CN105372526B - The test method of the high frequency electromagnetic property of Magnetic Nanowire Arrays - Google Patents
The test method of the high frequency electromagnetic property of Magnetic Nanowire Arrays Download PDFInfo
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- CN105372526B CN105372526B CN201510758343.9A CN201510758343A CN105372526B CN 105372526 B CN105372526 B CN 105372526B CN 201510758343 A CN201510758343 A CN 201510758343A CN 105372526 B CN105372526 B CN 105372526B
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- anodic alumina
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Abstract
The test method of the high frequency electromagnetic property of Magnetic Nanowire Arrays, is related to electromagnetism measuring technology.The present invention comprises the following steps：1) one-dimensional magnetic nano-wire array is prepared, obtains filling the porous anodic alumina template of magnetic material in nano aperture；2) isolation film of annular is sticked in the front of porous anodic alumina template；3) the soluble polymer protective layer of last layer is integrally coated at the porous anodic alumina template back side；4) porous anodic alumina template is put into making choice property in NaOH solution to corrode；5) porous anodic alumina template is put into the solution of soluble polymeric thing protective layer, removes the polymer protective layer at the porous anodic alumina template back side；6) using vector network analyzer to carrying out high frequency electromagnetic property test through the processed sample of step 5).The method high certainty of measurement of the present invention, test frequency range is wide, and sample preparation is simple, and can obtain multiple dielectric parameter and complex permeability at the same time.
Description
Technical field
The present invention relates to electromagnetism measuring technology.
Background technology
Orderly Magnetic Nanowire Arrays have highly important application, such as high density magnetic recording, microwave magnetic in many fields
Device, electromagnetic noise suppressing thin film etc..The high frequency performance (magnetic conductivity high spectrum, dielectric constant high spectrum) of magnetic material is to magnetism
The performance of device has vital influence.At present, the working frequency of many electronic devices is higher than 1GHz, as circulator,
Isolator, phase shifter etc..For these magnetic microwave devices, if continuing to use traditional Ferrite Material, it is necessary to which additional permanent magnet comes
Apply bias magnetic field, this miniaturization to microwave magnetic material is very unfavorable.Ferromagnetic Nanowire Arrays have the strong shape each
Anisotropy, causes them to have larger remanent magnetization, because without using additional permanent magnetic field in microwave device, i.e.,
Effect with automatic biasing.In addition, can be adjusted as needed when device designs the material category of Ferromagnetic Nanowire Arrays,
The spacing of array structure (such as draw ratio) and nanostructured adjusts the working frequency of microwave device and loss.At present, it is one-dimensional
Magnetic Nano array of structures has started in automatic biasing circulator, electromagnetic noise eliminator, integrated waveguide isolator, phase shifter and micro-
Paid close attention in the high frequency such as wave filter field.When designing these high-gradient magnetism devices, it is necessary to know used magnetic nanometer in advance
The high-frequency electromagnetic parameter (such as magnetic conductivity high spectrum, dielectric constant high spectrum) of array of structures.However, still come at present without effective ways
The high frequency performance of the orderly Magnetic Nanowire Arrays based on AAO templates is measured, it is very frangible that this is primarily due to AAO templates.This
Patent proposes an effective solution method.
