CN105352937A - Novel robot and making method thereof - Google Patents

Novel robot and making method thereof Download PDF

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Publication number
CN105352937A
CN105352937A CN201510867477.4A CN201510867477A CN105352937A CN 105352937 A CN105352937 A CN 105352937A CN 201510867477 A CN201510867477 A CN 201510867477A CN 105352937 A CN105352937 A CN 105352937A
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organic
evaporation
substrate
pet
ito
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钟林超
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/04—Viewing devices

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  • Engineering & Computer Science (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a novel robot and a making method thereof. A gas detection module is installed outside the robot, and on the basis of an organic electroluminescence gas sensor, and creative optimization design is conducted on the gas detection module from the aspects of component materials of the sensor, making technology, structure and the like. Under the synergistic effect of various factors, unexpected sensitivity is achieved, the robot can conduct gas detection on the surrounding environment, and the novel robot has great market prospects.

Description

A kind of novel robot and preparation method thereof
Technical field
The invention belongs to robot field, more specifically relate to a kind of novel robot and preparation method thereof.
Background technology
Robot is a kind of installations that can automatically perform work, generally be made up of topworks, drive unit, pick-up unit and control system and complicated machinery etc., it both can accept mankind commander, the program of layout in advance can be run again, its task assists or replace the work of human work, such as production, building or the work of danger.
Robot in the work environment, often runs into the situations such as inflammable and explosive hazardous gas leakage, but robot does not generally possess the measuring ability to hazardous gas in environment at present.
Summary of the invention
Based on background technology Problems existing, the invention provides a kind of novel robot and preparation method thereof, it is characterized in that, at the outside installing gas detection module of robot, organic electroluminescence device and gas sensor, based on organic electroluminescent gas sensor device, combine by this gas detection module.
This gas detection module is achieved through the following technical solutions:
Based on a gas sensor for organic electroluminescent, it is made by the following method:
Organic electroluminescent gas sensor preparation technology relates to thin film technique and film treatment process etc., mainly includes the techniques such as the preparation of the organic film of machine Small molecular or high molecular polymer etc., the preparation of metal electrode and device package;
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then compound biological enzyme liquid (optional) is put into successively, in deionized water, acetone, ethanol, each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 0.2-0.5g/L, cellulase 0.9-1.3g/L, polyphenol oxidase 0.05g/L, and all the other are deionized water;
After utilizing biological membrane pre-service, significantly can increase the susceptibility of gas sensor.
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:6 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 3.5 μm, 2 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 7:1, obtains the Cr:Al electrode that thickness is 3 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m 2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.
Usefulness of the present invention is:
The present invention from the assembly material of the gas sensor of organic electroluminescent, manufacture craft, the many-sides such as structure have carried out creationary optimal design, under the synergy of many factors, reach unexpected sensitivity, can detect trace nitrogen dioxide, carrier mobility is for being greater than 9.8 × 10 -2cm 2/ Vs, fast response time, release time is short, can 100% recover; There are very large market outlook.
Accompanying drawing explanation
Fig. 1 is robot 10 structural representation, at the outside installing gas detection module 20 of robot.
Fig. 2 is the device architecture schematic diagram of gas detection module 20.
Embodiment
Gas sensor relates to the multi-disciplinary new and high technologies such as physics, chemistry, material, electronic technology.Gas sensor refers to the device or device that gaseous species to be measured or concentration are converted to the output electric signal having certain rule and relation with it.Gas sensor has a wide range of applications and important value in productive life.In the industrial production, can be used for detecting the flammable explosive gas such as rock gas, hydrogen, oxygen; In civilian, can be used for detecting the harmful gases such as vehicle exhaust.
It is different with sensitive mechanism that gas sensor presses gas sensitive, can be divided into: the gas sensor such as Electrolyte type, galvanochemistry type of semi-conductor type, catalytic combustion type, solid.
In solid electrolyte, conductive ion also can be able to be negative ion for kation, and it is mainly determined by the defect of material itself.
