CN105203433B - Abrasive lapping ability detection method - Google Patents
Abrasive lapping ability detection method Download PDFInfo
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- CN105203433B CN105203433B CN201510573839.9A CN201510573839A CN105203433B CN 105203433 B CN105203433 B CN 105203433B CN 201510573839 A CN201510573839 A CN 201510573839A CN 105203433 B CN105203433 B CN 105203433B
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Abstract
The present invention relates to a kind of abrasive lapping ability detection methods, include the following steps：Detection sample is extracted from abrasive material；The equivalent grain size and circularities of the particle in the detection sample are detected, form factor R is calculated；The detection sample is crushed, detects and crushes front and rear median particle diameter, wear-resisting factor H is calculated；The grainding capacity index C of abrasive material is calculated based on form factor R and wear-resisting factor H.The abrasive lapping ability detection method can be adapted for the particle thinner than F150, applied widely, can detect the abrasive material of a variety of different grain size sizes.
Description
Technical field
The present invention relates to abrasive material detection technique field, more particularly to a kind of abrasive lapping ability detection method.
Background technology
Abrasive material especially manufactured abrasive is more and more applied in commercial process, particularly photovoltaic and semiconductor
In wire cutting in industry.The grainding capacity of abrasive material plays the yield rate of product and the surface quality of finished product vital
Effect.The grainding capacity of abrasive material is higher, and processing efficiency is higher, and the yield rate and qualification rate processed are higher.
GB/T 23538-2009 define a kind of detection method of abrasive material ball milling toughness at present, but the detection method has
The smaller scope of application is only applicable to the detection of coarse grained abrasive of the granularity between F8 to F150, for thinner than F150
Grain can not then be suitable for this method.
Invention content
Based on this, it is necessary to for the detection method scope of application it is small the problem of, a kind of big abrasive material of scope of application is provided and is ground
Mill ability detection method.
A kind of abrasive lapping ability detection method, includes the following steps：
Detection sample is extracted from abrasive material；
The equivalent grain size and circularities of the particle in the detection sample are detected, form factor R is calculated；
The detection sample is crushed, detects and crushes front and rear median particle diameter, wear-resisting factor H is calculated；
The grainding capacity index C of abrasive material is calculated based on form factor R and wear-resisting factor H.
Above-mentioned abrasive lapping ability detection method can be adapted for the particle thinner than F150, applied widely, can be with
Detect the abrasive material of a variety of different grain size sizes.
The form factor R is calculated by following formula in one of the embodiments,：
R=Σ D4.4CD -1AD
Wherein, D is the equivalent grain size of individual particle in the detection sample；
CDIt is the circularities of individual particle in the detection sample；
ADIt is the percentage of the particle gross area that individual particle area accounts for all detection samples in the detection sample.
The wear-resisting factor H is calculated by following formula in one of the embodiments,：H=D2/D1；Wherein, D1 is
Described to detect the median particle diameter before sample crushes, D2 is the detection broken median particle diameter of sample.
The step of equivalent grain size and circularities of particle in the detection detection sample in one of the embodiments,
In, the quality of the detection sample is more than or equal to 0.002g, and the amounts of particles of the detection sample is more than or equal to 5000.
The grainding capacity index C and form factor R is in be incremented by relationship in one of the embodiments,；The grinding energy
Power index C and wear-resisting factor H is in be incremented by relationship.
The grainding capacity index C is calculated by following formula in one of the embodiments,：C=R × H.
The detection sample is being subjected to broken step in one of the embodiments, weigh the detection sample 2~
100 grams, 5~200 progress ball millings of abrading-ball are added in, rotational speed of ball-mill is more than or equal to 10 revs/min, and Ball-milling Time is 5~120 points
Clock.
In one of the embodiments, in the step of detection sample is extracted from abrasive material, with the sampling of GBT4676-2003
Method extracts sample.
In one of the embodiments, after the step of detection sample is extracted from abrasive material, further include to the detection sample
It is dried.
The median particle diameter is carried out by laser method, electric-resistivity method, microscopic method or sieve method in one of the embodiments,
Detection.
The abrasive material is silicon carbide abrasive in one of the embodiments,.
