CN105372612B - A kind of method of Precise Diagnosis series connection SQUID failures - Google Patents
A kind of method of Precise Diagnosis series connection SQUID failures Download PDFInfo
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- CN105372612B CN105372612B CN201510898342.4A CN201510898342A CN105372612B CN 105372612 B CN105372612 B CN 105372612B CN 201510898342 A CN201510898342 A CN 201510898342A CN 105372612 B CN105372612 B CN 105372612B
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Abstract
A kind of method of Precise Diagnosis series connection SQUID failures, make each series connection SQUID input coil there is different induction respectively, Fourier transformation is carried out to series connection SQUID adjustment curves and obtains the spectrogram of adjustment curve, by the amplitude for analyzing corresponding different frequency, the peak value lacked in amplitude-versus-frequency curve, its corresponding SQUID is trouble point, the present invention can be gone out single SQUID quality in the SQUID that connects with fine-resolution and can determine that bad SQUID position, it may determine that each SQUID is in the modulation depth of the current offset point and each SQUID of analysis just bias point according to amplitude simultaneously.
Description
Technical field
The invention belongs to astrosurveillance technical field, suitable for series connection SQUID amplifiers and two-stage SQUID amplifiers
Preparation, properties of sample and fail-safe analysis, more particularly to a kind of method of Precise Diagnosis series connection SQUID failures.
Background technology
In recent years, SQUID can be used for the spy of biological magnetic field as one of current most sensitive detection of magnetic field device
Survey, can be used for the Non-Destructive Testing of wheel, magnetism of material research, Nuclear Magnetic Resonance Measurement and for reading the low of astrosurveillance
Warm particle detector etc..And the SQUID amplifier output signal voltages of single current biasing are relatively small, multiple phases can be passed through
Increase output voltage amplitude with the method for SQUID series connection, and its output voltage is can be directly connected to room temperature amplifier.It is right
Connected in multiple identical SQUID, it is traditional to judge that series connection number is difficult to the tool for determining bad SQUID by series impedance size
Body position, and when parallel resistance number is excessive, because process deviation may cause have bad SQUID not to be parsed out.
By contrasting series connection SQUID adjustment curves depth and single SQUID modulation depths, because the different corresponding modulatings of bias current are deep
The difference of degree, cause to be difficult to differentiate the number for whether having bad SQUID and the SQUID that connects, and can not equally determine bad
SQUID particular location.
The content of the invention
The shortcomings that in order to overcome above-mentioned prior art, it is an object of the invention to provide a kind of Precise Diagnosis series connection SQUID
The method of failure, it can accurately judge the quality of each SQUID in series connection SQUID.
To achieve these goals, the technical solution adopted by the present invention is：
A kind of method of Precise Diagnosis series connection SQUID failures, makes each series connection SQUID input coil have different electricity respectively
Sense, Fourier transformation is carried out to series connection SQUID adjustment curves and obtains the spectrogram of adjustment curve, by analyzing corresponding different frequency
Amplitude, the peak value lacked in amplitude-versus-frequency curve, its corresponding SQUID is trouble point.
Because adjustment curve is periodic function, wherein amplitude frequency curve is the Fourier transformation of adjustment curve, therefore frequency spectrum
In figure, amplitude and the modulation depth of the current offset point are proportional；According to width corresponding to single SQUID different bias points
Degree is different, selects the maximum bias point of respective amplitude, the point is the just bias point of the SQUID.
Specifically, can be by adjusting the difference of wire circle so that each SQUID input coil has different electricity respectively
Sense.
Compared with prior art, the present invention can be gone out single SQUID quality in the SQUID that connects and be can determine that with fine-resolution
Bad SQUID position, at the same according to amplitude may determine that each SQUID be in the current offset point modulation depth and minute
Analyse each SQUID just bias point.
Brief description of the drawings
Fig. 1 is series connection SQUID layout design schematic diagrames corresponding to the input coil of different induction of the present invention.
Fig. 2 is first SQUID detail view in Fig. 1 series connection SQUID.
Fig. 3 is second SQUID detail view in Fig. 1 series connection SQUID.
Fig. 4 is the 3rd SQUID detail view in Fig. 1 series connection SQUID.
Fig. 5 is the 4th SQUID detail view in Fig. 1 series connection SQUID.
In Fig. 2-Fig. 5, Josephson junction is represented with 7, input coil is represented with 8, wire is represented with 9, represents to feed back with 10
Coil.
Fig. 6 is present invention series connection SQUID preparation technology schematic diagram.
In Fig. 6, SiO is represented with 12, Si is represented with 2, Photoresist is represented with 3, Nb is represented with 4, Al/ is represented with 5
AlOx, Au is represented with 6.
