CN105206597A - Support plate level embedded packaging structure with UBM structure and manufacture method of packaging structure - Google Patents
Support plate level embedded packaging structure with UBM structure and manufacture method of packaging structure Download PDFInfo
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- CN105206597A CN105206597A CN201510489482.6A CN201510489482A CN105206597A CN 105206597 A CN105206597 A CN 105206597A CN 201510489482 A CN201510489482 A CN 201510489482A CN 105206597 A CN105206597 A CN 105206597A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/19—Manufacturing methods of high density interconnect preforms
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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Abstract
The invention discloses a support plate level embedded packaging structure with a UBM structure and a manufacture method of the packaging structure. The packaging structure comprises a circuit board, at least one opening or cavity, a module aligning mark, at least one semiconductor chip, a packaging structure and the UBM structure, wherein the opening or cavity is arranged in the circuit board to accommodate the semiconductor chip, the module aligning mark is arranged at the first surface of the circuit board, the semiconductor chip is accommodated in the opening or cavity, an electrode surface of the semiconductor chip is exposed out of the second surface of the circuit board at least, and is placed in the same plane with the second surface or the lowest surface of the circuit board, the packaging material covers the first surface of the circuit board and the module aligning mark and fills space, not occupied by the semiconductor chip, of the opening or cavity, and the UBM structure is arranged over an electrode of the semiconductor chip correspondingly. According to the invention, the problem in the compatibility between the semiconductor chip with an aluminum-based metal top layer and the embedded packaging technology of the support plate level semiconductor chip is effectively solved.
Description
Technical field
The present invention relates to a kind of circuit board package structure, particularly relate to a kind of support plate level embedded packaging structure with UBM ((UnderB μm of pMetal, metal under salient point)) structure and preparation method thereof.
Background technology
At present, Wire Bonding Technology is generally applied in the encapsulation process of semiconductor chip.Such as, the encapsulation of existing semiconducter IC adopts the interconnection that Wire Bonding Technology realizes tactile disk on chip and encapsulates between inner cabling usually.Then these technology are Shortcomings part all, comprising:
1, Wire Bonding Technology is connect based on the line bonding of single-chip, and is asynchronous for the multi-thread bonding of I/Opad (electrode) numbers many on single-chip, and process speed is slow.
2, employing wire-bond technology and chip are placed in the technology on support plate, and the thickness of the final encapsulating structure formed is larger.
3, the cost of this packing forms is high.
In addition, top layer electrode (BondingPad) the material normally aluminium based metal top layer of semiconductor chip, such as Al, AlSi, AlSiCu etc., aluminium based metal material is easily subject to the corrosion of acid-base solution, not good with chip embedded packaging technology compatibility, and the WB gold thread that novel encapsulated mode Flip-chip (flip chip technology (fct)) salient point of the semiconductor chip that is also widely used at present replaces conventional package used, improve the efficiency of transmission of electric current, and the component size after encapsulated moulding also significantly reduces, but this technology needs further growth copper post again after aluminium based metal topsheet surface does UBM (UnderB μm of pMetal: metal under salient point) process, the copper column technology that it adopts and the usual complex process of follow-up tin welding, cost is high.
Therefore need badly and provide a kind of novel semiconductor chip package and technique to solve the problems referred to above.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of support plate level embedded packaging structure with UBM structure, effectively can improve the compatibility issue of semiconductor chip with aluminium based metal top layer and the chip embedded packaging technology of support plate level semiconductor.
For solving the problems of the technologies described above, a kind of support plate level embedded packaging structure with UBM structure provided among the technical scheme that the present invention adopts comprises:
Circuit board;
Be located in described circuit board, at least one opening in order to accommodating semiconductor chip or cavity;
Be arranged at the semiconductor chip in described opening or cavity, the electrode surface of described semiconductor chip at least exposes from described circuit board second surface, and is in same plane with the minimum surface of described circuit board second surface or described circuit board;
Encapsulating material, at least in order to cover the first surface of described circuit board, module contraposition mark and to fill in described opening or cavity not by space that described chip occupies;
And correspondence is arranged on the UBM structure above the electrode of semiconductor chip.
In a preferred embodiment, described circuit board first surface is also provided with module contraposition mark, the highest face temperature of described module contraposition mark surface and the corresponding described circuit board of circuit board second surface difference and minimum surface.
In a preferred embodiment, on described circuit board, there are at least one opening or cavity in single-bit module region.
Further, in described single-bit module region, single opening or compartment put at least one semiconductor chip.
