CN105151848B - For transmitting the bridge member of thin plate and thin plate conveyer including it - Google Patents
For transmitting the bridge member of thin plate and thin plate conveyer including it Download PDFInfo
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- CN105151848B CN105151848B CN201510459024.8A CN201510459024A CN105151848B CN 105151848 B CN105151848 B CN 105151848B CN 201510459024 A CN201510459024 A CN 201510459024A CN 105151848 B CN105151848 B CN 105151848B
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- Prior art keywords
- bridge member
- thin plate
- power transmission
- transmission shaft
- fixed component
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Abstract
The present invention relates to a kind of bridge member for transmitting thin plate and the thin plate conveyer including it.The bridge member includes：Support member, it includes the upper surface and the lower surface relative with the upper surface for being used to support that the thin plate passes through from it, and the support member includes the first end and second end relative with the first end positioned at the upper surface side；First fixed component, it is connected to the first end and is configured to the bridge member being fixed to the first power transmission shaft.Thin plate conveyer includes：Multiple power transmission shafts, the power transmission shaft includes flower roller structure, and above-mentioned bridge member, and the bridge member is arranged between power transmission shaft described in adjacent at least two, and the upper surface of the bridge member is concordant with the top of the power transmission shaft.
Description
Technical field
The present invention relates to semiconductor preparation field.More particularly it relates to a kind of bridge joint structure for being used to transmit thin plate
Part and the thin plate conveyer including it.
Background technology
During wet process operation prepared by semiconductor, (thin plate as described herein is often referred to thickness of slab at 0.15 millimeter to thin plate
Following thin plate, espespecially ultra thin plate of the thickness of slab below 0.06 millimeter) not stalling dynamic and move forward with power transmission shaft.As schemed
Shown in 1, the shower nozzle 30a between power transmission shaft 10,20 and shower nozzle 30b, 30c positioned at power transmission shaft 10,20 opposite sides distinguish
Treatment liquid is vertically sprayed to thin plate 40 to clean it or etch operation from the above and below of thin plate 40.But,
Because thin plate (or ultra thin plate) is relatively thin, the injection for the treatment of liquid can cause the position contacted with liquid of thin plate to bear larger
The partial treatment liquids remained in after pressure, injection on thin plate also can make thin plate the situation of unbalance stress occur, and this can all cause
Thin plate produces undesirable warpage (for example, thin sheet surface is uneven or thin plate edge sagging (referring to Fig. 1 40a) etc.), hair
The thin plate of raw warpage is easily stuck at shower nozzle and can not continue on (" clamp ") and cause the paralysis of whole operating line again.Separately
Outside, if the spacing between power transmission shaft is larger, particularly spacing is larger between the power transmission shaft of junction between two cell bodies, it will plus
The generation of acute clamp phenomenon.
In order to avoid above-mentioned situation, the settling mode that prior art is generally used is set in the preceding inlet side of thin plate direction of transfer
A relatively thick band plate is put, the band plate is connected by adhesive tape with thin plate.Because band plate is thicker, it is difficult to be subject to processing the influence of liquid
And deformation is produced, so as to drive thin plate successfully to be advanced between power transmission shaft, which solve clamp problem.But, adhesive tape
Interior remaining decoction easily oozes out and corroded the copper wire of thin plate, and this has a strong impact on the quality of thin plate.In addition, attachment and release band
The operation of plate influences production efficiency it is also possible that thin plate ruptures.
Therefore, this area needs one kind to prevent thin plate from occurring clamp again will not be due to attachment band plate to thin plate product
Matter produces the device of additional risk.
The content of the invention
In order to solve the above problems, the present invention provides a kind of bridge member for being used to transmit thin plate, and it includes：Supporting part
Part, it includes the upper surface and the lower surface relative with the upper surface for being used to support that the thin plate passes through from it, the branch
Support part part includes the first end and second end relative with the first end positioned at the upper surface side；First fixed component,
It is connected to the first end and is configured to the bridge member being fixed to the first power transmission shaft.
The present invention further provides a kind of thin plate conveyer, it includes：Multiple power transmission shafts, the power transmission shaft includes flower and rolled
Wheel construction, and bridge member as described above, the bridge member are arranged between power transmission shaft described in adjacent at least two,
And the upper surface of the bridge member is concordant with the top of the power transmission shaft.
Thereby, bridge member of the invention and the conveyer including it can prevent thin plate from occurring clamp again will not be right
The quality of thin plate produces harmful effect.Being simple to manufacture of bridge member, with low cost, effect significantly, be adapted to large-scale application in
The wet process operation of thin plate.
Brief description of the drawings
Fig. 1 shows the schematic diagram of the mechanism of transmission thin plate.
Fig. 2 shows the schematic diagram according to an embodiment of the invention for being used to transmit the bridge member of thin plate.
Fig. 3 shows another schematic diagram according to another embodiment of the present invention for being used to transmit the bridge member of thin plate.
Fig. 4 shows the scheme of installation for being used to transmit the bridge member of thin plate according to further embodiment of this invention.
