CN105316641A - Coating substrate support and vacuum coating equipment - Google Patents
Coating substrate support and vacuum coating equipment Download PDFInfo
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- CN105316641A CN105316641A CN201510759845.3A CN201510759845A CN105316641A CN 105316641 A CN105316641 A CN 105316641A CN 201510759845 A CN201510759845 A CN 201510759845A CN 105316641 A CN105316641 A CN 105316641A
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- film plating
- frame
- plating substrate
- montant
- substrate frame
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Abstract
The invention is applicable to the technical field of vacuum coating and discloses a coating substrate support and vacuum coating equipment. The coating substrate support comprises an outer frame used for transmission and supporting, at least two vertical rods and at least two horizontal rods, wherein the vertical rods and the horizontal rods are arranged in the outer frame. An inner frame of an adjustable size is defined by every two adjacent vertical rods and every two adjacent horizontal rods in an enclosed mode. Each vertical rod is in sliding connection with each horizontal rod. Each vertical rod can slide in the length direction of the horizontal rods, each horizontal rod can slide in the length direction of the vertical rods, and therefore the size of the inner frame is adjusted. According to the coating substrate support and the vacuum coating equipment, the at least two horizontal rods and the at least two vertical rods are in sliding connection in the outer frame so as to be freely combined into the inner frames of various sizes; the horizontal rods and the vertical rods are then fixed to the outer frame of the coating substrate support, uses can start to place glass sheets to carry out coating, and the sizes of products can be rapidly switched online. Meanwhile, the coating substrate support and the vacuum coating equipment are applied to practical coating production, so that not only is production cost reduced, but also production efficiency is improved.
Description
Technical field
The invention belongs to vacuum coating film equipment technical field, particularly relate to a kind of film plating substrate frame and vacuum coating film equipment.
Background technology
Substrate frame belongs to a part for vacuum coating film equipment, is the carrier of substrate and a part for transmission system.Current plated film is all the special a set of substrate frame of a kind of dimension glass in producing, and consequently due to the diversity of production glass size, often needs the substrate frame of many cover different sizes, thus causes the increase of production cost.Meanwhile, when changing the product size of producing, need a whole set of substrate frame changing corresponding size, virtually cause the waste of waste of time and manpower.So customization often kind of a set of substrate frame of specification, change the mode of production used, cause the increase of production cost and the decline of production efficiency.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, provide a kind of film plating substrate frame and vacuum coating film equipment, its size that can adjust inner frame quickly and easily, to adapt to the glass of different size, has been saved cost, and has been improve production efficiency.
Technical scheme of the present invention is: provide a kind of film plating substrate frame, comprise for the external frame of transmission and support and at least two montants be arranged in described external frame and at least two cross bars, two often adjacent described montants and two often adjacent described cross bars enclose the inner frame of size adjustable; Montant described in each and cross bar described in each are slidably connected, montant described in each can slide along the length direction of described cross bar, cross bar described in each can slide along the length direction of described montant, to regulate the size of described inner frame, to regulate the size of described inner frame.
Present invention also offers a kind of vacuum coating film equipment, comprise film plating substrate frame described above.
A kind of film plating substrate frame of the present invention and vacuum coating film equipment, it is by being slidably connected in external frame by least two cross bars and at least two montants, and two often adjacent montants and two often adjacent cross bars enclose inner frame, the inner frame of various size can be freely formed, again cross bar and montant are fixed on film plating substrate frame housing, can start to put sheet glass and carry out plated film; In the process completing glass coating transmission, product size can be switched online fast, overcome a set of film plating substrate frame in the past and can only meet a kind of shortcoming of product size, saved production cost; Meanwhile, frame operation of changing in the past is wasted time and energy, and causes manpower and waste of time, seriously hinders production efficiency, and the application of the present invention in actual plated film is produced, both save production cost and also improve production efficiency.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the external frame that the embodiment of the present invention provides;
Fig. 2 is the structural representation of the film plating substrate frame that the embodiment of the present invention provides;
Fig. 3 is the enlarged view of a-quadrant in Fig. 2;
Fig. 4 is the part-structure schematic diagram of the montant that the embodiment of the present invention provides;
Fig. 5 is the perspective view of the slide block that the embodiment of the present invention provides;
Fig. 6 is the part-structure schematic diagram of the cross bar that the embodiment of the present invention provides.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
It should be noted that, when element is called as " being fixed on " or " being arranged at " another element, it can directly on another element or may there is centering elements simultaneously.When an element is known as " being connected to " another element, it can be directly connected to another element or may there is centering elements simultaneously.