Description of the drawings
Fig. 1 is the flow chart of the abrasive lapping ability detection method of one embodiment of the invention.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
Referring to Fig. 1, a kind of abrasive lapping ability detection method includes the following steps：
Step S1, detection sample is extracted from abrasive material.
Wherein, abrasive material is selected from silicon carbide abrasive.Certainly, abrasive material is not limited to silicon carbide abrasive, can also be that corundum is ground
Other abrasive materials such as material, boron carbide abrasive material, natural abrasive.
Wherein, detection quadrat method is extracted, detection sample is extracted with the methods of sampling of GBT4676-2003.GBT4676-2003's
The methods of sampling is known to those skilled in the art, and details are not described herein.Certainly, it is not limited to the pumping of GBT4676-2003
Quadrat method, the present invention can also use other methods of samplings.
After detection sample is extracted, in order to avoid influence of the other factors such as moisture to detection sample, step is preferably further included
Rapid S2 --- detection sample is dried.
Specifically, drying equipment may be selected from baking oven, Muffle furnace or halogen lamp etc., temperature >=80 DEG C of drying, drying when
Between 3~40 minutes.
Step S3, the equivalent grain size and circularities of the particle in the detection sample are detected, form factor R is calculated.
In order to ensure the precision of final result, the equivalent grain size and circularities of the particle in the detection sample is detected
In step, the quality of the detection sample is more than or equal to 0.002g, and the amounts of particles of the detection sample is more than or equal to 5000.
The present invention preferably detected by imaged particles test equipment it is described detection sample in particle equivalent grain size and
Circularities.The model of imaged particles test equipment includes but not limited to Sysmex FPIA 3000, BT-2800, PIP-9.1 etc..
1. the form factor R is calculated by formula below：
R=Σ D4.4CD -1ADKD
Wherein, D is the equivalent grain size of individual particle in the detection sample；
CDIt is the circularities of individual particle in the detection sample；
ADIt is the percentage of the particle gross area that individual particle area accounts for all detection samples in the detection sample；
KDDesign factor for individual particle in the detection sample.That is, R is all particles in detection sample
D4.4CD -1ADKDSum.
KDIt can be with all 1 namely R=Σ D4.4CD -1AD。
Preferably, KDIt can also accordingly be chosen according to table 1:
Certainly, wear-resisting factor H is not limited to above-mentioned formula and 1. calculates, such as addition coefficient or other correction terms.
Step S4, the detection sample is crushed, detects and crush front and rear median particle diameter, wear-resisting factor H is calculated；
Wherein, the detection sample is crushed, detects and crush front and rear median particle diameter.That is, in destruction step
Before, broken median particle diameter is completed and then detected to the median particle diameter of first detection detection sample, step to be broken.
In the detection sample is carried out broken step, 2~100 grams of the sample of detection is weighed, adds in abrading-ball 5~200
Carry out ball milling, rotational speed of ball-mill be more than or equal to 10 revs/min, Ball-milling Time be 5~120 minutes.
Hard alloy abrading-ball, agate abrading-ball, aluminium oxide abrading-ball etc. may be used in abrading-ball.It is of course also possible to it is other mills
Ball.
Ball milling step realizes that ball-milling device is mainly by decelerating motor, synchronous cog belt, main shaft, ball by ball-milling device
The part such as grinding jar and electrical control system forms.Decelerating motor is rotated by synchronous cog belt driving spindle, and main shaft drives simultaneously
Abrasive material and abrading-ball rotation in ball grinder and tank.Electrical control system leaves the motor off when Ball-milling Time reaches setting value to be turned
It is dynamic.
2. wear-resisting factor H is calculated by formula below：
H=D2/D1；
Wherein, D1 is the median particle diameter before the detection sample crushes, and D2 is the detection broken median particle diameter of sample.
Wherein, the median particle diameter can be detected by laser method, electric-resistivity method, microscopic method or sieve method.
Certainly, wear-resisting factor H is not limited to above-mentioned formula and 2. calculates, such as addition coefficient or other correction terms.
In the present invention, " equivalent grain size and circularities of the particle in the detection detection sample, are calculated step S3
The detection sample " is crushed, detects and crush front and rear median particle diameter, be calculated wear-resisting by form factor R " and step S4
Factor H " is not limited in sequence, and can be carried out at the same time.
