CN105186952A - 稳定真空室真空度的控制系统 - Google Patents
稳定真空室真空度的控制系统 Download PDFInfo
- Publication number
- CN105186952A CN105186952A CN201510465121.8A CN201510465121A CN105186952A CN 105186952 A CN105186952 A CN 105186952A CN 201510465121 A CN201510465121 A CN 201510465121A CN 105186952 A CN105186952 A CN 105186952A
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- Prior art keywords
- voltage signal
- stepping motor
- vacuum
- vacuum degree
- starting switch
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- Control Of Stepping Motors (AREA)
Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510465121.8A CN105186952A (zh) | 2015-07-31 | 2015-07-31 | 稳定真空室真空度的控制系统 |
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CN201510465121.8A CN105186952A (zh) | 2015-07-31 | 2015-07-31 | 稳定真空室真空度的控制系统 |
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CN105186952A true CN105186952A (zh) | 2015-12-23 |
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CN201510465121.8A Pending CN105186952A (zh) | 2015-07-31 | 2015-07-31 | 稳定真空室真空度的控制系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110109396A (zh) * | 2019-05-09 | 2019-08-09 | 中国飞机强度研究所 | 一种力臂调节控制装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1932453A (zh) * | 2005-09-15 | 2007-03-21 | 比亚迪股份有限公司 | 汽车节气门体进气量测试系统和测试方法 |
CN1969241A (zh) * | 2004-07-05 | 2007-05-23 | 喜开理株式会社 | 真空压力控制系统 |
CN101751056A (zh) * | 2008-12-10 | 2010-06-23 | 中国科学院沈阳科学仪器研制中心有限公司 | 真空系统恒压恒流调节器及其控制方法 |
CN204886765U (zh) * | 2015-07-31 | 2015-12-16 | 芜湖真空科技有限公司 | 稳定真空室真空度的控制系统 |
-
2015
- 2015-07-31 CN CN201510465121.8A patent/CN105186952A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1969241A (zh) * | 2004-07-05 | 2007-05-23 | 喜开理株式会社 | 真空压力控制系统 |
CN1932453A (zh) * | 2005-09-15 | 2007-03-21 | 比亚迪股份有限公司 | 汽车节气门体进气量测试系统和测试方法 |
CN101751056A (zh) * | 2008-12-10 | 2010-06-23 | 中国科学院沈阳科学仪器研制中心有限公司 | 真空系统恒压恒流调节器及其控制方法 |
CN204886765U (zh) * | 2015-07-31 | 2015-12-16 | 芜湖真空科技有限公司 | 稳定真空室真空度的控制系统 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110109396A (zh) * | 2019-05-09 | 2019-08-09 | 中国飞机强度研究所 | 一种力臂调节控制装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
CB02 | Change of applicant information |
Address after: 241000 Anhui Province, Wuhu city Jinghu District Zhongjiang integrate Western Plaza B-101 Applicant after: WUHU VACUUM TECHNOLOGY CO., LTD. Address before: 241000 room 320, building B, science and technology innovation center, Wuhu economic and Technological Development Zone, Anhui Applicant before: WUHU VACUUM TECHNOLOGY CO., LTD. |
|
COR | Change of bibliographic data | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 11 Applicant after: WUHU VACUUM TECHNOLOGY CO., LTD. Address before: 241000 Anhui Province, Wuhu city Jinghu District Zhongjiang integrate Western Plaza B-101 Applicant before: WUHU VACUUM TECHNOLOGY CO., LTD. |
|
CB02 | Change of applicant information | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151223 |
|
WD01 | Invention patent application deemed withdrawn after publication |