CN105378399A - Temperature control system with programmable orit valve - Google Patents

Abstract

A temperature control system employing a two-phase refrigerant and a compressor/condenser loop is disclosed wherein a two phase refrigerant condenses within the load, the system including a thermo-expansion valve that simultaneously allows refrigerant flow through the thermo-expansion valve and regulates a temperature of the refrigerant in its two phase state ahead of the thermo-expansion valve, and wherein a flow through the thermo-expansion valve occurs only after a pressure and temperature upstream of the thermo-expansion valve reaches a final temperature and pressure.

Description

With the temperature control system of ORIT valve able to programme

The cross reference of related application

This application claims the provisional application No.61/845 submitted on July 12nd, 2013, the non-provisional application No.14/327 that on July 9th, 814 and 2014 submits to, the priority of 402, and the overall content of above-mentioned application is incorporated herein by reference.

Background technology

Thermal control units (TCU), such as heating and cooling system is settled under being widely used in selected variable temperature and is kept machining tool or other devices.The typical case of modern thermal control units or temperature control unit is found in the capital-intensive semiconductor manufacturing facility of height.Strict space requirement is forced to TCU, to save expensive floor space as far as possible.Reliability must be guaranteed, because if will obtain advantageous property, the large capital equipment costs of requirement does not allow shutdown in operation.For different manufacturing steps, target temperature can be changed, but must strictly be kept, until particular step is done.In much industry and normal domestic use refrigeration system, object temperature is reduced to selected level then temperature to be remained in not highly accurate temperature range.Therefore, even if realize reliable and long-life operation in these business systems, this performance also can not reach the demand of high-tech manufacturing machine.

In the modern TCU of major part, controlled by the actual temperature for executing means or processing that makes of intermediate heat transfer fluid, wherein in closed circulation, intermediate heat transfer fluid is recycled by equipment from TCU and again returns.Heat transfer fluid is selected, and this heat transfer fluid is stable in the opereating specification of the expectation lower than its boiling temperature under its minimum operational pressure.Heat transfer fluid also must have applicable viscosity and flow behavior in its opereating specification.TCU itself applies cold-producing medium (now normally the acceptable type of ecological environment) to provide any cooling kept required for selected temperature.TCU can carry out circulating refrigerant by conventional liquid phase/vapour phase circulation.In this circulation, first cold-producing medium is compressed to hot gas in high pressure level, is then condensed into fluid under pressure.Gas is converted into liquid within the condenser by being passed with cooling fluid close thermal contact, and wherein cooling fluid is cooled by surrounding fluid or directly by liquid that surrounding air cools.Then, liquid refrigerant reduces temperature by expanding into selected stress level through valve.This some liquid of evaporation that expand through carry out cooling refrigeration agent, force liquid to balance under low saturation pressure thus.After this expansion type cooling, cold-producing medium carries out heat exchange gradually to cool described heat transfer fluid with heat transfer fluid, so that keeping object equipment is in target temperature level.Then, cold-producing medium turns back to the pressure period with vapour phase.If need the temperature of the heat transfer fluid promoting circulation, then heating source must be provided to heat transfer fluid usually as required.As a rule, electric heater is arranged to exchange with the fluid thermal of circulation, and as required for electric heater is powered.

And be used quite extensively together with many variants, and development in the art has the cost of reduction and the reliability of raising for large-scale application to this TCU.Such as, in the refrigeration machine of large-scale production, estimate the operation of thousands of hours and the maintenance of relatively low cost.But this refrigeration system seldom can operate in wide temperature range, and the version of lower cost uses air-flow as direct heat-exchange medium usually for refrigeration content.