Stabilizing zirconia/yttrium stable zirconium oxide (YSZ) is the most useful a kind of solid electrolyte, under normal temperature, zirconia (ZrO2) is a kind of monoclinic crystal, ionic conductivity is very low, when being doped into appropriate divalence or trivalent cubic symmetry oxide (Y2O3, MgO, CaO, Sc2O3) processes it, ionic conductivity can be shown, there is high oxide ion conduction rate, excellent chemical stability and thermal stability and mechanicalness, be widely used in Solid Oxide Fuel Cell and gas sensor domain.
Organic electroluminescent phenomenon and corresponding research start from the sixties in last century, and organic electroluminescent is through development for many years, gradually to industrialized development, in the world, especially more active with Japan, American Studies.The features such as organic electroluminescence device has active illuminating, fast response time, visual angle is wide, cost is low.
The basic structure of organic electroluminescence device is thin by one and organic material layer sandwiches wherein for positive pole and metallic cathode by the ITO of transparent semiconductor character as sandwich, and organic material generally comprises hole transmission layer, luminescent layer and electron transfer layer.It is a kind of pouring-in luminescent device, and to meet luminescent layer formation exciton from anode injected holes with from negative electrode injected electrons, radioactive transition occurs exciton compound, namely reaches the luminescence of organic material.
Organic electroluminescent gas sensor comprises gas sensing thin film part and organic electroluminescent part.
The sensitive thin film of gas sensor is a complicated process to gas molecule to be measured, comprising to the physisorption of gas molecule and chemisorption.This wherein theoretical side can use the explanations such as grain-boundary barrier model, space-charge model, redox model.
Organic Light Emitting Diodes can simply be described as: outside under alive effect, after the electronics of negative electrode and anode and hole overcome the charge carrier potential barrier between electrode and organic material, be injected into organic layer and transmit wherein, their compounds after luminescent layer meets release energy, and by energy transferring to luminous organic material molecule, luminescent material molecule obtains after energy can be energized into excited state from ground state, and it just can send light when ground state or energy lower state are returned in excited state transition.
Organic electroluminescence device and gas sensor, based on organic electroluminescent gas sensor device, combine by this programme.
The design of this technological invention is mainly for some consideration following:
Consider organic electroluminescence device material and gas sensor gas sensitive and associated materials performance:
(1) experiment adopts oxine aluminium (Alq3) to hold concurrently electron transport material as the luminescent material of device, based on following consideration: a) Alq3 is a kind of stable metal complex, between organism and inorganics, itself has electron transport property; B) Alq3 has good film forming, high glass transition temperature and good chemical stability; C) Alq3 transmitting green light is higher compared to brightness Red and blue light;
(2) adopt compliant conductive plastics ITO-PET as substrate, it has the features such as softness, flexible, lightweight and cost are low, and is conducive to large-scale production;
(3) adopt porous structure YSZ material to be hole transmission layer, improve hole transport rate;
(4) adopt micro fabrication to prepare mesh-like Cr:Ag electrode, increase gas to be measured and gas sensitive contact area, and then increase its susceptibility to gas concentration, kind.
For working out the gas sensor having organic electro luminescent performance, having prepared structure is: the device of ITO-PET/ porous YSZ/Alq3/ CuPc (CuPc)/Cr:Ag, and structure as shown in drawings;
This device is under impressed voltage effect, and hole is injected through YSZ hole transport layer transports to luminescent layer Alq3 from ITO, and electronics is transferred in Alq3 layer through Cr:Ag electrode injection through CuPc layer, electronics and hole-recombination, and electroluminescent organic material Alq3 can send green glow; After device gaseous surrounding environment changes, such as NO 2concentration increases, and the concentration of the gas molecule of CuPc absorption changes thereupon, causes its conductivity to change, finally causes the change of luminescent layer Alq3 luminescence efficiency, and namely device detects place environmental gas concentration by the luminescence efficiency of luminescent layer.
Fig. 1 is robot 10 structural representation, at the outside installing gas detection module 20 of robot.
Fig. 2 is the device architecture schematic diagram of gas detection module 20.
Embodiment 1:
A kind of novel robot, at the outside installing gas detection module of robot, this gas detection module is made by the following method:
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then puts into compound biological enzyme liquid successively, in deionized water, acetone, ethanol, and each ultrasonic 65min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 2.5g/L, cellulase 1.3g/L, polyphenol oxidase 0.06g/L, and all the other are deionized water;