Step S5, the grainding capacity index C of abrasive material is calculated based on form factor and the wear-resisting factor.
Specifically, grainding capacity index C and form factor R is in be incremented by relationship；The grainding capacity index C and the wear-resisting factor
H is in be incremented by relationship.
3. grainding capacity index C is calculated by formula below：
C=R × H.
Certainly, grainding capacity index C is not limited to above-mentioned formula and 3. calculates, such as addition coefficient or other correction terms.
In invention, the grainding capacity index C of abrasive material is bigger, then abrasive material has more preferably grainding capacity, wire cutting
Yield rate higher.
In order to further improve measurement accuracy, it is preferable that all quality measuring instruments used when weighing in the present invention
Scale division value is not less than 0.001 gram.
The abrasive lapping ability detection method of the present invention, can be adapted for the particle thinner than F150, applied widely,
The abrasive material of a variety of different grain size sizes can be detected.In addition, the shape that abrasive material is introduced in abrasive lapping ability detection process refers to
Number, has advanced optimized the detection of abrasive lapping ability.
Below in conjunction with specific embodiment, the present invention is further elaborated.
Embodiment 1
According to the GBT4676-2003 methods of samplings respectively from five parts of different GC#1500 silicon carbide abrasives (be denoted as respectively P1,
P2, P3, P4, P5) in obtain five parts detection samples.
Detection sample is placed in baking oven, dries 40 minutes at 80 DEG C, is cooled to room temperature in drier.
Equivalent grain size, the circularities of 5000 particles in detection sample are detected using Sysmex FPIA 3000；Pass through formula
1. and K in table 1DIts form factor R is calculated.
60.00 grams of detection samples are weighed, its median particle diameter D1 is detected by laser method.Then 60.00 grams of detection samples are added in
Size is that the agate abrading-ball 100 of Ф 8mm is added in the ball grinder of Φ 53mm × 74mm, and rotational speed of ball-mill is 100 turns/min,
Ball-milling Time is 100 minutes.After ball milling, detection sample is taken out, its median particle diameter D2 is detected by laser method.
The wear-resisting factor H of detection sample is 2. calculated according to formula；
The grainding capacity index C of detection sample is 3. calculated according to formula.
Under comparable conditions, the silicon carbide of P1, P2, P3, P4, P5 are used respectively on HCT+E500SD-B5 slicers
Abrasive material carries out linear cutter to silicon ingot, calculates the product qualification rate after wire cutting, is specifically shown in Table 2.
Table 2
| Abrasive material | R | D1 | D2 | H | C | Qualification rate |
| P1 | 4.523 | 8.520μm | 8.005μm | 93.96% | 4.25 | 95.43% |
| P2 | 4.710 | 8.537μm | 8.085μm | 94.71% | 4.46 | 97.78% |
| P3 | 5.664 | 8.543μm | 8.133μm | 95.20% | 5.39 | 98.20% |
| P4 | 6.397 | 8.488μm | 8.114μm | 95.60% | 6.12 | 98.65% |
| P5 | 6.540 | 8.511μm | 8.178μm | 96.09% | 6.28 | 99.84% |
As can be seen from Table 2：The grainding capacity index C of abrasive material is bigger, is got over using the product qualification rate of its wire cutting
It is high.
Embodiment 2
According to the GBT4676-2003 methods of samplings respectively from five parts of different GC#1500 silicon carbide abrasives (be denoted as respectively P6,
P7, P8, P9, P10) in obtain five parts detection samples.
Detection sample is placed under halogen lamp, dries 8 minutes at 150 DEG C, is cooled to room temperature in drier.
Equivalent grain size, the circularities of 7000 particles in detection sample are detected using Sysmex FPIA 3000；Pass through formula
1. and K in table 1DIts form factor R is calculated.
40 grams of detection samples are weighed, its median particle diameter D1 is detected by laser method.Then 40 grams of detection samples are added in size is
In the ball grinder of Φ 53mm × 74mm, the agate abrading-ball 70 of Ф 8mm is added, rotational speed of ball-mill is 110 turns/min, Ball-milling Time
It is 80 minutes.After ball milling, detection sample is taken out, its median particle diameter D2 is detected by laser method.