Fig. 7 is the mono- SQUID amplifier circuit configurations figures of Fig. 1.
Fig. 8 is the adjustment curve figure of simulation parameter 1 of the present invention.
Fig. 9 is the amplitude-versus-frequency curve figure of simulation parameter 1 of the present invention.
Embodiment
Describe embodiments of the present invention in detail with reference to the accompanying drawings and examples.
As shown in figure 1, the present invention prepares the different string of mutual inductance between input coil and SQUID based on microelectronics planar technology
Join SQUID, by the way that the input coil of different induction is designed series connection SQUID on domain, it is different from SQUID mutual inductances.When
After preparing series connection SQUID and adjustment curve being obtained, Fourier transformation is carried out to adjustment curve and obtains the frequency of adjustment curve
Spectrogram；Amplitude by analyzing corresponding different frequency can be gone out single SQUID quality in the SQUID that connects with fine-resolution and can be really
Fixed bad SQUID position, and according to amplitude may determine that each SQUID be in the current offset point modulation depth and minute
Analyse each SQUID just bias point.
In Fig. 1, the SQUID of four series connection is indicated altogether, wherein, first SQUID is as shown in Fig. 2 its input coil
For a circle, second SQUID is as shown in figure 3, its input coil is two circles, and the 3rd SQUID is as shown in figure 4, its input coil
For three circles, the 4th SQUID is as shown in figure 5, its input coil is four circles.
It can be seen that in each SQUID, Josephson junction 7, input coil 8, wire 9 and feedback coil 10 are respectively provided with.Wherein,
Each SQUID Josephson junction 7, wire 9 is consistent with the structure of feedback coil 10, and the number of turns of only input coil 8 is different.
Its concrete implementation technique as shown in fig. 6, prepare SQUID technological process using five photoetching processes of autoregistration,
Five photoetching are carried out altogether.In Fig. 6 A, one layer of 400nm SiO is sputtered on silicon wafer layer 22Layer 1, first time photoetching is using double-deck
The purpose of positivity stripping glue photoetching process is to sputter trilamellar membrane, and Photoresist layers 3 are located at SiO2The top of layer 1, such as Fig. 6 B institutes
Show.Trilamellar membrane is sputtered afterwards introduces Nb4 and Al/AlOx5, as shown in Fig. 6 C and D.Second of photoetching peels off glue using negativity
NR9-3000PY is carried out, and its purpose is to define interface photoetching offset plate figure on trilamellar membrane surface, and is etched using SF6Gas, Al
Natural barrier can be used as, as shown in Fig. 6 E, Fig. 6 F, Fig. 6 G, Fig. 6 H.Third time photoetching by reactive ion etching and
80%H3PO4Wet etching is so as to empty out the through hole for upper/lower electrode connection, as shown in Fig. 6 I, Fig. 6 J, Fig. 6 K, Fig. 6 L.The
The purpose of four mask is sputtering Au parallel resistances 6, and base vacuum is 10E-4Pa during sputtering, in order to increase surface before Au is splashed
Adhesion needs to sputter a thin layer 8nm or so Ti, as shown in Fig. 6 M, Fig. 6 N, Fig. 6 O.5th photoetching sputter Top electrode and
Modulation coil, before sputtering, the oxygen that can be easily absorbing due to Nb surfaces in air turns into oxidation Nb, it is therefore desirable to carries out
Oxide layer technique, 350nm thickness Nb conductor layers are then sputtered, as shown in Fig. 6 P, Fig. 6 Q, Fig. 6 R.This time photoetching has two kinds
Layout design, one are common design, and it belongs to the series connection SQUID amplifiers of identical input coil, and this design can not
Judge single SQUID quality；Secondly the series connection SQUID amplifiers of the different input coils to be designed in the present invention are (different
The design layout of input coil is referred to as diagnosing coil domain, as shown in Figure 1).According to process above step, needs can be prepared
Sample.By carrying out Fourier transformation to the adjustment curve of the SQUID amplifiers containing diagnosis coil, amplitude versus frequency characte song is found out
The peak value lacked in line, its corresponding SQUID is trouble point, therefore may determine that single SQUID quality.
Specifically, each SQUID and modulation coil mutual inductance are directed in one group of series connection SQUID not with wrspice softwares
It is identical to be emulated.Shown in single SQUID amplifier circuit configurations Fig. 7, design load is：SQUID inductance is Lsq=74pH, biased electrical
Flow for Ibias=58.6 μ A, Ib1To flow through Josephson junction J1Bias current, Ib2To flow through Josephson junction J2Biased electrical
Stream, the critical current of knot is Ic=29.25 μ A, parallel resistance Rs1=Rs2=1.6 Ω, four SQUID input coil inductance point
Wei not Lin1=20nH, Lin2=80nH, Lin3=320nH, Lin4=1280nH coefficients of coup k is 0.2.
