CN105253766A - Self-balancing hoisting device used in lithographic projection lens - Google Patents

Self-balancing hoisting device used in lithographic projection lens Download PDF

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Publication number
CN105253766A
CN105253766A CN201510756931.9A CN201510756931A CN105253766A CN 105253766 A CN105253766 A CN 105253766A CN 201510756931 A CN201510756931 A CN 201510756931A CN 105253766 A CN105253766 A CN 105253766A
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CN
China
Prior art keywords
loading board
vertical loading
self
balancing
regulating control
Prior art date
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Pending
Application number
CN201510756931.9A
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Chinese (zh)
Inventor
孙振
赵磊
倪明阳
隋永新
杨怀江
张巍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201510756931.9A priority Critical patent/CN105253766A/en
Publication of CN105253766A publication Critical patent/CN105253766A/en
Pending legal-status Critical Current

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Abstract

The invention belongs to the field of hoisting and transportation of objective lenses in lithographic projection lenses and provides a self-balancing hoisting device used in a lithographic projection lens. The problem of vibration impact and inclination of objective lenses in the hoisting and transportation processes of the objective lenses in the prior art is solved. The self-balancing hoisting device used in the lithographic projection lens comprises a hoisting board and hoisting rods; one end of each of the three hoisting rods is connected with the hoisting board. Each hoisting rod comprises an upper hoisting rod body, a lower hoisting rod body and a self-balancing adjustor, wherein one end of the upper hoisting rod body is fixedly connected with the hoisting board, and the other end of the upper hoisting rod body is connected with one end of the self-balancing adjustor adjustable in length; the other end of the self-balancing adjustor is connected with one end of the lower hoisting rod body; the self-balancing adjustor internally comprises a compression spring arranged at the junction of the self-balancing adjustor and the upper hoisting rod body.

