CN105136858A - Optical non-destructive inspection method and optical non-destructive inspection apparatus - Google Patents

Optical non-destructive inspection method and optical non-destructive inspection apparatus Download PDF

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Publication number
CN105136858A
CN105136858A CN201510300277.0A CN201510300277A CN105136858A CN 105136858 A CN105136858 A CN 105136858A CN 201510300277 A CN201510300277 A CN 201510300277A CN 105136858 A CN105136858 A CN 105136858A
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CN
China
Prior art keywords
pressure welding
heating
welding portion
workpiece
measuring point
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CN201510300277.0A
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Inventor
松本直树
松本顺
吉田航也
濑尾良太郎
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JTEKT Corp
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JTEKT Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0896Optical arrangements using a light source, e.g. for illuminating a surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/005Soldering by means of radiant energy
    • B23K1/0056Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0806Focusing or collimating elements, e.g. lenses or concave mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/66Testing of connections, e.g. of plugs or non-disconnectable joints
    • G01R31/70Testing of connections between components and printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10431Details of mounted components
    • H05K2201/1059Connections made by press-fit insertion
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107Using laser light
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16Inspection; Monitoring; Aligning
    • H05K2203/162Testing a finished product, e.g. heat cycle testing of solder joints
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/306Lead-in-hole components, e.g. affixing or retention before soldering, spacing means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

An optical non-destructive inspection method includes: heating including setting a measurement spot (SP) on a surface of a workpiece and irradiating the measurement spot with heating laser light using a heating laser light source (21), heat ray detectors (31, 32), and a controller (50); acquiring a temperature rise property that is a temperature rise state of the measurement spot according to a heating time by detecting a heat ray radiated from the measurement spot to determine a temperature at the measurement spot; and determining whether or not a pressure contact state at pressure contact portions (91B, 92B), which include a contact area and a contact pressure, is appropriate based on the temperature rise property.

Description

Optics non-destructive detection method and optics non-destructive testing apparatus
Quoting on June 5th, 2014 at this is the full content comprising instructions, accompanying drawing and summary disclosed in the Japanese publication of 2014-116848 at the application number that Japan submits to.
Technical field
The present invention relates to optics non-destructive detection method and optics non-destructive testing apparatus that the pressure welding state at the place of pressure welding portion not being 2 workpiece combined by welding but by pressure welding is judged.
Background technology
In recent years, have developed the control module that vary in size corresponding with the purposes of automobile, household appliances etc.In this control module, use various electronic circuit board, be assembled with various contacts etc. at this electronic circuit board.Such as shown in Figure 1, there is following situation: be formed with the through hole 91 with Copper Foil, zinc-plated etc. inwall 91B at substrate 90, in this through hole 91, be pressed into the press-fit pin 92 as contact.In this case, the inwall 91B (pressure welding portion) of through hole 91 is Copper Foil, the conductive component such as zinc-plated, and the elastic deformation portion 92B (pressure welding portion) of press-fit pin 92 is also conductive component.And the external diameter of the elastic deformation portion 92B of press-fit pin 92 is set to slightly larger than the internal diameter of inwall 91B.For the elastic deformation portion 92B of press-fit pin 92, if be inserted into through hole 91, deform thus external diameter undergauge, become pressure welding state by flexible recuperability relative to the inwall 91B of through hole 91.The contact area in the pressure welding portion under this pressure welding state and contact affect the conductance at this place of pressure welding portion.When the elastic deformation portion 92B of such as press-fit pin 92 become abnormal deformation state thus the situation minimum with the contact area of the inwall 91B of through hole 91 or contact extremely low, there is conductance and decline thus the situation of the poor flow of desired conductance cannot be guaranteed.In addition, when press-fit pin 92 is inserted through hole 91, the inwall 91B that also there is through hole 91 is by shaving thus cannot guarantee the situation of desired conductance.So, disclose various method and various device that insert state and the pressure welding state of the press-fit pin 92 inserted in through hole 91 are checked.
Such as in Jap.P. No. 5175681 publication, describe a kind of insert state testing fixture of press-fit pin, in the apparatus, in the part of press-fit pin and the inspection hole formed from position that substrate is given prominence to when being inserted into the patchhole of substrate as through hole, before inserting press-fit pin to the patchhole of substrate and after inserting press-fit pin to the patchhole of substrate, the position detecting inspection hole judges the whether good of insert state.In addition, when detecting, from illuminating part, light is irradiated to press-fit pin, make a video recording to through image or reflected image, thus check the insert state of press-fit pin according to the position of the position of the inspection hole in the image that obtains of making a video recording before inserting and the inspection hole in inserting the image of making a video recording afterwards and obtaining.