In a preferred embodiment, the highest face temperature of described opening or cavity in the vertical direction and minimum surface are respectively second surface or its minimum surface of the highest face temperature of described circuit board or described module contraposition mark surface and described circuit board, and described opening or cavity border is in the horizontal direction the opening of described circuit board between first surface and second surface or the sidewall of cavity, described opening or cavity comprise the first space and second space simultaneously, wherein said first spatial distribution is between the first surface and second surface of described circuit board, described second space is distributed in the first surface of described circuit board and described module contraposition identifies between surface, and the sidewall in described first space is the continuous cross section of circuit board between described circuit board first surface and second surface, and described second space is without sidewall.
In a preferred embodiment, described semiconductor chip electrode is aluminium based metal top layer, and described aluminium based metal can be selected from but be not limited to aluminum metal, alusil alloy metal, Al-Si-Cu alloy metal and other alloying metal containing aluminium.
In a preferred embodiment, the UBM structure on the aluminium based metal top layer of described semiconductor chip electrode comprises the combination of non-proliferation metal level and conductive metal layer, but is not limited thereto.
Further, the aluminium based metal top layer of described bonding or the direct coated electrode of non-proliferation metal level, described bonding or non-proliferation metal layer material can be selected from but be not limited to nickel, titanium, nichrome and titanium-tungsten etc.; And described conductive metal layer directly covers bonding or non-proliferation metal level, the material of described conductive metal layer can be selected from but be not limited to copper, gold etc.
In a preferred embodiment, the UBM structure on the aluminium based metal top layer of described semiconductor chip electrode comprises the nickel metal layer of electroless coating and the combination of gold metal layer.Wherein, first nickel metal layer generates by changing nickel process deposits on the aluminium based metal top layer of electrode, and gold metal layer completes deposition by gold-leaching technology on nickel metal layer.
In a preferred embodiment, first on the electrode of described semiconductor chip, carry out UBM generating process, form UBM structure, again described circuit board second surface, semiconductor chip and with the coplanar encapsulating material surface of described circuit board second surface on cover one deck accumulated layers, and by above described semiconductor chip UBM accumulated layers remove formed opening.
Further, described accumulated layers material can be selected from but be not limited to ABF insulating material, containing fiberglass insulation, photaesthesia insulating material.
Further, be provided with first line layer on described accumulated layers surface, and described first line layer is electrically connected through the opening of described accumulated layers and UBM surface.
Further, described encapsulating structure also can comprise: solder mask, in order to cover the first line layer in described accumulated layers and accumulated layers.
Further, described encapsulating structure also can comprise: pad array, it to be arranged in the solder mask opening on the first line layer surface covered in described accumulated layers and accumulated layers and to be electrically connected with described first line layer, and described pad array comprises ball grid array or contact array.
A kind of support plate level embedded packaging structure with UBM structure provided among another technical solution used in the present invention comprises:
Circuit board;
Be located in described circuit board, at least one opening in order to accommodating semiconductor chip or cavity;
Be arranged at the semiconductor chip in described opening or cavity, the electrode surface of described semiconductor chip at least exposes from described circuit board second surface, and is in same plane with the minimum surface of described circuit board second surface or described circuit board;
Encapsulating material, at least in order to cover the first surface of described circuit board, module contraposition mark and to fill in described opening or cavity not by space that described chip occupies;
And correspondence is arranged on the UBM structure above the electrode of semiconductor chip.
In a preferred embodiment, described circuit board first surface is also provided with module contraposition mark, the highest face temperature of described module contraposition mark surface and the corresponding described circuit board of circuit board second surface difference and minimum surface.
In a preferred embodiment, on described circuit board, there are at least one opening or cavity in single-bit module region.
Further, in described single-bit module region, single opening or compartment put at least one semiconductor chip.
In a preferred embodiment, the highest face temperature of described opening or cavity in the vertical direction and minimum surface are respectively second surface or its minimum surface of the highest face temperature of described circuit board or described module contraposition mark surface and described circuit board, and described opening or cavity border is in the horizontal direction the opening of described circuit board between first surface and second surface or the sidewall of cavity, described opening or cavity comprise the first space and second space simultaneously, wherein said first spatial distribution is between the first surface and second surface of described circuit board, described second space is distributed in the first surface of described circuit board and described module contraposition identifies between surface, and the sidewall in described first space is the continuous cross section of circuit board between described circuit board first surface and second surface, and described second space is without sidewall.
In a preferred embodiment, described semiconductor chip electrode is aluminium based metal top layer, and described aluminium based metal can be selected from but be not limited to aluminum metal, alusil alloy metal, Al-Si-Cu alloy metal and other alloying metal containing aluminium.
