CN105242496B - A kind of sound absorber for lithographic equipment - Google Patents
A kind of sound absorber for lithographic equipment Download PDFInfo
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- CN105242496B CN105242496B CN201410330541.0A CN201410330541A CN105242496B CN 105242496 B CN105242496 B CN 105242496B CN 201410330541 A CN201410330541 A CN 201410330541A CN 105242496 B CN105242496 B CN 105242496B
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Abstract
The present invention discloses a kind of sound absorber for lithographic equipment, it is characterized in that, the sound absorber includes an arc microperforated panel and supports the adjusting means of the arc microperforated panel to form, and some micropunch, the adjusting means and the microperforated panel ball pivot chain link are included on the arc microperforated panel；The adjusting means adjusts the microperforated panel relative to by the distance and angle of sound absorption device.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field, more particularly to a kind of sound absorption for lithographic equipment to fill
Put.
Background technology
Lithographic equipment is a kind of machine being applied to required pattern on substrate.For example, lithographic equipment can be used in collection
Into in circuit (IC) manufacture.In such a case, it is possible to the alternatively referred to as pattern shape of mask or mask (reticle)
It is used for the circuit pattern for generating the individual layer corresponding to the IC into device.The pattern can be imaged onto to substrate (for example, silicon wafer
Piece) on target part (e.g., including a part of tube core, one or more tube cores) on.Pattern imaging be by pattern into
As what is carried out to offer to radiation-sensitive materials (resist) layer on substrate.Generally, single substrate will include continuous
The network of the adjacent target portions of exposure.Conventional lithographic equipment includes：So-called stepper, in the stepper, pass through by
Whole patterns are exposed on the target part to radiate each target part successively;And so-called scanning machine：Swept described
Retouch in machine, the pattern is scanned along assigned direction (" scanning " direction) by radiation beam while edge is parallel or reverse with the direction
Substrate described in parallel scanning direction radiates each target part.May also be by the way that imprint patterns (imprinting) be arrived
The mode of substrate is formed pattern onto substrate from patterning device.
High accuracy and high-resolution need phase between each part of lithographic equipment as the target that photoetching technique currently aims at
Mutually it is accurately positioned, such as keeps reticle stage, optical projection system and the substrate for keeping substrate of patterning device (such as mask)
Platform.In addition to the positioning of such as reticle stage and substrate table, optical projection system also faces this needs.Projection in current device
System includes bearing structure, such as lens mounting (situation of transmitted light) or mirror frame (situation of reflected light), and including
Multiple optical elements, such as lens element, speculum etc..
Generally in Optical Coatings for Photolithography, because structural vibration will cause the short-term errors of image, simultaneously because kinetic system
System（Such as micropositioner, speculum）MA (Moving Average) and MSD (Moving Standard Deviation) watch
Taking site error causes pattern distortion.Complete machine dynamic property is reduced and controlled, error is reduced to a relatively low level.Noise
Load（Acoustics Load）The pressure for being defined as air changes with time and acts on the Inner-worlds such as object lens and main substrate
On effect.Show according in litho machine in the test of client, the sound and noise pair propagated under clean air ambient
The ratio that the disturbance of Inner-world accounts for total vibration interference is about 40%, as shown in Figure 1.Its litho machine noise experimental test value model
It is trapped among 75-90dB or so.Fig. 2 is Clean room environment acoustic pressure-time graph schematic diagram.
In litho machine, noise can have an impact to litho machine Inner-world, such as object lens, objective lenses, interferometer, main base
Plate.Main sound source has ambient noise, electrical noise, mask platform ＆ work stage motion artifacts.In as disclosed in US20090195760
Shown in appearance, exemplified by moving the stage noise, sports platform has three kinds of noises, first, rigid motion noise, is drawn by rigid motion acceleration
Rise, frequency is far below 150Hz, and overlay may be had an impact；Second, structural vibration noise, frequency is higher than 150Hz, can
Overlay and fading can be had an impact；Third, aerodynamic noise caused by air drag, frequency is higher than 500Hz.