For commercial Application modern TCU must precise manipulation, usually require to be less than at selected temperature levels place ± 1 degree Celsius, and in wide region internal conversion to different level (such as, for specific installation from-40 degrees Celsius to+60 degrees Celsius).The mixture (being as a rule deionization form) that typical heat transfer fluid for this application comprises ethylene glycol and water or the special perfluorinate fluid sold with trade mark " Galden " or " Fluorinert ".These fluids and other fluids have been found to be widely used for these temperature varying systems highly reliably.But they do not have high heat transference efficiency, particularly perfluorinate fluid, and need to force some design requirements to TCU.Such as, pumping system needs energy and space, cycles through heat exchanger (HEX) and controlled tool or other equipment for making heat transfer fluid.Except these energy loss factors, in heat exchange, also there is energy loss because transmit heat to need temperature difference, and in conduit TCU being coupled to controlled plant or from the conduit of controlled plant in also meet with loss.Because space directly related around device to be cooled is of great rarity, so can require the physical length of conduit, this has not only introduced energy loss, also add the time required for temperature of stable machining tool.In a word, the volume of TCU is larger, more needs TCU to be located away from controlled device.The loss that fluid mass along flow path needs time and energy to introduce to compensate them.Any change of controlled device temperature, except affecting the heat transfer fluid that comprises in conduit, also must affect the conduit connecting TCU and controlled device.This is because heat transfer fluid and catheter wall close thermal contact.Therefore, the fluid occurred at the catheter tip place closest to controlled device arrives described device when temperature is substantially equal to the temperature of catheter wall, and the temperature of these catheter walls must change before controlled device may experience similar temperature change.

Say in this sense, simple refrigeration system may apply cold-producing medium when not having heat transfer fluid separately in the past, has considered that the phase transformation of applying during kind of refrigeration cycle stops the physical distance place outside circulation directly to use cold-producing medium.Conventional refrigerant relies on phase transformation to be used for energy storage and conversion inherently, so that often some place in kind of refrigeration cycle also must have suitable state or the mixing of liquid phase and vapour phase, for compressor and the stable of other assemblies and reliable operation.Saturated fluid such as cold-producing medium is used directly to present with variable heat load heat exchange the system problem being difficult to overcome.

Depart from tradition two-phase steam circulation be suggested for temperature controlled various system, comprise the people such as inventor KennethW.Cowans in U.S. Patent No. 7,178,353 and U.S. Patent No. 7,415,835 in describe those systems.This deviating from is temperature control system for novelty, and the cooling agent stream that the flow of refrigerant in hot gas pattern of pressure is identical with the vapor/liquid pattern of expansion combines by novel temperature control system.In closed loop vapor recycle refrigeration system, the depressed conjunction of pressurized heat of the cooling agent stream that some expand by this system and proper proportion.When generate in conjunction with when flow of refrigerant is in the heat exchanger (HEX), its can directly and load exchange heat energy.This system provides remarkable effect in raising heat transference efficiency and economy, and temperature levels change can be made rapid and accurate.Because these systems do not need intercoolant and pressure can promptly change, sometimes " directly will transmit saturated fluid " be called TDSF to simplify, this method provides different operations and economic advantages for many temperature control application.

Transfer the U.S. Patent No. 7 of current assignee hereof, 415,835 (its content is all herein incorporated by reference) introduce a kind of system, this system when can variations in temperature response quickly using liquid and the high heat transference efficiency of refrigerant mixture of steam.The advantage of this system is it eliminates the needs of a large amount of time delays to the temperature levels revising controlled device place, eliminates the needs of energy loss a large amount of in conduit and heat exchanger and to eliminate between the target temperature of varying level in conversion the needs of plenty of time delay.

Limited ramp system applies four kinds of patterns in their operations: tilt to rise, regulate, wait for and tilt to decline.In inclination ascending fashion, electrostatic chuck regulates temperature to be rapidly heated to higher temperature from one.In the adjustment stage, a large amount of radio frequency (RF) energy is cooled in process.In loitering phase, electrostatic chuck is conditioned and is in a certain temperature, but system is waken up to provide heat.In inclination drop mode, electrostatic chuck regulates temperature to be cooled to lower temperature rapidly from one.

