CN105388162B - 基于机器视觉的原料硅片表面划痕检测方法 - Google Patents
基于机器视觉的原料硅片表面划痕检测方法 Download PDFInfo
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- CN105388162B CN105388162B CN201510713473.0A CN201510713473A CN105388162B CN 105388162 B CN105388162 B CN 105388162B CN 201510713473 A CN201510713473 A CN 201510713473A CN 105388162 B CN105388162 B CN 105388162B
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106157303A (zh) * | 2016-06-24 | 2016-11-23 | 浙江工商大学 | 一种基于机器视觉对表面检测的方法 |
CN106269549B (zh) * | 2016-08-23 | 2018-10-12 | 厦门佳元电子科技有限公司 | 硅片筛分流水线系统及筛分方法 |
CN107358598A (zh) * | 2017-05-24 | 2017-11-17 | 上海视马艾智能科技有限公司 | 一种划痕检测方法与装置 |
CN108090929B (zh) * | 2017-12-04 | 2021-12-03 | 国家海洋局第一海洋研究所 | 矿区线性异常分析提取新型方法 |
CN108230303A (zh) * | 2017-12-21 | 2018-06-29 | 河北工业大学 | 一种多晶硅太阳能电池片外观划痕缺陷检测的方法 |
CN108365051B (zh) * | 2018-02-05 | 2019-08-02 | 河北工业大学 | 一种太阳能电池片轨道去除的方法 |
CN108732186A (zh) * | 2018-07-20 | 2018-11-02 | 梧州学院 | 嵌入式工件表面缺陷自动检测系统及其控制方法 |
CN109060838B (zh) * | 2018-07-23 | 2020-12-29 | 三固(厦门)科技有限公司 | 一种基于机器视觉的产品表面划痕检测方法 |
CN109085791A (zh) * | 2018-07-25 | 2018-12-25 | 嘉兴锐川电气有限公司 | 冲床视觉监控系统及其监控方法 |
CN109084957B (zh) * | 2018-08-31 | 2024-03-19 | 华南理工大学 | 光伏太阳能晶硅电池片的缺陷检测和颜色分选方法及其系统 |
CN109584212B (zh) * | 2018-11-05 | 2022-04-26 | 华中科技大学 | 一种基于matlab的slm粉床铺粉图像划痕缺陷识别方法 |
CN109374638B (zh) * | 2018-12-18 | 2022-01-18 | 深圳市鼎源检测技术有限公司 | 一种基于机器视觉的木地板表面检测装置及其检测方法 |
CN110632086A (zh) * | 2019-11-04 | 2019-12-31 | 大连中启伟创科技有限公司 | 一种基于机器视觉的注塑件表面缺陷的检测方法及系统 |
CN112508937A (zh) * | 2020-12-22 | 2021-03-16 | 北京百度网讯科技有限公司 | 生成划痕数据的方法、装置、电子设备和存储介质 |
CN113129260B (zh) * | 2021-03-11 | 2023-07-21 | 广东工业大学 | 一种锂电池电芯内部缺陷的自动检测方法及装置 |
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JP2009229197A (ja) * | 2008-03-21 | 2009-10-08 | Seiko Epson Corp | 線状欠陥検出方法および線状欠陥検出装置 |
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CN103175839A (zh) * | 2011-12-21 | 2013-06-26 | 北京兆维电子(集团)有限责任公司 | 胶印版材表面检测的处理方法及系统 |
CN103245671A (zh) * | 2013-05-09 | 2013-08-14 | 深圳先进技术研究院 | 冲压件表面缺陷检测装置及方法 |
CN104111029A (zh) * | 2013-04-19 | 2014-10-22 | 延锋伟世通汽车电子有限公司 | 用于电子产品加工检验的机器视觉检测系统 |
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CN104952754A (zh) * | 2015-05-05 | 2015-09-30 | 江苏大学 | 基于机器视觉的镀膜后硅片分选方法 |
CN104966101A (zh) * | 2015-06-17 | 2015-10-07 | 镇江苏仪德科技有限公司 | 一种基于LabVIEW的太阳能电池片分类方法 |
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US20040223053A1 (en) * | 2003-05-07 | 2004-11-11 | Mitutoyo Corporation | Machine vision inspection system and method having improved operations for increased precision inspection throughput |
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- 2015-10-28 CN CN201510713473.0A patent/CN105388162B/zh active Active
Patent Citations (8)
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JP2009229197A (ja) * | 2008-03-21 | 2009-10-08 | Seiko Epson Corp | 線状欠陥検出方法および線状欠陥検出装置 |
CN101852768A (zh) * | 2010-05-05 | 2010-10-06 | 电子科技大学 | 磁粉探伤环境下基于复合特征的工件伤痕识别方法 |
CN103175839A (zh) * | 2011-12-21 | 2013-06-26 | 北京兆维电子(集团)有限责任公司 | 胶印版材表面检测的处理方法及系统 |
CN104111029A (zh) * | 2013-04-19 | 2014-10-22 | 延锋伟世通汽车电子有限公司 | 用于电子产品加工检验的机器视觉检测系统 |
CN103245671A (zh) * | 2013-05-09 | 2013-08-14 | 深圳先进技术研究院 | 冲压件表面缺陷检测装置及方法 |
CN104458749A (zh) * | 2013-09-25 | 2015-03-25 | 中国科学院沈阳自动化研究所 | 基于机器视觉的铝型材表面缺陷实时检测系统 |
CN104952754A (zh) * | 2015-05-05 | 2015-09-30 | 江苏大学 | 基于机器视觉的镀膜后硅片分选方法 |
CN104966101A (zh) * | 2015-06-17 | 2015-10-07 | 镇江苏仪德科技有限公司 | 一种基于LabVIEW的太阳能电池片分类方法 |
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