CN105388610B - A kind of light attenuation device of continuously adjustabe light intensity - Google Patents
A kind of light attenuation device of continuously adjustabe light intensity Download PDFInfo
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- CN105388610B CN105388610B CN201510601122.0A CN201510601122A CN105388610B CN 105388610 B CN105388610 B CN 105388610B CN 201510601122 A CN201510601122 A CN 201510601122A CN 105388610 B CN105388610 B CN 105388610B
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- light
- integrating sphere
- clamping ring
- continuously adjustabe
- light intensity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/005—Diaphragms
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention discloses a kind of light attenuation device of continuously adjustabe light intensity, the device includes light source and two or more integrating spheres, each integrating sphere is provided with light well and light hole, concatenated in order between each integrating sphere, the light hole of i.e. previous integrating sphere connects the light well of the latter integrating sphere, two integrating sphere connecting portions of concatenated in order are respectively arranged with electronic variable diaphragm, enter integrating sphere and the light radiant flux from integrating sphere outgoing for adjusting.The device of the present invention can realize the zonal cooling decay of light intensity, quantification regulation can be achieved, light distribution is uniform after decay, and attenuation coefficient adjustable range is wide, the multiple fields such as light detection sensitivity detection, the amount of radiation of light source and color measuring, the Spectral Property Analysis of optical attenuator, device or equipment that a wide range of continuous and quantitative is adjusted are can be applied to.
Description
Technical field
The present invention relates to light intensity attenuation technical field and field of optical measuring technologies, and in particular to one kind can continuously adjust
The attenuating device of light intensity.
Background technology
In the optical path, optical attenuation piece and uniform light board can realize optical attenuation and even light.Optical attenuation piece using light absorption and
Reflex is come the light intensity that decays in certain wavelength band.Optical attenuation piece has certain attenuation coefficient, but unadjustable, if
The light of varying strength is needed, it is necessary to prepare the attenuator of multiple differential declines coefficients, is changed further according to needs, this increase
The complexity and cost of operation.Existing light attenuation device (such as Chinese patent of Application No. 201310603534.9《Day blind purple
End depth test device outside outer optical filter band》Optical attenuation is carried out using optical attenuation piece), after optical attenuation non-quantitative, decay being present
Light distribution is uneven and intensity the shortcomings of cannot continuously adjusting of decay light source so that attenuating device should in some reality
In, the problem of attenuation coefficient is small, and light intensity does not reach attenuation requirement still after decay be present.It is thus impossible to meet the optics of precision
The requirement of measurement, it is also difficult in some aspects, applied in being detected such as transducer sensitivity.
In consideration of it, in field of precision measurement typically without using attenuator, and use integrating sphere device.Integrating sphere is in one
Wall scribbles the hollow spheres of diffusive white reflective material.One or several fenestras are opened on ball wall, as light well, place optical receiver
The receiver hole and light hole of part.The very high diffuse-reflective material of reflectivity is coated with integrating sphere inwall, so, into the light of integrating sphere
By inside coating multiple reflections, uniform illumination is formed on inwall.Integrating sphere is generally used to do even radiant and optical attenuation.With
Traditional optical attenuation piece is compared with uniform light board, and integrating sphere can realize the light distribution of Uniform attenuation, therefore, is widely used in light
The fields such as the photoluminescence Study in source, Spectral Property Analysis, the demarcation of device and equipment, high-precision optical test.
But in some application-specifics, in being detected such as transducer sensitivity, it is desirable to very weak light source, therefore, decay is filled
The attenuation coefficient requirement put is higher, and requires output intensity in a small range continuously adjustabe.Now, to meet requirement, need
The attenuator of heavy caliber integrating sphere and highly attenuating coefficient is wanted, so causes difficulty of processing, quality and cost all very high, even with
Existing actual process can not process at all.
The content of the invention
For technological deficiency present in above prior art, it is an object of the invention to provide a kind of continuously adjustabe light intensity
Light attenuation device, the device can continuously adjust decay light intensity interior on a large scale.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of light attenuation device of continuously adjustabe light intensity, the device include light source and two or more integrating spheres,
Each integrating sphere is provided with light well and light hole, concatenated in order between each integrating sphere, i.e., the light hole of previous integrating sphere
The light well of the latter integrating sphere is connected, two integrating sphere connecting portions of concatenated in order are respectively arranged with electronic variable diaphragm, are used for
Light radiant flux of the regulation into integrating sphere and from integrating sphere outgoing.
The light power meter for detecting the irradiation level on integrating sphere inwall is additionally provided with each integrating sphere.
The light power meter selects current mode light power meter or photon counting-type light power meter or the combination of both.
Further, optical filter is installed on first integrating sphere light well of light source incidence, for filtering out veiling glare.
The electronic variable diaphragm includes light hole, baffle plate and motor, and motor driven baffle plate moves left and right.