In a preferred embodiment, the UBM structure on the aluminium based metal top layer of described semiconductor chip electrode comprises the combination of non-proliferation metal level and conductive metal layer, but is not limited thereto.
Further, the aluminium based metal top layer of described bonding or the direct coated electrode of non-proliferation metal level, described bonding or non-proliferation metal layer material can be selected from but be not limited to nickel, titanium, nichrome, nickel-vanadium alloy and titanium-tungsten etc.; And described conductive metal layer directly covers bonding or non-proliferation metal level, the material of described conductive metal layer can be selected from but be not limited to copper, gold etc.
In a preferred embodiment, the UBM structure on the aluminium based metal top layer of described semiconductor chip electrode comprises the nickel metal layer of electroless coating and the combination of gold metal layer.Wherein, first nickel metal layer generates by changing nickel process deposits on the aluminium based metal top layer of electrode, and gold metal layer completes deposition by gold-leaching technology on nickel metal layer.
In a preferred embodiment, the second surface of circuit board, semiconductor chip and with second surface coplanar encapsulating material surface on be coated with at least one accumulated layers, described accumulated layers has opening at the electrode surface upper area of semiconductor chip, and UBM structure be positioned at semiconductor chip electrode surface on and be restricted to accumulated layers opening, the aluminium based metal top layer of described UBM metal level and electrode is directly in electrical contact.
Further, described accumulated layers material can be selected from but be not limited to ABF insulating material, containing fiberglass insulation, photaesthesia insulating material etc.
Further, be provided with first line layer on described accumulated layers surface, and described first line layer is electrically connected through the opening of described accumulated layers and UBM surface.
Further, described encapsulating structure also can comprise: solder mask, in order to cover the first line layer in described accumulated layers and accumulated layers.
Further, described encapsulating structure also can comprise: pad array, it to be arranged in the solder mask opening on the first line layer surface covered in described accumulated layers and accumulated layers and to be electrically connected with described first line layer, and described pad array comprises ball grid array or contact array.
Present invention also offers and make the described method with the support plate level embedded packaging structure of UBM structure, it comprises the following steps:
(1) circuit board is provided, described circuit board is provided with at least one opening for accommodating semiconductor chip or cavity, and on the first surface of described circuit board, the surrounding of the module region of separately encapsulation or the opening separately in encapsulation submodule or cavity surrounding is provided with module contraposition and identifies;
(2) on the second surface of described circuit board, attach adhesive film, and described chip is inserted described opening or cavity, and described semiconductor chip is adhesively fixed with adhesive film with the one side of electrode;
(3) at least on the first surface of described circuit board, module contraposition mark and described opening or cavity, encapsulating material is applied, make the first surface of described circuit board, module contraposition identifies packed material and cover, and described opening or the packed material of cavity and described semiconductor chip are filled completely;
(4) remove described adhesive film, and described circuit board is overturn;
(5) described circuit board second surface, semiconductor chip and with described circuit board second surface coplanar encapsulating material surface on cover the above accumulated layers of one deck, and by above described semiconductor chip electrode accumulated layers remove formed opening,
In described accumulated layers opening and on the electrode of described semiconductor chip, carry out UBM generating process, form UBM structure;
Or,
Direct elder generation carries out UBM generating process on the electrode of described semiconductor chip, form UBM structure, again described circuit board second surface, semiconductor chip, UBM structure and with described circuit board second surface coplanar encapsulating material surface on cover the above accumulated layers of one deck, and by above described semiconductor chip UBM accumulated layers remove formed opening;
(6) in accumulated layers described in described UBM body structure surface, non-proliferation TiW metal level and layers of copper is formed successively;
(7) in accumulated layers, first line layer is processed to form;
(8) the first line layer in described accumulated layers and accumulated layers arranges solder mask, and pad array is set in the solder mask opening covering the first line layer surface in described accumulated layers and accumulated layers, and described pad array is electrically connected with first line layer.
Further, described UBM generating process comprises the following steps:
(1) on the electrode of described semiconductor chip, the nickel dam that thickness is 5 ~ 15 μm is formed;
(2) on described nickel dam, the Au layer that thickness is 0.05 ~ 0.2 μm is formed.
Compared with prior art, the present invention at least tool have the following advantages:
(1) compatibility of semiconductor chip with the electrode of aluminium based metal (such as AlSi) and the chip embedded packaging technology of support plate level semiconductor is effectively improved by UBM structure;
(2) the described support plate level embedded packaging structure with UBM structure has high production efficiency and premium properties, and with low cost;
(3) the described manufacturing process with the support plate level embedded packaging structure of UBM structure is the support plate level encapsulation process of high production speed, is obviously better than the inefficient production process based on single-chip bonding connecting line technics.