In order to solve noise problem, resonator has been provided in the prior art（Or acoustic resonator）Technology.Single resonator
It can regard as and be made up of the different acoustic element of several acoustics effect.Air vibrates with sound wave in open tube and near the mouth of pipe, is
One acoustic mass element, the pressure in cavity change with air, are an acoustic compliance elements.And the air in cavity is to a certain degree
It is interior to be vibrated with sound wave, it may have certain acoustic mass.For air in the vibration friction of opening wall, its acoustics effect is sound
Resistance.When incident acoustic wave frequency close to resonator intrinsic frequency when, the air column of pore-throat produces judder, in vibration processes
In, due to overcome frictional resistance and sound energy consumption.Conversely, when incident acoustic wave frequency is away from resonator intrinsic frequency, resonator
Vibration is very weak, therefore sound absorption effect very little, it is seen that resonator acoustic absorptivity varies with frequency, and highest acoustic absorptivity appears in
At resonant frequency.
As used above-mentioned acoustic resonator principle in patent US20090161085, three kinds of acoustic resonator are devised.Feature has for the mouth of pipe
Multiple different volumes, sound absorption frequency can be extended, cavity volume is adjusted by active device, can dynamically adjust acoustic resonator sound absorption
Frequency.
Used another noise reduction mode is exactly Active Noise Control technology in the prior art.In general, traditional noise
Control method is more effective to control high-frequency noises, and little to the control effect of low-frequency noise, if to accomplish well
Control, even will may not costly.Reason is to be related to that wavelength is very long, if with Passive Shape Control, sound-absorbing material is very thick,
Silencer is very big, elastomeric material（For vibration isolation）It is very soft, it is very thick.Early in the 1930s, just having sprouted Active control
Concept, due to the limitation of electronic equipment and control theory, this system can not also be promoted.Nearly 30 years, active noise and control
It is that Active control is possibly realized as acoustics, particularly Noise measarement theoretical developments.Its principle is mainly sent instead with transducer
Phase noise is to offset original noise, and so as to reach the purpose of noise reduction, control noise is then electronically from former noisy
Obtained in measurement, that's what it all adds up to.This simple concept used for more than halfth century, and also to keep punching to realize.Active control
It is only applicable to low frequency（500 below Hz）, high frequency space phase change greatly, be just not easily controlled.Active noise control is profit
Noise is sent with one or more secondary noise sources to suppress original noise.Secondary noise source uses electronic circuit and loudspeaker,
Its noise power sent must be more than the noise power of original noise source, could realize control.
As devised polytype active silencer in patent US20090195763（Feed forward type）, for reducing noise
Influence to Optical Coatings for Photolithography.Sound wave is produced because workpiece platform mask platform moves, air-flow and other disturbances, may be to projection
System has an impact, by arranging a series of loudspeakers, to reduce these influences of the disturbance to equipment.Detected by sensor SE and be
Noise in system gas bath pipeline, by control system CON drive the speaker ACT, secondary noise is produced, offsets former noise, reduced
Influenceed caused by gas bath noise.Multiple sensors and multiple loudspeakers are controlled by a control system, reduce noise to object lens
Influence.The external structures such as basic framework meeting radiated noise under excitation, active countersound system are arranged in motherboard and nearby absorbed
Noise, to reduce influence of the noise to motherboard.By being disposed about microphone in horizontal calibrator PSE, by control system,
Influence of the noise to measuring instrument can be reduced., can by control system by being disposed about microphone in vertical calibration STA
To reduce influence of the noise to measuring instrument.
Another used noise reduction mode is exactly sound absorption technique in the prior art.Sound wave is by medium or incides medium
The reduction process of acoustic energy when on interface, referred to as absorb sound or absorb.When medium interface is material（Structure）During surface, part sound
It can be absorbed, referred to as absorbed sound.Any material（Structure）Due to its porous, membrane action or resonant interaction, to incident acoustic energy
More or less there is acoustical absorptivity.
