CN105162353B - A kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor and electricity-generating method thereof - Google Patents
A kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor and electricity-generating method thereof Download PDFInfo
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- CN105162353B CN105162353B CN201510424502.1A CN201510424502A CN105162353B CN 105162353 B CN105162353 B CN 105162353B CN 201510424502 A CN201510424502 A CN 201510424502A CN 105162353 B CN105162353 B CN 105162353B
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Abstract
The invention discloses a kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor and electricity-generating method thereof.The present invention uses at the fan-shaped metal electrode of the vane rotor assemblies surface configuration relative with stator module, and arranges electret on stator module metal electrode separately, thus forms electric capacity and produce charge inducing；When blade rotates, between metal electrode, right opposite amasss generating period change, causes capacitance periodically to change, and the therefore generating period of the charge inducing between metal electrode changes, to the electric current of electric power management circuit output alternation.Threshold wind velocity of the present invention can as little as 0.5m/s, the generated output under 1～5m/s wind speed is 0.05～5mW/cm3In the range of, in current mild wind power MEMS generation technology, present ultralow wind speed start and the characteristic of high power generation density, there is size simultaneously and volume is little, the advantage such as lightweight, high integration, can be widely applied to the power supply of all kinds of radio sensing network nodes in Internet of Things.
Description
Technical field
The present invention relates to microminiature faint wind MEMS electromotor, be specifically related to a kind of based on electrostatic charming appearance and behaviour MEMS of electret
Electromotor and electricity-generating method thereof.
Background technology
In recent years, along with micro-electromechanical system (MEMS) technology and " Internet of Things " concept develop rapidly, the wireless biography of Internet of Things in region
Sensor network system is advanced greatly.Micro-energy self-powered technology, such as chemical micro-energy and the micro-energy of physics, self can carry
For the electric energy of 10 μ W-1mW, therefore they are considered the most effectively to solve the key technology of wireless senser energy supply.
The wind energy of nature is a kind of clean energy resource and the moment is present in life, and wind speed can be in 0.1m/s～20m/s range.
Along with the micro-systems (consume energy 10 μ W～1W) such as radio sensing network, outdoor monitoring fast development and it is to wireless faint confession
The urgent needs of power technology, before the miniature MEMS wind-driven generator of micro volume (diameter < 10cm) shows extremely strong application
Scape.Current charming appearance and behaviour MEMS electromotor mainly has piezoelectric type and turbine electromagnetic type.Piezoelectric type charming appearance and behaviour MEMS electromotor is by wind
The vibrational energy of micro structure can be converted to, utilize piezoelectric effect that micro structure vibrational energy is converted to electric energy, but it is in mechanical vibration process
In with a large amount of energy losses, cause generated output density low, its volume is relatively big in addition, heavier mass.Turbine type electromagnetic type wind
Cause MEMS electromotor under wind action, rotor around stator generation relative motion, cutting magnetic induction line thus produce electric energy, but
Need high blast drive rotor to rotate, thus generate electricity under faint wind (less than 5m/s), the slow-speed of revolution (less than 100rpm)
Power density is low.
Summary of the invention
For above problems of the prior art, the present invention proposes a kind of based on the generating of electret electrostatic charming appearance and behaviour MEMS
Machine and electricity-generating method thereof, threshold wind velocity can as little as 0.5m/s, the generated output under 1～5m/s wind speed is 0.05～5mW/cm3Model
In enclosing, current mild wind power MEMS generation technology presents ultralow wind speed and starts and the characteristic of high power generation density.
It is an object of the invention to provide a kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor.
The present invention includes based on electret electrostatic charming appearance and behaviour MEMS electromotor: generator casing, stator module, blade rotor
Assembly, central shaft and electric power management circuit；Wherein, stator module, vane rotor assemblies, central shaft and electric power management circuit peace
It is contained in the generator casing of tubular；Stator module is fixed on the bottom of generator casing, centrally disposed central shaft；Blade rotor
Installing on center shaft centrally through bearing and axle sleeve of assembly, and around central axis；Stator module includes stator substrate, determines
Sub-metal electrode and electret, stator substrate has 2N fan-shaped grid of radial, turns with blade on stator substrate
The surface configuration that sub-component is relative has the stator metal electrode that 2N with its similar shape is fan-shaped, the stator metal electrode at N number of interval
On be provided with electret, form fan-shaped interdigital electrode and the interdigital electret of sector respectively；Vane rotor assemblies include rotor substrate,
Blade and rotor metal electrode, blade rigidity be connected on rotor substrate with stator module back to surface on, rotor substrate has
The grid of N number of sector of radial, surface configuration relative with stator module on rotor substrate has the N number of fan with its similar shape
The rotor metal electrode of shape；N number of rotor metal electrode is electrically connected by wire, is connected to by the central shaft at rotor substrate center
One input of electric power management circuit；N number of stator metal electrode being not provided with electret is electrically connected to power management by wire
Another input of circuit；Being provided with external interface on generator casing, wire passes through external interface by electric power management circuit
Output port is connected to external circuit.