Accompanying drawing explanation
Fig. 1 a-Fig. 1 d is the module of variety classes opening or cavity on described circuit board and the schematic diagram of accommodating semiconductor chip thereof;
Fig. 2 is the transverse sectional view in a preferred embodiment of the present invention with opening or cavity and wiring board substrate;
Fig. 3 a-Fig. 3 b is that in a preferred embodiment of the present invention, semiconductor chip inserts the schematic diagram in opening or cavity with the ventricumbent state of electrode;
Fig. 4 is the schematic diagram encapsulating device shown in Fig. 3 b with encapsulating material;
Fig. 5 removes adhesive film in device shown in Fig. 4 and by it inverted schematic diagram;
Fig. 6 a-Fig. 6 d is the schematic diagram arranging nickel dam, Au layer and accumulated layers and form a preferred embodiment of accumulated layers opening on device shown in Fig. 5;
Fig. 7 a-Fig. 7 b arranges the adhesive layer of NiCr or TiW, the schematic diagram of Cu layer on device shown in Fig. 6 d;
Fig. 8 is the schematic diagram of the preferred embodiment forming first line layer in the UBM structure of device shown in Fig. 7 b;
Fig. 9 a-Fig. 9 b is the schematic diagram arranging accumulated layers and form another preferred embodiment of accumulated layers opening on device shown in Fig. 5;
Figure 10 a-Figure 10 d arranges nickel dam, the adhesive layer of Au, NiCr or TiW and the schematic diagram of Cu layer in the accumulated layers opening of device shown in Fig. 9 b;
Figure 11 is the schematic diagram forming another preferred embodiment of first line layer in the UBM structure of device shown in Figure 10 d;
Figure 12 a-Figure 12 b is the schematic diagram arranging solder mask and pad array on device shown in Fig. 8 or Figure 11;
In accompanying drawing, the mark of each parts is as follows: 1-circuit board, 11-first surface, 12-second surface, 2-opening or cavity, 21-first space, 22-second space, 3-semiconductor chip, 31-semiconductor chip electrode, the contraposition of 4-module identifies, 5-adhesive film, 6-encapsulating material, 7-accumulated layers, 71-accumulated layers opening, 8-UBM structure, 81-nickel dam, 82-Au layer, the adhesive layer of 83-NiCr or TiW, 84-Cu layer, 9-first line layer, 100-solder mask, 101-solder mask opening, 102-pad array, L-are horizontal, V-is longitudinal.
Embodiment
Below in conjunction with accompanying drawing, preferred embodiment of the present invention is described in detail, can be easier to make advantages and features of the invention be readily appreciated by one skilled in the art, thus more explicit defining is made to protection scope of the present invention.
Below in conjunction with accompanying drawing, preferred embodiment of the present invention is described in detail, can be easier to make advantages and features of the invention be readily appreciated by one skilled in the art, thus more explicit defining is made to protection scope of the present invention.
One aspect of the present invention provides a kind of support plate level embedded packaging structure with UBM structure, comprising:
Circuit board 1, that is for encapsulating the support plate of IC, comprise first surface 11, second surface 12;
Be located in described circuit board 1, at least one opening in order to accommodating semiconductor chip 3 or cavity 2; On described circuit board 1, there are at least one opening or cavity 2 in single-bit module region, in described single-bit module region, an opening or cavity 2 can at least one semiconductor chips 3 accommodating, or there is plural opening or cavity 2 accommodating plural semiconductor chip 3 respectively in described single-bit module region, and have electrode 31 surface of a semiconductor chip 3 and second surface 12 copline of circuit board 1 at least, refer to Fig. 1 a-Fig. 1 d, Figure 12 a etc.;
Be arranged at the module contraposition mark 4 of described circuit board 1 first surface 11, described module contraposition mark 4 surface and the second surface 12 of circuit board 1 distinguish highest face temperature and the minimum surface of corresponding described circuit board 1; Described module contraposition mark 4 is arranged and conducting wire interconnection in order to realize accurate flip-chip, and all mark or portion identification become connection line simultaneously and provide conducting function;
Semiconductor chip 3, is arranged in described opening or cavity 2, and electrode 31 surface of described chip 3 is at least exposed from described circuit board second surface 12, and is in same plane with the minimum surface of described second surface 12 or described circuit board 1; Described semiconductor chip electrode 31 is aluminium based metal top layers, and aluminium based metal comprises aluminum metal, alusil alloy metal, Al-Si-Cu alloy metal or other alloying metal containing aluminium;
Encapsulating material 6, at least in order to cover the first surface 11 of described circuit board 1, module contraposition mark 4 and to fill in described opening or cavity 2 not by space that described chip 3 occupies;
And, above the electrode 31 of semiconductor chip, be provided with corresponding UBM structure 8.