Then the mutual inductance size between SQUID and coil is respectively：Min1=0.24nH, Min2=0.48nH, Min3=0.96nH,
Min4=1.92nH.
Then corresponding to each periodic current is respectively：I1=8.499 μ A, I2=4.25 μ A, I3=2.13 μ A, I4=1.07 μ A.
Corresponding to each frequency is respectively：f1=117664 (1/A), f2=235328 (1/A), f3=470656 (1/A), f4
=941312 (1/A).
Obtained adjustment curve is emulated as shown in figure 8, carrying out the amplitude versus frequency characte that Fourier transformation obtains to the adjustment curve
Curve is as shown in Figure 9.
According to simulation result it can be seen that corresponding f in amplitude-versus-frequency curve1, f2, f3, f4Four points have peak value,
If wherein f1There is no peak value, then it is bad to correspond to the SQUID of an only circle input coil, wherein can pass through f1Corresponding peak value
Judge only circle SQUID modulation depth；If f2There is no peak value, then correspond to the SQUID of two circle input coils to be bad, can be with
Pass through f2Corresponding peak value judges only circle SQUID modulation depth, therefore can obtain simulation result correctly and can pass through
Peak value whether there is and its size judges single SQUID quality and modulation depth.
Claims (3)
- A kind of 1. method of Precise Diagnosis series connection SQUID failures, it is characterised in that distinguish each series connection SQUID input coil With different induction, Fourier transformation is carried out to series connection SQUID adjustment curves and obtains the spectrogram of adjustment curve, passes through analysis pair The amplitude of different frequency is answered, SQUID corresponding to the peak value lacked in spectrogram is trouble point.
- 2. according to claim 1 Precise Diagnosis series connection SQUID failures method, it is characterised in that in spectrogram, amplitude with The modulation depth of current offset point is proportional, different according to amplitude corresponding to single SQUID different bias points, selection pair The maximum bias point of amplitude is answered, the point is the just bias point of the SQUID.
- 3. the method for Precise Diagnosis series connection SQUID failures according to claim 1, it is characterised in that by adjusting coil turn Several difference so that each SQUID input coil has different induction respectively.
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| CN110764037B (en) * | 2019-11-11 | 2021-04-13 | 吉林大学 | Automatic recovery method and circuit for lock loss detection of aviation high-temperature superconducting full-tensor magnetic gradient instrument |
| CN111190125A (en) * | 2020-01-06 | 2020-05-22 | 长沙理工大学 | Discrimination method for detecting turn-to-turn insulation fault of air-core reactor by pulse voltage method based on FFT transform domain characteristics |
Citations (3)
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| CN102175980A (en) * | 2011-02-21 | 2011-09-07 | 吉林大学 | High-temperature superconducting magnetometer measurement and control device capable of automatically locking work point |
| CN104808156A (en) * | 2015-05-05 | 2015-07-29 | 中国科学院上海微系统与信息技术研究所 | SQUID (superconducting quantum interference device) magnetic sensor and best operating point locking method |
| CN105022005A (en) * | 2014-04-23 | 2015-11-04 | 中国科学院上海微系统与信息技术研究所 | SQUID magnetic sensor measuring sensitivity enhancement method, device and system |
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| JP2869776B2 (en) * | 1995-06-06 | 1999-03-10 | 株式会社超伝導センサ研究所 | SQUID magnetometer |
| JP5849282B2 (en) * | 2011-09-09 | 2016-01-27 | 国立大学法人秋田大学 | Method for increasing resolution of scanning SQUID microscope image |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175980A (en) * | 2011-02-21 | 2011-09-07 | 吉林大学 | High-temperature superconducting magnetometer measurement and control device capable of automatically locking work point |
| CN105022005A (en) * | 2014-04-23 | 2015-11-04 | 中国科学院上海微系统与信息技术研究所 | SQUID magnetic sensor measuring sensitivity enhancement method, device and system |
| CN104808156A (en) * | 2015-05-05 | 2015-07-29 | 中国科学院上海微系统与信息技术研究所 | SQUID (superconducting quantum interference device) magnetic sensor and best operating point locking method |
Non-Patent Citations (2)
| Title |
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| Fabrication and Measurement of Nb-based Josephson Junction and SQUID for Low-Power Superconducting Circuits Application;Hao LI et.al;《低温物理学报》;20140630;第36卷(第3期);第161-166页 * |
| 高温超导双晶结dc SQUID的I~V特性仿真研究;漆汉宏 等;《系统仿真学报》;20040731;第16卷(第7期);第1421-1424页 * |
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