Also it should be noted that, the orientation term such as left and right, upper and lower in the embodiment of the present invention, is only relative concept or be reference with the normal service condition of product each other, and should not be regarded as have restrictive.
As depicted in figs. 1 and 2, the film plating substrate frame that the embodiment of the present invention provides comprises external frame 1, at least two for the montant 2 that prevents glass from toppling over and at least two cross bars 3.Wherein, external frame 1 is for transmission and integrated support, and at least two montants 2 and at least two cross bars 3 are arranged in external frame 1.Two often adjacent montants 2 and two often adjacent cross bars 3 enclose the inner frame 4 of size adjustable.Particularly, each montant 2 is crossing with each cross bar 3 respectively, and being slidably connected of length direction realized in intersection along cross bar 3 and montant 2, namely each montant 2 is slidably connected with each cross bar 3, each montant 2 can slide along the length direction of cross bar 3, each cross bar 3 can slide along the length direction of montant 2, thus regulates the size of inner frame 4.The embodiment of the present invention, can the size that needs of convenient and swift replacing film plating substrate frame by being free to slide between cross bar 3 and montant 2, put for the production of glass substrate.
The present invention is by being slidably connected in external frame 1 by least two cross bars 3 and at least two montants 2, and two often adjacent montants 2 and two often adjacent cross bars 3 enclose inner frame 4, the inner frame 4 of various size can be freely formed, again cross bar 3 and montant 2 are fixed in film plating substrate frame external frame 1, can start to put sheet glass and carry out plated film; In the process completing glass coating transmission, product size can be switched online fast, overcome a set of film plating substrate frame in the past and can only meet a kind of shortcoming of product size, saved production cost; Meanwhile, frame operation of changing in the past is wasted time and energy, and causes manpower and waste of time, seriously hinders production efficiency, and the application of the present invention in actual plated film is produced, both save production cost and also improve production efficiency.
Preferably, in one embodiment of the invention, film plating substrate frame comprises two montants 2 and two cross bars 3, and two montants 2 and the vertical setting mutually of two cross bars 3, to enclose an inner frame 4, regulated the size of inner frame 4 by the position of slide two montants 2 and two cross bars 3.Be understandable that, in other embodiments of the invention, the number of montant 2 and cross bar 3 also can be two or more, and the quantity of montant 2 and cross bar 3 also can be different.In addition, according to the needs of physical size, montant 2 and cross bar 3 also can be obliquely installed mutually.
Further, as shown in Figure 3, in one embodiment of the invention, be provided with U-shaped screw 21 at the two ends of each cross bar 3 and montant 2, film plating substrate frame also comprises and to coordinate with U-shaped screw 21 and for cross bar 3 and montant 2 being fixed on when the size of inner frame 4 is determined the trip bolt (not shown) in external frame 1.Particularly, after the size regulating inner frame 4, by the coordinating of U-shaped screw 21 of trip bolt with cross bar 3 and montant 2 two ends, cross bar 3 and montant 2 are fixed in external frame 1, thus the size of fixing internal framework 1.
Be understandable that, in other embodiments of the invention, also cross bar 3 and montant 2 can be fixed in external frame 1 by other fixed form, as shown in Figure 4, offer open holes 203 at the two ends of montant 2, then by screw, montant 2 is fixed in external frame 1.Particularly, montant 2 comprises the second fixed part 202 and to be layered in above the second fixed part 202 and second connection section 201 integrated with the second fixed part 202, the length of this second fixed part 202 is greater than the second connection section 201, and the two ends of the second fixed part 202 are provided with multiple above-mentioned open holes 203.
Further, as shown in Figure 5, film plating substrate frame also comprises the slide block 5 for being slidably connected at respectively by each montant 2 on cross bar 3.Particularly, slide block 5 clamping part 52 that comprises sliding part 51 and be fixedly connected with sliding part 51.
