CN105300369A - Multi-shaft structure of electronic system - Google Patents
Multi-shaft structure of electronic system Download PDFInfo
- Publication number
- CN105300369A CN105300369A CN201510701660.7A CN201510701660A CN105300369A CN 105300369 A CN105300369 A CN 105300369A CN 201510701660 A CN201510701660 A CN 201510701660A CN 105300369 A CN105300369 A CN 105300369A
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- China
- Prior art keywords
- rigid member
- electronic system
- electrostatic
- dielectric film
- substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention relates to a multi-shaft structure of an electronic system. The multi-shaft structure comprises an electrostatic vibrator, a reduction gear and a base plate. An electrostatic actuator is arranged on the electrostatic vibrator, the upper end of the electrostatic vibrator is connected with the lower end of the base plate, the upper end of the base plate is connected with the lower end of an insulating film, the upper end of the insulating film is connected with the input end of a basal layer, the basal layer is arranged at the lower end of a protective film, an MEMS structure instrument is arranged at the lower end of the protective film, the lower end of the MEMS structure instrument is connected with the input end of a mechanical movable part, a rigid member is arranged below the mechanical movable part, and the rigid member is connected with a cage nut. The mechanical multi-shaft structure is reasonably used, the purposes of the high digitized degree and the good speed regulating effect are achieved through multiple advanced mechanical devices, the machine service life is prolonged, and the multi-shaft structure is simple, reasonable in design and suitable for mass production.
Description
Technical field
The present invention relates to electronic mechanical system multiaxis structural devices field, particularly a kind of electronic system multiaxis structure.
Background technology
At present, China's electronic mechanical system multiaxis structural devices industry development is rapid, and the equipment for electronic mechanical system multiaxis structural devices is also varied, but is still faced with very many-sided challenge, and demand finds the solution meeting client.Application number: the Chinese patent literature of 201380007577.9 reports one, particular content is: a kind of electronic mechanical system multiaxis structural devices, and can discharge the mechanical energy storage gearing of the operation that its energy storage allows mechanical apparatus also accelerate flexibly when needed.This mechanism comprises electrostatic vibration device, reduction gearing, substrate; described electrostatic vibration device is provided with electrostatic actuator; described electrostatic vibration device upper end is connected to substrate lower end; described substrate upper end is connected to the lower end of dielectric film; described dielectric film upper end is connected to basalis input end; described basalis is arranged on diaphragm lower end; described diaphragm lower end is provided with MEMS structure body; described MEMS structure body lower end is connected to input end on mechanical movable position; arrange rigid member below described mechanical movable position, described rigid member is connected to clamped nut.The present invention is by reasonable employment motor direct drive, and use multiple advanced machinery device to reach digitized degree high, speed governing is effective, and function is many, machine service life is extended and structure and design science reasonable, can turnout large.
Summary of the invention
Originally in view of this, technical matters to be solved by this invention is to provide a kind of electronic machine system multiaxis structural devices, and this electronic mechanical system multiaxis structural devices realizes braking procedure by machinery, to solve the unreasonable point of traditional braking and impracticable point.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of electronic system multiaxis structure, comprise electrostatic vibration device, reduction gearing, substrate, described electrostatic vibration device is provided with two reduction gearing, described electrostatic vibration device upper end is connected to substrate lower end, described substrate upper end is connected to the lower end of dielectric film, described dielectric film upper end is connected to basalis, described basalis is arranged on diaphragm lower end, described diaphragm lower end is provided with MEMS structure body, described MEMS structure body lower end is connected to input end on mechanical movable position, below described mechanical movable position, rigid member is set, described rigid member is connected to clamped nut.
Further; inertial sensor is provided with below described clamped nut; described rigid member outer end is provided with electrode rotor frame; described electrode rotor frame lower end connects single central anchor; described substrate upper ends inertial sensor, and described inertial sensor upper end is connected to rigid member lower end, and described diaphragm is directly over rigid member; the outer end of described rigid member is provided with dielectric film, and described dielectric film inside arranges three-axis gyroscope.