The U.S. Patent application No.13/651 of the people such as Cowans, 631 (its full content is incorporated herein by reference) discuss the improvement of the steam circulation being used to refrigeration or heat exchange, it can be realized by amendment conventional steam cycles (Fig. 2), and it comprises added heat exchange step (Fig. 3) after the expansion of compression condensation cold-producing medium.Then, this heat energy exchanges and carries out between the cold-producing medium expanded and the backflow carrying out flash-pot, and along with controlled Pressure Drop, it introduces the rear condensation (EPC) strengthened.Rear condensation reduces the quality level (ratio of quality of steam and gross mass) being delivered to the cold-producing medium of evaporimeter, and improves the available heat carry-over factor between load energy commutation period.This means add the mobile bulk density by the quality of evaporimeter, and reduce the Pressure Drop of introduction, thus the heat trnasfer loss in minimization for evaporative device in low efficiency region.The controlled pressure provided by pressure-drop designs is fallen and is introduced substantially invariable pressure differential, to guarantee expecting the steam that those time durations of maximum heating do not expand and liquid flow.

The liquid/vapor mixture expanded was provided to the side of two-phase heat-exchanger before pressurization input is fed to evaporimeter, and heat exchanger also receives the output stream come from evaporimeter transmission after service load.The temperature that same order in two-phase mixture introduced by Pressure Drop valve is fallen as the quality overheated (masssuperheat) for using thermal expansion valve to regulate chilling temperature.Consequent temperature is fallen and is driven heat to flow in another stream from the stream of heat exchanger.Therefore, by introducing relatively little heat exchanger and pressure-drop designs in given temperature control unit, realizing overall gain is h.This causes the net gain of efficiency.

The TDSF system applying this principle adopts the fluid flowing of the supplement heat exchanger by being usually less than load comparatively speaking, and adopts Pressure Drop valve to drive the heat at described supplement heat exchanger two ends to make temperature difference can be used for, to introduce further condensation.Thisly be combined through action and affect TDSF Dynamic System uniquely, to limit and to eliminate the deviation of variations in temperature and to increase system effectiveness.The hot gas stream that can enter mixture by accurately valve regulation introduces the little change of temperature levels.

When needs temperature higher a little and/or when operating under low flow levels or lower power levels, situation is different, because pressurized hot gasses source presents the energy input (energy presented with the liquid vapour input of condensation after expanding input compared with) of larger potentiality, if so that temperature will be enhanced relatively little amount, then stability and precision may go wrong.In this case, the application of the rear condensation of enhancing changes the flow rate of pure gas medium at elevated pressures effectively, so that the control of temperature becomes more accurate, particularly at relatively high temperatures, wherein may need alternatively heating and cooling so that control temperature.Heat exchanger in flow path and Pressure Drop valve increase rate of change by smoothed temperature and guarantee that thermodynamical equilibrium carrys out the thermal energy exchange of compensating non-linear.Therefore, under TDSF environment, apply EPC guarantee that higher, stable temperature levels can more promptly be obtained, and the increments of change no matter related to and power level.

Fig. 3 illustrates heavy pump machanism (repumpingmechanism), and it is connected to check-valves between the input and output of the evaporimeter in steam circulation by pipeline and pump forms.Pump is in expectation or need to be used when increasing the heat transfer coefficient in evaporimeter.When pump is not opened, heavy pumping system do not installed by the better function picture of steam circulation.In the diagram, the rear condensation of heavy pumping system and enhancing is all used.In the system of combination, when the output at evaporimeter place promptly changes to another temperature from a temperature, heavy pump is opened.In this tilting procedure, the rear condensation increasing the enhancing of efficiency may not increase pitch velocity, particularly for the steam circulation of reequiping the EPC system comprising less compressor.This is because less compressor will reduce the current mass at evaporimeter two ends, and therefore there is less heat transfer coefficient, particularly when load temperature is changed.

Fig. 5 illustrates that record is about the chart of data using heat transfer coefficient in the evaporimeter of vapor recycle refrigerator of cold-producing medium R22 (it is the representative of other cold-producing mediums) or heat pump.These data illustrate how the rear condensation of enhancing increases steam cycle efficiency.The function of EPC is the sharply decline of two phase behaviours elimination heat transfer coefficients of use about 80 (80%) percent or more.As shown in Figure 5, heat transfer coefficient is very responsive to the mass velocity in evaporimeter.Curve characteristic shown in Fig. 5 illustrates the impact of speed.When liquid is boiled for gas, due to the fact that density of gas phase is quite low, therefore speed increases.Therefore, Fig. 5 illustrates when being boiled for gas characteristic increases until when this characteristic exceeds 80% due to liquid, heat transfer coefficient monotone increasing.After this, heat transfer characteristic sharply declines, thus becomes and be equal to the heat transfer characteristic of the pure gas in the exit of Conventional vaporizer.