Description

A kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens
Technical field
The invention belongs to lifting and the transport field of object lens in photoetching projection objective lens, be specifically related to a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens.
Background technology
Lithographic projection technology is large-scale integration circuit manufacturing technology and micro-optics, the guide of micro mechanical technology and basis, determines the integrated level of integrated circuit.Photoetching projection objective lens has the features such as size is large, weight is high, assembly precision is high, many mirrors group assembly, often needs lifting mirror group in the process of the integrated assembling of object lens; The simultaneously test of object lens and use procedure very complicated, need to use different equipment to test object lens, require that object lens repeatedly lift by crane between devices and lay, and object lens are very strict for the requirement of vibration, require in lifting and lay and avoid in transportation producing excessive impact and inclination.Excessive impact and larger inclination can cause the change in location of object lens inner flexible mechanism even to be damaged.
In prior art, the lifting of object lens adopts 3 rigid rods to be connected object lens with the hanging apparatus used in transportation, in object lens lifting and installation course, make object lens be subject to vibratory impulse, and when the installation length of 3 rigid rods is different, object lens run-off the straight, makes the compliant mechanism in object lens there is the risk damaged.
Summary of the invention
The object of the invention is to propose a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, solve object lens vibratory impulse and tilt problem that prior art exists in object lens lifting and transportation.
For achieving the above object, of the present invention a kind of for the hanging apparatus of self-balancing lifting plate and vertical loading board can be comprised in photoetching projection objective lens; One end of three described vertical loading boards is connected with described lifting plate respectively;
Described vertical loading board comprises vertical loading board, lower vertical loading board and self-balancing regulating control; Described upper vertical loading board one end is fixedly connected with described lifting plate, and the other end is connected with length-adjustable self-balancing regulating control one end, and the described self-balancing regulating control other end is connected with described lower vertical loading board one end;
Described self-balancing regulating control inside comprises Compress Spring, and described Compress Spring is arranged on described self-balancing regulating control and described upper vertical loading board junction.
Described lifting slab integral is triangular structure, and described lifting plate comprises lifting plate main body and ringbolt; Described lifting plate main body three angles place is respectively arranged with vertical loading board mounting hole, and middle position is provided with ringbolt and installs tapped bore;
Described upper vertical loading board is connected with vertical loading board nut thread through described vertical loading board mounting hole, is provided with pad between described vertical loading board nut and lifting plate main body;
Described ringbolt and described ringbolt are installed tapped bore and are threaded, and described ringbolt is threaded with a jam nut through lifting plate base portion.
Described self-balancing regulating control also comprises regulating control and lower regulating control; Described upper regulating control is cylindrical structural, cylindrical structure is provided with cylindrical external thread, and centre is provided with through hole, and one end of cylindrical structure is provided with circular platform A, be provided with center hole A in the middle of described circular platform A, the internal diameter of described center hole A is less than the internal diameter of the through hole of regulating control; Described lower regulating control is cylindrical structural, through hole is provided with in the middle of cylindrical structure, cylindrical structural is provided with cylindrical internal thread, one end of cylindrical structure is provided with circular platform B, be provided with center hole B in the middle of described circular platform B, the internal diameter of described center hole B is less than the internal diameter of the through hole of lower regulating control; The cylindrical external thread of described upper regulating control coordinates with the cylindrical internal thread of described lower regulating control.
Described circular platform A outside face is provided with symmetrical plane A, described circular platform B outside face is provided with symmetrical plane B.
Described upper vertical loading board comprises vertical loading board boss, upper vertical loading board main body and upper vertical loading board and installs screw thread; One end of described upper vertical loading board main body is provided with described upper vertical loading board boss, and the other end of described upper vertical loading board main body is provided with described upper vertical loading board and installs screw thread; Described upper vertical loading board installation is thread through lifting plate mounting hole and is connected with described vertical loading board nut thread, described upper vertical loading board boss is arranged in the through hole of described upper regulating control, contact with the circular platform A of described upper regulating control, described Compress Spring is arranged between described upper vertical loading board boss and described circular platform A.
Described upper vertical loading board main body is provided with symmetrical plane C.
Described lower vertical loading board comprises lower vertical loading board boss, lower vertical loading board main body and lower vertical loading board and installs screw thread; One end of described lower vertical loading board main body is provided with described lower vertical loading board boss, the other end of described lower vertical loading board main body is provided with described lower vertical loading board and installs screw thread, described lower vertical loading board boss is arranged in described lower regulating control, contacts with the circular platform B of described lower regulating control.
Described lower vertical loading board main body is provided with symmetrical plane D.