Wherein, the highest face temperature of described opening or cavity 2 in the vertical direction and minimum surface are respectively second surface 12 or its minimum surface of the highest face temperature of described circuit board 1 or described module contraposition mark 4 surface and described circuit board 1, and described opening or cavity 2 border are in the horizontal direction the opening of described circuit board 1 between first surface 11 and second surface 12 or the sidewall of cavity 2, described opening or cavity 2 comprise the first space 21 and second space 22 simultaneously, between the first surface 11 that wherein said first space 21 is distributed in described circuit board 1 and second surface 12, described second space 22 is distributed in the first surface 11 of described circuit board 1 and described module contraposition identifies between 4 surfaces, and the sidewall in described first space 21 is circuit board 1 cross section continuously between described circuit board first surface 11 and second surface 12, and described second space 21 is without sidewall.
Further, UBM structure 8 on the aluminium based metal top layer of described semiconductor chip electrode 31 can be the nickel of electroless coating and the two metal layers of gold, wherein first nickel metal layer generates by changing nickel process deposits on the aluminium based metal top layer of electrode 31, and gold metal layer completes deposition by gold-leaching technology on nickel metal layer.
Or the UBM structure 8 on the aluminium based metal top layer of described semiconductor chip electrode 31 can be the double layer of metal structure of bonding or non-proliferation metal level and conductive metal layer, but is not limited thereto.
Further, described bonding or non-proliferation metal level are the aluminium based metal top layers of direct coated electrode 31, and this bonding or non-proliferation metal layer material can be nickel, titanium, nichrome or titanium-tungsten; And described conductive metal layer directly covers bonding or non-proliferation metal level, this conductive metal layer can be copper or gold.
Described with in the support plate level embedded packaging structure of UBM structure, described circuit board 1 second surface 12, semiconductor chip 3 and be coated with one deck accumulated layers 7 on the surface with the coplanar encapsulating material 6 of second surface 12, described accumulated layers 7 has opening 71 in the region, electrode 31 surface of semiconductor chip 3, and UBM structure 8 be positioned at semiconductor chip 3 electrode 31 on the surface and be restricted to accumulated layers opening 71, described UBM metal level directly contacts with the aluminium based metal top layer of electrode 31, realizes electrical communication.Described accumulated layers 7 material is ABF insulating material, epoxy resin insulating material or photaesthesia insulating material etc. containing glass fibre.Also be provided with first line layer 9 on described accumulated layers 7 surface, and described first line layer 9 is electrically connected with UBM surface through the opening 71 of described accumulated layers 7, described first line layer 9 also can be described as RDL (reroute layer).
Further, the described support plate level embedded packaging structure with UBM structure also can comprise solder mask 100, in order to cover the first line layer 9 in described accumulated layers 7 and accumulated layers 7; Also comprise pad array 102, it to be arranged in the solder mask opening 101 on first line layer 9 surface covered in described accumulated layers 7 and accumulated layers 7 and to be electrically connected with described accumulated layers 7, and described pad array 102 comprises ball grid array BGA (BallGridArray) or contact array LGA (LandGridArray).
Another aspect of the present invention additionally provides and makes the described method with the support plate level embedded packaging structure of UBM structure, and it may be implemented in a variety of ways.
Such as, a kind of implementation wherein can comprise the following steps:
(1) circuit board 1 is provided, described circuit board 1 is provided with at least one opening for accommodating semiconductor chip 3 or cavity 2, and on the first surface 11 of described circuit board 1, the surrounding in independent support plate level package module region, or opening separately in support plate level package module or cavity 2 surrounding are provided with module contraposition mark 4, refer to Fig. 1 a-Fig. 1 d and Fig. 2;
(2) on the second surface 12 of described circuit board 1, attach adhesive film 5, and described chip 3 is inserted described opening or cavity 2 with reversion form, and the electrode 31 of described chip 3 is adhesively fixed with adhesive film 5, refer to Fig. 3 a, Fig. 3 b;
(3) at least on the first surface 11 of described circuit board 1, module contraposition mark 4 and described opening or cavity 2, encapsulating material 6 is applied, make the first surface 11 of described circuit board 1, module contraposition identifies 4 packed materials 6 and cover, and described opening or the packed material of cavity 26 and described chip 3 are filled completely, refer to Fig. 4;
In this step, also planarizing process can be carried out to encapsulating material 6.