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 4:1 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 5 μm, 2 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 8:3, obtains the Cr:Al electrode that thickness is 3.5 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m 2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.Detection limit 0.1ppmNO 2under concentration, luminosity is 18cd/m2,30ppmNO 2under concentration, luminosity is 35cd/m 2, 50ppmNO 2under concentration, luminosity is 39cd/m 2, 100ppmNO 2under concentration, luminosity is 162cd/m 2, 150ppmNO 2under concentration, luminosity is 288cd/m 2.
Embodiment 2:
A kind of novel robot, at the outside installing gas detection module of robot, this gas detection module is made by the following method:
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then puts into deionized water, acetone, ethanol successively, each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 390 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:2 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 5 μm, 2 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.9 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 8:1, obtains the Cr:Al electrode that thickness is 2.6 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.Detection limit 1ppmNO 2under concentration, luminosity is 18cd/m 2, 50ppmNO 2under concentration, luminosity is 51cd/m2,150ppmNO 2under concentration, luminosity is 52cd/m 2.
Embodiment 3:
A kind of novel robot, at the outside installing gas detection module of robot, this gas detection module is made by the following method:
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then puts into compound biological enzyme liquid successively, in deionized water, acetone, ethanol, and each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 0.2g/L, cellulase 1.3g/L, polyphenol oxidase 0.25g/L, and all the other are deionized water;
The enzyme of described three kinds of enzymes is lived and is 6000u/g.
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:3 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 5 μm, 2.3 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 3:1, obtains the Cr:Al electrode that thickness is 3 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m 2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.Detection limit 0.1ppmNO 2under concentration, luminosity is 18cd/m2,30ppmNO 2under concentration, luminosity is 35cd/m 2, 50ppmNO 2under concentration, luminosity is 62cd/m 2, 100ppmNO 2under concentration, luminosity is 168cd/m 2, 150ppmNO 2under concentration, luminosity is 209cd/m 2.
Embodiment 4:
A kind of novel robot, at the outside installing gas detection module of robot, this gas detection module is made by the following method:
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then puts into compound biological enzyme liquid successively, in deionized water, acetone, ethanol, and each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 0.5g/L, cellulase 0.9g/L, polyphenol oxidase 0.05g/L, and all the other are deionized water;
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:1 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 5.4 μm, 2.3 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 4:1, obtains the Cr:Al electrode that thickness is 3 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m 2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.Detection limit 0.2ppmNO 2under concentration, luminosity is 18cd/m2,30ppmNO 2under concentration, luminosity is 35cd/m 2, under 50ppmNO2 concentration, luminosity is 72cd/m 2, 100ppmNO 2under concentration, luminosity is 145cd/m 2, 150ppmNO 2under concentration, luminosity is 209cd/m 2.
Embodiment 5:
A kind of novel robot, at the outside installing gas detection module of robot, this gas detection module is made by the following method:
Idiographic flow is: conductive plastics ITO-PET surface clean and process-substrate are placed in vacuum chamber-vacuum evaporation organic layer-evaporation metal electrode-encapsulation or test.
1. conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then puts into compound biological enzyme liquid successively, in deionized water, acetone, ethanol, and each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 0.4g/L, cellulase 1.6g/L, polyphenol oxidase 0.05g/L, and all the other are deionized water;
2. prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:1 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
3. organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 3.6 μm, 2 μm;
4. mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 8:1, obtains the Cr:Al electrode that thickness is 3 μm;
Device test data:
After element manufacturing completes, use the nitometer sensitive detection parts luminosity of sensitive detection parts luminosity, use semiconductor test system test component I-E characteristic.After testing, this device is to NO 2have air-sensitive response characteristic Deng gas, this gas can the luminosity of increased device; When operating voltage is 20V, luminosity is 16cd/m 2, with NO 2increase Deng nitrogenous gas concentration, luminosity increases.Detection limit 0.1ppmNO 2under concentration, luminosity is 19cd/m 2, 30ppmNO 2under concentration, luminosity is 35cd/m 2, 50ppmNO 2under concentration, luminosity is 65cd/m 2, 100ppmNO 2under concentration, luminosity is 150cd/m 2, 150ppmNO 2under concentration, luminosity is 202cd/m 2.
The above; be only the present invention's preferably embodiment; but protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; be equal to according to technological invention of the present invention and inventive concept thereof and replace or change, all should be encompassed within protection scope of the present invention.