Vapor recycle is used as the drive system in all temperature control units as discussed above.Based on U.S. Patent No. 7,178,353 and the U.S. Patent No. 7,415 of above-mentioned discussion, the temperature control system of the principle discussed in 835 relates to directly transmits saturated fluid or TDSF.TDSF is again U.S. Patent application No.13/651, the basis of limited slope (TR) system set forth in 631 (as mentioned above).That is, for heating the limited ramp system of electrostatic chuck degree of reaching a high temperature rapidly based on being used in condensation in electrostatic chuck, flowing through the TDSF of the thermal high power gas flow of valve from described electrostatic chuck, this valve is opened when input temp rises (ORIT valve or " ORIT "), and after this this valve regulates the temperature of electrostatic chuck.Due to the intrinsic property of saturated fluid, this system regulates temperature by controlled pressure.

Because limited ramp system is used to rapid heating (tilting to rise) load, so reach the pressure regulated before temperature at ORIT under, condensed gas will not flow through.This can cause fluid to turn back in load, thus reduces the region that can be used for condensed gas.Therefore, firing rate slows down.Heavy pumping system counteracts this deceleration.When the pumping of heavy pump is lived, it forces and flows through load, flows through electrostatic chuck in this case.Then the hot gas that this action allows into, therefore allows to heat more rapidly through condensation during electrostatic chuck at it.

Summary of the invention

(tilt to rise) when detecting that controlled ramp system is increased to higher temperature from lower temperature, close to the ramp rate calculated, (refrigeration work consumption adds that compressor horsepower adds the ESC of thermal measurement to apparent initial ramp speed, about 5 DEG C/sec), ramp rate reduces rapidly and manifestation mode is difficult to explain.Determine slope rises and be performed together with the condensation of refrigerant in load ESC, allow flow of refrigerant to pass through described ORIT valve until open (ORIT) valve when described inlet temperature rises simultaneously, and regulate the temperature of cold-producing medium in its two-phase state prior to ORIT.After the final high-temperature only reaching design prior to ORIT at Pressure/Temperature and high pressure, ORIT could be flowed through.Above-mentioned showing flows interrupt response slowing down in ramp rate.The liquid assembled in electrostatic chuck stops condensation, and no matter where liquid is prevented from flowing.The present invention increases the volume capacity in electrostatic chuck downstream, is collected in this capacity to allow liquid.When pressure reaches its desired value, be arranged according to design stream and pass through ORIT.In a preferred embodiment, fluid thermistor and Δ pressure valve are all included in system.

In order to avoid the gathering of system inner fluid, ORIT must be controlled as and little by little opening during the heating period, little by little enters container (capacitor) to allow fluid.Controlled slope is introduced into the operation of ORIT valve by the present invention, thus stops the gathering of liquid refrigerant during the heating period.Such as, ORIT valve can be programmed and open with the linearly of the pressure of the cold-producing medium under the pressure of the cold-producing medium under initial temperature and final temperature.By little by little and constantly opening ORIT valve during the heating period in pressure limit, can not mass accumulation in inclination ascending fashion or inclination drop mode.

In conjunction with the accompanying drawing of setting forth below and detailed description of preferred embodiment, of the present invention these improve and other advantages will better be understood.

Accompanying drawing explanation

Fig. 1 is the schematic diagram of limited slope temperature control system;

Fig. 2 is the schematic diagram of vapor recycle;

Fig. 3 is the schematic diagram of the vapor recycle with heavy pump;

Fig. 4 is the schematic diagram of the vapor recycle with the rear condensation weighing pump and enhancing;

Fig. 5 is the figure that heat transfer coefficient feature is shown;

Fig. 6 is with fluid collection with at the schematic diagram of ORIT valve outlet port with the temperature control system of liquid detecting in ORIT valve upstream; And

Fig. 7 is the schematic diagram with the limited slope temperature control system of fluid collection and liquid detecting in limited ramp system.

