CN105142092A - Substrate and manufacturing method thereof and display device - Google Patents

Substrate and manufacturing method thereof and display device Download PDF

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Publication number
CN105142092A
CN105142092A CN201510434522.7A CN201510434522A CN105142092A CN 105142092 A CN105142092 A CN 105142092A CN 201510434522 A CN201510434522 A CN 201510434522A CN 105142092 A CN105142092 A CN 105142092A
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CN
China
Prior art keywords
substrate
back electrode
sensing film
pressure
support component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510434522.7A
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Chinese (zh)
Inventor
王慧
闫龙
吴芳芳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei Xinsheng Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201510434522.7A priority Critical patent/CN105142092A/en
Publication of CN105142092A publication Critical patent/CN105142092A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a substrate and a manufacturing method thereof and a display device. The substrate comprises at least one sound acquisition unit. The sound acquisition unit comprises a back electrode which is arranged on the underlying substrate of the substrate, a supporting part which is arranged on the back electrode, a pressure sensing membrane which is arranged on the supporting part, wherein a capacitor is formed by the pressure sensing membrane and the back electrode, and a first signal transmission line which is connected with the back electrode and a second signal transmission line which is connected with the pressure sensing membrane. With application of the substrate, the internal structure of a mobile phone, a tablet computer and other intelligent terminals can be simplified so that the intelligent terminals are enabled to be lighter and thinner, and influence of external dust and foreign matter on the sound acquisition units can also be avoided.