Beneficial effect of the present invention is: of the present invention a kind of for coordinating with the cylindrical internal thread of lower regulating control the length regulating self-balancing regulating control by the cylindrical external thread of upper regulating control in the hanging apparatus of self-balancing in photoetching projection objective lens, the circular platform A of upper regulating control is used for the position of limit compression spring, the center hole A of upper regulating control is used for the installation of upper vertical loading board, and the symmetrical plane A of upper regulating control is used for wrench operated; The circular platform B of lower regulating control is for limiting the position of lower vertical loading board boss, and the center hole B of lower regulating control is used for the installation of lower vertical loading board, and the symmetrical plane B of lower regulating control is used for wrench operated; Its assembling form is that upper vertical loading board is connected with lifting plate by nut, and lower vertical loading board is installed screw thread by lower vertical loading board and is connected with object lens, is connected between upper vertical loading board and lower vertical loading board by self-balancing regulating control.Compress Spring is arranged between vertical loading board boss and upper regulating control circular platform A, plays the effect of buffering vibration and self-balancing when object lens are sling.
Hanging apparatus of the present invention can avoid photoetching projection objective lens in lifting and installation course owing to impacting the problem causing object lens flexible unit to damage.Simultaneously due to the mass distribution almost symmetry in all directions of object lens, this hanging apparatus can ensure that when object lens are sling object lens balance effectively, avoid the problem that object lens inclining is excessive, meet object lens lifting and transportation demand, reduce the danger that photoetching projection objective lens damages.
Of the present invention a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, can avoid photoetching projection objective lens in lifting and installation course due to problem that impact causes object lens flexible unit to damage.This structure has that structure is simple, convenient operation, reliability are high and the outstanding advantages such as commonality is good, and can well be applicable to object lens lifting and handling process, realization reliably lifts.
Accompanying drawing explanation
Fig. 1 be of the present invention a kind of in photoetching projection objective lens can self-balancing hanging apparatus solid assembling schematic diagram;
Fig. 2 is of the present invention a kind of for can the front sectional view of hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 3 is of the present invention a kind of for lifting plate schematic perspective view in the hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 4 be Fig. 3 look up schematic perspective view;
Fig. 5 is of the present invention a kind of for can the perspective view of upper vertical loading board in the hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 6 is of the present invention a kind of for can the perspective view of lower vertical loading board in the hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 7 is of the present invention a kind of for can the perspective view of upper regulating control in the hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 8 is of the present invention a kind of for can the structure cutaway view of upper regulating control in the hanging apparatus of self-balancing in photoetching projection objective lens;
Fig. 9 is of the present invention a kind of for can the perspective view of lower regulating control in the hanging apparatus of self-balancing in photoetching projection objective lens;
Figure 10 is of the present invention a kind of for descending controller structure cutaway view in the hanging apparatus of self-balancing in photoetching projection objective lens;
Figure 11 is of the present invention a kind of for can the solid assembling schematic diagram of vertical loading board in the hanging apparatus of self-balancing in photoetching projection objective lens;
Figure 12 is the part sectional view of Figure 11;
Wherein: 1, lifting plate, 1-1, lifting plate main body, 1-2, ringbolt, 1-3, jam nut, 1-4, ringbolt installs tapped bore, 1-5, vertical loading board nut, 1-6, pad, 1-7, vertical loading board mounting hole, 2, upper vertical loading board, 2-1, upper vertical loading board boss, 2-2, upper vertical loading board main body, 2-2-1, symmetrical plane C, 2-3, upper vertical loading board installs screw thread, 3, lower vertical loading board, 3-1, lower vertical loading board boss, 3-2, lower vertical loading board main body, 3-2-1, symmetrical plane D, 3-3, lower vertical loading board installs screw thread, 4, self-balancing regulating control, 4-1, upper regulating control, 4-1-1, cylindrical external thread, 4-1-2, circular platform A, 4-1-3, center hole A, 4-1-4, symmetrical plane A, 4-2, Compress Spring, 4-3, lower regulating control, 4-3-1, cylindrical internal thread, 4-3-2, circular platform B, 4-3-3, center hole B, 4-3-4, symmetrical plane B.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 1 and accompanying drawing 2, of the present invention a kind of for the hanging apparatus of self-balancing lifting plate 1 and vertical loading board can be comprised in photoetching projection objective lens; One end of three described vertical loading boards is connected with described lifting plate 1 respectively;
Described vertical loading board comprises vertical loading board 2, lower vertical loading board 3 and self-balancing regulating control 4; Described upper vertical loading board 2 one end is fixedly connected with described lifting plate 1, and the other end is connected with length-adjustable self-balancing regulating control 4 one end, and described self-balancing regulating control 4 other end is connected with described lower vertical loading board 3 one end;
Described self-balancing regulating control 4 inside comprises Compress Spring 4-2, and described Compress Spring 4-2 is arranged on described self-balancing regulating control 4 and described upper vertical loading board 2 junction.
See accompanying drawing 3 and accompanying drawing 4, described lifting plate 1 entirety is triangular structure, and described lifting plate 1 comprises lifting plate main body 1-1 and ringbolt 1-2; Described lifting plate main body 1-1 tri-angles place is respectively arranged with vertical loading board mounting hole 1-7, and middle position is provided with ringbolt and installs tapped bore 1-4;
Described upper vertical loading board 2 is threaded with vertical loading board nut 1-5 through described vertical loading board mounting hole 1-7, is provided with pad 1-6 between described vertical loading board nut 1-5 and lifting plate main body 1-1;
Described ringbolt 1-2 and described ringbolt are installed tapped bore 1-4 and are threaded, and described ringbolt 1-2 is threaded with a jam nut 1-3 through lifting plate main body 1-1 part, and wherein, described jam nut 1-3 is used for loosening of ringbolt 1-2.