The central angle of the rotor metal electrode of each sector is a, and the central angle of each stator metal electrode is b, exposed (not
Electret is set) stator metal electrode and the stator metal electrode of adjacent the most exposed (electret is set) between angle,
I.e. clearance angle is c, meets c ＞ 0, c ＜ a ＜ 2b.The thickness of rotor metal electrode and stator metal electrode 0.1～0.5 μm it
Between；The thickness of electret is between 1～200 μm；Distance between rotor metal electrode and electret is between 5～500 μm.
Electret includes the polarization charge on electret matrix and its surface.The rotor metal electricity being arranged on vane rotor assemblies
Pole constitutes electric capacity with the corresponding stator metal electrode being arranged on stator substrate, and rotor metal electrode produces under the sensing of electret
Raw charge inducing.When there being wind moving vane to rotate, blade rotates rotor driven metal electrode and rotates, and stator metal electrode is in
Static, between rotor metal electrode and stator metal electrode, right opposite amasss generating period change, causes capacitance periodically to change,
Stator metal electrode and the charge inducing therefore generating period change in rotor metal electrode, and then produce sensing in the line
Alternating current.When by bridge rectifier in electric power management circuit, the alternating current of sensing is converted into direct current, then exists
Build-out resistor forms DC voltage and is stored on energy storage unit, when needs energy supply by external interface to external sensor
Power supply.
The material of electret uses the one in the electret such as Parylene Parylene, Teflon Teflon and silicon dioxide.
The material of generator casing uses plastics, and thickness is between 1mm～3cm, to ensure light weight characteristics.
The material of stator substrate and rotor substrate uses silicon dioxide material, and thickness is between 0.3mm～0.5cm, to ensure lightweight
Feature.
Electret and metal electrode pattern can be made by micro Process and MEMS technology.
Bearing, axle sleeve and central shaft use rustless steel or lightweight aluminium.
Electric power management circuit includes bridge rectifier, build-out resistor, energy storage unit, power transformation device and output port；Wherein,
Stator metal electrode and rotor metal electrode are electrically connected the two ends at bridge rectifier by wire；Bridge rectifier with after
Build-out resistor, energy storage unit and the power transformation device of end is electrically in parallel；Output port includes power and ground, connects respectively
The external interface being connected on generator casing.
Further, present invention additionally comprises arrestment mechanism, arrestment mechanism uses the elastic washer of annular, is fixed on generator casing
In, and between stator module and vane rotor assemblies, and between vane rotor assemblies, have space.When wind speed exceedes threshold value
Time (such as 12m/s), blade deforms upon together with rotor substrate, and the gap between vane rotor assemblies and elastic washer reduces
Until rotor metal electrode contacts with elastic washer, it is achieved braking, to protect blade to be protected from the destruction of superelevation blast；Work as wind
Within speed is attenuated to threshold value, rotor substrate separates with elastic washer, and vane rotor assemblies can the most normally work.The present invention's is another
One purpose is to provide a kind of electricity-generating method based on electret electrostatic charming appearance and behaviour electromotor.
Present invention additionally comprises empennage, be arranged on the afterbody of electromotor, for perception wind direction, the fuselage positions of regulator generator.