Description

Substrate and manufacture method, display unit
Technical field
The present invention relates to Display Technique field, especially relate to a kind of substrate and manufacture method, display unit.
Background technology
The microphone of the terminals such as existing computer, mobile phone, panel computer is all integrated in the inside of equipment as independently unit, sound is collected by microphone aperture or microphone, but lightening along with the mobile terminal such as mobile phone, panel computer, microphone aperture is more and more less, easily by extraneous dust and foreign matters from being blocked, affect the effect of sound collecting.
For this technical problem, prior art does not provide a kind of effective solution.
Summary of the invention
Main purpose of the present invention is to provide a kind of sound collection mode be not easy by extraneous dust and foreign matters from being blocked, the generation causing sound collecting effect to avoid dust and foreign matters from being blocked and reduce.
In order to achieve the above object, the invention provides a kind of substrate and manufacture method, display unit.
According to an aspect of the present invention, provide a kind of substrate, comprise at least one sound collection unit, described sound collection unit comprises: be arranged on the back electrode on the underlay substrate of described substrate, the support component be arranged on described back electrode, with the pressure-sensing film be arranged on described support component, described pressure-sensing film and described back electrode form an electric capacity; And, the first signal transmssion line be connected with described back electrode, and the secondary signal transmission line be connected with described pressure-sensing film.
Preferably, described support component comprises the resiliency supported circle of at least two elastomeric support column or toroidal.
Preferably, the height of described support component is 1 ~ 10 micron.
Preferably, described substrate is display base plate or touches substrate.
Preferably, when described substrate is display base plate, described sound collection unit is arranged on the non-display area of described display base plate, and the material that described back electrode adopts is transparent conductive material or nontransparent electric conducting material.
Preferably, when described substrate is display base plate, described sound collection unit is arranged on the viewing area of described display base plate, and the material that described back electrode and described pressure-sensing film adopt is transparent conductive material.
Preferably, described display base plate comprises: array base palte or color membrane substrates.
According to another aspect of the present invention, provide a kind of display unit, comprising: aforesaid substrate, and cover the cover plate be arranged on aforesaid substrate, the position described cover plate corresponding to described sound collection unit is provided with at least one opening.
Preferably, also comprise: sound processing unit, for being connected with described first signal transmssion line and described secondary signal transmission line, and receive the voltage signal of described first signal transmssion line and described secondary signal transmission line, to process described voltage signal.
According to a further aspect of the invention, provide a kind of manufacture method of substrate, comprising: a underlay substrate is provided; Described underlay substrate is formed a back electrode, and the first signal transmssion line of connection with described back electrode; Described back electrode arranges a support component; Described support component arranges a pressure-sensing film, and the secondary signal transmission line be connected with described pressure-sensing film, described pressure-sensing film and described back electrode form an electric capacity.
Compared with prior art, substrate of the present invention and manufacture method, display unit, the electric capacity between pressure-sensing film and ITO back electrode is changed with the deformation of pressure-sensing film, the voltage of output is changed, by amplifying circuit, acoustical signal is converted into the signal of telecommunication again and reaches sound collecting, thus the internal structure of the intelligent terminal such as mobile phone, panel computer can be simplified, make it more lightening, sound collection list can be avoided again to be subject to the impact of extraneous dust and foreign matter.
Accompanying drawing explanation
Fig. 1 is the structural representation according to the business collecting unit in the substrate of the embodiment of the present invention;
Fig. 2 is the method for preparing substrate flow chart according to the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtains under the prerequisite not making creative work, all belongs to the scope of protection of the invention.
The embodiment of the present invention is easy to by dust and other foreign matters from being blocked sound collection effect generation considerable influence mainly for solving in prior art the mode that independently arranges microphone along with the development of littleization that become.In the embodiment of the present invention, microphone (parts for sound collection) can be arranged in the various substrate or device with underlay substrate, such as, in the display devices such as Thin Film Transistor-LCD TFT-LCD, or TouchGlass or touch device.
Understand with convenient for convenience of description, please also refer to Fig. 1, Fig. 1 is the structural representation according to the sound collection unit in the substrate of the embodiment of the present invention.
Embodiments provide a kind of substrate, this substrate comprises at least one sound collection unit, described sound collection unit comprises: be arranged on the back electrode 2 on the underlay substrate 1 of described substrate, the support component 3 be arranged on described back electrode, with the pressure-sensing film 4 be arranged on described support component, described pressure-sensing film 4 forms an electric capacity with described back electrode 2; And, the first signal transmssion line 5 be connected with described back electrode 2, and the secondary signal transmission line 6 be connected with described pressure-sensing film 4.
Because described back electrode 2 and described pressure-sensing film 4 can carry electric charge, therefore support component 3 is used described back electrode 2 and described pressure-sensing film 4 to be kept apart, make that there is certain interval therebetween and just can form a capacitance structure, and described pressure-sensing film 4 is once the vibrations receiving sound wave will produce distortion, thus cause the distance between described back electrode 2 and described pressure-sensing film 4 to change, thus cause the electric capacity be made up of the two to change, and then by the variable quantity of described first signal transmssion line 5 and/or secondary signal transmission line 6 output voltage signal.