See accompanying drawing 7, accompanying drawing 8, accompanying drawing 9 and accompanying drawing 10, described self-balancing regulating control 4 also comprises regulating control 4-1 and lower regulating control 4-3; Described upper regulating control 4-1 is cylindrical structural, cylindrical structure is provided with cylindrical external thread 4-1-1, centre is provided with through hole, one end of cylindrical structure is provided with circular platform A4-1-2, be provided with center hole A4-1-3 in the middle of described circular platform A4-1-2, the internal diameter of described center hole A4-1-3 is less than the internal diameter of the through hole of regulating control 4-1; Described lower regulating control 4-3 is cylindrical structural, through hole is provided with in the middle of cylindrical structure, cylindrical structural is provided with cylindrical internal thread 4-3-1, one end of cylindrical structure is provided with circular platform B4-3-2, be provided with center hole B4-3-3 in the middle of described circular platform B4-3-2, the internal diameter of described center hole B4-3-3 is less than the internal diameter of the through hole of lower regulating control 4-3; The cylindrical external thread 4-1-1 of described upper regulating control 4-1 coordinates with the cylindrical internal thread 4-3-1 of described lower regulating control 4-3.Compress Spring 4-2 plays the effect alleviating impact shock in lifting and installation course.Simultaneously due to the mass distribution almost symmetry in all directions of object lens, when slinging object lens, Compress Spring 4-2 can ensure that object lens balance, and effectively avoids object lens to produce larger inclination, protection object lens inner structure.
Described circular platform A4-1-2 outside face is provided with symmetrical plane A4-1-4, described circular platform B4-3-2 outside face is provided with symmetrical plane B4-3-4.Symmetrical plane A4-1-4 and symmetrical plane B4-3-4 is used for wrench operated.
Comprise upper vertical loading board boss 2-1, upper vertical loading board main body 2-2 and upper vertical loading board see vertical loading board 2 upper described in accompanying drawing 5 and screw thread is installed; One end of described upper vertical loading board main body 2-2 is provided with described upper vertical loading board boss 2-1, and the other end of described upper vertical loading board main body 2-2 is provided with described upper vertical loading board and installs screw thread; Described upper vertical loading board installation is thread through lifting plate 1 mounting hole and is threaded with described vertical loading board nut 1-5, described upper vertical loading board boss 2-1 is arranged in the through hole of described upper regulating control 4-1, contact with the circular platform A4-1-2 of described upper regulating control 4-1, described Compress Spring 4-2 is arranged between described upper vertical loading board boss 2-1 and described circular platform A4-1-2.
Described upper vertical loading board main body 2-2 is provided with symmetrical plane C2-2-1, contacts with spanner when described symmetrical plane C2-2-1 is used for wrench operated.
See accompanying drawing 6, described lower vertical loading board 3 comprises lower vertical loading board boss 3-1, lower vertical loading board main body 3-2 and lower vertical loading board and installs screw thread 3-3; One end of described lower vertical loading board main body 3-2 is provided with described lower vertical loading board boss 3-1, the other end of described lower vertical loading board main body 3-2 is provided with described lower vertical loading board and installs screw thread 3-3, described lower vertical loading board boss 3-1 is arranged in described lower regulating control 4-3, contacts with the circular platform B4-3-2 of described lower regulating control 4-3.
Described lower vertical loading board main body 3-2 is provided with symmetrical plane D3-2-1, contacts with spanner when described symmetrical plane D3-2-1 is used for wrench operated.
Assembling and the working process of hanging apparatus of the present invention are as follows:
Compress Spring 4-2 is enclosed within upper vertical loading board main body 2-2, by the center hole A4-1-3 of upper vertical loading board main body 2-2 through upper regulating control 4-1, ensure that one end of Compress Spring 4-2 contacts with upper vertical loading board boss 2-1, the other end of Compress Spring 4-2 contacts with the circular platform A4-1-2 of upper regulating control 4-1; By the center hole B4-3-3 of lower vertical loading board main body 3-2 through lower regulating control 4-3, ensure that lower vertical loading board boss 3-1 contacts with the circular platform B4-3-2 of lower regulating control 4-3; The cylindrical external thread 4-1-1 of upper regulating control 4-1 is screwed in the cylindrical internal thread 4-3-1 of lower regulating control 4-3, completes the assembling at self-balancing regulating control 4 place in 3 vertical loading boards.
Ringbolt 1-2 is screwed into the ringbolt 1-2 mounting hole of lifting plate 1, jam nut 1-3 is installed on ringbolt 1-2, locking for ringbolt 1-2.
Lower vertical loading board is installed screw thread 3-3 be connected with object lens, the symmetrical plane D3-2-1 that spanner can be used during connection to clamp lower vertical loading board main body 3-2 screws lower vertical loading board and installs screw thread 3-3, ensure that lower vertical loading board 3 is reliably connected with object lens, complete the installation of vertical loading board 3 and object lens under three places; Upper vertical loading board is installed the vertical loading board mounting hole 1-7 being thread through lifting plate 1, use pad 1-6 to be connected with lifting plate main body 1-1 by upper vertical loading board 2 with two vertical loading board nut 1-5 successively, complete the installation of vertical loading board 2 and lifting plate 1 in three places.
The working process of hanging apparatus be first by hanging apparatus according to above-mentioned fitting process installation, by the upper regulating control 4-1 and lower regulating control 4-3 that rotate three place's self-balancing regulating controls 4, lifting plate 1 is estimated leveling, use the ringbolt 1-2 of the lifting machines lift lifting plates 1 such as sky hangs, Compress Spring 4-2 is compressed gradually, until object lens are lifted, this process can realize steadily promoting object lens.Due to the mass distribution almost symmetry in all directions of object lens, under the elastic telescopic effect of Compress Spring 4-2, the vertical loading board of hanging apparatus can regulate length voluntarily according to object lens weight distribution, reduces the tilt quantity of object lens; In the installation course of object lens whereabouts, Compress Spring 4-2 recovers gradually, and object lens can be made steadily to lay, alleviate object lens sling and in the installation course that falls to the impact shock of object lens.