The electricity-generating method based on electret electrostatic charming appearance and behaviour MEMS electromotor of the present invention, comprises the following steps:
1) the rotor metal electrode being arranged on vane rotor assemblies is constituted with the corresponding stator metal electrode being arranged on stator substrate
Charge inducing is formed under electric capacity, and the sensing of the polarization charge on electret；
2) when there being wind moving vane to rotate, blade rotates rotor driven metal electrode and rotates, and stator metal electrode is static, rotor metal
Between electrode and stator metal electrode, right opposite amasss generating period change, causes capacitance periodically to change；
3) stator metal electrode periodically changes because of capacitance and generating period change with the charge inducing in rotor metal electrode, enters
And produce the alternating current of sensing in the line；
4) when by bridge rectifier in electric power management circuit, the alternating current of sensing is converted into direct current, then in build-out resistor
Form DC voltage and be stored on energy storage unit, when needs energy supply by external interface to outside sensor power.
Further, in generator casing and between stator module and vane rotor assemblies, fixing arrestment mechanism, braking
Mechanism uses the elastic washer of annular, and has space between vane rotor assemblies, and when wind speed exceedes threshold value, blade is together with turning
Submounts deforms upon, and the gap between vane rotor assemblies and elastic washer reduces until rotor metal electrode connects with elastic washer
Touch, it is achieved braking.
Advantages of the present invention:
The present invention uses at the fan-shaped metal electrode of the vane rotor assemblies surface configuration relative with stator module, and in stator pack
Electret is set on part metal electrode separately, thus forms electric capacity and produce charge inducing；When blade rotates, rotor metal
Between electrode and stator metal electrode, right opposite amasss generating period change, causes capacitance periodically to change, between metal electrode
Charge inducing therefore generating period changes, to the electric current of electric power management circuit output alternation.Threshold wind velocity of the present invention can as little as 0.5
M/s, the generated output under 1～5m/s wind speed is 0.05～5mW/cm3In the range of, in current mild wind power MEMS generation technology
Represent ultralow wind speed to start and the characteristic of high power generation density, there is the advantage such as size and volume is little, lightweight, high integration simultaneously,
Can be widely applied to the power supply of all kinds of radio sensing network nodes in Internet of Things, such as portable wearable device, unattended
In intelligent wireless system.
Accompanying drawing explanation
Fig. 1 is the profile based on electret electrostatic charming appearance and behaviour electromotor of the present invention；
Fig. 2 is the top view on the surface that the stator module of the present invention is relative with vane rotor assemblies；
Fig. 3 is the top view on the surface that the vane rotor assemblies of the present invention is relative with stator module.
Detailed description of the invention
Below in conjunction with the accompanying drawings, by embodiment, the present invention will be further described.
As it is shown in figure 1, the including based on electret electrostatic charming appearance and behaviour electromotor of the present embodiment: generator casing 1, stator module,
Vane rotor assemblies, central shaft 4, arrestment mechanism 5, electric power management circuit 6 and empennage 7；Wherein, stator module, blade turn
Sub-component and central shaft 4 are arranged in the generator casing 1 of tubular；Stator module is fixed on the bottom of generator casing 1, in
The heart arranges central shaft 4；Being arranged on central shaft 4 centrally through bearing and axle sleeve 8 of vane rotor assemblies, and turn around central shaft
Dynamic；Arrestment mechanism 5 uses the elastic washer of annular, is fixed in generator casing, and is positioned at stator module and blade turns
Between sub-component；Afterbody at central shaft 4 is provided with empennage 7；The bottom of stator module arranges electric power management circuit 6.At stator
It is provided with brake unit 5 between assembly and vane rotor assemblies, uses the elastic washer of annular.
As in figure 2 it is shown, stator module includes stator substrate 21, stator metal electrode 22 and electret 23, stator substrate 21 has
Having 10 fan-shaped grids of radial, surface configuration relative with vane rotor assemblies on stator substrate 21 has same with it
10 fan-shaped stator metal electrodes 22 of shape, the stator metal electrode at N number of interval is provided with electret 23, forms sector
Interdigital electrode and the interdigital electret of sector；N number of stator metal electrode being not provided with electret is electrically connected to power supply pipe by wire
One input of reason circuit.
As it is shown on figure 3, vane rotor assemblies includes rotor substrate 31, blade 33 and rotor metal electrode 32, blade 33 rigidity
Being connected on rotor substrate 31, rotor substrate 31 has 5 fan-shaped grids of radial, with stator on rotor substrate
The surface configuration that assembly is relative has 5 with its similar shape fan-shaped rotor metal electrodes 32；5 rotor metal electrodes are by wire electricity
Learn and connect, be connected to another input of electric power management circuit by the central shaft at rotor substrate center.