In embodiments of the present invention, described support component 3 can be at least two elastomeric support column or, also can be the resiliency supported circle of toroidal.Certainly, choosing of these shapes is just more common, the embodiment of the present invention does not carry out any restriction to the shape of support component 3, in actual applications, the shape of holding components 3 can design according to process requirements, also will accomplish consistent with the shape of described pressure-sensing film and the design shape of back electrode simultaneously.
Such as support component 3 is two elastomeric support column (please refer to Fig. 1), as long as these two elastomeric support column are designed to support described pressure-sensing film 4, certainly in order to increase the stability of support, can by larger for the area design in upper cross section of these two support columns and lower support cross section.
Further, support component 3 can be multiple elastomeric support column, and the mode of its arrangement only needs to carry out arranging according to the edge shape of described back electrode 2 and described pressure-sensing film 4.
Such as support component 3 is resiliency supported circles of toroidal, this situation compares and is common in current microphone design scheme, can also be the resiliency supported circle of Else Rule or irregular shape, such as square, triangle, oval or even trapezoidally all can realize.
In actual applications, above-mentioned support component 3 can be the material of the PS support column be similar in TFT-LCD between TFT and CFGlass.
In embodiments of the present invention, the height of described support component 3 (such as, described elastomeric support column or described resiliency supported circle) can be 1 ~ 10 micron.Such designing requirement is to not impact the manufacture craft of common display base plate or common touch substrate, to mate the thickness of common substrate.Certainly, if can mate with other substrate, any restriction is not carried out to the height of described elastomeric support column or described resiliency supported circle in actual applications.
In the present embodiment, described substrate is display base plate or touches substrate.Such as, display base plate can be array base palte, also can be color membrane substrates, also can be the common touch substrates such as TouchPanel.
Such as, when described substrate is display base plate:
(1) described sound collection unit can be arranged on the non-display area of described display base plate, and the material that described back electrode 2 adopts is transparent conductive material or nontransparent electric conducting material.
In actual applications, if sound collection unit is arranged on non-display area, for user operation or viewing display base plate form display unit time impact be smaller, more can not produce the picture of viewing area display and block, therefore many requirements can not be had very much to the Material selec-tion of back electrode in this case, as long as a conductive layer can be gone into as back electrode, thus just passable as a battery lead plate of above-mentioned capacitance structure.
The metal materials such as Cu, Al (nontransparent electric conducting material) such as can be used as the formation material of described back electrode 2, the materials (transparent conductive material) such as tin indium oxide (ITO) electro-conductive glass film more can be used as the formation material of described back electrode 2.In practical application, by pecvd process, ITO is deposited on glass substrate (underlay substrate).
(2) described sound collection unit can also be arranged on the viewing area of described display base plate, and the material that described back electrode 2 and described pressure-sensing film 4 adopt is transparent conductive material.
In actual applications, if sound collection unit is arranged on viewing area, in order to not impact the display unit that user operation or viewing display base plate are formed, need to use transparent conductive material to form described back electrode 2 and described pressure-sensing film 4.
Such as, the materials (transparent conductive material) such as tin indium oxide (ITO) electro-conductive glass film can be used as the formation material of described back electrode 2, the material such as silicon or perfluoroethylene-propylene can be used as the material of described pressure-sensing film 4, for sensing size and the frequency of sound wave.
Present invention also offers a kind of display unit (no longer in conjunction with the accompanying drawings).This display unit can comprise: aforesaid substrate, and covers the cover plate be arranged on aforesaid substrate, and the position described cover plate corresponding to described sound collection unit is provided with at least one opening.Because aforesaid substrate can be array base palte or color membrane substrates; therefore display floater is formed for one by array base palte and color membrane substrates; when making display unit; need for this display floater arranges the cover plate that is played protection and/or touch sensitive operation effect; the touch-screen of such as mobile phone, the outer protection screen etc. of LCD TV.
In actual applications, described cover plate etching can be formed the small array opening of some shape completely, design can make opening enough little, to avoid the impact on substrate so certainly.
In the present embodiment, described display unit also comprises: sound processing unit, for being connected with described first signal transmssion line and described secondary signal transmission line, and receive the voltage signal of described first signal transmssion line and described secondary signal transmission line, to process described voltage signal.
Present invention also offers a kind of manufacture method of substrate.Fig. 2 is the method for preparing substrate flow chart according to the embodiment of the present invention, and as shown in Figure 2, this flow process comprises the following steps (step S202-step S208):
Step S202, provide a underlay substrate;
Step S204, on described underlay substrate, form a back electrode, and the first signal transmssion line of connection with described back electrode;
Step S206, a support component is set on described back electrode;
Step S208, a pressure-sensing film is set on described support component, and the secondary signal transmission line be connected with described pressure-sensing film, described pressure-sensing film and described back electrode form an electric capacity.
The embodiment of the present invention, can microphone function be integrated on TFT-LCD or TouchGlass, the mode of multiple sound collection unit composition sound collection matrix specifically can be set, the electric capacity between pressure-sensing film and ITO back electrode is changed with the deformation of pressure-sensing film, thus the voltage of output is changed, by amplifying circuit, acoustical signal is converted into the signal of telecommunication again and reaches sound collecting, thus can mobile phone be simplified, the internal structure of the intelligent terminals such as panel computer, make it more lightening, sound collection list can be avoided again to be subject to the impact of extraneous dust and foreign matter.
The above is the preferred embodiment of the present invention; it should be pointed out that for the person of ordinary skill of the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered to be encompassed within protection scope of the present invention.