Claims (8)

1., for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, comprise lifting plate (1) and vertical loading board; One end of three described vertical loading boards is connected with described lifting plate (1) respectively;
Described vertical loading board comprises vertical loading board (2), lower vertical loading board (3) and self-balancing regulating control (4); Described upper vertical loading board (2) one end is fixedly connected with described lifting plate (1), the other end is connected with length-adjustable self-balancing regulating control (4) one end, and described self-balancing regulating control (4) other end is connected with described lower vertical loading board (3) one end;
Described self-balancing regulating control (4) inside comprises Compress Spring (4-2), and described Compress Spring (4-2) is arranged on described self-balancing regulating control (4) and described upper vertical loading board (2) junction.
2. according to claim 1 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described lifting plate (1) entirety is triangular structure, and described lifting plate (1) comprises lifting plate main body (1-1) and ringbolt (1-2); Described lifting plate main body (1-1) three angles place is respectively arranged with vertical loading board mounting hole (1-7), and middle position is provided with ringbolt and installs tapped bore (1-4);
Described upper vertical loading board (2) is threaded with vertical loading board nut (1-5) through described vertical loading board mounting hole (1-7), is provided with pad (1-6) between described vertical loading board nut (1-5) and lifting plate main body (1-1);
Described ringbolt (1-2) and described ringbolt are installed tapped bore (1-4) and are threaded, and described ringbolt (1-2) is threaded with a jam nut (1-3) through lifting plate main body (1-1) part.
3. according to claim 2 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described self-balancing regulating control (4) also comprises regulating control (4-1) and lower regulating control (4-3); Described upper regulating control (4-1) is cylindrical structural, cylindrical structure is provided with cylindrical external thread (4-1-1), centre is provided with through hole, one end of cylindrical structure is provided with circular platform A (4-1-2), be provided with center hole A (4-1-3) in the middle of described circular platform A (4-1-2), the internal diameter of described center hole A (4-1-3) is less than the internal diameter of the through hole of regulating control (4-1); Described lower regulating control (4-3) is cylindrical structural, through hole is provided with in the middle of cylindrical structure, cylindrical structural is provided with cylindrical internal thread (4-3-1), one end of cylindrical structure is provided with circular platform B (4-3-2), be provided with center hole B (4-3-3) in the middle of described circular platform B (4-3-2), the internal diameter of described center hole B (4-3-3) is less than the internal diameter of the through hole of lower regulating control (4-3); The cylindrical external thread (4-1-1) of described upper regulating control (4-1) coordinates with the cylindrical internal thread (4-3-1) of described lower regulating control (4-3).
4. according to claim 3 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described circular platform A (4-1-2) outside face is provided with symmetrical plane A (4-1-4), described circular platform B (4-3-2) outside face is provided with symmetrical plane B (4-3-4).
5. according to claim 3 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described upper vertical loading board (2) comprises vertical loading board boss (2-1), upper vertical loading board main body (2-2) and upper vertical loading board and installs screw thread (2-2-1); One end of described upper vertical loading board main body (2-2) is provided with described upper vertical loading board boss (2-1), and the other end of described upper vertical loading board main body (2-2) is provided with described upper vertical loading board and installs screw thread (2-2-1); Described upper vertical loading board is installed screw thread (2-2-1) and is threaded with described vertical loading board nut (1-5) through lifting plate (1) mounting hole, described upper vertical loading board boss (2-1) is arranged in the through hole of described upper regulating control (4-1), contact with the circular platform A (4-1-2) of described upper regulating control (4-1), described Compress Spring (4-2) is arranged between described upper vertical loading board boss (2-1) and described circular platform A (4-1-2).
6. according to claim 5 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described upper vertical loading board main body (2-2) is provided with symmetrical plane C (2-2-1).
7. according to claim 3 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described lower vertical loading board (3) comprises lower vertical loading board boss (3-1), lower vertical loading board main body (3-2) and lower vertical loading board and installs screw thread (3-3); One end of described lower vertical loading board main body (3-2) is provided with described lower vertical loading board boss (3-1), the other end of described lower vertical loading board main body (3-2) is provided with described lower vertical loading board and installs screw thread (3-3), described lower vertical loading board boss (3-1) is arranged in described lower regulating control (4-3), contacts with the circular platform B (4-3-2) of described lower regulating control (4-3).
8. according to claim 7 a kind of for can the hanging apparatus of self-balancing in photoetching projection objective lens, it is characterized in that, described lower vertical loading board main body (3-2) is provided with symmetrical plane D (3-2-1).
CN201510756931.9A 2015-11-10 2015-11-10 Self-balancing hoisting device used in lithographic projection lens Pending CN105253766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510756931.9A CN105253766A (en) 2015-11-10 2015-11-10 Self-balancing hoisting device used in lithographic projection lens