As shown in patent US20090195760, acoustic board 13,14,15,16 is placed on around mask stage and object lens.Specially
Sharp CN102332259, it adjusts the pore size of piezoelectricity membrane structure by the piezo-electric effect of piezoelectric membrane, so as to reach regulation
The purpose of sound absorbing capabilities；Patent CN102646414, disclose a kind of combination sound absorption based on microperforated panel and intracavitary resonator system
Device, the bandwidth of sound absorption frequency is adjusted by adjusting aperture and the cavity depth of microperforated panel.Patent CN102044239 passes through
The adjusting method of spring or elastomeric material adjusts cavity depth, so as to changing the sound absorbing capabilities of microperforated panel.
The content of the invention
The defects of in order to overcome in the prior art, the present invention provide a kind of sound absorption structure device for litho machine, and it is inhaled
Acoustic energy power can be adjusted according to angle proposed by the invention, depth adjusting mechanism according to actual environment noise, so as to reach
To optimal acoustically effective.
In order to realize goal of the invention, the present invention discloses a kind of sound absorber for lithographic equipment, it is characterised in that the suction
Acoustic device includes an arc microperforated panel and supports the adjusting means of the arc microperforated panel to form, on the arc microperforated panel
Including some micropunch, the adjusting means and the microperforated panel ball pivot chain link；The adjusting means adjusts the microperforated panel
Relative to by the distance and angle of sound absorption device.
Further, the quantity of the adjusting means is more than or equal to three.
Further, the adjusting means includes a connecting rod and the sleeve composition outside the connecting rod.
Further, the connecting rod keeps relative position to fix with the sleeve by some regulation positioning holes.
Further, the connecting rod keeps relative position to fix with the sleeve by screw thread.
Further, the sleeve includes a support unit and the adjusting cavity above shown support unit, should
Connected between support unit and the adjusting cavity by a movable plate.
Further, the sleeve includes a support unit and the one the second adjusting cavities, the one the second adjusting cavities it
Between pass through a movable plate connect.
Further, the material of the microperforated panel can be the one or more in following material：Hardboard, glue
Plywood, plasterboard, fiber cement board, steel plate, aluminium sheet.
Further, the form of the micropunch is circular hole, conical bore or gap structure.
Further, the movable plate is controlled by a Pneumatic controller, hydraulic control device or machine control unit
It is mobile.
The invention also provides a kind of control method of above-mentioned sound absorber, it is characterised in that：Comprise the following steps：Step
1, noise frequency information is identified by noise measuring system, frequency information is then sent to processor；Step 2, processor will
Frequency information is converted into control signal, and controller receives after control signal output drive signal to sound absorber；Step 3, control
The cavity depth and angular adjustment of microperforated panel in sound absorber processed；Step 4, the collection of noise reduction microphone is after sound absorption
Noise information, feed back to processor, and enter step 2, the acoustically effective until reaching setting.
The invention also provides a kind of litho machine using above-mentioned sound absorber, it is characterised in that：The sound absorber peace
On framework, in measuring system, on objective system or in gas bath system, the sound absorber relative to its installation site tune
Whole angle is 0 to 40 degree.
Instant invention overcomes in place of the deficiencies in the prior art, it is proposed that one kind is gone back while being used to adjust microperforated panel depth
The governor motion of angle can be adjusted, is equipped with arc microperforated panel, the space of microperforated panel can be changed by the governor motion
Posture, so that noise to greatest extent on vertical radiation and microperforated panel, reaches optimal acoustically effective.