Detailed description of the invention

Fig. 1 illustrates temperature control system, it is characterized by limited ramping technique.Temperature control system utilizes four kinds of patterns: tilt to rise, regulate, wait for and tilt to decline.With reference to figure 1, set forth in more detail all below for often kind in these patterns.Although complete being described in U.S. Patent Publication No.2013/0036753 of this operation is disclosed (its full content is incorporated herein by reference), the details relevant with the present invention is discussed below.

In FIG, system comprises vapor recycle refrigeration system, and it has Conventional press 150, and high pressure high-temperature exports and is fed to condenser 130 as gas-pressurized by compressor 150.In environment temperature or close under environment temperature, refrigerant temperature is reduced to bulk fluid state by condenser 130.Condenser 130 can be liquid-cooled or ventilation type, and can adjustment in use cooling agent control or be not conditioned.The pressurized product carrying out the liquefaction of condenser 130 is imported into the thermal expansion valve of external balance (hereinafter referred to as TXV) 125.TXV125 has conventional inner septum (diaphragm) (not shown), and the position of inner septum determines the flow by TXV125.

The TXV125 expanded exports and is passed to as an input the sub-HEX135 led in the refrigerant path of evaporimeter, and this evaporimeter is load 100.In sub-HEX135, from fluid flowing and the cold-producing medium heat exchange returned from system load (evaporimeter) 100 of the expansion of TXV, wherein system load sucks intake line the most at last and is fed to compressor 150.Return pipeline is inputted to compressor 150 from load 100 by HEX135, therefore forms a part for sub-heat exchange loop, and a part for this sub-heat exchange loop is configured and is operated to provide the heat trnasfer of improvement.In the sub-loop to evaporimeter 100, first the effluent from TXV125 passes HEX135, then through pressure valve 145.Pressure valve 145 is introduced temperature and is fallen, and temperature is fallen close to the temperature difference between the cold-producing medium of evaporation and the load of cooling because evaporimeter 100 overheated be the key factor of stable operation.

In operation, the system of Fig. 1 provides basic compression and the condensation function of steam circulation, and the pressurize refrigerant of liquefaction is fed to TXV125, then controls to expand, and therefore controls the main amount of cooling water of cold-producing medium.The capillary with fixing hole and Pressure Drop can alternatively be used, but TXV125 is being designed to play larger function in high efficiency system.

In EPCHEX135, the basic change that thermodynamic cycle experience produces by usually circulating, come flash-pot 100 return stream and to evaporimeter 100 inlet flow between exchange heat energy.So, when cold-producing medium is through contiguous pressure valve 145, inlet flow temperature is lowered.In sub-heat exchange loop, output stream is effectively roughly equal with the heat energy returning stream.But this makes the rear condensation of enhancing become possibility.The refrigerant liquid of boiling provides enough coolings with the liquid on the opposite side of condensation HEX135, to reduce the enthalpy (enthalpy) of input cold-producing medium.Heat trnasfer is driven by temperature difference, and temperature difference is produced by the effect of Pressure Drop valve 145.The Pressure Drop of valve 145 reduces temperature.The combined effect of HEX135 and valve 145 reduces the characteristic (quality of steam accounts for the percentage of gross mass) being delivered to the cold-producing medium of load 100.

1. inclination ascending fashion:

