CN105223210A - A kind of New X ray micro imaging system - Google Patents
A kind of New X ray micro imaging system Download PDFInfo
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- CN105223210A CN105223210A CN201510672822.9A CN201510672822A CN105223210A CN 105223210 A CN105223210 A CN 105223210A CN 201510672822 A CN201510672822 A CN 201510672822A CN 105223210 A CN105223210 A CN 105223210A
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Abstract
The invention discloses a kind of New X ray micro imaging system, comprise: the first optical element arranged successively at optical path direction and the second optical element, first optical element and the second optical element all have curved surface face shape, the normal direction of the first optical element is orthogonal with the normal direction of the second optical element, the X ray sent by object point is successively through the first optical element and the reflection of the second optical element, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization; One of them of first optical element and the second optical element is the bent crystal, and another optical element is multi-layer mirror.Described imaging system adopts the bent crystal to improve energy resolution, and reduces the aberration in this focus direction; Utilize the bent crystal and multi-layer mirror focal length coupling, the unrestricted choice that the work of realization can be put.Therefore described imaging system have that high energy resolution, high spatial resolution and work can put concurrently can the advantage of unrestricted choice, compensate for the deficiencies in the prior art.
Description
Technical field
The present invention relates to X ray micro-imaging technique field, particularly relate to a kind of New X ray micro imaging system.
Background technology
Inertial confinement fusion (Inertialconfinementfusion, being called for short ICF) research is one of great science frontier problem, in ICF diagnostic test, internal quick-fried constricted zone carries out high-resolution imaging, can obtain the physical message that the symmetry in radiation-driven source, homogeneity and implosion plasma compression hydrodynamic instability etc. are important.
At present, x-ray imaging is the important means of implosion constricted zone imaging, and wherein X ray Kirkpatrick-Baez (KB) imaging system and sphere bent crystal imaging system are the major equipments of x-ray imaging diagnosis in ICF experiment.KB micro imaging system adopts the metallic-membrane plating reflector of two panels orthogonal placement, obtains radioscopic image in grazing mirror system mode, and the feature of KB micro imaging system is that spatial resolution is high, work can be put can unrestricted choice, but energy resolution is low.Sphere bent crystal imaging system adopts a crystal face to be bent into the crystal of sphere, in close to normal incidence situation, diffraction imaging is carried out to object point, the feature of sphere bent crystal imaging system is that spatial resolution is high, energy resolution is high, but work can not be selected arbitrarily by point.
Therefore, existing KB micro imaging system and sphere bent crystal imaging system all cannot realize high energy resolution, high spatial resolution and to the x-ray imaging can put arbitrarily simultaneously, thus can not meet the requirement of many diagnostic tests.
Summary of the invention
Given this, the invention provides a kind of New X ray micro imaging system, high energy resolution, high spatial resolution and to the x-ray imaging can put arbitrarily can be realized simultaneously.
For achieving the above object, the invention provides following technical scheme:
The first optical element arranged successively at optical path direction and the second optical element, described first optical element and described second optical element all have curved surface face shape, the normal direction of described first optical element is orthogonal with the normal direction of described second optical element, the X ray sent by object point is successively through described first optical element and described second optical element reflection, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization;
One of them of described first optical element and described second optical element is the bent crystal, and the described bent crystal is the crystal that crystal face is bent into curved surface, and another optical element is multi-layer mirror.
Alternatively, the crystal face face shape of the described bent crystal is sphere or cylinder.
Alternatively, the mirror shape of described multi-layer mirror is sphere or cylinder.
Alternatively, described first optical element is multi-layer mirror, and described second optical element is the bent crystal.
Alternatively, described multi-layer mirror can grazing angle (incident light and minute surface angle) corresponding to point be 3.575 ° in work, and the described bent crystal can Bragg angle (multi-layer mirror emergent light and crystal face angle) corresponding to point be 14.476 ° in work.
Alternatively, the described bent crystal is mica crystal, and the diffraction surfaces of the described bent crystal is mica (002) crystal face.
From above technical scheme, a kind of New X ray micro imaging system provided by the present invention, be included in the first optical element and the second optical element that optical path direction arranges successively, first optical element and the second optical element all have curved surface face shape, the normal direction of the first optical element is orthogonal with the normal direction of the second optical element, the X ray sent by object point is successively through the first optical element and the reflection of the second optical element, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization.
One of them of first optical element of described imaging system and the second optical element is the bent crystal, another optical element is multi-layer mirror, the bent crystal is the monochromatization of Bragg diffraction principle realization to incident light based on crystal, the self-energy resolution of crystal is better than multilayer film, and for the X ray of identical energy, the Bragg angle of crystal is usually large than the grazing angle of multi-layer mirror, therefore described imaging system is while guarantee high spatial resolution, can improve the energy resolution of imaging system.Further, described imaging system, by the matched design of the focal length to the bent crystal and multi-layer mirror, does not limit Bragg angle, and its work can be put can unrestricted choice.