Relative to adjusting methods such as prior art piezoelectric membrane, springs, the present invention is proposed using air pressure adjustment, hydraulic regulation
And the methods of mechanical adjustment, carries out offline or on-line control, has more preferable active control, can adjust angle and sky simultaneously
Chamber depth.Offline regulation is mainly applied to steady state noise source, when litho machine environment is undergone mutation, it is only necessary to which adjusting means is entered
Row simple adjustment, and do not have to renewal part；Mainly in litho machine sound source frequency displacement occurs for on-line control, is passed by noise
Sensor pickoff signals, are output to adjusting apparatus so that microperforated panel is in optimal locus, so as to reach optimal sound absorption effect
Fruit.
Compared with prior art, angle proposed by the present invention, depth simultaneously governor motion, using air pressure, hydraulic pressure or
The method of Mechanical course, control principle is simple, and realizability is strong, is that can reach the purpose of noise reduction without external sound source, can beyond
The sound absorbing capabilities that noise testing equipment realizes adjustment microperforated panel in real time are connect, so as to reach the effect of Active Absorption, can be used for
The noise reduction of litho machine difference subsystem, it such as can be used for framework noise reduction, gas bath noise reduction, object lens noise reduction.
Brief description of the drawings
It can be obtained further by following detailed description of the invention and institute's accompanying drawings on the advantages and spirit of the present invention
Solution.
Fig. 1 is the measurement result schematic diagram that vibration caused by acoustic pressure is measured in typical cleaned air environment；
Fig. 2 is Clean room environment acoustic pressure-time graph schematic diagram；
Fig. 3 is one of Clean room noise frequency domain test result schematic diagram；
Fig. 4 is the two of Clean room noise frequency domain test result schematic diagram；
Fig. 5 is the acoustic absorptivity of typical microperforated panel with the schematic diagram of the change of sound absorption frequency；
Fig. 6 is one of structural representation of sound absorber provided by the present invention；
Fig. 7 is the two of the structural representation of sound absorber provided by the present invention；
Fig. 8 is sound absorber provided by the present invention and the principle comparison diagram of prior art；
Fig. 9 is of the invention and traditional microperforated absorber acoustically effective comparison diagram；
Figure 10 is one of structural representation of adjustment element of sound absorber provided by the present invention；
Figure 11 is the two of the structural representation of the adjustment element of sound absorber provided by the present invention；
Figure 12 is the three of the structural representation of the adjustment element of sound absorber provided by the present invention；
Figure 13 is the four of the structural representation of the adjustment element of sound absorber provided by the present invention；
Figure 14 is the control flow schematic diagram of sound absorber provided by the present invention；
Figure 15 is the regulation flow process schematic diagram of sound absorber provided by the present invention；
Figure 16 is the schematic view of the mounting position of sound absorber provided by the present invention.
Embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
The present invention proposes a kind of sound absorption structure device for litho machine, and its acoustical absorptivity can be according to proposed by the invention
Angle, depth adjusting mechanism be adjusted according to actual environment noise, so as to reach optimal acoustically effective.
The main regulative mode of adjustable sound absorption structure of the prior art based on microperforated panel sound absorption principle is adjustment aperture
And cavity depth, such as patent CN102332259, it is big that it adjusts the aperture of piezoelectricity membrane structure by the piezo-electric effect of piezoelectric membrane
It is small, so as to reach the purpose of regulation sound absorbing capabilities；Patent CN102646414, it in microperforated panel cavity by increasing by one
Spring mass system, to expand its wide band sound absorption.The shape of microperforated panel described in the prior art is square, adjustment parameter
Predominantly cavity depth and aperture.Actually the radiation of noise is not always in vertical incidence and square microperforated panel, therefore only
By adjustment aperture and cavity depth, optimal sound absorbing capabilities can't be reached.
In lithographic equipment field, with Photolithography Technology permissible accuracy and resolution ratio more and more higher, this just needs light
Carve equipment each subsystem between can keep being precisely located, such as holding reticle stage system, optical projection system, holding substrate lining
Base frame and measuring system can exactly position each other and improve the short-term stability of each subsystem as much as possible.And according to
Lithographic equipment vibration experiments show：Disturbance of the sound and noise propagated under clean air ambient to Inner-world accounts for
The ratio of total vibration interference about 40%, its litho machine noise experimental test value scope is in 75-90dB or so.