In addition, in Japanese Unexamined Patent Publication 2010-86868 publication, describe a kind of engagement state testing fixture of press-fit pin, in the apparatus, the oscillator of ultrasonic oscillator will be abutted to the front end of the press-fit pin inserted in the hole being inserted into substrate, and receive from the reflection wave of the front end of this press-fit pin reflection wave receiver with receive from to be positioned at relative to patchhole with the opposition side, front end of press-fit pin and the propagation wave receiver of the propagation wave of the pressure welding electric conductor (being inserted into the pad of the through hole of press-fit pin) that has the patchhole of press-fit pin to be connected connects.In addition, in inspection, whether good the comparison of baseline reflectance waveform when by carrying out the press-fit pin being in good engagement state and at least one party of benchmark propagation wave waveform, judge.
In the invention described in Jap.P. No. 5175681 publication, although the insert state of the press-fit pin that can be inserted to the patchhole of substrate by spectral discrimination, but the pressure welding state of press-fit pin and patchhole cannot be checked, therefore there is the possibility cannot carrying out the inspection of the electric conducting state as original object.Even if press-fit pin is inserted into correct position, due to the shaving state etc. of the deformation state at place of pressure welding portion of press-fit pin, the inwall of the inserting hole of substrate, likely electric conducting state is not desired conducting state.
In addition, in the invention described in Japanese Unexamined Patent Publication 2010-86868 publication, although the pressure welding state of press-fit pin and patchhole can be checked, but in order to check, must near the front end of press-fit pin, press-fit pin, the pin etc. of the oscillator of ultrasonic oscillator, reception propagation wave is fixed on desired position with desired state, therefore checks and be not easy.
Summary of the invention
An object of the present invention is, provide a kind of can more easily, shorter time, the optics non-destructive detection method more suitably checking the pressure welding state at place of pressure welding portion and optics non-destructive testing apparatus.
The optics non-destructive detection method of a mode of the present invention judges the pressure welding state at place of pressure welding portion, above-mentioned pressure welding portion is the pressure welding portion of 2 workpiece combined not by welding but by pressure welding, and above-mentioned pressure welding portion is the pressure welding portion that the above-mentioned pressure welding portion of side's workpiece and the above-mentioned pressure welding portion of the opposing party's workpiece are made up of conductive component mutually.
In above-mentioned optics non-destructive detection method, the surface of the side's workpiece near above-mentioned pressure welding portion and be the surface set measuring point of the conductive component comprising above-mentioned pressure welding portion, the heating LASER Light Source utilizing the heating laser of injection regulation optical maser wavelength, at least 1 hot line detecting device that can detect hot line and control above-mentioned heating LASER Light Source and import the controller from the detection signal of above-mentioned hot line detecting device.Above-mentioned optics non-destructive detection method comprises: heating steps, in this heating steps, by above-mentioned controller, above-mentioned heating LASER Light Source is controlled, above-mentioned heating laser after being adjusted to the heat heated with not destroying above-mentioned workpiece is irradiated to above-mentioned measuring point, thus above-mentioned measuring point is heated; Temperature rising characteristic obtains step, obtain in step in this temperature rising characteristic, while carry out the heating in above-mentioned heating steps, while utilize above-mentioned hot line detecting device the hot line radiated from above-mentioned measuring point to be detected to the temperature obtaining above-mentioned measuring point by above-mentioned controller, and obtain temperature propradation that is the temperature rising characteristic of the above-mentioned measuring point corresponding with the heat time; And determination step, in this determination step, based on the hot spot of impact that is the said temperature rising characteristic of above-mentioned measuring point that are subject to amount of thermal conduction, what judged the place of above-mentioned pressure welding portion of above-mentioned 2 workpiece by above-mentioned controller comprises the whether good of the pressure welding state of contact area and contact.
According to aforesaid way, such as 2 workpiece are press-fit pin and through hole, press-fit pin is being inserted to through hole, and not under the state being combined with press-fit pin (conductive component) by welding but by pressure welding to the inwall (conductive component) of through hole, at the setting measurement position, front end of press-fit pin, heating laser is irradiated to this measuring point, and obtains temperature rising characteristic, suitably can judge the presence or absence of the contact area at place of pressure welding portion and the exception of contact thus.In addition, due to temperature rising characteristic can be obtained in a non-contact manner, therefore, it is possible to judge more easily to 2 workpiece.In addition, by using the heating laser of suitable output, desired temperature rising characteristic can be obtained with the very short time.That is, can more easily, shorter time, more suitably check whether it is desired electric conducting state (pressure welding state).
