CN105239061B - A kind of graphene/metal composite thin film and preparation method thereof - Google Patents
A kind of graphene/metal composite thin film and preparation method thereof Download PDFInfo
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- CN105239061B CN105239061B CN201510624104.4A CN201510624104A CN105239061B CN 105239061 B CN105239061 B CN 105239061B CN 201510624104 A CN201510624104 A CN 201510624104A CN 105239061 B CN105239061 B CN 105239061B
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- graphene
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- metal composite
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 212
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 203
- 239000002905 metal composite material Substances 0.000 title claims abstract description 74
- 239000010409 thin film Substances 0.000 title claims abstract description 68
- 238000002360 preparation method Methods 0.000 title claims abstract description 23
- 239000010408 film Substances 0.000 claims abstract description 176
- 239000000758 substrate Substances 0.000 claims abstract description 97
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 239000010949 copper Substances 0.000 claims description 52
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 49
- 229910052802 copper Inorganic materials 0.000 claims description 49
- 229910052737 gold Inorganic materials 0.000 claims description 39
- 239000010931 gold Substances 0.000 claims description 39
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 26
- 229910021645 metal ion Inorganic materials 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 239000011230 binding agent Substances 0.000 claims description 18
- 239000008367 deionised water Substances 0.000 claims description 18
- 229910021641 deionized water Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 238000006722 reduction reaction Methods 0.000 claims description 15
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 13
- 239000004831 Hot glue Substances 0.000 claims description 12
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- 150000003839 salts Chemical class 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- -1 platinum ion Chemical class 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 4
- 239000011734 sodium Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000011780 sodium chloride Substances 0.000 claims description 2
- 238000011065 in-situ storage Methods 0.000 abstract description 4
- 239000006185 dispersion Substances 0.000 abstract description 2
- 238000007654 immersion Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 50
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 37
- 239000002245 particle Substances 0.000 description 35
- 238000004140 cleaning Methods 0.000 description 11
- SJUCACGNNJFHLB-UHFFFAOYSA-N O=C1N[ClH](=O)NC2=C1NC(=O)N2 Chemical compound O=C1N[ClH](=O)NC2=C1NC(=O)N2 SJUCACGNNJFHLB-UHFFFAOYSA-N 0.000 description 9
- 238000010790 dilution Methods 0.000 description 8
- 239000012895 dilution Substances 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 150000001336 alkenes Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004575 stone Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000002082 metal nanoparticle Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical group [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 241000416536 Euproctis pseudoconspersa Species 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- BRSVJNYNWNMJKC-UHFFFAOYSA-N [Cl].[Au] Chemical compound [Cl].[Au] BRSVJNYNWNMJKC-UHFFFAOYSA-N 0.000 description 1
- QYSYEILYXGRUOM-UHFFFAOYSA-N [Cl].[Pt] Chemical compound [Cl].[Pt] QYSYEILYXGRUOM-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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CN105657303B (en) * | 2016-01-26 | 2018-11-27 | 电子科技大学 | A kind of strong radiator structure and preparation method thereof for laser television heat dissipation |
CN106179923B (en) * | 2016-07-11 | 2019-07-05 | 黑龙江碳时代石墨烯科技有限公司 | The preparation method of graphene metallic composite |
CN106517993B (en) * | 2016-10-18 | 2018-12-18 | 中国科学院宁波材料技术与工程研究所 | A kind of graphene/montmorillonite Composite porous membrane and preparation method thereof |
CN107261857B (en) * | 2017-05-10 | 2020-06-30 | 四川大学 | Modified graphene membrane for separating monovalent and polyvalent metal ions and preparation method thereof |
CN107913061A (en) * | 2017-12-07 | 2018-04-17 | 湖南豌豆医疗用品有限公司 | A kind of production method of graphene electrocardioelectrode |
US11346619B2 (en) | 2017-12-18 | 2022-05-31 | University Of South Carolina | Manufacturable metal-graphene interface for highly efficient and durable condensers |
GB2622118A (en) * | 2022-05-13 | 2024-03-06 | Ningbo Softcarbon Electronic Tech Co Ltd | Binding agent for graphene film transfer and transfer method of graphene film |
CN117088362A (en) * | 2022-05-13 | 2023-11-21 | 宁波柔碳电子科技有限公司 | Adhesive for graphene film transfer and graphene film transfer method |
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KR101166528B1 (en) * | 2011-07-29 | 2012-07-19 | 주식회사 엘엠에스 | Graphene laminate comprising dopants and preparation method of the same |
CN103000817B (en) * | 2012-11-29 | 2016-04-20 | 无锡格菲电子薄膜科技有限公司 | A kind of flexible Organic Light Emitting Diode |
CN103848416A (en) * | 2012-11-29 | 2014-06-11 | 中国科学院上海微系统与信息技术研究所 | Method of modifying graphene film |
CN103400632B (en) * | 2013-07-17 | 2016-05-11 | 常州二维碳素科技股份有限公司 | A kind of Graphene dopant material and application thereof |
CN104091892B (en) * | 2014-06-13 | 2016-10-05 | 中国科学院重庆绿色智能技术研究院 | A kind of photoconductive organic semiconductor device based on Graphene electrodes |
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Effective date of registration: 20220825 Address after: No. 1818, Zhongguan West Road, Zhuangshi street, Zhenhai District, Ningbo City, Zhejiang Province, 315000 Patentee after: NINGBO GRAPHENE INNOVATION CENTER Co.,Ltd. Address before: 315201 No. 1219 Zhongguan West Road, Zhenhai District, Ningbo City, Zhejiang Province Patentee before: NINGBO INSTITUTE OF MATERIALS TECHNOLOGY & ENGINEERING, CHINESE ACADEMY OF SCIENCES |
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Effective date of registration: 20240328 Address after: No. 189 Guangming Road, Zhuangshi street, Zhenhai District, Ningbo City, Zhejiang Province Patentee after: NINGBO ROUTAN ELECTRONIC TECHNOLOGY CO.,LTD. Country or region after: China Address before: No. 1818, Zhongguan West Road, Zhuangshi street, Zhenhai District, Ningbo City, Zhejiang Province, 315000 Patentee before: NINGBO GRAPHENE INNOVATION CENTER Co.,Ltd. Country or region before: China |
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