Ferromagnetic metal nano-wire array may be considered magnetic thick film material of the direction of easy axis perpendicular to film surface.High frequency
The test method of magnetic conductivity can be divided into three kinds of free-space Method, resonator and transmission/reflection/angle method by test philosophy, wherein freely empty
Between method because required sample size is not suitable for greatly very much the test of ferromagnetic metal nano tube/linear array film.Although Resonant-cavity Method can be high
The complex dielectric permittivity and complex permeability of magnetic material are measured to precision, but a resonator can only measure a Frequency point, nothing
Method frequency sweep, and it is more demanding to the size precision of sample.Transmission/reflection/angle method is by measuring electromagnetic wave in magnetic material
Scattering parameter derives electromagnetic parameter, it is the most commonly used method of present characterization material electromagnetic parameter.According to measurement method
Difference, transmission/reflection/angle method can be divided into the several methods such as rectangular waveguide, strip line, microstrip line and coaxial line again.Micro-strip collimation method needs
Metal micro-strip line is made in template surface, and is difficult to Inversion Calculation and obtains complex dielectric permittivity and complex permeability.The survey of coaxial axis method
Accuracy of measurement is high, and test frequency range is wide, and can obtain dielectric spectra and magnetic conductivity spectrum at the same time, but the test request annular test sample is interior
Outer diameter is matched with coaxial linear dimension.AAO templates currently used for preparing nano-structure array it is very thin it is frangible be difficult to, mesh
The preceding report that can be seen is to be dissolved out Magnetic Nanowire Arrays from AAO templates, is made and is received containing complete disorder distribution
The composite material of rice noodles, then ring-type test sample is made in the composite material, its high-frequency electrical is finally measured using coaxial axis method
Magnetic parameter.It is clear that the electromagnetic parameter obtained in this way can not represent the performance of orderly Magnetic Nanowire Arrays,
The use of these parameter designing high-gradient magnetism devices is problematic.The method of present patent application protection ensure that nanometer in measurement
The high-sequential of line and the integrality of AAO templates, the orderly Magnetic Nanowire Arrays of the high frequency performance real embodiment obtained
Electromagnetic performance.
The content of the invention
The technical problem to be solved by the invention is to provide one kind realization easy to process, high certainty of measurement, test frequency range are wide
Magnetic Nanowire Arrays high frequency electromagnetic property test method.
The present invention solves the technical solution that the technical problem uses, the high frequency electromagnetic property of Magnetic Nanowire Arrays
Test method, comprises the following steps：
1) porous anodic alumina template of bilateral is used, one-dimensional magnetic nanometer linear array is prepared using electrochemical deposition method
Row, obtain filling the porous anodic alumina template of magnetic material in nano aperture；
2) stick the isolation film of annular in the front of porous anodic alumina template, the internal diameter and outside diameter of isolation film with it is follow-up
The internal-and external diameter of coaxial line waveguide is consistent used in test；
3) the soluble polymer protective layer of last layer is integrally coated at the porous anodic alumina template back side；
4) porous anodic alumina template with isolation film and polymer protective layer is put into NaOH solution and is selected
Selecting property is corroded, and removes the part beyond the region of isolation film protection；
5) porous anodic alumina template for obtaining step 4) is put into the solution of soluble polymeric thing protective layer, is removed
The polymer protective layer at the porous anodic alumina template back side, finally obtains the loop sample with isolation film；
6) using vector network analyzer to carrying out high frequency electromagnetic property test through the processed sample of step 5).
Further,
In step 2), isolation film is by PET film and EVA glue-lines with 1:1 ratio composition, thickness 50-430um；
In step 3), polymer protective layer is nail polish, polymethylacrylic acid or the polystyrene of water white transparency；
In step 4), NaOH solution concentration is 1-5mol/L.
The beneficial effects of the invention are as follows：Coaxial line waveguide measurement can be directly used in by being obtained using the method for selective corrosion
Both ring sam, deposition has the Magnetic Nanowire Arrays of high-sequential in the AAO Both ring sams.Measure the high-frequency electromagnetic of the sample
The performance of nano-wire array used during microwave components design of the parameter energy true representations based on AAO templates.Using coaxial line
Waveguide method is tested, high certainty of measurement, and test frequency range is wide, and sample preparation is simple, and can be obtained multiple dielectric parameter at the same time and be answered
Magnetic conductivity.Test sample when being used to prepare annular AAO templates due to being solved by the protection of plastic packaging film it is very thin it is frangible be difficult to plus
The shortcomings that work, be successfully realized the test of the electromagnetic performance to one-dimensional magnetic nano-array.