In the optics non-destructive detection method of aforesaid way, also can: at least one party in the above-mentioned pressure welding portion of above-mentioned 2 workpiece, is electroplate with fusing point than the respective low-melting alloy of the conductive component in the above-mentioned pressure welding portion of above-mentioned 2 workpiece or metal; In above-mentioned heating steps, by above-mentioned controller, above-mentioned heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying above-mentioned workpiece heating and be that the above-mentioned heating laser of the output after the heat of the fusing point being less than above-mentioned plating irradiates to above-mentioned measuring point; Also comprise welding step, in this welding step, when being judged to be non-defective unit in above-mentioned determination step, the output of above-mentioned heating LASER Light Source is risen to be adjusted to be the heat that carries out with not destroying above-mentioned workpiece heating by above-mentioned controller and be the output after the heat of more than the fusing point of above-mentioned plating that is new heating laser, then irradiate new heating laser with the stipulated time to above-mentioned measuring point, make above-mentioned plating molten make above-mentioned 2 workpiece weldings at place of above-mentioned pressure welding portion thus.
According to aforesaid way, confirming not to be after 2 workpiece combined by welding but by pressure welding are desired pressure welding state, can by welding step suitably and easily welding is carried out to pressure welding portion.In addition, melting is carried out to the trickle whisker based on plating shaving portion, tin etc., the pressure welding state (electric conducting state) that reliability is higher can be obtained.
In the optics non-destructive detection method of aforesaid way, also can be configured to, at least one party in the above-mentioned pressure welding portion of above-mentioned 2 workpiece, be electroplate with fusing point than the respective low-melting alloy of the conductive component in the above-mentioned pressure welding portion of above-mentioned 2 workpiece or metal, in above-mentioned heating steps, by above-mentioned controller, above-mentioned heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying above-mentioned workpiece heating and be that the above-mentioned heating laser of the output after the heat of more than the fusing point of above-mentioned plating irradiates to above-mentioned measuring point.
According to aforesaid way, owing to can carry out heating steps and welding step simultaneously, therefore, it is possible to carry out the inspection of pressure welding state with shorter time.
In the optics non-destructive detection method of aforesaid way, also can be configured to, in above-mentioned determination step, utilize above-mentioned controller, when from irradiate the start time of above-mentioned heating laser to above-mentioned measuring point to become the propradation of temperature relative with the process of time in said temperature rising characteristic be do not converge on time the thermal equilibrium state of below regulation propradation preset between the 1st baseline threshold and the 2nd baseline threshold, be judged to be to be above-mentioned contact area beyond the defective products of the scope of the area of desired size or the above-mentioned contact defective products beyond the scope of desired pressure.
According to aforesaid way, by judging based on the time to the thermal equilibrium state become in temperature rising characteristic, contact area or the contact situation beyond the scope of desired area or the scope of desired pressure suitably can be judged.
As the optics non-destructive testing apparatus of another way of the present invention, for performing the optics non-destructive detection method of aforesaid way, above-mentioned optics non-destructive testing apparatus possesses: above-mentioned heating LASER Light Source; Optically focused collimating apparatus, its make the directional light along optical axis from side incidence towards be set as focal position above-mentioned measuring point optically focused and from opposite side injection, and make from the radiation of above-mentioned measuring point and reflection and from the light of opposite side incidence convert to along optical axis directional light that is measure light and penetrate from side; Laser lightguide is used in heating, and it converts above-mentioned heating laser to directional light and the side of the above-mentioned optically focused collimating apparatus that leads; At least 1 above-mentioned hot line detecting device; Hot line lightguide, it will be the hot line that comprises of above-mentioned measurement light and is that the hot line corresponding with the heat of radiating from above-mentioned measuring point leads above-mentioned hot line detecting device; And above-mentioned controller.
Accompanying drawing explanation
About above-mentioned and further feature of the present invention and advantage, be able to clear and definite in the explanation by reference to the accompanying drawings specific embodiment carried out that will be described below, wherein, give same tag for identical element, wherein,
Fig. 1 illustrates the stereographic map of example using the outward appearance as each workpiece before 2 workpiece (press-fit pin and through hole) of measuring object thing combine.
Fig. 2 is the II-II sectional view in FIG when through hole inserts press-fit pin.
Fig. 3 is the enlarged drawing in III portion in Fig. 2, be illustrate the position of measuring point and hot line (infrared ray) radiation, from measuring point to the figure of the state of pressure welding portion heat by conduction etc.
Fig. 4 is the figure of the example of the formation that optics non-destructive testing apparatus is described.
Fig. 5 is the process flow diagram of the example of the treatment step that optics non-destructive detection method is described.
Fig. 6 is the figure of the relation that Infrared wavelength and infrared energy and temperature are described.
Fig. 7 is the figure of the relation of the ratio (2 wavelength ratio) of the ultrared energy that temperature and 2 different wavelength are described.
Fig. 8 is the figure of the example that the temperature rising characteristic measured is described.
Fig. 9 illustrates temperature rising characteristic to carry out compressing and the figure of normalized standardized temperature rising characteristic to temperature direction.
Figure 10 illustrates temperature rising characteristic to expand and the figure of normalized standardized temperature rising characteristic to temperature direction.