Influence of the noise to each system of photoetching machine equipment is very notable, and it actually refers to that air pressure changes with time and acted on
In each subsystem of litho machine.The noise source of litho machine is mainly derived from the noise of electrical control equipment, the fortune of work stage ＆ mask platforms
The dynamic stage noise, gas bath noise and ambient noise etc., the main dynamic stability for influenceing litho machine Inner-world, such as object lens（Including
Internal each eyeglass）, main substrate, interferometer etc..
According to microperforated panel sound absorption correlation theory, it is the combination of He Muhuozhi resonators, therefore can be regarded as by matter
One resonator system of amount and spring composition.When the frequency of incident acoustic wave and the consistent resonant frequency of system, perforated plate neck
Air produces fierce vibration friction, strengthens sink effect, forms absworption peak, acoustic energy is significantly decayed.Perforated plate is total to
Vibration frequency can calculate according to the following formula：
In above formula, L --- air layer thickness after plate；The thickness of t --- plate；D --- aperture；C --- the velocity of sound；P --- wear
Porosity.
The theoretical absorbability that can draw its noise to different frequency is different more than, and Fig. 5 is typical micropunch
The acoustic absorptivity of plate with frequency change schematic diagram, it can be seen that it has two features, first, its maximum sound absorption
Ability reaches maximum at resonance, and second, the frequency bandwidth that it absorbs sound is bigger, generally more than 1kHz.
Fig. 3, Fig. 4 are to survey noise frequency-domain result to a Clean room, it can be seen that in 580Hz or so and 100Hz or so
Contributed with larger noise energy.Therefore carrying out noise reduction to litho machine using microperforated panel structure has extraordinary effect.
After the design of in general microperforated panel mounting interface finishes, its sound absorbing capabilities is also just basic to be determined, but when noise circumstance changes
When, its acoustically effective will be greatly affected.Fig. 6 is one embodiment of the present of invention, and it is by arc microperforated panel 2 and multiple
Adjustment structure 1 forms.Micropunch adjusting means connecting rod is connected with microperforated panel by socket arrangement.Adjusting rod and micropunch
Connected mode is ball-joint mode, adjusts the length of connecting rod so that connecting rod position moves up and down, while connecting rod moves up and down
While, the socket arrangement in microperforated panel along rod slide, will realize the regulation of angle, so as to change microperforated panel
Cavity depth after angle and plate, noise vertical radiation and microperforated panel to greatest extent make it that on the premise of resonant frequency is ensured
On, reach optimal acoustically effective.Its advantages of, is, when noise circumstance changes, only can reach by adjusting adjusting means
Optimal acoustically effective, without changing other fixed mechanisms and interface.Fig. 7 is the embodiment of three support meanss of the present invention.
Fig. 8 is the of the invention and comparison diagram of traditional microperforated absorber, passes through the angle adjustment mechanism of the present invention so that
Arc microperforated panel vertically absorbs the noise of sound source radiation to greatest extent, and Fig. 9 is the acoustically effective comparison diagram of two kinds of structures, can
To find out, by angle regulator, acoustic absorptivity and wide band sound absorption ratio traditional structure can be caused to increase, had obvious
Advantage.
The adjusting means of the present invention, as shown in Figure 10, can pass through the length of the hole locking mode adjusting rod of discrete type.
In present embodiment, the adjusting means 1 is a cavity regulating element.The adjusting means 1 includes microperforated panel connecting rod 10 and position
Sleeve 12 outside microperforated panel connecting rod 10.Wherein there is regulation positioning hole in microperforated panel connecting rod 10 and sleeve 12
11。
Figure 11 is another embodiment of the adjusting means shown in the present invention.As shown in figure 11, the adjusting means includes regulation
Screw rod 21 and adjusting nut 22.The adjusting means 1 can continuously change the length of bar by way of screw-driven.