It is finally noted that, publicize and implement the purpose of mode and be that help is further appreciated by the present invention, but the skill of this area
Art personnel are understood that without departing from the spirit and scope of the invention and the appended claims, and various substitutions and modifications are all
Possible.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is with claim
Book defines in the range of standard.
Claims (10)
1. one kind based on electret electrostatic charming appearance and behaviour MEMS electromotor, it is characterised in that described electromotor includes: generator casing,
Stator module, vane rotor assemblies, central shaft and electric power management circuit；Wherein, stator module, vane rotor assemblies,
Central shaft and electric power management circuit are arranged in the generator casing of tubular；Described stator module is fixed on generator casing
Bottom, centrally disposed central shaft；Installing on center shaft centrally through bearing and axle sleeve of described vane rotor assemblies, and
Around central axis；Described stator module includes stator substrate, stator metal electrode and electret, and stator substrate has into
Radial 2N fan-shaped grid, surface configuration relative with vane rotor assemblies on stator substrate has and stator substrate
The stator metal electrode that 2N of similar shape is fan-shaped, the stator metal electrode at N number of interval is provided with electret, is formed respectively
Fan-shaped interdigital electrode and the interdigital electret of sector；Described vane rotor assemblies includes rotor substrate, blade and rotor metal electricity
Pole, blade rigidity be connected on rotor substrate with stator module back to surface on, rotor substrate has the N of radial
The grid of individual sector, surface configuration relative with stator module on rotor substrate has the N number of sector with rotor substrate similar shape
Rotor metal electrode；N number of rotor metal electrode is electrically connected by wire, is connected to by the central shaft at rotor substrate center
One input of electric power management circuit；N number of stator metal electrode being not provided with electret is electrically connected to power supply pipe by wire
Another input of reason circuit；Being provided with external interface on described generator casing, wire passes through external interface by power supply
The output port of management circuit is connected to external circuit.
2. MEMS electromotor as claimed in claim 1, it is characterised in that the central angle of the rotor metal electrode of each sector
For a, the central angle of each stator metal electrode is b, exposed stator metal electrode and the most exposed adjacent stator gold
The angle i.e. clearance angle belonged between electrode is c, meets c ＞ 0, c ＜ a ＜ 2b.
3. MEMS electromotor as claimed in claim 1, it is characterised in that described rotor metal electrode and stator metal electrode
Thickness is between 0.1～0.5 μm；The thickness of electret is between 1～200 μm；Described rotor metal electrode and electret it
Between distance between 5～500 μm.
4. MEMS electromotor as claimed in claim 1, it is characterised in that the material of described electret uses Parylene
One in Parylene, Teflon Teflon and silicon dioxide.
5. MEMS electromotor as claimed in claim 1, it is characterised in that also including arrestment mechanism, described arrestment mechanism uses
The elastic washer of annular, is fixed in generator casing, and between stator module and vane rotor assemblies, with
Space is had between vane rotor assemblies.
6. MEMS electromotor as claimed in claim 1, it is characterised in that described electric power management circuit include bridge rectifier,
Build-out resistor, energy storage unit, power transformation device and output port；Wherein, stator metal electrode leads to rotor metal electrode
Cross wire and be connected to the two ends of bridge rectifier；Bridge rectifier and the build-out resistor of rear end, energy storage unit and
Power transformation device is electrically in parallel；Output port includes power and ground, and the outside being respectively connecting on generator casing connects
Mouthful.
7. MEMS electromotor as claimed in claim 1, it is characterised in that the material of described generator casing uses plastics, thick
Degree is between 1mm～3cm.
8. MEMS electromotor as claimed in claim 1, it is characterised in that the material of described stator substrate and rotor substrate uses
Silicon dioxide material, thickness is between 0.3mm～0.5cm.
9. MEMS electromotor as claimed in claim 1, it is characterised in that also include that empennage, described empennage are arranged on electromotor
Afterbody.