Claims (10)

1. a substrate, is characterized in that, comprises at least one sound collection unit, and described sound collection unit comprises:
Be arranged on the back electrode on the underlay substrate of described substrate, the support component be arranged on described back electrode, with the pressure-sensing film be arranged on described support component, described pressure-sensing film and described back electrode form an electric capacity; And, the first signal transmssion line be connected with described back electrode, and the secondary signal transmission line be connected with described pressure-sensing film.
2. substrate according to claim 1, is characterized in that, described support component comprises the resiliency supported circle of at least two elastomeric support column or toroidal.
3. substrate according to claim 1, is characterized in that, the height of described support component is 1 ~ 10 micron.
4. substrate according to claim 1, is characterized in that, described substrate is display base plate or touches substrate.
5. substrate according to claim 4, is characterized in that, when described substrate is display base plate, described sound collection unit is arranged on the non-display area of described display base plate, and the material that described back electrode adopts is transparent conductive material or nontransparent electric conducting material.
6. substrate according to claim 4, is characterized in that, when described substrate is display base plate, described sound collection unit is arranged on the viewing area of described display base plate, and the material that described back electrode and described pressure-sensing film adopt is transparent conductive material.
7. the substrate according to any one of claim 4 to 6, is characterized in that, described display base plate comprises: array base palte or color membrane substrates.
8. a display unit, is characterized in that, comprising: the substrate according to any one of claim 1 to 7, and covers the cover plate arranged on the substrate, and the position described cover plate corresponding to described sound collection unit is provided with at least one opening.
9. display unit according to claim 8, is characterized in that, also comprises:
Sound processing unit, for being connected with described first signal transmssion line and described secondary signal transmission line, and receives the voltage signal of described first signal transmssion line and described secondary signal transmission line, to process described voltage signal.
10. a manufacture method for substrate, is characterized in that, comprising:
One underlay substrate is provided;
Described underlay substrate is formed a back electrode, and the first signal transmssion line of connection with described back electrode;
Described back electrode arranges a support component;
Described support component arranges a pressure-sensing film, and the secondary signal transmission line be connected with described pressure-sensing film, described pressure-sensing film and described back electrode form an electric capacity.
CN201510434522.7A 2015-07-21 2015-07-21 Substrate and manufacturing method thereof and display device Pending CN105142092A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
CN105142092A true CN105142092A (en) 2015-12-09

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109445640A (en) * 2018-12-18 2019-03-08 昆山龙腾光电有限公司 Display screen and electronic equipment with the display screen
CN110267172A (en) * 2019-06-28 2019-09-20 Oppo广东移动通信有限公司 Sounding device, display device and terminal
CN113223432A (en) * 2020-01-21 2021-08-06 京东方科技集团股份有限公司 Display panel and display device

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US20030094047A1 (en) * 2000-03-21 2003-05-22 Altti Torkkeli Method of manufacturing a membrane sensor
CN2870067Y (en) * 2005-09-19 2007-02-14 陈东红 Multifunction combined display
CN101022685A (en) * 2007-03-23 2007-08-22 胡维 Condenser miniature silicon microphone and preparative method
CN101534466A (en) * 2009-04-15 2009-09-16 无锡市纳微电子有限公司 Silicon microphone chip and manufacture method thereof
CN102056061A (en) * 2009-10-29 2011-05-11 苏州敏芯微电子技术有限公司 Capacitive miniature silicon microphone and manufacturing method thereof
CN102118930A (en) * 2010-01-04 2011-07-06 Lg电子株式会社 Mobile terminal
JP4944494B2 (en) * 2006-05-22 2012-05-30 日本放送協会 Capacitive sensor

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Publication number Priority date Publication date Assignee Title
JPS4944494B1 (en) * 1966-02-14 1974-11-28
US20030094047A1 (en) * 2000-03-21 2003-05-22 Altti Torkkeli Method of manufacturing a membrane sensor
CN2870067Y (en) * 2005-09-19 2007-02-14 陈东红 Multifunction combined display
JP4944494B2 (en) * 2006-05-22 2012-05-30 日本放送協会 Capacitive sensor
CN101022685A (en) * 2007-03-23 2007-08-22 胡维 Condenser miniature silicon microphone and preparative method
CN101534466A (en) * 2009-04-15 2009-09-16 无锡市纳微电子有限公司 Silicon microphone chip and manufacture method thereof
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109445640A (en) * 2018-12-18 2019-03-08 昆山龙腾光电有限公司 Display screen and electronic equipment with the display screen
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CN113223432B (en) * 2020-01-21 2023-09-29 京东方科技集团股份有限公司 Display panel and display device

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Application publication date: 20151209