Figure 11 is the figure of the example representing the state after by standardization ideal temperature rising characteristic, standardization lower limit temperature rising characteristic and standardization ceiling temperature rising characteristic overlap.
Figure 12 illustrates information displaying relevant for the result of determination of the pressure welding state to measuring object thing in the figure of the example of display.
Embodiment
Accompanying drawing is below utilized to be described for implementing mode of the present invention.
The example of Fig. 1 to measuring object thing is utilized to be described.Fig. 1 represents the example as the through hole 91 being formed at substrate 90 of measuring object thing and the outward appearance of press-fit pin 92.In description of the present embodiment, this through hole 91 and press-fit pin 92 are equivalent to 2 workpiece as measuring object thing.Further, through hole 91 has relative to the through hole being formed at substrate 90 is the inwall 91B of the inner wall section of through hole and is arranged at the pad 91A of marginal portion of through hole.In addition, the surface that pad 91A is arranged at substrate 90 is with the back side and be connected with inwall 91B, such as by wiring printed on substrate and other the electronic unit on substrate 90 install with pad etc. be connected.In addition, inwall 91B, pad 91A are formed by conductive component (such as Copper Foil, zinc-plated etc.).In addition, in the present embodiment, inwall 91B is equivalent to the pressure welding portion of through hole 91.
Press-fit pin 92 is formed by conductive component, has leading section 92A, elastic deformation portion 92B and base portion 92C etc.The width of elastic deformation portion 92B is set to slightly larger than the internal diameter of the inwall 91B of through hole 91, if be inserted through to through hole 91 from the leading section 92A of press-fit pin 92 to elastic deformation portion 92B, then there is elastic deformation in elastic deformation portion 92B, by the recuperability pressure welding of elastic deformation in inwall 91B.Thus, press-fit pin 92 is not combined with through hole 91 (with reference to Fig. 2, Fig. 3) with the state of pressure welding with not being fused.In addition, in the present embodiment, elastic deformation portion 92B is equivalent to the pressure welding portion of press-fit pin 92.
In the pressure welding portion (inwall 91B) relative to through hole 91, when the pressure welding portion (elastic deformation portion 92B) of press-fit pin 92 is not applicable pressure welding state, existence cannot guarantee desired electric conducting state, thus becomes the situation of poor flow.Such as be abnormal shape thus the abnormal little situation of contact in the abnormal little situation of the contact area in pressure welding portion, pressure welding portion, the inwall 91B situation that is elastically deformed portion 92B significantly shaving is inferior at press-fit pin 92 in inwall 91B internal strain, exist and the situation that resistance becomes abnormal high poor flow occurs.
When whether the pressure welding state of the judgement inwall 91B of the through hole 91 and elastic deformation portion 92B of press-fit pin 92 is desired state (desired contact area and desired contacts), can be judged by the transmit mode of heat.Such as in figure 3, become the side's workpiece near pressure welding portion surface and comprise the surface of the conductive component in pressure welding portion, setting measurement position, the front end SP of press-fit pin 92.Further, irradiate heating laser to measuring point SP to heat in a non contact fashion measuring point SP.Like this, the temperature of measuring point SP rises gradually, propagates heat from measuring point SP via press-fit pin 92 and inwall 91B.In addition, from comprising the press-fit pin 92 of measuring point SP, through hole 91 radiates the hot line (infrared ray) corresponding with the temperature of rising.And, the temperature of measuring point SP is obtained by the hot line (infrared ray) measuring radiation in a non contact fashion, indirectly can measure the spread state (shown by dashed lines in figure 3) of the heat of releasing via pressure welding portion, thus obtain contact area and the contact in pressure welding portion.
In addition, although the temperature of measuring point SP rises gradually, add the saturation temperature that heat is consistent with thermal discharge if reach, then the rising of temperature stops, even if continue the temperature that heating also becomes constant.Here, when the larger situation of the contact area at place of pressure welding portion, contact are larger, amount of thermal conduction is many, and the increase ratio of therefore corresponding with heat time temperature is comparatively slow, and saturation temperature is lower.In addition, when the less situation of the contact area at place of pressure welding portion, contact are smaller, amount of thermal conduction is few, and the increase ratio of therefore corresponding with heat time temperature is comparatively anxious, and saturation temperature is higher.Therefore, can heating laser be irradiated to measuring point SP thus measure temperature rising characteristic as shown in Figure 8, and based on temperature rising characteristic, judge the contact area at place of pressure welding portion and contact whether in allowed band, thus judge the whether good of pressure welding state.In explanation afterwards, to the example of formation of whether good optics non-destructive testing apparatus and being described in detail of optics non-destructive detection method that can judge above-mentioned pressure welding state.