10. an electricity-generating method based on electret electrostatic charming appearance and behaviour MEMS electromotor, it is characterised in that described electricity-generating method includes
Following steps:
1) the rotor metal electrode being arranged on vane rotor assemblies is constituted with the corresponding stator metal electrode being arranged on stator substrate
Charge inducing is formed under electric capacity, and the sensing of the polarization charge on electret；
2) when there being wind moving vane to rotate, blade rotates rotor driven metal electrode and rotates, and stator metal electrode is static, rotor metal
Between electrode and stator metal electrode, right opposite amasss generating period change, causes capacitance periodically to change；
3) stator metal electrode periodically changes because of capacitance and generating period change with the charge inducing in rotor metal electrode, enters
And produce the alternating current of sensing in the line；
4) when by bridge rectifier in electric power management circuit, the alternating current of sensing is converted into direct current, then in build-out resistor
Form DC voltage and be stored on energy storage unit, when needs energy supply by external interface to outside sensor power；
Wherein, electromotor includes: generator casing, stator module, vane rotor assemblies, central shaft and electric power management circuit；Its
In, stator module, vane rotor assemblies, central shaft and electric power management circuit are arranged in the generator casing of tubular；Described
Stator module is fixed on the bottom of generator casing, centrally disposed central shaft；Described vane rotor assemblies centrally through bearing
Install on center shaft with axle sleeve, and around central axis；Described stator module include stator substrate, stator metal electrode and
Electret, stator substrate has 2N fan-shaped grid of radial, relative with vane rotor assemblies on stator substrate
Surface configuration have with stator substrate similar shape 2N fan-shaped stator metal electrode, on the stator metal electrode at N number of interval
It is provided with electret, forms fan-shaped interdigital electrode and the interdigital electret of sector respectively；Described vane rotor assemblies includes rotor base
Plate, blade and rotor metal electrode, blade rigidity be connected on rotor substrate with stator module back to surface on, rotor base
Plate has the grid of N number of sector of radial, and surface configuration relative with stator module on rotor substrate has and rotor base
The rotor metal electrode of N number of sector of plate similar shape；N number of rotor metal electrode is electrically connected by wire, by rotor substrate
The central shaft of the heart is connected to an input of electric power management circuit；N number of stator metal electrode of electret that is not provided with is by wire
It is electrically connected another input to electric power management circuit；Being provided with external interface on described generator casing, wire passes through
The output port of electric power management circuit is connected to external circuit by external interface；
Described electric power management circuit includes bridge rectifier, build-out resistor, energy storage unit, power transformation device and output port；Its
In, stator metal electrode and rotor metal electrode are connected to the two ends of bridge rectifier by wire；Bridge rectifier with
The build-out resistor of rear end, energy storage unit and power transformation device are electrically in parallel；Output port includes power and ground, point
The external interface not being connected on generator casing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510424502.1A CN105162353B (en) | 2015-07-17 | 2015-07-17 | A kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor and electricity-generating method thereof |
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| CN201510424502.1A CN105162353B (en) | 2015-07-17 | 2015-07-17 | A kind of based on electret electrostatic charming appearance and behaviour MEMS electromotor and electricity-generating method thereof |
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| CN105162353B true CN105162353B (en) | 2016-08-17 |
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| FR3046436B1 (en) * | 2016-01-06 | 2018-02-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | ELECTROSTATIC CONVERTER. |
| CN105932899B (en) * | 2016-06-07 | 2018-12-11 | 清华大学 | No basal electrode electret electrostatic generator and the method for manufacturing the electret |
| RU2703256C1 (en) * | 2018-12-29 | 2019-10-16 | Николай Иванович Кузин | Electrostatic motor |
| CN110474558B (en) * | 2019-08-20 | 2021-01-05 | 西北工业大学 | Multifunctional electret generator based on permanent magnet suspension gyroscope |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102420518A (en) * | 2011-11-22 | 2012-04-18 | 马天平 | Electric field energy generator |
| CN104734556A (en) * | 2013-12-23 | 2015-06-24 | 北京纳米能源与系统研究所 | Non-contact type electrostatic induction nanometer generator, generator set and generation method |
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| US20040007877A1 (en) * | 2002-06-07 | 2004-01-15 | California Institute Of Technology | Electret generator apparatus and method |
| JP2011101499A (en) * | 2009-11-05 | 2011-05-19 | Panasonic Corp | Power generation apparatus |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102420518A (en) * | 2011-11-22 | 2012-04-18 | 马天平 | Electric field energy generator |
| CN104734556A (en) * | 2013-12-23 | 2015-06-24 | 北京纳米能源与系统研究所 | Non-contact type electrostatic induction nanometer generator, generator set and generation method |
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