: with dehydrated alcohol or acetone by the electrode surface of quartz crystal microbalance
It cleans up, by liquid medium drop on the electrode of quartz crystal microbalance after its drying, and will step (1) oxidation obtained
Zinc nano fibrous membrane directly applies above it, up to the ultraviolet light sensor of electrospinning zinc oxide nano fiber QCM after its drying
Device, the liquid medium are one of water, ethyl alcohol, acetone or a variety of.
The ultraviolet photosensitive sensor of zinc oxide nano fiber QCM made from the above method, using wavelength be respectively 365nm and
The ultraviolet light of 254nm is detected, and when measuring ultraviolet light and opening-close, the QCM vibration frequency variation response of sample restores
Characteristic curve, discovery device is short to the response time of ultraviolet light, and responsiveness is very high, has repeatability and stability well.
Further, the high molecular material in step (1) is polyvinylpyrrolidone, polyvinyl alcohol, polycaprolactone, polyoxy
Change ethylene, polymethyl methacrylate, polystyrene, Kynoar, collagen, gelatin, one of polyethylene glycol or
It is a variety of.
Further, step (1) the zinc oxide nano fiber sensitive layer preparation: by the poly- second of relative molecular weight 1,300,000
Alkene pyrrole network alkanone is dissolved in dehydrated alcohol, and magnetic stirring apparatus is sufficiently stirred, and it is 10wt%'s that polyethylene pyrrole network alkanone content, which is made,
Solution A；Zinc acetate, deionized water are mixed with solution A again, heats and stirs to zinc acetate and be completely dissolved, preparation is aoxidized
The presoma spinning solution of zinc；At room temperature, As-deposited state zinc oxide nano fiber is made with method of electrostatic spinning, spinning nozzle is from receipts
The distance 8-15cm of collector, spinning voltage 20-30kV；Gained As-deposited state zinc oxide nano fiber is sintered using Muffle furnace
Obtain zinc oxide nano fiber film.
Further, step (1) the zinc oxide nano fiber sensitive layer preparation: first by 1.2 grams of relative molecular weight
1300000 polyvinylpyrrolidone is dissolved in 8.5 grams of dehydrated alcohols, is placed in triangular flask A, and the condition of the water-bath at 60 DEG C
Lower heating stirring 4 hours obtains solution A, and 1.2 grams of zinc acetates are added equipped with 2 grams of dehydrated alcohols and 0.45 gram of deionized water
It in triangular flask B, is stirred 2 hours under magnetic stirring apparatus, obtains inorganic salt solution B, the Polymer Solution A and nothing being mixed with
Machine salting liquid B, and be sufficiently stirred 2 hours with magnetic stirring apparatus, obtain the presoma spinning solution of uniform zinc oxide；Electrostatic spinning
The anode of the high voltage power supply of device connects syringe needle point, and cathode receives collector, described to collect extremely silicon wafer or aluminium foil, zinc oxide
Presoma spinning solution is added in syringe, and for spinning nozzle 13.5 centimetres with a distance from collector, spinning voltage is 25 kilovolts, wet
Degree control is 60% hereinafter, unlatching high-voltage electric switch, nanometer zinc oxide precursor fiber can be obtained on collector, will be received
The zinc oxide precursor fiber of collection is placed on silicon wafer, then silicon wafer is put into Muffle furnace, is warming up to 800 DEG C through 200 minutes, in
800 DEG C (air atmosphere) keep the temperature 2 hours, and furnace cooling is after the completion of sintering up to zinc oxide nano fiber film.
Further, the assembly of the ultraviolet photosensitive sensor of step (2) QCM: first that quartz wafer is clear with dehydrated alcohol
Wash clean drips ethyl alcohol on the electrode of quartz crystal microbalance after being dried up with hair dryer, and by zinc oxide made from step (1)
Nano fibrous membrane directly applies above it, and natural air drying is in air to get the ultraviolet light sensor of zinc oxide nano fiber QCM
Device.
Testing principle of the invention is:
Quartz crystal microbalance QCM can carry out extremely sensitive mass measurement, have high sensitivity, response time fast and behaviour
Make the advantages that facilitating.QCM utilizes the sensitive membrane adsorbed water molecule of its surface modification, and mass change is caused to lead to changing for resonant frequency
Become, measurement result can be output on computer by electrochemical quartz crystal microbalance (EQCM), and computer is by software to output frequency
It is acquired, handles and draws response curve, to realize the detection of humidity.It is micro- with CHI400C Series Electrochemical quartz crystal
For balance, potential range is ± 10 volts, and current range is ± 250 milliamperes.Current measurement lower limit is lower than 50 pico-amperes.Appropriate
Under conditions of, relationship is in simple linear relationship between the mass change deposited on quartz crystal and vibration frequency movement.This hair
The bright ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, every hertz of frequency shift are equivalent to quality and change 1.34 nanograms.