Therefore, New X ray micro imaging system provided by the present invention, achieves high energy resolution, high spatial resolution and to the x-ray imaging can put arbitrarily.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The light path arrangement schematic diagram of a kind of New X ray micro imaging system that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is the vertical view of Fig. 1;
The light source schematic diagram of Fig. 3 for adopting when adopting X ray simulation software SHADOW to simulate in the embodiment of the present invention;
Fig. 4 is for often organizing the enlarged drawing of pointolite in the light source shown in Fig. 3;
Fig. 5 adopts X ray simulation software SHADOW to carry out simulating the image space distribution plan obtained;
Fig. 6 adopts X ray simulation software SHADOW to carry out simulating the bandwidth curve obtained.
Embodiment
Technical scheme in the present invention is understood better in order to make those skilled in the art person, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, should belong to the scope of protection of the invention.
Please refer to Fig. 1 and Fig. 2, the light path arrangement schematic diagram of a kind of New X ray micro imaging system that Fig. 1 provides for the embodiment of the present invention, be specially side view, Fig. 2 is the vertical view of Fig. 1.Described New X ray micro imaging system comprises:
At the first optical element 1 and the second optical element 2 that optical path direction is arranged successively, described first optical element 1 and described second optical element 2 all have curved surface face shape, the normal direction of described first optical element 1 is orthogonal with the normal direction of described second optical element 2, the X ray sent by object point reflects through described first optical element 1 and described second optical element 2 successively, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization;
One of them of described first optical element 1 and described second optical element 2 is the bent crystal, and the described bent crystal is the crystal that crystal face is bent into curved surface, and another optical element is multi-layer mirror.
From above content, X ray micro imaging system described in the present embodiment, be included in the first optical element 1 and the second optical element 2 that optical path direction is arranged successively, first optical element 1 and the second optical element 2 all have curved surface face shape, the normal direction of the first optical element 1 is orthogonal with the normal direction of the second optical element 2, the X ray sent by object point reflects through the first optical element 1 and the second optical element 2 successively, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization.
One of them of first optical element of described imaging system and the second optical element is the bent crystal, another optical element is multi-layer mirror, the bent crystal is the monochromatization of Bragg diffraction principle realization to incident light based on crystal, the self-energy resolution of crystal is better than multilayer film, and for the X ray of identical energy, the Bragg angle of crystal is usually large than the grazing angle of multi-layer mirror, therefore described imaging system is while guarantee high spatial resolution, can improve the energy resolution of imaging system.Further, described imaging system, by the matched design of the focal length to the bent crystal and multi-layer mirror, does not limit Bragg angle, and its work can be put can unrestricted choice.Therefore, described X ray micro imaging system, have that high energy resolution, high spatial resolution and work can put can the advantage of unrestricted choice simultaneously.
The bent crystal realizes monochromatization to X ray incident light based on the Bragg diffraction principle of crystal, and according to Bragg diffraction principle, X-ray wavelength and crystal lattices spacing and grazing angle (i.e. Bragg angle) have following relation:
nλ=2dsinθ(1)
Wherein, n is the order of diffraction time, and λ is X-ray wavelength, and d is spacing of lattice, and θ is Bragg angle.When specific design, according to the X-ray wavelength λ that diagnostic test requires, select suitable interplanar distance d and the order of diffraction time n, with the grazing angle of the Bragg angle and multi-layer mirror of determining the bent crystal.Bragg angle can be controlled in the scope needed when specific design, experimentally to need to arrange the light path of imaging system.
After the grazing angle of the Bragg angle and multi-layer mirror that determine the bent crystal, according to image distance and the magnification requirement of imaging system, according to imaging formula:
Wherein, p is object distance, and q is image distance, and R is reflecting element radius, and θ is grazing angle/Bragg angle.Calculate the radius-of-curvature f of bent crystal crystal face and multi-layer mirror minute surface respectively.To determine the radius-of-curvature of the bent crystal and multi-layer mirror.The crystal face as diffraction surfaces of the described bent crystal can be sphere, cylinder, also can be other face shape; The mirror shape of described multi-layer mirror can be sphere or cylinder, or other face shape.
In X ray micro-imaging technique, adopt the monochromaticity of energy resolution to imaging system to be described, energy resolution represents the energy range of X ray after the light path light splitting of imaging system, is one of important indicator of characterization of X-ray imaging system performance.Energy resolution is higher, illustrates by the X-ray energy scope of imaging optical path less, and imaging system is easier separates target energy and other energy range, and the monochromaticity of the x-ray imaging obtained is stronger.