Brief description of the drawings
Fig. 1 is the machining sketch chart that the selective corrosion method that the present invention uses prepares loop sample；Sequence number in figure：1 template,
2 plastic packaging films, 3 high polymer protective layers；
Fig. 2 is the pictorial diagram of the loop sample prepared in embodiment；
Fig. 3 is the front shape appearance figure for being used to deposit the anodic oxidation aluminium formwork of Fe nanowire array in embodiment；
Fig. 4 is the sectional view of the anodic oxidation aluminium formwork that deposition has Fe nanowire array in embodiment；
Fig. 5 is the shape appearance figure of Fe nanowire prepared in embodiment；
Fig. 6 is the test that the complex dielectric constant (permittivity) of Fe nanowire array in embodiment changes with frequency
As a result；
Fig. 7 is the test knot that the complex permeability (permeability) of Fe nanowire array in embodiment changes with frequency
Fruit.
Embodiment
Using the high frequency electromagnetic property of coaxial line waveguide approach test one-dimensional magnetic nano-structure array, including following step
Suddenly：
Step 1, the porous anodic alumina template using bilateral, one-dimensional magnetic nanometer is prepared using electrochemical deposition method
Linear array, the sample of gained are the porous anodic alumina template that magnetic material is filled in nano aperture.
The porous anodic alumina template refers to：The nano aperture regular appearance and positive and negative of template are consistent, its hole
Spacing and pore size can be selected according to actual conditions, be deposited on the nano-wire array in hole perpendicular to template surface.
Step 2, the front of the porous anodic alumina template containing Magnetic Nanowire Arrays obtained to step 1 stick one
The plastic packaging film (i.e. isolation film) of layer annular.
The plastic packaging film is by PET film and EVA glue-lines with 1:1 ratio composition, general thickness 50-430um, internal diameter and
Outside diameter is consistent with the internal-and external diameter of coaxial line waveguide used in follow-up test, internal diameter 3mm, outside diameter 7mm.
Step 3, integrally coat the soluble polymerization of last layer to the processed porous anodic alumina template back side of step 2
Thing protective layer, and polymer protective layer is kept to drying regime.
The polymer protective layer refers to the corruption of the alkali resistants such as the nail polish, polymethylacrylic acid, polystyrene of water white transparency
The polymer that erosion can be dissolved by acetone and other organic solvent.
Step 4, above-mentioned steps are handled after sample to be put into the NaOH solution of concentration 1-5mol/L making choice property rotten
Erosion.After reacting after a while, the region of no plastic packaging film protection will be dissolved.
Step 5, the sample for obtaining step 4 are put into acetone soln, and the polymer protective layer of template back surface is dissolved, most
The loop sample of plastic packaging plastic packaging film protection, the sample clamp of coaxial waveguide used in the internal-and external diameter of this loop sample and test are obtained eventually
Internal-and external diameter it is consistent, internal diameter 3mm, outside diameter 7mm.
Step 6, using vector network analyzer to carrying out high frequency electromagnetic property test through the processed sample of step 5.
The high frequency electromagnetic property test refers to：Using transmission/reflection/angle method, sample is carried out using coaxial line waveguide
Test, the complex dielectric constant (ε of sample is obtained by scattering parameter (S parameter) inverting of electromagnetic waver=ε/-jε//) and plural number
Magnetic conductivity (μr=μ/-jμ//) with the variation relation of frequency.
Embodiment：
The use of pitch of holes is 100nm, aperture 80nm, thickness is the porous anodic alumina template of 70um or so bilateral,
One-dimensional Fe nanowire array is prepared using the methods of electrochemical deposition, electrolyte prescription is the FeSO of 0.2mol/L4, 0.5g/L resists
Bad hematic acid, uses H2SO4Adjust pH=3-4, sedimentation time 3h.The sample of gained is pair that Fe nanowire is filled with hole
Logical porous anodic alumina template.Stick one in porous anodic alumina template front first after Fe nanowire array has been deposited
Layer thickness be 50um annular plastics card-protecting film, its outside diameter is about 7mm, and internal diameter is about 3mm, with follow-up test used in coaxial line ripple
The internal-and external diameter led is consistent.The overleaf nail polish of overall coating last layer water white transparency, and keep to drying regime.Then sample
Product are put into the NaOH solution of 1mol/L, and about after reaction 20 minutes, the region of no plastic packaging film protection will be dissolved.