The invention has the benefit that the present invention provides a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM and
It is ultraviolet to overcome existing resistor-type without preparing electrode on the photosensitive material for mass type sensor for preparation method, the device
The disadvantage that photosensitive sensor preparation process is complicated, cost is high, the device have preparation method simple simultaneously, and the response time is short, spirit
Sensitivity is high, simple operation and other advantages, provides new method to make high performance ultraviolet light transducer.Specifically:
1) research of light-sensitive material is still rested in the variation of its electric property under illumination condition at present, resistor-type passes
Sensor needs make electrode on sensitive material, for miniature electricity device, micro-processing technology are needed to process metal microelectrode,
Preparation process is complicated, involves great expense.Inventor is through having found electrospun nanofiber zinc oxide fiber film in ultraviolet light in long-term experiment
Under the conditions of not only its electric property can change, quality can also change, inventor speculate, this performance is due to purple
When outer light irradiates, electronics-double-void is generated in zinc oxide nano fiber, some vacancy are reacted with Lattice Oxygen, form Surface Oxygen
Hole, these defects, which are more biased towards, enhances the hydrophily of zinc oxide surface in the absorption to hydroxy, and it is empty to make it easier to absorption
Molecule in gas causes the gross mass of material to increase, while electrospun nanofiber zinc oxide fiber film is compared to other zinc oxide materials
Material has the characteristics that enhance the contact probability of molecule and material in air with large specific surface area, effectively enhances material
Absorb the ability of molecule in air.Using this performance of material, combine it with highly sensitive mass type sensor QCM,
Using electrospun nanofiber zinc oxide fiber film as the sensitive material of quartz crystal microbalance, by ultraviolet light to the photograph of sensitive material
It penetrates, so that sensitive material electronic state changes, causes the absorption of molecule in sensitive material and air, its quality is caused to occur
Variation, to influence the variation of QCM resonance frequency, that is, can be made into highly sensitive ultraviolet photosensitive sensor, compared to traditional light
Dependent sensor, the sensor structure is simple, and without preparing electrode on sensitive material, preparation method is simple, while having had both QCM
The advantage that sensor operations are simple, high sensitivity, response time are short.
2) sensor of the invention prepares zinc oxide sensitive material using method of electrostatic spinning, and preparation method is simple, and principle can
It leans on, it is simple and efficient to handle, it is practical.
3) the frequency variation of QCM is made period measurement by sensor of the invention, is shortened the sampling time, is improved the time point
It distinguishes.
Detailed description of the invention
Fig. 1 is that the present invention relates to zinc oxide nano fiber film electron scanning micrographs.
Fig. 2 wavelength is that quartz crystal microbalance vibration frequency changes response-recovery characteristic song under 254nm ultraviolet light
Line.
Fig. 3 wavelength is that quartz crystal microbalance vibration frequency changes response-recovery characteristic song under 365nm ultraviolet light
Line.
Specific embodiment
According to following embodiments, the present invention may be better understood.However, as it will be easily appreciated by one skilled in the art that real
It applies specific material proportion, process conditions and its result described in example and is merely to illustrate the present invention without that should will not limit
The present invention described in detail in claims.
Embodiment 1
A kind of preparation method of the ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, comprising the following steps:
(1) prepared by zinc oxide nano fiber sensitive layer: first by the polyvinyl pyrrole of 1.2 grams of relative molecular weight 1,300,000
Alkanone is dissolved in 8.5 grams of dehydrated alcohols, is placed in triangular flask A, and heating stirring 4 hours under conditions of 60 DEG C of water-baths, is obtained
Solution A is obtained, 1.2 grams of zinc acetates are added in the triangular flask B equipped with 2 grams of dehydrated alcohols and 0.45 gram of deionized water, are stirred in magnetic force
It mixes and is stirred 2 hours under device, obtain inorganic salt solution B, the Polymer Solution A and inorganic salt solution B being mixed with, and use magnetic force
Blender is sufficiently stirred 2 hours, obtains the presoma spinning solution of uniform zinc oxide；The high voltage power supply of electrostatic spinning apparatus is just
Pole connects syringe needle point, and cathode receives collector, the collection extremely silicon wafer or aluminium foil, and the presoma spinning solution of zinc oxide is added
In syringe, spinning nozzle 13.5 centimetres with a distance from collector, spinning voltage be 25 kilovolts, humid control 60% hereinafter,
High-voltage electric switch is opened, nanometer zinc oxide precursor fiber can be obtained on collector, by the zinc oxide precursor of collection
Fiber is placed on silicon wafer, then silicon wafer is put into Muffle furnace, is warming up to 800 DEG C through 200 minutes, is protected in 800 DEG C (air atmosphere)
Temperature 2 hours, furnace cooling is after the completion of sintering up to zinc oxide nano fiber film.The scanning electron of gained zinc oxide nano fiber film
Microscope photo is as shown in Figure 1.