Wherein, encapsulating material 6 can be molding compounds (Moldingcompound), epoxy resin or epoxy resin/filler compound etc., and it is filled into cavity 2 and covers first surface 11 as a smooth accumulation horizon.
(4) remove described adhesive film 5, and foregoing circuit plate 1 is overturn, refer to Fig. 5;
(5) Fig. 6 a-Fig. 6 d is referred to, chemical nickel plating on the electrode 31 of semiconductor chip 3, the thickness of nickel dam 81 is 5 ~ 15 μm, and on nickel dam 81 sputtering sedimentation Au, the thickness of Au layer 82 is 0.05 ~ 0.2 μm, again described circuit board 1 second surface 12, semiconductor chip 3 and be coated with one deck accumulated layers 7 on the surface with the coplanar encapsulating material 6 of second surface 12, and the accumulated layers 7 above semiconductor chip electrode 31 is removed formation opening 71, opening 71 mode of formation comprises laser drilling, photoetching;
(6) Fig. 7 a-Fig. 7 b is referred to, the adhesive layer 83 of sputtering NiCr or TiW on Au layer 82 in above-mentioned steps (5) and the opening 71 of accumulated layers, the thickness of this adhesive layer 83 is 50 ~ 100nm, and copper facing forms Cu layer 84 on the adhesive layer 83 of NiCr or TiW, the thickness of layers of copper 84 is 0.5 ~ 2 μm.
(7) in accumulated layers 7, form first line layer 9, also can be described as RDL (reroute layer), refer to Fig. 8, its formation method comprises dry film pressing, exposing patterns, development, copper facing, striping, copper etching; Or copper facing, dry film pressing, exposing patterns, development, copper etching, striping;
(8) the first line layer 9 in described accumulated layers 7 and accumulated layers 7 arranges solder mask 100, and pad array 102 is set in the solder mask opening 101 covering first line layer 9 surface in described accumulated layers 7 and accumulated layers 7, and described pad array 102 is electrically connected with first line layer 9, refer to Figure 12 a-Figure 12 b.Wherein, solder mask 100 is formed by coating or compound, photoetching and annealing, and pad array 102 is formed hole by solder mask 100 photoetching on first line layer 9, ball grid (BGA) or contacts matrix (LGA) are embedded corresponding hole formation.
Again such as, another kind of implementation wherein can comprise the following steps:
(1) circuit board 1 is provided, described circuit board 1 is provided with at least one opening for accommodating semiconductor chip or cavity 2, and on the first surface 11 of described circuit board, the surrounding in independent support plate level package module region, or opening separately in support plate level package module or cavity surrounding are provided with module contraposition mark 4, refer to Fig. 1 a-Fig. 2;
(2) on the second surface 12 of described circuit board, attach adhesive film 5, and described chip 3 is inserted described opening or cavity 2 with reversion form, and the one side with electrode 31 of described chip 3 is adhesively fixed with adhesive film 5, refer to Fig. 3 a-Fig. 3 b;
(3) at least on the first surface 11 of described circuit board 1, module contraposition mark 4 and described opening or cavity 2, encapsulating material 6 is applied, make the first surface 11 of described circuit board 1, module contraposition identifies 4 packed materials 6 and cover, and described opening or the packed material of cavity 26 and described chip 3 are filled completely, refer to Fig. 4;
In this step, also planarizing process can be carried out to encapsulating material 6.
Wherein, encapsulating material 6 can be molding compounds (MoldingCompound), epoxy resin or epoxy resin/filler compound etc., and it is filled into cavity 2 and covers first surface 11 as a smooth accumulation horizon.
(4) remove described adhesive film 5, and foregoing circuit plate 1 is overturn, refer to Fig. 5;
(5) described circuit board second surface 12, semiconductor chip 3 and be coated with one deck accumulated layers 7 on the surface with the coplanar encapsulating material 6 of second surface 12, and the accumulated layers 7 above semiconductor chip electrode 31 is removed formation opening 71, opening 71 mode formed comprises laser drilling, photoetching, refers to Fig. 9 a-Fig. 9 b;
(6) on the electrode 31 of accumulated layers opening 71 and semiconductor chip 3, carry out UBM technique, form UBM structure 8, refer to Figure 10 a ~ 10d;
Wherein, described UBM technique comprises the following steps:
A () be chemical nickel plating on the electrode 31 of semiconductor chip 3, it covers the whole of semiconductor chip electrode 31 in described accumulated layers opening 71, and the thickness of nickel dam 81 is 5 ~ 15 μm, as shown in Figure 10 a;
B on () nickel dam 81 in step (1), the thickness of sputtering sedimentation Au, Au layer 82 is 0.05 ~ 0.2 μm, as shown in fig. lob;
The adhesive layer 83 of sputtering sedimentation NiCr or TiW on the opening 71 of (c) Au layer 82 in step (2) and accumulated layers 7, the thickness of this adhesive layer 83 is 50 ~ 100nm, as shown in figure l oc;
D on the adhesive layer 83 of () NiCr or TiW in step (3), sputtering sedimentation forms Cu layer 84, the thickness of layers of copper 84 is 0.5 ~ 2 μm, as shown in fig. 10d.