As shown in figure 12, it can be it by adjusting cavity 31, movable plate 33, movable plate support flexible member 34, micropunch
Plate connecting rod 32 forms.Connecting rod 32 is hinged with microperforated panel.Movable plate 33 is supported by flexible member 34, by being applied to adjusting cavity
Add certain gas pressure or fluid pressure, pass through the balance of pressure and resilient support, you can to realize the upper of movable plate 33
Lower motion.
Figure 13 is another embodiment of the adjusting means shown in the present invention.As Figure 13 be mainly by the pressure of two intracavitary
Change the change for the length for realizing connecting rod 42.The adjusting means 1 includes the first adjusting cavity 41, the second adjusting cavity 43, micropunch
Plate connecting rod 42 and movable plate 44.
Figure 14 is an instance graph of online Active Absorption System, and it includes noise testing microphone 501b, noise reduction
Test microphone 501a, the processor 504, one of noise frequency analyzer 502, one controller 506, online micropunch sound absorption dress
Put 508.Noise frequency information 502 is identified by noise measuring system, frequency information 503 is then sent to processor 504.Place
Frequency information is converted into control signal 505 by reason device 504.Output drive signal 507 is real after controller 506 receives control signal
The cavity depth of existing microperforated panel and the regulation of angle, noise reduction microphone 501a gather the noise information after sound absorption,
Processor 504 is fed back to, the information that processor 504 comes to feedback is further processed, and carries out the angle of sound absorption structure again
The regulation of degree and depth, until reaching the acoustically effective being manually set.For frequency acoustic absorptivity of the invention with cavity depth
And the information of angle change, it can be released according to microperforated panel correlation theory, resonant frequency can be worn according to micro- in technical scheme 1
Orifice plate resonant frequency calculates formula and calculated, and acoustic absorptivity can be calculated according to the following formula, and acoustic absorptivity during resonance is, in formula, R --- sound pressure reflection coefficient；R, relative specific acoustic resistance, the phase of x --- resonance sound-absorbing structure
Specific acoustic reactance is 0 when being resonated to specific acoustic reactance, for wide band sound absorption, can be calculated according to the following formula,
, in formula,For quality factor, L is cavity depth,Wave length of sound during to resonate, r are relative specific acoustic resistance,
Characteristic.The frequency acoustic absorptivity of the present invention can also be according to noise testing with the information of cavity depth and angle change simultaneously
Experiment draws, the noise information of the present apparatus is whether there is by test, the two, which is compared, can show that acoustic absorptivity becomes with frequency
The relation of change, then changes cavity thickness and angle carries out retest, you can to draw under different cavity thickness and angle
Sound absorbing capabilities.For the processor of the present invention, it can release or test the acoustic absorptivity measured with adjustment parameter by theoretical
The relation of change is handled with noise testing frequency information, establishes the adjustment parameter and actual noise frequency of optimal sound absorbing capabilities
The relation of signal；For the noise-measuring system of the present invention, it has the function that frequency spectrum of noise signals is analyzed；For the present invention's
Control device, it has is converted into control signal by the regulation information that processor sends over, and puts on on-line control device.Should
Online Active Absorption System compare with traditional Active Noise Control, it can be achieved online actively to inhale without external sound source and phaser
Sound, it has more preferable economy and practicality.