Further, as shown in Figure 6, in one embodiment of the invention, offer groove 31 along its length at each cross bar 3, above-mentioned sliding part 51 is for being slidably connected in groove 31, and clamping part 52 is for clamping the second connection section 201 of montant 2.
Particularly, cross bar 3 comprises the first fixed part 301 and to be layered in above the first fixed part 301 and first connection section 302 integrated with the first fixed part 301, this first connection section 302 is provided with above-mentioned groove 31, in addition, the length of the first fixed part 301 is greater than the first connection section 302, and the two ends of the first fixed part 301 are provided with above-mentioned U-shaped screw 21.
In another embodiment of the present invention, offer groove 31 along its length at each montant 2, above-mentioned sliding part 51 is for being slidably connected in groove 31, and clamping part 52 is for clamping cross bar 3.
Preferably, when offering groove 31 on cross bar 3, cross bar 3 is arranged on the below of montant 2, to facilitate sliding vertical member 2; When offering groove 31 on montant 2, montant 2 is arranged on the below of cross bar 3, to facilitate slip cross bar 3.
Further preferably, the cross section of groove 31 is trapezoidal.Correspondingly, the cross section of sliding part 51 also mates with groove 31 in trapezoidal and size.
Further, the cross section of clamping part 52 is trapezoidal, and the plane orthogonal at the trapezoidal cross-section place of clamping part 52 is in the plane at the trapezoidal cross-section place of sliding part 51.Particularly, being provided with cross section in clamping part 52 is trapezoidal holding tank 501, and this holding tank 501 can be used for the second connection section 201 clamping above-mentioned montant 2, and now the cross section of the second connection section 201 is also in trapezoidal.
Preferably, the film plating substrate frame of the embodiment of the present invention is used for high-temperature vacuum coating field, and its material is high temperature anaerobic copper or high-strength stainless steel material.
Present invention also offers a kind of vacuum coating film equipment, it comprises film plating substrate frame described above.
The present invention, by being located on external frame 1 by inner frame 4, being fixed by fastening screw simultaneously, solves the support of glass substrate and the problem of transmission.Simultaneously due to the mode independent assortment that inner frame 4 adopts at least two cross bars 3 and at least two montants 2 to slide each other, conveniently various size can be formed.When online production, rapidly inner frame 4 can be adjusted to the size of needs, by slip cross bar 3 and montant 2, complete the adjustment of inner frame 4, by fastening screw, inner frame 4 is fixed in external frame 1 again, whole operating process can complete waiting substrate load section, has saved the production time.Eliminate many covers corresponding size substrate frame for subsequent use simultaneously, save production cost.
The research of above material and test by the financial aid of problem " high-performance and low-cost multiple point touching capacitance plate industrialization gordian technique " in national high-tech research evolutionary operation(EVOP) (863 Program), project number: 2013AA030602.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement or improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a film plating substrate frame, it is characterized in that, comprise for the external frame (1) of transmission and support and at least two montants (2) be arranged in described external frame (1) and at least two cross bars (3), two often adjacent described montants (2) and two often adjacent described cross bars (3) enclose the inner frame (4) of size adjustable; Montant described in each (2) is slidably connected with cross bar (3) described in each, montant described in each (2) can slide along the length direction of described cross bar (3), cross bar described in each (3) can slide along the length direction of described montant (2), to regulate the size of described inner frame (4).
2. film plating substrate frame as claimed in claim 1, it is characterized in that, described film plating substrate frame also comprises the slide block (5) for being slidably connected at respectively by montant described in each (2) on described cross bar (3).
3. film plating substrate frame as claimed in claim 2, it is characterized in that, cross bar described in each (3) offers groove (31) along its length, and described slide block (5) comprises and to mate with described groove (31) and for the sliding part (51) that is slidably connected in described groove (31) be fixedly connected with described sliding part (51) and clamping part (52) for clamping described montant (2).
4. film plating substrate frame as claimed in claim 2, it is characterized in that, montant described in each (2) offers groove (31) along its length, and described slide block (5) comprises and to mate with described groove (31) and for the sliding part (51) that is slidably connected in described groove (31) be fixedly connected with described sliding part (51) and clamping part (52) for clamping described cross bar (3).
5. film plating substrate frame as claimed in claim 2 or claim 3, it is characterized in that, the cross section of described groove (31) is trapezoidal.