The invention has the beneficial effects as follows: the present invention is by reasonable employment motor running multi-spindle machining device, use multiple advanced machinery device to reach digitized degree high, speed governing is effective, and function is many, machine service life is extended and structure and design science are reasonable, can turnout large.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of structure of the present invention;
Fig. 2 is the magnified partial view of structure of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, electrostatic vibration device; 2, electrostatic actuator; 3, substrate; 4, dielectric film; 5, basalis; 6, diaphragm; 7, MEMS structure body; 8, mechanical movable position; 9, rigid member; 10, clamped nut; 11, inertial sensor; 12, electrode rotor frame; 13, single central anchor; 14, three-axis gyroscope.
Embodiment
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As shown in the figure: a kind of electronic system multiaxis structure of the present embodiment, comprise electrostatic vibration device 1, electrostatic actuator 2, substrate 3, electrostatic vibration device 1 is provided with electrostatic actuator 2, electrostatic vibration device 1 upper end is connected to substrate 3 lower end, substrate 3 upper end is connected to the lower end of dielectric film 4, dielectric film 4 upper end is connected to basalis 5 input end, basalis 5 is arranged on diaphragm 6 lower end, diaphragm 6 lower end is provided with MEMS structure body 7, MEMS structure body 7 lower end is connected to input end on mechanical movable position 8, rigid member 9 is set below mechanical movable position 8, rigid member 9 is connected to clamped nut 10.Be provided with inertial sensor 11 below clamped nut 10, rigid member 9 outer end is provided with electrode rotor frame 12, and electrode rotor frame 12 lower end connects single central anchor 13.Substrate 3 upper ends inertial sensor 11, and inertial sensor 11 upper end is connected to rigid member 9 lower end.Diaphragm 6 is directly over rigid member 9, and the outer end of rigid member 9 is provided with dielectric film 4, and dielectric film 4 inside arranges three-axis gyroscope 14.
Principle of work: the present invention is by reasonable employment motor running multi-spindle machining device, multiple advanced machinery device is used to reach digitized degree high, and inertial sensor has the function of multiple sensors, make present device speed governing effective, function is many, machine service life is extended and structure and design science are reasonable, can turnout large.
Finally illustrate, the foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. an electronic system multiaxis structure, it is characterized in that: comprise electrostatic vibration device (1), electrostatic actuator (2), substrate (3), described electrostatic vibration device (1) is provided with electrostatic actuator (2), described electrostatic vibration device (1) upper end is connected to substrate (3) lower end, described substrate (3) upper end is connected to the lower end of dielectric film (4), described dielectric film (4) upper end is connected to basalis (5) input end, described basalis (5) is arranged on diaphragm (6) lower end, described diaphragm (6) lower end is provided with MEMS structure body (7), described MEMS structure body (7) lower end is connected to the upper input end in mechanical movable position (8), described mechanical movable position (8) below arranges rigid member (9), described rigid member (9) is connected to clamped nut (10).
2. an electronic system multiaxis structure according to claim 1, it is characterized in that: described clamped nut (10) below is provided with inertial sensor (11), described rigid member (9) outer end is provided with electrode rotor frame (12), and described electrode rotor frame (12) lower end connects single central anchor (13).
3. an electronic system multiaxis structure according to claim 1, it is characterized in that: described substrate (3) upper ends inertial sensor (11), described inertial sensor (11) upper end is connected to rigid member (9) lower end.