Embodiment
It is as follows, the bridge member that thin plate is driven that is used for of the present invention will be described in further detail.The bridge member of the present invention is set
It is set to and bridges at least two adjacent power transmission shafts so that thin plate thereon can pass through these power transmission shafts.
As shown in Fig. 2 bridge member 100 includes support member 101.Wherein, support member 101 includes being used to support thin plate
The upper surface 1011 passed through from it and the lower surface 1012 relative with the upper surface 1011.Support member 101 also includes position
First end 1013 and second end 1014 relative with the first end 1013 in the side of upper surface 1011.
Bridge member 100 further comprises the first fixed component 102.First fixed component 102 is connected to support member 101
First end 1013 and be configured to the bridge member 100 being fixed to the first power transmission shaft.Those skilled in the art can manage
Solution, the connection between the first fixed component 102 and support member 101 can be realized in any manner, as long as ensureing thin plate
Successfully it can be advanced on bridge member.For example, the top of the first fixed component 102 and the first of support member 101
End 1013 is integrally formed to realize smooth seamless connection.The bottom of first fixed component 102 is configured to opening
1021 are matched with the outline with the first power transmission shaft so that the first fixed component 102 is blocked and to the first power transmission shaft.At one
In preferred embodiment, in order to ensure that thin plate is steadily transmitted on bridging component, the opening 1021 is configured to its internal diameter slightly
More than the arc opening or semicircle opening of the external diameter of the first power transmission shaft matched.Further, the arc opening or semicircle
The both sides of shape opening also each include foremost downwards or the extension 1022 that slightly extends internally is to ensure bridge member 100 not
Can easily it be come off due to the rotation of power transmission shaft.
In one embodiment, the upper surface 1011 of support member 101 and lower surface 1012 are mutual at the second end 1014
It is parallel.In a preferred embodiment, the upper surface 1011 is configured to towards lower surface in the part at second end 1014
1012 tilt an angle, and such as, but not limited to 10-30 degree (as shown in Figure 2), this is conducive to thin plate to be smoothly communicated off transmission
Axle.
As shown in figure 3, in another embodiment, bridge member 100 includes the second fixed component 103.Second fixed part
Part 103 is connected to the second end 1014 of support member 101 and is configured to the bridge member 100 being fixed to the second transmission
Axle.Preferably, the second fixed component 103 is configured to identical with first fixed component 102.For example, the second fixed component
103 bottom is configured to the outline with second driving shaft match with opening so that the second fixed component 103 is blocked
With to the power transmission shaft.In a preferred embodiment, in order to ensure that thin plate is steadily transmitted on bridging component, the opening quilt
Its internal diameter is configured to slightly larger than the arc opening of the external diameter of matched second driving shaft or semicircle opening.Further, should
The extension that the also each including foremost of the both sides of arc opening or semicircle opening extends internally downwards or slightly is to ensure bridge
Connection member will not easily be come off due to the rotation of the power transmission shaft.
Bridge member 100 can be made up of any appropriate material, such as, but not limited to the high molecule plastic material such as PP, PVC
Material, Teflon or other suitable materials, wherein it is preferred to use the Teflon corroded with antiacid alkali resistant.
The present invention further provides a kind of thin plate conveyer, it includes multiple power transmission shafts and bridge joint structure mentioned above
Part 100, wherein, the power transmission shaft includes flower roller structure.The bridge member 100 is arranged on two adjacent power transmission shafts
Between (as shown in Figure 4), bridge member 100 generally is set between spacing is more than 1 centimetre of two adjacent drive axles.And it is described
The upper surface of bridge member 100 is concordant with the top of the power transmission shaft.More specifically, the bridge member 100 of being provided with
Two adjacent power transmission shafts 200 include flower roller structure, and it has newel 201 and surrounds and protrude from newel 201 respectively
And spaced multiple shoulders 202.First fixed component of bridge member 100 is arranged between two adjacent shoulders 202
Newel.Preferably, bridge member 100 is constructed and is arranged as：Make its first fixed component and/or the second fixed component card
Firmly the upper surface of its support member and the top of shoulder are concordant while newel, so as to prevent thin plate from being advanced in transmission between centers
Shi Fasheng plates pin is torn or clamp phenomenon.Bridge member may be selected it is one or more be disposed side by side on power transmission shaft, bridge member
Between preferably spacing be thin plate transmission direction of principal axis 1/4 width, to play more preferable supporting role.In one embodiment
In, thin plate conveyer of the present invention further comprises cell body, motor and the shower nozzle for carrying out wet process operation.Wherein, cell body
It is provided with multiple power transmission shafts to internal both sides inwall horizontal parallel.The two ends of each power transmission shaft are mounted on sprocket wheel, adjacent sprocket wheel
Between chain is installed, motor is connected to drive it to rotate with power transmission shaft.The shower nozzle be arranged at power transmission shaft top and/or
Lower section, to being cleaned or being etched operation via the thin plate upper surface of power transmission shaft horizontal transmission.