The wear-resisting factor H of detection sample is 2. calculated according to formula；
The grainding capacity index C of detection sample is 3. calculated according to formula.
Under comparable conditions, the silicon carbide abrasive of P6, P7, P8, P9, P10 are used respectively on MB-DS271 slicers
Linear cutter is carried out to silicon ingot, the product qualification rate after wire cutting is calculated, is specifically shown in Table 3.
Table 3
| Abrasive material | R | D1 | D2 | H | C | Qualification rate |
| P6 | 4.400 | 8.718μm | 8.119μm | 93.13% | 4.10 | 97.66% |
| P7 | 4.948 | 8.464μm | 7.964μm | 94.09% | 4.66 | 98.56% |
| P8 | 5.575 | 8.496μm | 8.014μm | 94.33% | 5.26 | 98.69% |
| P9 | 5.803 | 8.511μm | 8.086μm | 95.01% | 5.51 | 99.00% |
| P10 | 5.918 | 8.450μm | 8.119μm | 96.08% | 5.69 | 99.14% |
As can be seen from Table 3：The grainding capacity index C of abrasive material is bigger, and the product using the silicon chip of its wire cutting is qualified
Rate is higher.
In addition, the GC#1500 silicon carbide abrasives used in embodiment 1 and embodiment 2, hence it is evident that be thinner than F150
Grain, it can be seen that, detection method of the invention is completely suitable for the particle thinner than F150.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. a kind of abrasive lapping ability detection method, includes the following steps：
Detection sample is extracted from abrasive material；
The equivalent grain size and circularities of the particle in the detection sample are detected, form factor R is calculated；
The detection sample is crushed, detects and crushes front and rear median particle diameter, wear-resisting factor H is calculated；
The grainding capacity index C of abrasive material is calculated based on form factor R and wear-resisting factor H；
The form factor R is calculated by following formula：R=Σ D4.4CD -1AD, wherein, D is individual particle in the detection sample
Equivalent grain size, CDBe it is described detection sample in individual particle circularities, ADBe it is described detection sample in individual particle area account for it is all
The percentage of the particle gross area of the detection sample；
The wear-resisting factor H is calculated by following formula：H=D2/D1, wherein, D1 is the intermediate value before the detection sample crushes
Grain size, D2 are the detection broken median particle diameter of sample.
2. abrasive lapping ability detection method according to claim 1, which is characterized in that in the detection sample is detected
In the step of equivalent grain size and circularities of particle, the quality of the detection sample is more than or equal to 0.002g, the detection sample
Amounts of particles is more than or equal to 5000.
3. abrasive lapping ability detection method according to claim 1, which is characterized in that the grainding capacity index C with
Form factor R is in be incremented by relationship；The grainding capacity index C and wear-resisting factor H is in be incremented by relationship.
4. abrasive lapping ability detection method according to claim 1, which is characterized in that the grainding capacity index C by
Following formula are calculated：
C=R × H.
5. abrasive lapping ability detection method according to claim 1, which is characterized in that broken by the detection sample
In broken step, 2~100 grams of the sample of detection is weighed, adds in 5~200 progress ball millings of abrading-ball, rotational speed of ball-mill is more than or equal to 10
Rev/min, Ball-milling Time is 5~120 minutes.
6. abrasive lapping ability detection method according to claim 1, which is characterized in that detection sample is being extracted from abrasive material
The step of in, sample is extracted with the methods of sampling of GBT4676-2003.
7. abrasive lapping ability detection method according to claim 1, which is characterized in that detection sample is being extracted from abrasive material
The step of after, further include to it is described detection sample dry.
8. according to claim 1-7 any one of them abrasive lapping ability detection methods, which is characterized in that the abrasive material is carbon
SiClx abrasive material.
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| CN103018140A (en) * | 2012-12-05 | 2013-04-03 | 平顶山易成新材料股份有限公司 | Detection method of abrasion resistance and grindability of silicon carbide micropowder |
| CN104075935A (en) * | 2014-06-27 | 2014-10-01 | 中南钻石有限公司 | Method for correcting test value of impact toughness of artificial diamond |
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