The electronic variable diaphragm includes multiple blades, diaphragm adjustment ring, gear and motor, and multiple blades form rotating ring
The outer cause diaphragm adjustment ring of shape and annular is fixed, and diaphragm adjustment ring is connected with gear, and gear is rotated by motor control.
Further, connected between each integrating sphere by attachment means, the attachment means include placing inside and outside two
Clamping ring, by connector, either rubber ring is fixedly connected or in the inner side of outer clamping ring and interior connected between clamping ring
The outside of adapter ring is correspondingly provided with groove respectively, is provided with spring and steel ball in groove, wherein spring is arranged on the groove of interior clamping ring
Interior, steel ball is located at the top of spring, and steel ball is fixed in the groove of outer clamping ring under spring force, so that two
Clamping ring links together.
Preferably, in the attachment means, the clamping ring being connected with electronic variable diaphragm is provided with limiting stand.
Preferably, the electronic variable diaphragm be respectively arranged with screw thread in the circumference for the clamping ring being connected, both pass through
Screw thread is realized and is fastenedly connected.
The present invention can solve the problem that technological deficiency existing for light attenuation device in the market, have advantages below：
(1) device can realize the zonal cooling decay of light intensity, and quantification regulation can be achieved.Light distribution is equal after decay
It is even, and attenuation coefficient adjustable range is wide.
(2) Chinese patent of Application No. 201410312773.3《Day blind uv radiation intensity robot scaling equipment》, disclose one
Day blind uv irradiance robot scaling equipment is planted, it uses single integrating sphere to carry out optical attenuation, the outgoing ultraviolet light irradiation after decay
Spend for 10-7-10-13W/cm2, in actual applications, this can not meet that the detection of more sensitive solar blind ultraviolet detector sensitivity will
Ask.When the cascade unit of present invention ultraviolet band blind for day, the outgoing ultraviolet light irradiation degree after decay can reach 10-17-
10-19W/cm2, the irradiation level of significantly larger than above-mentioned single integrating sphere patent.
(3) device of the invention can be applied to the light spy of optical attenuator, device or equipment that a wide range of continuous and quantitative is adjusted
Survey sensitive detection, the amount of radiation of light source and the multiple fields such as color measuring, Spectral Property Analysis.
Brief description of the drawings
Fig. 1 is the structural representation of light attenuation device of the present invention；
Fig. 2 is the first implementation structure chart of electronic variable diaphragm of the present invention；
Fig. 3 is the second implementation structure chart of electronic variable diaphragm of the present invention；
Fig. 4 is the connected mode one of two integrating sphere light holes and light well of the invention；
Fig. 5 is the connected mode two of two integrating sphere light holes and light well of the invention；
Fig. 6 is the connected mode three of two integrating sphere light holes and light well of the invention.
In figure, 1- light sources, 2- light well filter plates, 3- light power meters, 4- first integral balls, 5- second integral balls, 6-
Three integrating spheres, the integrating spheres of 7- the 4th, 8- electronic variable diaphragms, 9- light holes, 10- light holes, 11- baffle plates, 12- motors, 13- leaves
Piece, 14- diaphragm adjustment rings, 15- gears, 16- clamping rings A, 17- clamping ring B, 18- screw, 19- steel balls, 20- springs, 21- rubbers
Cushion rubber, 22- boss.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of light attenuation device of continuously adjustabe light intensity of the present invention, including light source 1, two or more
Integrating sphere, wherein, on each integrating sphere comprising light well, light hole 9, the light for detecting the irradiation level on integrating sphere inwall
Power meter 3, filter plate 2 is installed on the light well of first integral ball 4, for filtering out veiling glare, the light well of remaining integrating sphere and
Electronic variable diaphragm 8 is respectively arranged with light hole, enters integrating sphere and the light radiant flux from integrating sphere outgoing for adjusting, and then
Realize the zonal cooling regulation of output intensity.Concatenated in order between each integrating sphere, the light hole of previous integrating sphere with it is latter
The light well connection of individual integrating sphere, connecting portion are provided with electronic variable diaphragm, as the light hole of first integral ball 4 connects second
The light well of integrating sphere 5.
The light beam being emitted from light source 1, after filtered wave plate 2 filters out veiling glare, enter the from the light well of first integral ball 4
One integrating sphere 4, light beam after multiple diffusing reflection, are emitted in first integral ball 4 from light hole 9, and emergent light is through overdamping
Equally distributed radiant light.The ratio between output intensity and input intensity are about：Surface inside light output hole area/and bulb separation
Product.The position of light hole 9 is provided with electronic variable diaphragm 8, the size of light hole or light well can be adjusted, and then adjust output
Light radiant flux.Meanwhile on integrating sphere inwall, be also provided with an aperture, be placed with light power meter 3, for detecting light irradiation
Degree, the reading of observable light power meter adjust light irradiance to required value.