The bent crystal realizes monochromatization to X ray incident light based on the Bragg diffraction principle of crystal, by the both sides differential of above-mentioned relation formula (1), and in conjunction with the corresponding relation of energy and wavelength, obtains the expression formula of energy resolution:
ΔE=EΔθcotθ(3)
Wherein, Δ E is energy resolution, and E is X-ray energy, and θ is grazing angle/Bragg angle, and Δ θ is the variation range of grazing angle/Bragg angle.By rocking curve and geometrical light-path, Δ θ arranges that two aspects affect.Rocking curve is determined by the error of d value, and when being easily subject to processing for multilayer film d value, the impact of the factor such as temperature, humidity and variation in voltage, makes d value error larger, and for bent crystal crystal, its interior atoms is regularly arranged, and d value error is little, and the self-energy resolution of crystal is better than multilayer film.And for the X ray of identical energy, crystal Bragg angle is greater than the grazing angle of multi-layer mirror.Therefore compared to traditional KB imaging system, the imaging system described in the present embodiment adopts the bent crystal can improve the energy resolution of imaging system, and the monochromaticity of x-ray imaging is strengthened.
The second, when the X ray incident light angle of divergence is identical, the aberration of the bent crystal is less.The aberration δ of imaging system can be approximated to be:
Wherein, a is aperture stop size, and f is focal length, and θ is Bragg angle or grazing angle, and M is magnification, and d is field size.Can see, when a, f, M are identical with d, aberration δ can increase along with θ and reduce, and bent crystal Bragg angle is greater than the grazing angle of multi-layer mirror usually, therefore the aberration of the bent crystal is less, and described imaging system adopts the bent crystal can improve the spatial resolution of imaging system.The aberration of imaging system in bent crystal focus direction can be reduced by selecting suitable Bragg angle.
Finally, according to Prague principle, when the bent crystal is operated in close to normal incidence situation, Bragg angle is close to 90 °, and known corresponding X-ray wavelength is about 2d/n.Therefore, the selection that the existing sphere bent crystal imaging system work only comprising discrete component can be put can be restricted, cannot freely select, and imaging system described in the present embodiment is by the matched design of the focal length to the bent crystal and multi-layer mirror, do not limit Bragg angle, its work can be put can unrestricted choice.
Compared with prior art, the New X ray micro imaging system described in the present embodiment, by adopting the bent crystal and multi-layer mirror, utilizes the bent crystal to improve energy resolution, and reduces the aberration in this focus direction; Utilize the bent crystal and multi-layer mirror focal length coupling, the unrestricted choice that the work of realization can be put.Therefore, at the X ray wave band that the bent crystal and multi-layer mirror all can work, described imaging system not only can improve energy resolution, but also can reduce aberration, room for promotion resolution, can also unrestricted choice work energy point, compensate for the deficiencies in the prior art.
Below with a specific embodiment, describe New X ray micro imaging system provided by the invention in detail.According to the primary demand of ICF diagnosis, the work arranging described X ray micro imaging system can put 2.5keV, object distance 200mm, magnification 20 times, light harvesting solid angle 1 × 10
-6sr.
Wherein, the first optical element 1 of this imaging system is multi-layer mirror, and the second optical element 2 is the bent crystal, and incident light is successively through multi-layer mirror and bent crystal reflection.Can put 2.5keV in work, the angle (i.e. grazing angle) between the minute surface of multi-layer mirror and incident light is 3.575 °.The bent crystal adopts mica crystal, and the crystal face as diffraction surfaces is (002) crystal face, and corresponding interplanar distance is 1.984nm.This crystal face and incident light (referring to the emergent light reflected through multi-layer mirror) angle (i.e. Bragg angle) are 14.476 °.Calculate the radius-of-curvature of multi-layer mirror and bent crystal crystal face respectively according to imaging formula (2), concrete parameters and component parameters are as shown in following table 1 and table 2, and wherein spacing is the distance between multi-layer mirror and the bent crystal.
Table 1
Object distance | Spacing | Image distance | Can point | Enlargement factor | Light harvesting solid angle |
200mm | 20mm | 4000mm | 2.5keV | 20 | 1×10 -6sr |
Table 2
Reflecting element | Grazing angle/Bragg angle | Radius-of-curvature |
Multicoating catoptron | 3.575° | 6478mm |
The bent crystal | 14.476° | 1674mm |
For such scheme, X ray simulation software SHADOW is adopted to carry out Imaging Simulation.Spatial resolution simulates the light source that uses as shown in Figure 3 (unit is mm), in diameter 0.2mm field of view edge, 8 groups of light source points are evenly set respectively, often group comprises 4 ideal point light source, and 4 pointolites lay respectively at the square vertices of the length of side 2.5 μm, as shown in Figure 4.Simulation result as shown in Figure 5, Fig. 5 is the image space distribution plan (unit is mm) obtained after simulating, and can see, light source is after imaging, still can distinguish 4 pointolites in every group, illustrative system reaches the spatial resolution of 2.5 μm in 0.2mm visual field.