Fig. 4 shows the example of the formation of optics non-destructive testing apparatus 1.Optics non-destructive testing apparatus 1 shown in Fig. 4 is by optically focused collimating apparatus 10, heating LASER Light Source 21, heating laser aligner 41, heating laser is with selecting reverberator 11A, 1st infrared detector 31 (being equivalent to hot line detecting device), 1st infrared ray is with selecting reverberator 12A, 1st infrared light concentrating device 51, 2nd infrared detector 32 (being equivalent to hot line detecting device), 2nd infrared ray is with selecting reverberator 13A, 2nd infrared light concentrating device 52, the formations such as controller 50 and storer 60.
The directional light incident along the optical axis of self from side (from top the example of Fig. 4) penetrates towards the measuring point SP optically focused be set in as focal position measuring object thing from opposite side (the example of Fig. 4 from below) by optically focused collimating apparatus 10.In addition, optically focused collimating apparatus 10 will be radiated from (as focal position) measuring point SP and reflection measure light L11 from the directional light that is the 1st that the light of opposite side incidence converts to along the optical axis of self and to penetrate from side.Wherein, optically focused collimating apparatus 10 also can by making light transmission and the collector lens of refraction is formed, but owing to processing the light of different multiple wavelength, the collector lens therefore producing aberration is not by preferably.So, by forming optically focused collimating apparatus by (aspheric surface) catoptron 10A, 10B, eliminate the generation of aberration, corresponding with large-scale wavelength band.
Heating LASER Light Source 21 is adjusted to heating laser wavelength (λ heating laser a) that can carry out the output of heating based on the control signal injection carrying out self-controller 50 non-destructive assay object.Such as heating LASER Light Source 21 is semiconductor laser light resources of the blue laser of injection λ=about 450 [nm].Heating laser aligner 41 be configured at heating LASER Light Source 21 vicinity (laser injection position near and be heating laser optical axis on), the heating laser penetrated from heating LASER Light Source 21 is converted to the heating laser La of directional light.Such as only by heating laser wavelength, (λ light a) is converted to directional light to heating laser aligner 41, is therefore collimation lens.In addition, if heating LASER Light Source 21 can penetrate the heating laser of directional light, then heating laser aligner 41 can be omitted.
Heating laser selects reverberator 11A to be configured on the optical axis of optically focused collimating apparatus 10, to penetrate from heating LASER Light Source 21 and be converted into directional light heating laser wavelength (λ heating laser La a) towards a lateral reflection of optically focused collimating apparatus 10, and make from measuring point SP radiate and reflection and penetrate from the side of optically focused collimating apparatus 10 with heating laser wavelength (directional light that is the 2nd of λ a) different wave length measure light L12 through.Such as heating laser select reverberator 11A be to heating laser wavelength (λ light a) reflect and make heating laser wavelength (λ a) beyond the dichroic mirror of light transmission of wavelength.Wherein, using as radiating from measuring point SP and reflection the measurement light of directional light penetrate from the side of optically focused collimating apparatus 10 is called that the 1st measures light L11, by from the 1st measure light L11 taken out the light of heating laser wavelength after remaining measurement light be called the 2nd measurement light L12.And, select reverberator 11A to form heating laser lightguide by heating laser aligner 41 and heating laser, the heating laser penetrated from heating LASER Light Source 21 is converted to directional light and the side of the optically focused collimating apparatus 10 that leads by heating laser lightguide.
1st infrared detector 31 can detect the energy of the infrared ray (hot line) radiated from measuring point SP, and such as the 1st infrared detector 31 is infrared ray sensors.In addition, the detection signal from the 1st infrared detector 31 is imported into controller 50.1st infrared ray selects reverberator 12A be configured at the side injection from optically focused collimating apparatus 10 and select the directional light of reverberator 11A that is the path of the 2nd measurement light L12 (directional light of the wavelength different from heating laser wavelength) (now, being configured on the optical axis of optically focused collimating apparatus 10) through heating laser.And, 1st infrared ray is with selecting reverberator 12A from the side injection of Self-concentration collimating apparatus 10 and measuring light L12 through the heating laser directional light that is the 2nd selecting reverberator 11A, the ultrared directional light L1 of the 1st Infrared wavelength (λ 1) is reflected towards the 1st infrared detector 31, and make the directional light that is the 3rd of the wavelength different from the 1st Infrared wavelength (λ 1) measure light L13 through.
Therefore, the 1st infrared detector 31 only detects the ultrared energy of the 1st Infrared wavelength (λ 1).Such as the 1st infrared ray selection reverberator 12A is the light of reflection the 1st Infrared wavelength (λ 1), and makes the dichroic mirror of the light transmission of the wavelength beyond the 1st Infrared wavelength (λ 1).In addition, 1st infrared light concentrating device 51 is configured at the vicinity (detecting the vicinity of position) of the 1st infrared detector 31, will the infrared ray of the directional light L1 of the 1st Infrared wavelength (λ 1) selecting reverberator 12A to reflect be used towards the 1st infrared detector 31 optically focused by the 1st infrared ray.Such as the 1st infrared light concentrating device 51 is only to the light optically focused of the 1st Infrared wavelength (λ 1), is therefore collector lens.And, reverberator 11A, the 1st infrared ray selection reverberator 12A and the 1st infrared light concentrating device 51 is selected to form the 1st infra-red-emitting lightguide (being equivalent to hot line lightguide) by heating laser, 1st infra-red-emitting lightguide radiates from measurement position SP and the directional light that is the 2nd penetrated from the side of optically focused collimating apparatus 10 is measured light L12, by the infrared ray of the 1st Infrared wavelength (λ 1) guiding the 1st infrared detector 31.