(7) in accumulated layers 7, form first line layer 9, also can be described as RDL (reroute layer), refer to Figure 11, its formation method comprises dry film pressing, exposing patterns, development, copper facing, striping, copper etching; Or copper facing, dry film pressing, exposing patterns, development, copper etching, striping;
(8) the first line layer 9 in described accumulated layers 7 and accumulated layers 7 arranges solder mask 100, and pad array 102 is set in the solder mask opening 101 covering first line layer 9 surface in described accumulated layers 7 and accumulated layers 7, and described pad array 102 is electrically connected with first line layer 9, refer to Figure 12 a, Figure 12 b.Wherein, solder mask 100 is by coating, photoetching, development, exposure curing and baking are formed, and pad array 102 is formed hole by solder mask 100 photoetching on first line layer 9, ball grid (BGA) or contacts matrix (LGA) are embedded corresponding hole formation.
The present invention effectively improves the compatibility issue of the semiconductor chip 3 with AlSi electrode and the chip embedded packaging technology of support plate level semiconductor by UBM structure.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize specification of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (16)
1., with a support plate level embedded packaging structure for UBM structure, it is characterized in that comprising:
Circuit board;
Be located in described circuit board, at least one opening in order to accommodating semiconductor chip or cavity;
Be arranged at the semiconductor chip in described opening or cavity, described semiconductor chip electrode surface is at least exposed from described circuit board second surface, and is in same plane with the minimum surface of described circuit board second surface or described circuit board;
Encapsulating material, at least in order to cover described circuit board first surface, module contraposition mark and to fill in described opening or cavity not by space that described semiconductor chip occupies;
And correspondence is arranged on the UBM structure above described semiconductor chip electrode.
2. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, described circuit board first surface is provided with module contraposition mark, the highest face temperature of described module contraposition mark surface and the corresponding described circuit board of circuit board second surface difference and minimum surface.
3. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, on described circuit board, single-bit module region is provided with at least one opening or cavity.
4. the support plate level embedded packaging structure with UBM structure according to claim 3, it is characterized in that, the single opening in described single-bit module region or compartment are equipped with at least one semiconductor chip.
5. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, the highest face temperature of described opening or cavity in the vertical direction and minimum surface are respectively second surface or its minimum surface of the highest face temperature of described circuit board or described module contraposition mark surface and described circuit board, and described opening or cavity border is in the horizontal direction the opening of described circuit board between first surface and second surface or the sidewall of cavity, described opening or cavity comprise the first space and second space simultaneously, wherein said first spatial distribution is between the first surface and second surface of described circuit board, described second space is distributed in the first surface of described circuit board and described module contraposition identifies between surface, and the sidewall in described first space is the continuous cross section of circuit board between described circuit board first surface and second surface, and described second space is without sidewall.
6. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, described semiconductor chip electrode comprises aluminium based metal top layer, wherein aluminium based metal material comprises aluminum metal or take aluminium as the aluminum alloy materials of main component, and described aluminum alloy materials comprises alusil alloy or Al-Si-Cu alloy.
7. the support plate level embedded packaging structure with UBM structure according to claim 6, it is characterized in that, UBM structure on described semiconductor chip electrode comprises the combination with the conductive metal layer suppressing the non-proliferation metal level of dissimilar metal atoms permeating function and have conducting function, described non-proliferation metal level direct aluminium coating Base Metal top layer, described conductive metal layer then covers non-proliferation metal level.
8. the support plate level embedded packaging structure with UBM structure according to claim 7, it is characterized in that, the material of described non-proliferation metal level comprises nickel, titanium, nichrome, nickel-vanadium alloy or titanium-tungsten; Described conducting metal layer material comprises copper or gold.
9. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, have at least one accumulated layers directly to cover UBM structure on described circuit board second surface, described semiconductor chip, described semiconductor chip electrode and encapsulating material surface coplanar with second surface, described accumulated layers is provided with opening at UBM body structure surface upper area.