After falling the polymer protective layer at the back side with acetone solution again, you can obtain the loop sample of plastic packaging film protection, this loop sample
Internal-and external diameter it is consistent with the internal-and external diameter of coaxial waveguide used in test.Finally utilize S parameter vector network analyzer (Agilent
N5230A high frequency electromagnetic property test) is carried out to this loop sample, the frequency range of test is 0.5-18GHz, using coaxial line
Waveguide method tests sample.
Claims (2)
1. the test method of the high frequency electromagnetic property of Magnetic Nanowire Arrays, it is characterised in that comprise the following steps：
1) porous anodic alumina template of bilateral is used, one-dimensional magnetic nano-wire array is prepared using electrochemical deposition method,
Obtain filling the porous anodic alumina template of magnetic material in nano aperture；
2) isolation film of annular, the internal diameter and outside diameter of isolation film and follow-up test are sticked in the front of porous anodic alumina template
The internal-and external diameter of coaxial line waveguide used is consistent, and isolation film thickness is 50-430um；
3) the soluble polymer protective layer of last layer is integrally coated at the porous anodic alumina template back side；
4) porous anodic alumina template with isolation film and polymer protective layer is put into making choice property in NaOH solution
Corrosion, removes the part beyond the region of isolation film protection, NaOH solution concentration is 1-5mol/L；
5) porous anodic alumina template for obtaining step 4) is put into the solution of soluble polymeric thing protective layer, is removed porous
The polymer protective layer at the anodic oxidation aluminium formwork back side, finally obtains the loop sample with isolation film；
6) using vector network analyzer to carrying out high frequency electromagnetic property test through the processed sample of step 5).
2. the test method of the high frequency electromagnetic property of Magnetic Nanowire Arrays as claimed in claim 1, it is characterised in that
In step 2), isolation film is by PET film and EVA glue-lines with 1:1 ratio composition；
In step 3), polymer protective layer is nail polish, polymethylacrylic acid or the polystyrene of water white transparency.
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| CN109904308B (en) * | 2019-03-14 | 2020-07-03 | 南京大学 | Method for realizing electric control magnetic read-write storage function through nanowire ring structure |
| CN113281573A (en) * | 2021-05-21 | 2021-08-20 | 哈尔滨理工大学 | Method for testing electromagnetic performance of nano ferroferric oxide |
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| CN1397932A (en) * | 2002-07-29 | 2003-02-19 | 南京大学 | Fe-Co alloy nanoline array as high-density magnetic perpendicualr recording material and its preparing process |
| DE10231925A1 (en) * | 2002-07-10 | 2004-01-22 | Horst Dr. Ahlers | Reactor system for use in (bio)chemical research, has a miniaturized reactor array, with a magnetic field array under and parallel to it, fitted with magnets to manipulate magnetic particles in reaction clusters at the reaction sites |
| CN101944646A (en) * | 2010-07-15 | 2011-01-12 | 电子科技大学 | Integrated microstrip circulator and preparation method thereof |
| CN104087976A (en) * | 2014-07-02 | 2014-10-08 | 河北工业大学 | Preparation method of Sm-Co alloy amorphous magnetic nanowire array |
| CN104111378A (en) * | 2013-04-19 | 2014-10-22 | 电子科技大学 | Microwave material electromagnetic parameter and shielding performance slab line test method |
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| JP5103712B2 (en) * | 2005-06-16 | 2012-12-19 | 富士通株式会社 | Method for producing nanohole structure |
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|---|---|---|---|---|
| DE10231925A1 (en) * | 2002-07-10 | 2004-01-22 | Horst Dr. Ahlers | Reactor system for use in (bio)chemical research, has a miniaturized reactor array, with a magnetic field array under and parallel to it, fitted with magnets to manipulate magnetic particles in reaction clusters at the reaction sites |
| CN1397932A (en) * | 2002-07-29 | 2003-02-19 | 南京大学 | Fe-Co alloy nanoline array as high-density magnetic perpendicualr recording material and its preparing process |
| CN101944646A (en) * | 2010-07-15 | 2011-01-12 | 电子科技大学 | Integrated microstrip circulator and preparation method thereof |
| CN104111378A (en) * | 2013-04-19 | 2014-10-22 | 电子科技大学 | Microwave material electromagnetic parameter and shielding performance slab line test method |
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