2nd infrared detector 32 can detect the energy of the infrared ray (hot line) radiated from measuring point SP, and such as the 2nd infrared detector 32 is infrared ray sensors.In addition, the detection signal from the 2nd infrared detector 32 is imported into controller 50.2nd infrared ray is selected reverberator 13A to be configured at side injection from optically focused collimating apparatus 10 and is selected through heating laser the path of the directional light of reverberator 11A and the 1st infrared ray selection reverberator 12A that is the 3rd measurement light L13 (with the directional light of heating laser wavelength and the 1st Infrared wavelength different wave length) (now, being configured on the optical axis of optically focused collimating apparatus 10).And, 2nd infrared ray is with selecting reverberator 13A from the side injection of Self-concentration collimating apparatus 10 and measuring light L13 through heating laser with selecting reverberator 11A and the 1st infrared ray directional light that is the 3rd selecting reverberator 12A, the ultrared directional light L2 of the 2nd Infrared wavelength (λ 2) is reflected towards the 2nd infrared detector 32, and make to measure with the directional light that is the 4th of the 2nd Infrared wavelength (λ 2) different wave length light L14 through.In addition, due to do not need as through directional light the 4th measure light L14, therefore such as by absorptions such as absorber of light.
Therefore, the 2nd infrared detector 32 only detects the ultrared energy of the 2nd Infrared wavelength (λ 2).Such as the 2nd infrared ray selection reverberator 13A is the light of reflection the 2nd Infrared wavelength (λ 2), and makes the dichroic mirror of the light transmission of the wavelength beyond the 2nd Infrared wavelength (λ 2).In addition, 2nd infrared light concentrating device 52 is configured at the vicinity (detecting the vicinity of position) of the 2nd infrared detector 32, will the infrared ray of the directional light L2 of the 2nd Infrared wavelength (λ 2) selecting reverberator 13A to reflect be used towards the 2nd infrared detector 32 optically focused by the 2nd infrared ray.Such as the 2nd infrared light concentrating device 52 only carries out optically focused to the light of the 2nd Infrared wavelength (λ 2), is therefore collector lens.And, reverberator 11A, the 1st infrared ray selection reverberator 12A, the 2nd infrared ray is selected to select reverberator 13A and the 2nd infrared light concentrating device 52 to form the 2nd infra-red-emitting lightguide (being equivalent to hot line lightguide) by heating laser, 2nd infra-red-emitting lightguide radiates from measurement position SP and measures light L12 from the directional light that is the 2nd of optically focused collimating apparatus 10 side injection, by the infrared ray of the 2nd Infrared wavelength (λ 2) guiding the 2nd infrared detector 32.
Controller 50 is personal computers etc., measuring point SP is heated while control heating LASER Light Source 21 with heating laser, while import from the detection signal of the 1st infrared detector 31 and the detection signal from the 2nd infrared detector 32, and measure the temperature of measuring point SP based on detected value and the ratio of the detected value from the 2nd infrared detector 32 from the 1st infrared detector 31.In addition, aftermentioned to the measuring method of temperature.Further, controller 50 measures temperature propradation that is the temperature rising characteristic of the measuring point corresponding with the heat time, judges the pressure welding state of measuring object thing based on the temperature rising characteristic measured.In addition, being described in detail later to the action of controller 50.
Storer 60 is such as the memory storages such as hard disk, in storer 60, stores the pressure welding state of measuring object thing according to judging and different temperature rising characteristics etc.Such as, the standardization ceiling temperature rising characteristic shown in Figure 11, standardization ideal temperature rising characteristic, standardization lower limit temperature rising characteristic, standardization saturation temperature, the 1st baseline threshold, desirable baseline threshold and the 2nd baseline threshold etc. are stored.In addition, in storer 60, also store E (λ 1)/E (λ 2) characteristic (with reference to Fig. 7) being converted into temperature from the ratio of the ENERGY E (λ 1) of the infrared ray detected (λ 1), (λ 2), E (λ 2) that is E (λ 1)/E (λ 2).