Claims (3)

1. a novel robot, is characterized in that, at the outside installing gas detection module of robot, this gas detection module comprises flexible substrates, luminescent layer, hole transmission layer, mesh-like negative electrode, wherein, flexible substrate is conductive plastics ITO-PET, and porous structure YSZ is hole transmission layer.
2. robot according to claim 1, is characterized in that, described YSZ slurry thickness is 2 μm and is coated in conductive plastics surface.
3. a method for making for novel robot, is characterized in that, at the outside installing gas detection module of robot, the making step of this gas detection module is as follows:
Organic electroluminescent gas sensor preparation technology relates to thin film technique and film treatment process etc., mainly includes the techniques such as the preparation of the organic film of machine Small molecular or high molecular polymer etc., the preparation of metal electrode and device package;
Concrete steps are: conductive plastics ITO-PET surface clean and process, and substrate is placed in vacuum chamber, vacuum evaporation organic layer, evaporation metal electrode, encapsulation or test;
(1) conductive plastics ITO-PET cleans
First, the ITO-PET of cutting specific dimensions, washes by rubbing with the hands ITO-PET substrate with special purpose detergent and non-dust cloth, to remove on-chip various greasy dirt thing, then compound biological enzyme liquid (optional) is put into successively, in deionized water, acetone, ethanol, each ultrasonic 15min; Then, dry up ITO-PET with high pure nitrogen, make ethanol evaporation, then put into pre-service chamber, continue to pass into high purity oxygen gas, with plasma bombardment substrate 5min;
The composition of described compound biological enzyme is: alkali protease 0.2-0.5g/L, cellulase 0.9-1.3g/L, polyphenol oxidase 0.05g/L, and all the other are deionized water.
(2) prepared by porous structure YSZ
A) appropriate Ni (NO is taken 3) 26H 2o and deionized water are put into beaker and are fully dissolved, slowly ammoniacal liquor is instilled with separating funnel under the effect of magnetic agitation, make it abundant reaction, after titration, 80 DEG C of water-bath 1h obtain suspension, be separated through hydro-extractor and be precipitated thing, then put into the NiO powder that batch-type furnace 300 DEG C insulation 5h can obtain black;
B) take YSZ and NiO powder, 5:6 puts into bowl mill in mass ratio, then adds a certain amount of spreading agent and ethanol, makes it abundant mixing, obtains YSZ slurry;
C) adopted by YSZ slurry screen printing technique to be coated in conductive plastics ITO-PET surface, thickness is 2 μm, puts into drying baker and dries;
(3) organic thin-film vapor deposition
A) organic material (Alq3, CuPc) to be evaporated is put into corresponding evaporation boat, and block with mask;
B) the conductive plastics substrate after oven dry is sent to organic chamber from pre-service chamber, substrate is placed on the sample carrier in organic chamber, aims at organic electron gun;
C) organic chamber is vacuumized, when vacuum reaches required numerical value, regulate vapourizing furnace temperature controller, increase evaporating temperature, material is heated, after condition is suitable, evaporation organic material Alq3, CuPc successively, controls evaporation rate and time, makes it thickness and be respectively 3.5 μm, 2 μm;
(4) mesh-like metallic cathode preparation
After various organic thin-film vapor deposition, substrate is taken out, cover mesh-like electrode mask version, subsequently substrate is sent into metal evaporation room, vacuumize and make air pressure remain on 1.5 × 10 -3, carry out the evaporation of metal electrode, regulate electric current, the evaporation ratio making Cr:Al is 7:1, obtains the Cr:Al electrode that thickness is 3 μm.
CN201510867477.4A 2015-12-02 2015-12-02 Novel robot and making method thereof Pending CN105352937A (en)

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