(2) assembly of the ultraviolet photosensitive sensor of QCM: with dehydrated alcohol first by electrochemical quartz crystal microbalance (CHI400C
Series) quartz wafer clean up, ethyl alcohol is dripped on the electrode of electrochemical quartz crystal microbalance after being dried up with hair dryer,
And directly apply zinc oxide nano fiber film made from step (1) above it, natural air drying is in air to get zinc oxide nano
The rice ultraviolet photosensitive sensor of fiber QCM.
Light sensitive characteristic test: QCM is irradiated under different wave length ultraviolet light respectively and is modified with zinc oxide nano fiber film sensitivity
Layer, and its light sensitive characteristic is measured, measurement result is output on computer, computer is acquired output frequency by software, locates
Reason and drafting response curve, to realize the detection to ultraviolet-sensitive characteristic.As shown in Figures 2 and 3 for respectively in 254nm and
When 365nm length ultraviolet light is opened-closed, the QCM vibration frequency of sample changes response-recovery characteristic curve, it can be seen that should
Photosensitive sensor is very sensitive to ultraviolet light；The response time is about 5 seconds when illumination, and recovery time is about 2 seconds, and loop-around data
Repeatability is good.
Embodiment 2
A kind of preparation method of the ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, comprising the following steps:
(1) prepared by zinc oxide nano fiber sensitive layer: first by 1 gram of polyethylene glycol oxide PEO (relative molecular mass 500
Ten thousand) dissolution in deionized water, is placed in triangular flask A, at room temperature, with magnetic stirrer 4 hours, obtains solution A, will
1.2 grams of zinc acetates are added in the triangular flask B equipped with 2 grams of dehydrated alcohols and 0.45 gram of deionized water, stir 2 under magnetic stirring apparatus
Hour, inorganic salt solution B, the Polymer Solution A and inorganic salt solution B being mixed with are obtained, and abundant with magnetic stirring apparatus
Stirring 2 hours, obtains the presoma spinning solution of uniform zinc oxide；The anode of the high voltage power supply of electrostatic spinning apparatus connects syringe
Needle point, cathode receive collector, the collection extremely silicon wafer or aluminium foil, and the presoma spinning solution of zinc oxide is added in syringe,
For spinning nozzle 15 centimetres with a distance from collector, spinning voltage is 30 kilovolts, and humid control is 60% hereinafter, opening high voltage power supply
Switch, nanometer zinc oxide precursor fiber can be obtained on collector, the zinc oxide precursor fiber of collection is placed on silicon wafer
On, then silicon wafer is put into Muffle furnace, 800 DEG C were warming up to through 200 minutes, keeps the temperature 2 hours in 800 DEG C (air atmosphere), sintering
Furnace cooling is after the completion up to zinc oxide nano fiber film.
(2) assembly of the ultraviolet photosensitive sensor of QCM: with acetone first by electrochemical quartz crystal microbalance (CHI400C system
Column) quartz wafer clean up, ethyl alcohol is dripped on the electrode of electrochemical quartz crystal microbalance after being dried up with hair dryer, and
Zinc oxide nano fiber film made from step (1) is directly applied above it, natural air drying is in air to get zinc-oxide nano
The ultraviolet photosensitive sensor of fiber QCM, is tested through photosensitive property, and the response time is about 4 seconds when the illumination of the sample, and recovery time is about
It is 2 seconds, and repeatability is good for loop-around data.
The above, only of the invention illustrates embodiment, not to the present invention in any form with substantial limitation,
It should be pointed out that for those skilled in the art, under the premise of not departing from the method for the present invention, that makes several changes
It also should be regarded as protection scope of the present invention into supplement.All those skilled in the art are not departing from spirit of the invention
In the case where range, using the equivalent variations for a little variation, modification and evolution that disclosed above technology contents are made,
For equivalent embodiment of the invention；Meanwhile any equivalent change that all substantial technologicals according to the present invention do above-described embodiment
The variation, modification and evolution of change still fall within the range of technical solution of the present invention.It is existing at the not detailed disclosure of the present invention
Technology.