Figure 15 is the angle and depth adjustment flow chart of the present invention, and Fig. 6 embodiment is adjusted, passes through microperforated panel
Former and later two microphones test noise signal 701a and 701b, be pointed to first cornerwise adjustment structure be adjusted so as to
Angle Rx regulation is realized, after the sound absorption of satisfaction to be achieved.The regulation positioned at collinear adjustment structure is carried out again, so as to real
Four adjustment structures after the sound absorption of satisfaction to be achieved, then are adjusted by existing angle Ry regulation, to adjust its frequency that absorbs sound,
Regulation eventually through angle and depth reaches optimal acoustically effective.This adjusting method also can be according to actual conditions progress order
On change, can first adjust depth, then adjust Rx angles, finally adjust Ry angles；Rx angles can also be first adjusted, then are adjusted
Depth, finally adjust Ry angles.
Present invention could apply to the noise reduction of the multiple positions of litho machine device, as shown in figure 16, is easily made an uproar inside litho machine
It is main substrate 40 that sound shadow, which rings part, object lens 50, measures subsystem（Not shown in figure）.Vibration from basic framework 100 can be with
It is effectively isolated by shock absorber 30, noise turns into the main vibration source of litho machine Inner-world, with litho machine required precision
More and more higher, influence of the noise to Inner-world can not be ignored.From the current study, main noise source has mask stage
70th, the motion artifacts of work stage 20, external environmental noise 110, and gas bath system noise 80, electrical noise 90, due to litho machine
Inside is closing space, not only to consider direct sound wave to internal World-wide influence, reverberation noise needs also exist for considering.Apparatus of the present invention
100 can be mounted on shielded frame, improve litho machine inner sound absorption ability, reduce reverberation noise；Gas bath pipeline can be placed on
90 outsides, reduce gas bath noise；It can be placed in around object lens mount point and object lens, reduce object lens vibration caused by noise.Consider
To the installing space of actual litho machine, the angle of regulation range of the sound absorption structure is generally 0 degree to 40 degree, cavity thickness regulation model
Enclose for 20-100mm.
Instant invention overcomes in place of the deficiencies in the prior art, it is proposed that one kind is gone back while being used to adjust microperforated panel depth
The governor motion of angle can be adjusted, is equipped with arc microperforated panel, the space of microperforated panel can be changed by the governor motion
Posture, so that noise to greatest extent on vertical radiation and microperforated panel, reaches optimal acoustically effective.
Relative to adjusting methods such as prior art piezoelectric membrane, springs, the present invention is proposed using air pressure adjustment, hydraulic regulation
And the methods of mechanical adjustment, carries out offline or on-line control, has more preferable active control, can adjust angle and sky simultaneously
Chamber depth.Offline regulation is mainly applied to steady state noise source, when litho machine environment is undergone mutation, it is only necessary to which adjusting means is entered
Row simple adjustment, and do not have to renewal part；Mainly in litho machine sound source frequency displacement occurs for on-line control, is passed by noise
Sensor pickoff signals, are output to adjusting apparatus so that microperforated panel is in optimal locus, so as to reach optimal sound absorption effect
Fruit.
Compared with prior art, angle proposed by the present invention, depth simultaneously governor motion, using air pressure, hydraulic pressure or
The method of Mechanical course, control principle is simple, and realizability is strong, is that can reach the purpose of noise reduction without external sound source, can beyond
The sound absorbing capabilities that noise testing equipment realizes adjustment microperforated panel in real time are connect, so as to reach the effect of Active Absorption, can be used for
The noise reduction of litho machine difference subsystem, it such as can be used for framework noise reduction, gas bath noise reduction, object lens noise reduction.
The preferred embodiment of the simply present invention described in this specification, above example is only illustrating the present invention
Technical scheme rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical scheme of experiment, all should be within the scope of the present invention.
Claims (12)
- A kind of 1. sound absorber for lithographic equipment, it is characterised in that the sound absorber include an arc microperforated panel with And the adjusting means of the support arc microperforated panel forms, and includes some micropunch, the tune on the arc microperforated panel Regulating device and the arc microperforated panel ball pivot chain link；The adjusting means adjusts the arc microperforated panel relative to being inhaled The distance and angle of acoustic device.
- 2. sound absorber as claimed in claim 1, it is characterised in that the quantity of the adjusting means is more than or equal to three.