Energy resolution simulation adopts the uniform source of light of diameter 0.2mm, and energy of light source is increased to 2.51keV from 2.49keV successively, changes 1eV at every turn, obtains each light intensity putting image planes by simulation.Carry out Gauss curve fitting at the different intensity data obtained of putting, obtain the bandwidth curve of imaging system, as shown in Figure 6, Fig. 6 utilizes X ray simulation software SHADOW to carry out simulating the bandwidth curve obtained.Result shows the bandwidth of this imaging system, and namely energy resolution is 3.8eV, energy resolving power 658, and the energy resolution of the X ray micro imaging system described in visible the present embodiment is higher.
Above a kind of New X ray micro imaging system provided by the present invention is described in detail.Apply specific case herein to set forth principle of the present invention and embodiment, the explanation of above embodiment just understands method of the present invention and core concept thereof for helping.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improve and modify and also fall in the protection domain of the claims in the present invention.
Claims (6)
1. a New X ray micro imaging system, it is characterized in that, comprise: the first optical element arranged successively at optical path direction and the second optical element, described first optical element and described second optical element all have curved surface face shape, the normal direction of described first optical element is orthogonal with the normal direction of described second optical element, the X ray sent by object point is successively through described first optical element and described second optical element reflection, be separately implemented at the focusing in meridian direction and sagitta of arc direction and monochromatization, form the two-dimensional x-ray images of monochromatization;
One of them of described first optical element and described second optical element is the bent crystal, and the described bent crystal is the crystal that crystal face is bent into curved surface, and another optical element is multi-layer mirror.
2. New X ray micro imaging system as claimed in claim 1, it is characterized in that, the crystal face face shape of the described bent crystal is sphere or cylinder.
3. New X ray micro imaging system as claimed in claim 1, it is characterized in that, the mirror shape of described multi-layer mirror is sphere or cylinder.
4. New X ray micro imaging system as claimed in claim 1, it is characterized in that, described first optical element is multi-layer mirror, and described second optical element is the bent crystal.
5. New X ray micro imaging system as claimed in claim 4, it is characterized in that, described multi-layer mirror can grazing angle (incident light and minute surface angle) corresponding to point be 3.575 ° in work, and the described bent crystal can Bragg angle (multi-layer mirror emergent light and crystal face angle) corresponding to point be 14.476 ° in work.
6. New X ray micro imaging system as claimed in claim 5, it is characterized in that, the described bent crystal is mica crystal, and the diffraction surfaces of the described bent crystal is mica (002) crystal face.
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CN105873344A (en) * | 2016-03-22 | 2016-08-17 | 中国工程物理研究院流体物理研究所 | Transverse gradient multi-layer film reflective element based X-ray monoenergetic imaging method |
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CN106706157A (en) * | 2017-01-11 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Quasi-concentric visual axis-based ICF (inertial confinement fusion) hot spot electronic temperature detection device |
CN108254391A (en) * | 2018-01-29 | 2018-07-06 | 中国工程物理研究院激光聚变研究中心 | Flexure crystal detection method and device |
CN113030139A (en) * | 2021-05-31 | 2021-06-25 | 中国工程物理研究院激光聚变研究中心 | Novel crystal and compact imaging device |
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CN105873344A (en) * | 2016-03-22 | 2016-08-17 | 中国工程物理研究院流体物理研究所 | Transverse gradient multi-layer film reflective element based X-ray monoenergetic imaging method |
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CN106356111A (en) * | 2016-09-30 | 2017-01-25 | 同济大学 | Precision assembly method of eight-channel Kirkpatrick-Baez microscope |
CN106356111B (en) * | 2016-09-30 | 2018-07-27 | 同济大学 | A kind of eight microscopical Precise Assembling Methods of channel Kirkpatrick-Baez |
CN106706157A (en) * | 2017-01-11 | 2017-05-24 | 中国工程物理研究院激光聚变研究中心 | Quasi-concentric visual axis-based ICF (inertial confinement fusion) hot spot electronic temperature detection device |
CN106706157B (en) * | 2017-01-11 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | ICF hot spot electronic temperature detection equipment based on quasi-synoptic axis |
CN108254391A (en) * | 2018-01-29 | 2018-07-06 | 中国工程物理研究院激光聚变研究中心 | Flexure crystal detection method and device |
CN113030139A (en) * | 2021-05-31 | 2021-06-25 | 中国工程物理研究院激光聚变研究中心 | Novel crystal and compact imaging device |
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