Open magnetic valve 1S _c, 2S _c, 6S _cand close 3S _o, 4S _o, 7S _o, " load ESC " 100 is risen to high-temperature by inclination.Compressor exports and directly passes to ESC100 by this, and in ESC100, compressor exports condensation.Along with the beginning of tilting to rise, " E-ORIT " 100 has been set to ESC100 be the high-temperature of target simultaneously.After the cooling water from " condenser " 130 is heated by the heat of absorption refrigeration agent condensation during the previous adjustment stage, container 120 is heated by receiving described cooling water during normal regulating mode.In container 120, liquid passes through to store heat of vaporization in a reservoir after cold-producing medium flows through E-ORIT110.Hot gas by-passing valve 140 guarantees that the stream to compressor 150 is in the pressure of 4.9bar, and this is the compressor 150 maximum input pressure that can allow safely in this example.When detecting that the input pressure of compressor is less than 4.9bar to the sensing pipeline of HGBV, hot gas by-passing valve (" HGBV ") 140 is prompted to provide gas.When load ESC100 reaches design temperature, temperature sensor 160 transmits a signal to controller 170, then controller 170 shutoff valve 1S _cand open valve 3S _o, thus at relatively high temperatures system is converted to shaping modes.Valve 2S _cstay open, until flow through container 120 from all liq of load ESC100 appearance by E-ORIT110.After this, valve 4S _oopen and valve 2S _cclose.Attemperator (" DSV ") 180 cooling compressor input on demand.All be connected to HGBV140 and DSV180 after, receiver 190 is disposed in pipeline.Receiver 190 provides liquid refrigerant to DSV180.

2. the shaping modes between processing period:

At closedown 1S _cand use the RF energy being applied to load ESC100 to carry out processing then at valve 2S _cbe closed and valve 3S _oafter being opened, system operates as the TDSF of the advanced person using the main temperature provided by E-ORIT110 to control.By the operation of E-ORIT110, refrigeration is lowered to minimum, and wherein E-ORIT110 reduces the pressure of compressor input, until the refrigeration of ESC needs the output of cooled loop to balance.If regulated at the temperature of ESC100 lower than 15 DEG C, so magnetic valve 7S _obe allowed to open.This operation allows cooling water that condenser is cooled to 50 DEG C.This operation is required, to protect compressor 150: the input pressure being low to moderate 1.7bar can only be compressed to 4.9bar safely.

3. standby mode:

Just can there is a kind of situation after inclination is risen, wherein when ESC is in shaping modes, heat must be provided to load ESC100.If ESC to be maintained in standby mode and not to have RF to be provided to ESC, this can occur.In this case, the signal that ESC100 is cooled to lower than the adjustment temperature expected by temperature sensor 160 is provided to controller 170.Then, this signal is provided to temperature controller 200 by controller 170, and then temperature controller 200 provides pulse to valve 1S _c, suitable heat is provided to ESC100.When system is in shaping modes and does not provide enough RF energy to keep ESC100 at its design temperature, this operation will occur.As mentioned, when ESC processing is in standby mode, this will occur gradually.

4. inclination drop mode:

After regulating under high-temperature, adjust to lower temperature by means of only by E-ORIT110, just start to tilt to decline.By the action of E-ORIT valve, regulate and follow slope decline.If the low temperature expected is lower than 15 DEG C, then need some to the further amendment of the system of setting.Valve 6S _oneeds are closed, and this action allows hot gas by-passing valve 210 to make the temperature of cold-producing medium reach 0 DEG C, and this occurs under absolute 2.93bar for R134.The setting of 1.7bar meter allows some Pressure Drops between ESC100 and compressor 150 input.Cooling water valve must be allowed to control at 50 DEG C.Usually, from 0 DEG C to being greater than 70 DEG C, compressor can not compress R134A.

Fig. 6 illustrates the improvement for basic TR system discussed herein.As shown in the figure, mounted container 220 has entrance at top and has outlet in bottom.During the slope ascent stage of circulation, the fluid returned from ORIT valve collected by container 220.Liquid thermistor 230 is disposed in the exit of ORIT valve, with the existence of liquid in the output pipe detecting ORIT110.When shaping modes is waken up, thermistor 230 stops valve 4S _oopen.When there is fluid in container 220, fluid flows through ORIT valve 110, and arrives container 120 through pressure valve 240.When liquid empties completely from container 120, described valve 4S _obe allowed to open.When conduit acceptor max-flow, new Δ P valve 240 is set to be greater than and comprises valve 4S _othe Pressure Drop of described pipe ends.