And, by controller 50, measure in use optics non-destructive testing apparatus 1 pair of temperature rising characteristic, and in the temperature rising characteristic measured from heating start time to reach relative to the temperature variation of time variations that is slope be be not converged in time the saturation temperature of below regulation slope preset between the 1st baseline threshold and the 2nd baseline threshold when (the 1st baseline threshold, 2nd baseline threshold is also stored in storer 60), be judged to be that the contact area at the place of pressure welding portion being measuring object thing is beyond the defective products of the scope of the area of desired size or the contact at place of the pressure welding portion defective products beyond the scope of desired pressure.Below, the step of the decision method of the pressure welding state at the place of pressure welding portion of 2 workpiece based on controller 50 is described.
Then use the process flow diagram shown in Fig. 5, the example of the treatment step of the controller 50 of the optics non-destructive testing apparatus 1 shown in Fig. 4 is described.Process shown in Fig. 5 is performed by controller 50 when the inspection of pressure welding state carrying out the inwall 91B shown in Fig. 4 and elastic deformation portion 92B.Below, being described in detail successively to each process of the process flow diagram shown in Fig. 5.
In step slo, controller 50 controls heating LASER Light Source, from heating LASER Light Source injection heating laser, enters step S15.Heating laser is directed to measuring point, is directed to the 1st infrared detector and the 2nd infrared detector from the infrared ray of measuring point radiation.In addition, the output of heating laser is adjusted to the heat becoming and carry out with not destroying workpiece heating in advance.Step S10 is equivalent to be controlled heating LASER Light Source by controller, irradiates the heating laser after being adjusted to the heat carrying out with not destroying workpiece heating thus the heating steps heated measuring point to the measuring point be set on measuring object thing.
In step S15, controller 50 import the energy of the infrared ray (hot line) of the 1st Infrared wavelength (λ 1) based on the detection signal from the 1st infrared detector detected value, based on the detected value of energy of the infrared ray (hot line) of the 2nd Infrared wavelength (λ 2) of the detection signal from the 2nd infrared detector and the time (heat time) in step slo from starting the irradiation of heating laser, enter step S20.Then, in step S20, controller 50, based on from the detected value of the 1st infrared detector and the ratio of the detected value from the 2nd infrared detector, is obtained the temperature of the measuring point corresponding with the heat time, is entered step S25.Then, in step s 25, controller 50 determines whether and measures end time point.Controller 50, when the temperature being judged to obtain reaches saturation temperature, is judged to be it is measure end time point.Such as controller 50, when this temperature obtained in step S20 is in the temperature propradation of below setting relative to the previous temperature obtained in step S20, is judged to reach saturation temperature.In addition, saturation temperature is the situation of slope below setting of the temperature rising characteristic shown in Fig. 8, and is the temperature of the thermal equilibrium state of temperature constant.Controller 50 when be judged to reach saturation temperature (becoming thermal equilibrium state) from but measure end time point ("Yes") enter step S30, when being judged to be it is not that when measuring end time point, ("No") is back to step S15.In addition, when returning step S15, if owing to returning after wait stipulated time (such as about 1ms), then temperature can be obtained with specific time interval, therefore be more preferably again.In addition, step S15 ~ S25 is equivalent to the heating being carried out heating steps by controller, while utilize the 1st, the 2nd infrared detector to detect the temperature obtaining measuring point from the infrared ray (hot line) of measuring point radiation by controller, and the temperature rising characteristic of the temperature propradation that is temperature rising characteristic that obtain the measuring point corresponding with the heat time obtains step.In addition, for obtain in step S20 measuring point temperature step and to obtain the step of temperature rising characteristic aftermentioned.Then, when entering step S30, controller 50 controls heating LASER Light Source, stops the irradiation of heating laser, and enters step S35.
In step s 35, controller 50 obtain based in the temperature obtained in step S15 ~ S25 and the temperature rising characteristic of heat time (Fig. 8) from the time of heating start time to the temperature that reaches capacity (relative to the temperature variation of time variations that is slope the temperature below regulation slope), judge the whether good of the pressure welding state at place of pressure welding portion, enter step S40.In addition, step S35 is equivalent to the temperature rising characteristic of hot spot based on the impact being subject to amount of thermal conduction that is measuring point, is judged the whether good determination step comprising the pressure welding state of contact area and contact in the pressure welding portion of 2 workpiece by controller.In addition, whether good the step judged for the pressure welding state of carrying out in step S35 be aftermentioned.
Then, in step s 40, the information displaying relevant to the result of determination step (step S35) ends process in display by controller 50.In addition, display for showing the picture based on the output signal carrying out self-controller, such as, is liquid crystal display.In addition, the example for the display of picture is aftermentioned.
Then, the step of the temperature obtaining measuring point is described in detail in step S20.Such as Fig. 6 illustrates that representing in the temperature of the black matrix absorbed completely by the light of irradiation and radiate is each temperature (M1, M2 ... M6) when, from the ultrared wavelength (transverse axis) of blackbody radiation and the example of the infrared emission characteristic of the relation of the ultrared energy (longitudinal axis) of each wavelength.Such as be assumed to be the situation that measuring point is black matrix, and the position of the 1st Infrared wavelength (λ 1) is the position of (λ 1) shown in Fig. 6, the position of the 2nd Infrared wavelength (λ 2) is the position of (λ 2) shown in Fig. 6.