6. film plating substrate frame as claimed in claim 5, it is characterized in that, the cross section of described clamping part (52) is trapezoidal, and the plane orthogonal at the trapezoidal cross-section place of described clamping part (52) is in the plane at the trapezoidal cross-section place of described sliding part (51).
7. film plating substrate frame as claimed in claim 1, it is characterized in that, the two ends of cross bar described in each (3) and montant (2) are provided with U-shaped screw (21); Described film plating substrate frame also comprises and to coordinate with described U-shaped screw (21) and for described cross bar (3) and montant (2) being fixed on when the size of described inner frame (4) is determined the trip bolt in described external frame (1).
8. film plating substrate frame as claimed in claim 1, it is characterized in that, described film plating substrate frame comprises two described montants (2) and two described cross bars (3).
9. film plating substrate frame as claimed in claim 1, it is characterized in that, described film plating substrate frame is made up of high temperature anaerobic copper product or stainless material.
10. a vacuum coating film equipment, is characterized in that, comprises the film plating substrate frame as described in any one of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510759845.3A CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510759845.3A CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
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| CN105316641A true CN105316641A (en) | 2016-02-10 |
| CN105316641B CN105316641B (en) | 2019-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510759845.3A Active CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483637A (en) * | 2016-03-02 | 2016-04-13 | 凯盛信息显示材料(洛阳)有限公司 | Glass vacuum plated substrate frame |
| CN107574419A (en) * | 2017-10-11 | 2018-01-12 | 新乡市百合光电有限公司 | The coating film on glass frame and electric heater unit of a kind of vacuum chamber |
| CN107619196A (en) * | 2017-10-11 | 2018-01-23 | 新乡市百合光电有限公司 | A kind of ellipsoid shape coating film on glass frame |
| CN109533967A (en) * | 2018-10-18 | 2019-03-29 | 芜湖研历光电科技有限公司 | A kind of moving carrier of glass substrate |
| CN111334768A (en) * | 2020-03-18 | 2020-06-26 | 苏州求是真空电子有限公司 | Vertical wafer loading frame suitable for magnetron sputtering coating |
| CN112251729A (en) * | 2020-10-23 | 2021-01-22 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
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| CN204281592U (en) * | 2014-12-19 | 2015-04-22 | 湖北鸿创科技有限公司 | A kind of two-sided ITO plated film tool |
| CN104947060A (en) * | 2015-06-22 | 2015-09-30 | 安徽方兴科技股份有限公司 | Substrate rack |
| CN205205223U (en) * | 2015-11-09 | 2016-05-04 | 信义光伏产业(安徽)控股有限公司 | Coating film substrate frame and vacuum coating equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805410B (en) * | 2015-04-21 | 2017-04-12 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Magnetron sputtering film coating machine |
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2015
- 2015-11-09 CN CN201510759845.3A patent/CN105316641B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204281592U (en) * | 2014-12-19 | 2015-04-22 | 湖北鸿创科技有限公司 | A kind of two-sided ITO plated film tool |
| CN104947060A (en) * | 2015-06-22 | 2015-09-30 | 安徽方兴科技股份有限公司 | Substrate rack |
| CN205205223U (en) * | 2015-11-09 | 2016-05-04 | 信义光伏产业(安徽)控股有限公司 | Coating film substrate frame and vacuum coating equipment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483637A (en) * | 2016-03-02 | 2016-04-13 | 凯盛信息显示材料(洛阳)有限公司 | Glass vacuum plated substrate frame |
| CN107574419A (en) * | 2017-10-11 | 2018-01-12 | 新乡市百合光电有限公司 | The coating film on glass frame and electric heater unit of a kind of vacuum chamber |
| CN107619196A (en) * | 2017-10-11 | 2018-01-23 | 新乡市百合光电有限公司 | A kind of ellipsoid shape coating film on glass frame |
| CN109533967A (en) * | 2018-10-18 | 2019-03-29 | 芜湖研历光电科技有限公司 | A kind of moving carrier of glass substrate |
| CN111334768A (en) * | 2020-03-18 | 2020-06-26 | 苏州求是真空电子有限公司 | Vertical wafer loading frame suitable for magnetron sputtering coating |
| CN112251729A (en) * | 2020-10-23 | 2021-01-22 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105316641B (en) | 2019-05-14 |
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