- 3. sound absorber as claimed in claim 1, it is characterised in that it is described with being located at that the adjusting means includes a connecting rod Sleeve composition outside connecting rod.
- 4. sound absorber as claimed in claim 3, it is characterised in that the connecting rod is fixed by some regulations with the sleeve Position hole keeps relative position to fix.
- 5. sound absorber as claimed in claim 3, it is characterised in that the connecting rod keeps phase with the sleeve by screw thread Position is fixed.
- 6. sound absorber as claimed in claim 3, it is characterised in that the sleeve includes a support unit and positioned at shown An adjusting cavity above support unit, connected between the support unit and the adjusting cavity by a movable plate.
- 7. sound absorber as claimed in claim 3, it is characterised in that the sleeve includes a support unit and the first regulation Chamber and the second adjusting cavity, connected between first adjusting cavity and the second adjusting cavity by a movable plate.
- 8. sound absorber as claimed in claim 1, it is characterised in that the material of the microperforated panel is one in following material Kind is several：Hardboard, glued board, plasterboard, fiber cement board, steel plate, aluminium sheet.
- 9. sound absorber as claimed in claim 1, it is characterised in that the form of the micropunch is circular hole, conical bore or seam Gap structure.
- 10. sound absorber as claimed in claim 6, it is characterised in that the movable plate passes through a Pneumatic controller, hydraulic pressure Control device or machine control unit control movement.
- 11. the control method of the claimed sound absorber of any one, its feature in a kind of 1-10 to claim It is：Comprise the following steps：Step 1, noise frequency information is identified by noise measuring system, frequency information is then sent to processor；Step 2, frequency information is converted into control signal by processor, and output drive signal is extremely after controller receives control signal Sound absorber；Step 3, the cavity depth and angular adjustment of the microperforated panel in sound absorber are controlled；Step 4, noise reduction microphone gathers the noise information after sound absorption, feeds back to processor, and enters step 2, directly Reach the acoustically effective of setting.
- 12. a kind of usage right requires the litho machine of the sound absorber that any one claim is protected in 1-10, its feature exists In：The sound absorber is arranged on framework, in measuring system, on objective system or in gas bath system, the sound absorber phase Adjustment angle for its installation site is 0 to 40 degree.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2100488U (en) * | 1991-05-22 | 1992-04-01 | 李亚庆 | Combined efficient silencer |
| CN2457194Y (en) * | 2000-12-14 | 2001-10-31 | 上海申华声学装备有限公司 | Arc type sound absorption screen |
| CN101086178A (en) * | 2006-06-07 | 2007-12-12 | 刘涛 | Adjustable sound-adsorption device |
| CN201322008Y (en) * | 2008-12-15 | 2009-10-07 | 中铁上海设计院集团有限公司 | Novel slice type foam aluminum muffler for subway stations |
| CN103410637A (en) * | 2013-08-11 | 2013-11-27 | 中国人民解放军重庆通信学院 | Air intake and noise elimination structure of silent generator unit |
-
2014
- 2014-07-11 CN CN201410330541.0A patent/CN105242496B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2100488U (en) * | 1991-05-22 | 1992-04-01 | 李亚庆 | Combined efficient silencer |
| CN2457194Y (en) * | 2000-12-14 | 2001-10-31 | 上海申华声学装备有限公司 | Arc type sound absorption screen |
| CN101086178A (en) * | 2006-06-07 | 2007-12-12 | 刘涛 | Adjustable sound-adsorption device |
| CN201322008Y (en) * | 2008-12-15 | 2009-10-07 | 中铁上海设计院集团有限公司 | Novel slice type foam aluminum muffler for subway stations |
| CN103410637A (en) * | 2013-08-11 | 2013-11-27 | 中国人民解放军重庆通信学院 | Air intake and noise elimination structure of silent generator unit |
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| CN105242496A (en) | 2016-01-13 |
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