For light after the decay of first integral ball 4, the light beam being emitted from first integral ball 4 will be directed into second integral ball 5,
After second integral ball 5 is decayed again, the light beam being emitted from second integral ball 5 will be directed into third integral ball 6, successively class
Push away.Concatenated in order between each integrating sphere.
The device of the present invention can adjust output intensity on a large scale by increasing and decreasing integrating sphere quantity, can by adjusting electronics
Become the regulation output intensity that diaphragm 8 carrys out small range.Wherein electronic variable diaphragm 8 can change the size of light hole, and then control light
By force；Meanwhile multiple integrating spheres can carry out multilevel decay to the light intensity of light source.The two combination can realize the zonal cooling of light intensity
Regulation.Meanwhile be fitted with light power meter on each integrating sphere, can with the light irradiance of the real-time detection integrating sphere inwall,
The quantification regulation of decay light intensity is realized, and incident beam passes through the multiple diffusing reflection of integrating sphere inwall, the decay light of outgoing
It is evenly distributed.The present invention is cascaded by multiple integrating spheres, realizes the multistage decay of incident light, can select the product of cascade as needed
Bulb separation quantity, the adjustable range of the device light attenuation coefficient is considerably increased, stronger decline can be adjusted out according to using needs
Dim light, very weak decay light can also be adjusted out.
Electronic variable diaphragm used in apparatus of the present invention can have following two structure types：
1st, as shown in Fig. 2 electronic variable diaphragm 8 is made up of light hole 10, baffle plate 11 and the three parts of motor 12.Pass through control
The controllable register 11 of motor 12 is moved left and right, and when baffle plate 11 is moved to the left, baffle plate 11 is gradually increased with the overlapping region of light hole 10,
Thang-kng diaphragm diminishes, and light hole light radiant flux diminishes；When baffle plate 11 moves right, baffle plate 11 and the overlapping region of light hole 10
It is gradually reduced, thang-kng diaphragm becomes big, and light hole light radiant flux becomes big.
2nd, as shown in figure 3, electronic variable diaphragm 8 is made up of multiple blades 13, the outer rim of blade 13 is diaphragm adjustment ring 14, light
Late adjustment ring 14 is connected with gear 15, and gear 15 controls rotation by motor 12.The rotational band rotating ring circle regulation ring of gear 15 rotates, and enters
And with the rotation of movable vane piece 13, the rotation of blade 13 causes the change of thang-kng aperture area size, and light hole light is adjusted with this
Radiation flux.
Connection between integrating sphere light hole and light well, can be by setting an attachment means by two products of concatenated in order
Bulb separation links together, and mainly has following three kinds of modes：
1. as shown in figure 4, the attachment means include the clamping ring A16 that is connected with first integrating sphere light hole, including with
The clamping ring B17 of the light well connection of second integrating sphere, in addition to for clamping ring A16 and clamping ring B17 to be fixed on into one
Some connectors risen.Clamping ring A16 and clamping ring B17 coordinates, and is fixed by connector such as screw 18 therebetween.
2. clamping ring A16 and clamping ring B17 coordinates.Steel ball 19 is installed on clamping ring B17, had on clamping ring A16 correspondingly
Groove, for fixing steel ball 19.The one end of steel ball 19 is provided with spring 20 so that steel ball can carry out small stretch.Clamping ring
After A16 connects with clamping ring B17, fixed by steel ball 19.There are some depressed parts on clamping ring B17, there is one to be in respectively in it
The spring 20 of compression, and the steel ball 19 on spring 20.There are some grooves position corresponding clamping ring A16, works as connection
When circle A16 is fixedly connected with clamping ring B17, steel ball 19 is fixed in clamping ring A16 groove under spring force, is realized
It is fixedly connected.
3. clamping ring A16 and clamping ring B17 coordinates.Rubber ring 21 is installed on clamping ring B17, for being fixedly connected with circle
A16 and clamping ring B17.
Electronic variable diaphragm 8 be located at clamping ring in two integrating spheres wherein any one integrating sphere and attachment means it
Between.When iris diaphgram is fitted into clamping ring from integration direction of bowl, the boss 22 in clamping ring limits the movement of iris diaphgram, resistance
Only iris diaphgram moves on, and it is stopped at fixed position.The iris diaphgram can be fixed on integration by attachment means
Between ball and clamping ring.Likewise, the circumference of the iris diaphgram can also be arranged to screw thread, it is opposite using being set on clamping ring
Screw thread, both are realized by screw thread and are more fastenedly connected.