4. an electronic system multiaxis structure according to claim 1, is characterized in that; Described diaphragm (6) is directly over rigid member (9); the outer end of described rigid member (9) is provided with dielectric film (4), and described dielectric film (4) inside arranges three-axis gyroscope (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510701660.7A CN105300369A (en) | 2015-10-26 | 2015-10-26 | Multi-shaft structure of electronic system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510701660.7A CN105300369A (en) | 2015-10-26 | 2015-10-26 | Multi-shaft structure of electronic system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105300369A true CN105300369A (en) | 2016-02-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510701660.7A Pending CN105300369A (en) | 2015-10-26 | 2015-10-26 | Multi-shaft structure of electronic system |
Country Status (1)
| Country | Link |
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| CN (1) | CN105300369A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127554A (en) * | 1993-07-19 | 1996-07-24 | 米德凯姆公司 | Microelectromechanical television scanning device and method for making the same |
| CN101281209A (en) * | 2007-04-03 | 2008-10-08 | 索尼株式会社 | Inertial sensor and electrical or electronic device |
| CN101780941A (en) * | 2009-01-14 | 2010-07-21 | 精工爱普生株式会社 | Mems device and method for manufacturing the same |
| CN102016382A (en) * | 2008-02-29 | 2011-04-13 | Cbe环球控股公司 | Multi-axis metamorphic actuator and drive system and method |
| CN102947675A (en) * | 2010-04-30 | 2013-02-27 | 高通Mems科技公司 | Micromachined piezoelectric X-axis gyroscope |
| CN103185576A (en) * | 2011-12-29 | 2013-07-03 | 马克西姆综合产品公司 | Microelectromechanical system |
| CN103364592A (en) * | 2012-04-10 | 2013-10-23 | 精工爱普生株式会社 | Physical quantity sensor and manufacturing method thereof, and electronic device |
| CN104105945A (en) * | 2012-01-31 | 2014-10-15 | 快捷半导体公司 | MEMS multi-axis accelerometer electrode structure |
| CN104136886A (en) * | 2011-12-22 | 2014-11-05 | 特罗尼克斯微系统有限公司 | Multiaxial micro-electronic inertial sensor |
| CN104812630A (en) * | 2012-12-06 | 2015-07-29 | Trw汽车美国有限责任公司 | Method and apparatus for controlling an actuatable restraining device using multi-region enhanced discrimination |
| CN105043370A (en) * | 2014-04-29 | 2015-11-11 | 财团法人工业技术研究院 | Micro-motor device with fulcrum element |
-
2015
- 2015-10-26 CN CN201510701660.7A patent/CN105300369A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127554A (en) * | 1993-07-19 | 1996-07-24 | 米德凯姆公司 | Microelectromechanical television scanning device and method for making the same |
| CN101281209A (en) * | 2007-04-03 | 2008-10-08 | 索尼株式会社 | Inertial sensor and electrical or electronic device |
| CN102016382A (en) * | 2008-02-29 | 2011-04-13 | Cbe环球控股公司 | Multi-axis metamorphic actuator and drive system and method |
| CN101780941A (en) * | 2009-01-14 | 2010-07-21 | 精工爱普生株式会社 | Mems device and method for manufacturing the same |
| CN102947675A (en) * | 2010-04-30 | 2013-02-27 | 高通Mems科技公司 | Micromachined piezoelectric X-axis gyroscope |
| CN102959404A (en) * | 2010-04-30 | 2013-03-06 | 高通Mems科技公司 | Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (SLOT) based three-axis accelerometer |
| CN104136886A (en) * | 2011-12-22 | 2014-11-05 | 特罗尼克斯微系统有限公司 | Multiaxial micro-electronic inertial sensor |
| CN103185576A (en) * | 2011-12-29 | 2013-07-03 | 马克西姆综合产品公司 | Microelectromechanical system |
| CN104105945A (en) * | 2012-01-31 | 2014-10-15 | 快捷半导体公司 | MEMS multi-axis accelerometer electrode structure |
| CN103364592A (en) * | 2012-04-10 | 2013-10-23 | 精工爱普生株式会社 | Physical quantity sensor and manufacturing method thereof, and electronic device |
| CN104812630A (en) * | 2012-12-06 | 2015-07-29 | Trw汽车美国有限责任公司 | Method and apparatus for controlling an actuatable restraining device using multi-region enhanced discrimination |
| CN105043370A (en) * | 2014-04-29 | 2015-11-11 | 财团法人工业技术研究院 | Micro-motor device with fulcrum element |
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Application publication date: 20160203 |