Fig. 7 illustrates the overall controlled ramp system of the improvement using Fig. 6.The advantage of this system is that it keeps cold-producing medium to flow through the electrostatic chuck 100 being heated to higher temperature, can keep rapid heating in whole operating process.Be heated to after 70 DEG C at electrostatic chuck 100 from 0 DEG C, the present invention collects about 2.5 liters of cold-producing mediums.This can produce the problem of quality treatment, because liquid can not seethe with excitement continuously.Carrying out quality treatment is because ORIT110 valve during heating can not be opened, until two phase refrigerant heating reaches design temperature and pressure, under design temperature and pressure, ORIT is programmed to open.

Solution of the above problems is programmed to the setting of ORIT, and ORIT is moved in foreseeable mode by the pressure operated.Such as, for the R134A at time zero place, operating pressure can at 0 DEG C (2.93bar or 28.4psig), and tilt in a linear fashion and within 25 seconds, reach 70 DEG C of pressure (21.17bar or 296.5psig) through next.In this way, controlled ramp system rises in inclination and can operate easily with stable state during both decline of tilting, and in arbitrary patterns, therefore do not have quality to accumulate.

When cold-producing medium is in liquid form by accumulation, it must be stored in system in a gaseous form during liquid is not by those cyclic parts during accumulation, and the volume related to is huge, and allows this volume to be unpractical in available system.In elementary heat amechanical angle, basic TDSF system can use the over-all properties of compressor promptly to move heat load and makes its temperature increase and decline.Between steady state temperature processing period, also only can use the performance of sub-fraction compressor when there is no negative effect.This combination potentiality are basic advantages of TDSF system.These fundamental characteristics are used to make the most of the advantage in basic TR system.The disclosure has avoided the problem of accumulation liquid during the heating period of controlled ramp system.

The ORIT tilted controls (SOC) system to be of value to and to obtain rapid and predictable slope during variations in temperature to higher temperature.Load place can not condensation and collect cold-producing medium, thus produce barrier, and flowing can continue in a predictive manner.Only pressure and temperature prior to ORIT arrive design final high-temperature and pressure after, just flow through ORIT valve.

Although illustrated above or described various improvement and amendment, the present invention is not limited thereto, but all concepts be included in the scope of appended claim and means.

Claims (3)

1. a temperature control system, its application two phase refrigerant and compressor/condenser loop, described compressor/condenser loop have for circulating refrigerant under controllable temperature to there is the load evaporimeter of input terminal and outlet terminal and circulation from the input and output of the described cold-producing medium of described load evaporimeter, and there is known thermal capacity, described temperature control system comprises the substream loop of the performance for strengthening described system, comprises:

Sub-heat exchanger, it is coupled in between the described stream of the described output in described compressor/condenser loop and the input of described load evaporimeter, described sub-heat exchanger has the first flow path, described first flow path comprises reception from the input of the stream in described compressor/condenser loop and the output being couple to the input of described evaporimeter from described compressor/condenser loop, the described sub-heat exchanger length also comprised along described first flow path becomes the second flow path of parallel heat exchange relation, and the output from described sub-heat exchanger is coupled to the input of described compressor,

Described system also comprises: thermal expansion valve, and it is arranged in described first flow path, and described first flow path is between described sub-heat exchanger and the described input of described load evaporimeter; Fluid sensing apparatus, it is in the exit of described thermal expansion valve, for sensing the stream by described thermal expansion valve; Container, it is for collecting the condensed fluid of described thermal expansion valve upstream; And

Wherein cold-producing medium condensation in described load, until described thermal expansion valve allows cold-producing medium to flow through described thermal expansion valve and regulates the temperature of described cold-producing medium in its two-phase state at described thermal expansion valve simultaneously, and wherein only after the pressure and temperature of the upstream of described thermal expansion valve reaches final temperature and pressure, described expansion valve could be flowed through.

2. temperature control system according to claim 1, wherein said thermal expansion valve is the valve opened when inlet temperature rises.

3. temperature control system according to claim 1, also comprise: pressure valve, it is between described load and described compressor, wherein said pressure valve is parallel with solenoid, and described pressure valve be greater than max-flow by the pressure of the Pressure Drop at solenoid two ends described during described solenoid under open.