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Application Number Priority Date Filing Date Title
CN201510756931.9A CN105253766A (en) 2015-11-10 2015-11-10 Self-balancing hoisting device used in lithographic projection lens

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CN105253766A true CN105253766A (en) 2016-01-20

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN105967041A (en) * 2016-07-14 2016-09-28 苏州浦灵达自动化科技有限公司 Magnetic absorption type positioning lifting appliance capable of positioning center automatically

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CN204297933U (en) * 2014-11-24 2015-04-29 山东永泰化工有限公司 A kind of tire hoisting clamp

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Publication number Priority date Publication date Assignee Title
GB535823A (en) * 1938-12-10 1941-04-23 Gen Spring Corp Improvements in spring supports particularly for pipe lines
US20030183994A1 (en) * 2002-03-27 2003-10-02 Atwater D. Stuart Damper spring strut
JP2005272068A (en) * 2004-03-24 2005-10-06 Sankyu Inc Overload detecting device
CN201817191U (en) * 2010-04-16 2011-05-04 江苏长征风力发电设备有限公司 Special-purpose hoisting tool for yawing gear case of direct-drive permanent magnet wind driven generator
CN202924583U (en) * 2012-10-29 2013-05-08 无锡市联达电器有限公司 Coil balance lifting rod
CN202912558U (en) * 2012-11-03 2013-05-01 新乡中联石化封头锻压有限公司 Special chucking appliance used for end socket hoisting
CN203756893U (en) * 2014-02-28 2014-08-06 北京谊安医疗系统股份有限公司 Balanced type lifting tower crane and adjusting device thereof
CN204297933U (en) * 2014-11-24 2015-04-29 山东永泰化工有限公司 A kind of tire hoisting clamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105967041A (en) * 2016-07-14 2016-09-28 苏州浦灵达自动化科技有限公司 Magnetic absorption type positioning lifting appliance capable of positioning center automatically

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