Claims (6)
1. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM, which is characterized in that the sensor is QCM mass type sensing
Device, using electrospun nanofiber zinc oxide fiber film as the sensitive material of quartz crystal microbalance QCM mass type sensor, the electricity
Spinning nano zinc oxide fiber film quality under the conditions of ultraviolet light can change；The zinc oxide nano fiber QCM is purple
The preparation method of outer photosensitive sensor, comprising the following steps:
(1) prepared by zinc oxide nano fiber sensitive layer: high molecular material is dissolved in the solution A matched in solvent, the solvent and water
It dissolves each other, then zinc acetate, deionized water is mixed with solution A, heating stirring to zinc acetate is completely dissolved, before zinc oxide is made
Spinning solution is driven, As-deposited state zinc oxide nano fiber is made with method of electrostatic spinning, is then sintered acquisition oxygen using Muffle furnace
Change zinc nano fibrous membrane, as zinc oxide nano fiber sensitive layer；
(2) assembly of the ultraviolet photosensitive sensor of QCM: the electrode surface of quartz crystal microbalance is cleaned with dehydrated alcohol or acetone
Completely, after its drying by liquid medium drop on the electrode of quartz crystal microbalance, and by zinc oxide nano made from step (1)
Rice tunica fibrosa directly applies above it, up to the ultraviolet photosensitive sensor of electrospinning zinc oxide nano fiber QCM, institute after its drying
Stating liquid medium is one of water, ethyl alcohol, acetone or a variety of.
2. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM as described in claim 1, which is characterized in that the electricity
The avarage fiber diameter for spinning nano zinc oxide fiber film is 100~400 nanometers.
3. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM as described in claim 1, which is characterized in that step (1)
In high molecular material be polyvinylpyrrolidone, polyvinyl alcohol, polycaprolactone, polyethylene glycol oxide, polymethyl methacrylate,
One of polystyrene, Kynoar, collagen, gelatin, polyethylene glycol are a variety of.
4. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM as described in claim 1, which is characterized in that the step
Suddenly prepared by (1) zinc oxide nano fiber sensitive layer: the polyethylene pyrrole network alkanone of relative molecular weight 1300000 is dissolved in dehydrated alcohol
In, magnetic stirring apparatus is sufficiently stirred, and the solution A that polyethylene pyrrole network alkanone content is 10wt% is made；Again by zinc acetate, deionization
Water is mixed with solution A, is heated and is stirred to zinc acetate and is completely dissolved, and preparation obtains the presoma spinning solution of zinc oxide；In room
Under temperature, As-deposited state zinc oxide nano fiber is made with method of electrostatic spinning, spinning nozzle is from collector distance 8-15cm, spinning electricity
Pressure is 20-30kV；Gained As-deposited state zinc oxide nano fiber is sintered acquisition zinc oxide nano fiber film using Muffle furnace.
5. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM as described in claim 1, which is characterized in that the step
Suddenly prepared by (1) zinc oxide nano fiber sensitive layer: first by the polyvinylpyrrolidone of 1.2 grams of relative molecular weight 1300000
It is dissolved in 8.5 grams of dehydrated alcohols, is placed in triangular flask A, and heating stirring 4 hours under conditions of 60 DEG C of water-baths, obtain molten
Liquid A 1.2 grams of zinc acetates is added in the triangular flask B equipped with 2 grams of dehydrated alcohols and 0.45 gram of deionized water, in magnetic stirring apparatus
Lower stirring 2 hours, obtains inorganic salt solution B, the Polymer Solution A and inorganic salt solution B being mixed with, and use magnetic agitation
Device is sufficiently stirred 2 hours, obtains the presoma spinning solution of uniform zinc oxide；The anode of the high voltage power supply of electrostatic spinning apparatus connects
Syringe needle point, cathode receive collector, the collection extremely silicon wafer or aluminium foil, and injection is added in the presoma spinning solution of zinc oxide
In device, for spinning nozzle 13.5 centimetres with a distance from collector, spinning voltage is 25 kilovolts, and humid control is 60% hereinafter, opening
High-voltage electric switch can obtain nanometer zinc oxide precursor fiber on collector, by the zinc oxide precursor fiber of collection
It is placed on silicon wafer, then silicon wafer is put into Muffle furnace, be warming up to 800 DEG C through 200 minutes, it is small in 800 DEG C (air atmosphere) heat preservations 2
When, furnace cooling is after the completion of sintering up to zinc oxide nano fiber film.
6. a kind of ultraviolet photosensitive sensor of zinc oxide nano fiber QCM as described in claim 1, which is characterized in that the step
Suddenly the assembly of the ultraviolet photosensitive sensor of (2) QCM: first being cleaned up quartz wafer with dehydrated alcohol, will after being dried up with hair dryer
Ethyl alcohol drop directly applies zinc oxide nano fiber film made from step (1) at it on the electrode of quartz crystal microbalance
Above, in air natural air drying to get the ultraviolet photosensitive sensor of zinc oxide nano fiber QCM.
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