Although having illustrated and having described the not be the same as Example of this announcement, this announcement is not limited to these embodiments.Only exist
The technical characteristic occurred in some claims or embodiment be not meant to can not with other claims or embodiment
Other features are combined to realize beneficial new technical scheme.Without departing substantially from the essence as disclosed in this described by claims
In the case of god and scope, many modifications, change, deformation, substitute and it is equivalent be obvious to those skilled in the art
's.
Claims (10)
1. a kind of bridge member for being used to transmit thin plate, it is characterised in that including：
Support member, it includes the upper surface and the following table relative with the upper surface for being used to support that the thin plate passes through from it
Face, the support member includes the first end and second end relative with the first end positioned at the upper surface side；
First fixed component, it is connected to the first end and is configured to the bridge member being fixed to the first transmission
Axle.
2. bridge member according to claim 1, it is characterised in that first fixed component is configured to opening
Matched with the outline with first power transmission shaft.
3. bridge member according to claim 2, it is characterised in that the opening is arc opening or semicircle opening.
4. bridge member according to claim 3, it is characterised in that the two of the arc opening or the semicircle opening
The front end of side is each provided with the extension extended internally downwards or slightly.
5. bridge member according to claim 1, it is characterised in that the upper surface second end part by structure
Make to tilt an angle in the part at second end towards the lower surface.
6. bridge member according to claim 5, it is characterised in that the angle ranging from 10-30 degree.
7. bridge member according to claim 1, it is characterised in that first power transmission shaft includes flower roller structure, institute
Stating colored roller structure has newel and surrounds and protrude from the newel and spaced multiple shoulders；Wherein described
One fixed component is fixed to the newel between two shoulders.
8. bridge member according to any one of claim 1 to 4, it is characterised in that further comprise：
Second fixed component, it is located at second end and is configured to the bridge member being fixed to second driving shaft.
9. bridge member according to claim 8, it is characterised in that second fixed component is configured to and described
One fixed component is identical, and the second driving shaft includes flower roller structure, and the colored roller structure has newel and around simultaneously
Protrude from the newel and spaced multiple shoulders；Wherein described second fixed component be fixed to two shoulders it
Between the newel.
10. a kind of thin plate conveyer, it is characterised in that including：
Multiple power transmission shafts, the power transmission shaft includes flower roller structure, and
Bridge member as claimed in any one of claims 1-9 wherein, the bridge member is arranged on described in adjacent at least two
Between power transmission shaft, and the upper surface of the bridge member is concordant with the top of the power transmission shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510459024.8A CN105151848B (en) | 2015-07-30 | 2015-07-30 | For transmitting the bridge member of thin plate and thin plate conveyer including it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510459024.8A CN105151848B (en) | 2015-07-30 | 2015-07-30 | For transmitting the bridge member of thin plate and thin plate conveyer including it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105151848A CN105151848A (en) | 2015-12-16 |
| CN105151848B true CN105151848B (en) | 2017-09-29 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510459024.8A Active CN105151848B (en) | 2015-07-30 | 2015-07-30 | For transmitting the bridge member of thin plate and thin plate conveyer including it |
Country Status (1)
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| CN (1) | CN105151848B (en) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB108719A (en) * | 1916-08-17 | 1917-08-17 | Albert Edgar Alexander | Improvements in and relating to Sheet Feeding, Gumming and Transporting Mechanism. |
| GB942579A (en) * | 1960-03-28 | 1963-11-27 | Grinten Chem L V D | Device for separating two sheets of laminar material |
| JPS597668A (en) * | 1982-07-06 | 1984-01-14 | Ricoh Co Ltd | Sorter having reversing device |
| US4699031A (en) * | 1986-02-20 | 1987-10-13 | Ametek, Inc. | Method and apparatus for automatically cutting a web of foam material into sheets and for dispensing the cut sheets |
| CN102229386B (en) * | 2011-04-21 | 2012-11-21 | 牡丹江木工机械（厂）有限责任公司 | Transitional bridge for conveying belts |
| CN202499537U (en) * | 2012-03-21 | 2012-10-24 | 苏州宏瑞达新能源装备有限公司 | Transitional bridging mechanism for adjacent machines |
| JP6187469B2 (en) * | 2012-10-12 | 2017-08-30 | 旭硝子株式会社 | Glass plate conveying apparatus and glass plate conveying method |
| CN203497732U (en) * | 2013-08-01 | 2014-03-26 | 武汉七零九印制板科技有限公司 | Anti-board-sticking structure |
| CN204078969U (en) * | 2014-09-26 | 2015-01-07 | 广州御银自动柜员机技术有限公司 | A kind of paper Transfer pipe |
| CN204847473U (en) * | 2015-07-30 | 2015-12-09 | 日月光半导体(上海)有限公司 | A sheet metal conveyer for conveying bridging component of sheet metal and including its |
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2015
- 2015-07-30 CN CN201510459024.8A patent/CN105151848B/en active Active
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| Publication number | Publication date |
|---|---|
| CN105151848A (en) | 2015-12-16 |
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