10. the support plate level embedded packaging structure with UBM structure according to claim 1, it is characterized in that, there are the second surface of the direct covering board of at least one accumulated layers, semiconductor chip and encapsulating material surface coplanar with second surface, described accumulated layers has opening in region, semiconductor chip electrode surface, and UBM structure be positioned at described semiconductor chip electrode surface on and be restricted to accumulated layers opening.
11. support plate level embedded packaging structures with UBM structure according to claim 9 or 10, is characterized in that, described accumulated layers material comprises ABF insulating material, containing the epoxy resin insulating material of glass fibre or photaesthesia insulating material.
12. support plate level embedded packaging structures with UBM structure according to claim 9 or 10, is characterized in that, be provided with first line layer on described accumulated layers surface, and described first line layer is electrically connected through the opening of described accumulated layers and UBM surface.
13. support plate level embedded packaging structures with UBM structure according to any one of claim 9 to 12, is characterized in that, also comprise: solder mask, in order to cover the first line layer in described accumulated layers and accumulated layers.
The 14. support plate level embedded packaging structures with UBM structure according to claim 13, it is characterized in that, also comprise: pad array, it to be arranged in the solder mask opening on the first line layer surface covered in described accumulated layers and accumulated layers and to be electrically connected with described first line layer, and described pad array comprises ball grid array or contact array.
15. 1 kinds, with the manufacture method of the support plate level embedded packaging structure of UBM structure, is characterized in that comprising the following steps:
(1) circuit board is provided, described circuit board is provided with at least one opening for accommodating semiconductor chip or cavity, and on the first surface of described circuit board, the surrounding in independent package module region or the opening separately in package module or cavity surrounding is provided with module contraposition mark;
(2) on described circuit board second surface, attach adhesive film, and described semiconductor chip is inserted described opening or cavity, and described chip is adhesively fixed with adhesive film with the one side of electrode;
(3) at least on the first surface of described circuit board, module contraposition mark and described opening or cavity, encapsulating material is applied, make the first surface of described circuit board, module contraposition identifies packed material and cover, and described opening or the packed material of cavity and described chip are filled completely;
(4) remove described adhesive film, and described circuit board is overturn;
(5) described circuit board second surface, semiconductor chip and with the coplanar encapsulating material surface of described circuit board second surface on first cover one deck accumulated layers, then by above described semiconductor chip electrode accumulated layers remove formed opening,
Then in described accumulated layers opening and on the electrode of described semiconductor chip, carry out UBM generating process, form UBM structure;
Or,
First on the electrode of described semiconductor chip, carry out UBM generating process, form UBM structure, again described circuit board second surface, semiconductor chip and with the coplanar encapsulating material surface of described circuit board second surface on cover one deck accumulated layers, and the accumulated layers above described semiconductor chip UBM is removed formation opening
(6) in accumulated layers described in described UBM body structure surface, non-proliferation metal Ti W layer and layers of copper is formed successively;
(7) in accumulated layers, be processed to form first line layer, first line layer and UBM are electrically connected;
(8) the first line layer in described accumulated layers and accumulated layers arranges solder mask, and pad array is set in the solder mask opening covering the first line layer surface in described accumulated layers and accumulated layers, and described pad array is electrically connected with first line layer.
The manufacture method of the 16. support plate level embedded packaging structures with UBM structure according to claim 15, it is characterized in that, described UBM generating process comprises the following steps:
(1) on described semiconductor chip electrode, the nickel dam that thickness is 5 ~ 15 μm is formed;
(2) on described nickel dam, the Au layer that thickness is 0.05 ~ 0.2 μm is formed.
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| JP2015005566A (en) * | 2013-06-19 | 2015-01-08 | 株式会社ジェイテクト | Semiconductor element, temperature detection device of the same, and manufacturing method of the same |
| US20150130054A1 (en) * | 2013-11-13 | 2015-05-14 | Amkor Technology, Inc. | Semiconductor package structure and manufacturing method thereof |
| CN204927283U (en) * | 2015-08-11 | 2015-12-30 | 蔡亲佳 | Embedded semiconductor package structure of support plate level of improvement |
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| CN1901177A (en) * | 2000-09-25 | 2007-01-24 | 揖斐电株式会社 | Semiconductor element, method of manufacturing semiconductor element, multi-layer printed circuit board, and method of manufacturing multi-layer printed circuit board |
| JP2015005566A (en) * | 2013-06-19 | 2015-01-08 | 株式会社ジェイテクト | Semiconductor element, temperature detection device of the same, and manufacturing method of the same |
| US20150130054A1 (en) * | 2013-11-13 | 2015-05-14 | Amkor Technology, Inc. | Semiconductor package structure and manufacturing method thereof |
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