The above-mentioned light attenuation device of the present invention detects available for solar blind UV detector sensitivity, whole detection means
It is both needed to complete under dark room conditions with detection process, to remove environment veiling glare, improves the signal to noise ratio of detection, protect detector
It is safe to use.Detection means includes light source 1, for covering the light source 1 to prevent lamp house that veiling glare enters, optical filter 2, enter
Unthreaded hole, integrating sphere, electronic variable diaphragm 8, the light power meter 3 of 9,4 cascades of light hole.The light sent from light source 1 passes through optical filtering
Piece 2 enters in light well and integrating sphere, after decaying successively via the integrating sphere of 4 cascades, from the light extraction of last integrating sphere
It is emitted in hole.The service band of the device is day blind ultraviolet band：240~280nm, used optical filter 2 be 240~
280nm wave band bandpass filters, for filtering out the interference of stray light of its all band.Used light source 1 is the purple of high stability
Outer deuterium lamp.
Because the minimum detection accuracy of obtainable current mode light power meter is pW (10 on the market at present-12W) magnitude, because
This, cascades composition one-level optical attenuator by first integral ball 4 and second integral ball 5, controls the light work(on the inwall of second integral ball 5
Rate selects current mode light power meter in pW magnitudes, the light power meter 3 on first integral ball 4 and second integral ball 5.3rd
The integrating sphere 7 of integrating sphere 6 and the 4th cascade composition two-stage dimmer, the light on the integrating sphere 7 of third integral ball 6 and the 4th
Power meter 3 selects photon counting-type light power meter, can obtain radiant exitance control 10 in the light hole 9 of the 4th integrating sphere 7-17-10-19W/cm2Emergent light, light hole >=50mm of the 4th integrating sphere 7.Specific running parameter is as shown in the table：
The running parameter of the sensitivity technique of table 1
Claims (6)
1. a kind of light attenuation device of continuously adjustabe light intensity, the device includes light source and integrating sphere, and integrating sphere is provided with light well
And light hole, it is characterised in that the service band of the device is day blind ultraviolet band：240~280nm, integrating sphere use four,
Concatenated in order between each integrating sphere, i.e., the light hole of previous integrating sphere connect the light well of the latter integrating sphere, order levels
Two integrating sphere connecting portions of connection are respectively arranged with electronic variable diaphragm, enter integrating sphere and the light from integrating sphere outgoing for adjusting
Radiation flux；The light power meter for detecting the irradiation level on integrating sphere inwall is additionally provided with each integrating sphere, wherein, first
Light power meter on integrating sphere and second integrating sphere uses current mode light power meter, the 3rd integrating sphere and the 4th integrating sphere
On light power meter use photon counting-type light power meter；Connected between each integrating sphere by attachment means, the connection dress
The clamping ring including being placed inside and outside two is put, is correspondingly provided with respectively in the inner side of outer clamping ring and the outside of interior clamping ring recessed
Groove, groove is interior to be provided with spring and steel ball, and wherein spring is arranged in the groove of interior clamping ring, and steel ball is located at the top of spring,
Steel ball is fixed in the groove of outer clamping ring in the presence of spring force, so that two clamping rings link together.
2. the light attenuation device of a kind of continuously adjustabe light intensity according to claim 1, it is characterised in that in light source incidence
Optical filter is installed on first integrating sphere light well, for filtering out veiling glare.
A kind of 3. light attenuation device of continuously adjustabe light intensity according to claim 1 or 2, it is characterised in that the electronics
Iris diaphgram includes light hole, baffle plate and motor, and motor driven baffle plate moves left and right.
A kind of 4. light attenuation device of continuously adjustabe light intensity according to claim 1 or 2, it is characterised in that the electronics
Iris diaphgram includes multiple blades, diaphragm adjustment ring, gear and motor, and multiple blades form the outer rim of rotary annular and annular
Fixed by diaphragm adjustment ring, diaphragm adjustment ring is connected with gear, and gear is rotated by motor control.
A kind of 5. light attenuation device of continuously adjustabe light intensity according to claim 1 or 2, it is characterised in that the connection
In device, the clamping ring being connected with electronic variable diaphragm is provided with limiting stand.
A kind of 6. light attenuation device of continuously adjustabe light intensity according to claim 1 or 2, it is characterised in that the electronics
Iris diaphgram be respectively arranged with screw thread in the circumference for the clamping ring being connected, both by screw thread realize be fastenedly connected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510601122.0A CN105388610B (en) | 2015-09-18 | 2015-09-18 | A kind of light attenuation device of continuously adjustabe light intensity |
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| CN201510601122.0A CN105388610B (en) | 2015-09-18 | 2015-09-18 | A kind of light attenuation device of continuously adjustabe light intensity |
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| CN105388610B true CN105388610B (en) | 2018-02-09 |
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| CN116295820B (en) * | 2023-05-19 | 2023-08-08 | 中国科学院长春光学精密机械与物理研究所 | Cascade integrating sphere light source |
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