And, the detected value of the infrared energy of the 1st Infrared wavelength (λ 1) detected by the 1st infrared detector that controller 50 imports at the time point of heat time T1 is E1A, when the detected value of the infrared energy of the 2nd Infrared wavelength (λ 2) detected by the 2nd infrared detector is E2A (with reference to Fig. 6), according to the ratio of detected value that is " E (λ 1)/E (λ 2) " characteristic of E1A/E2A and temperature-2 wavelength ratio characteristic (Fig. 7), obtain the temperature of measuring point, obtaining in this case is M5 DEG C.In addition, 2 wavelength ratio are ratios of the ultrared energy of 2 different wavelength.Temperature-2 wavelength ratio characteristic shown in example of Fig. 7 is pre-stored within storer 60 in addition.
Like this, by using the ratio of detected value, controller can not obtain the temperature of measuring point accurately by the impact of the reflectivity of measuring point (emissivity).In addition, when the heat time T2, T3, T4 the value (infrared energy of the 1st Infrared wavelength, the infrared energy of the 2nd Infrared wavelength) that obtains of time point be (E1B, E2B), (E1C, E2C), (E1D, E2D) respectively, according to temperature-2 wavelength ratio characteristic, known heat time respective temperature of time point of T2, T3, T4 is M4, M3, M2.Further, controller, according to irradiating the time (being equivalent to the heat time) after starting and the temperature corresponding with this time, obtains the temperature rising characteristic shown in example of Fig. 8.
Although the difference having described the difference of the size of the contact area due to place of pressure welding portion or the size of contact causes amount of thermal conduction to change, therefore the situation that saturation temperature is different, but judge the whether good of pressure welding state under the state that saturation temperature is different in respective measuring object thing, not preferably.So, as will be explained below, to make the mode that the saturation temperature of each measuring object thing is identical, by the temperature rising characteristic standardization of measuring, get rid of the difference of saturation temperature thus.
In step s 35, controller 50 is to make the mode becoming the standardization saturation temperature preset based on the saturation temperature in the temperature obtained in step S15 ~ S25 and the temperature rising characteristic of heat time (Fig. 8), by carrying out processing at temperature direction in the mode of compression or expansion thus obtain standardized temperature rising characteristic (in addition, time-axis direction not being processed especially).Such as, standardization saturation temperature is set as the size of the contact area at place of pressure welding portion is desirable size and the size of contact is the saturation temperature in the temperature rising characteristic of the measuring object thing of desirable size, standardization saturation temperature is pre-stored within storer 60.Then, controller 50 is when the saturation temperature of the temperature rising characteristic measured is higher than standardization saturation temperature, as shown in Figure 9, to make the mode that the saturation temperature of the temperature rising characteristic measured is consistent with standardization saturation temperature, temperature rising characteristic is carried out compressing at temperature direction thus standardized temperature rising characteristic can be obtained.In addition, controller 50 is when the saturation temperature of the temperature rising characteristic measured is lower than standardization saturation temperature, as shown in Figure 10, to make the mode that the saturation temperature of the temperature rising characteristic measured is consistent with standardization saturation temperature, temperature rising characteristic is carried out expanding at temperature direction thus standardized temperature rising characteristic can be obtained.
Figure 11 show the size of the contact area to pressure welding portion is desirable size and the temperature rising characteristic that the size of the contact in pressure welding portion is the measuring object thing of desirable size carry out standardization after standardization ideal temperature rising characteristic (being illustrated by the broken lines in Figure 11), to the size of the contact area in pressure welding portion be allow lower limit and the size of the contact in pressure welding portion be allow the temperature rising characteristic of the measuring object thing of lower limit to carry out standardization after standardization lower limit temperature rising characteristic (being represented by single dotted broken line in Figure 11), to the size of the contact area in pressure welding portion be allow the upper limit and the size of the contact in pressure welding portion be allow the temperature rising characteristic of the measuring object thing of the upper limit to carry out standardization after the example of standardization ceiling temperature rising characteristic (being represented by double dot dash line in Figure 11) overlap display.Like this, by carrying out the standardization making saturation temperature consistent with standardization saturation temperature, can with from heating (moment) to the curve map reached standardization saturation temperature to the difference of the size of the difference or contact that represent the size of the contact area in pressure welding portion.
When the result after the temperature rising characteristic standardization of measuring object thing not being converged on the standardization ceiling temperature rising characteristic shown in Figure 11 and between standardization lower limit temperature rising characteristic, can say that the contact area at the place of pressure welding portion of this measuring object thing is beyond desired scope, or the contact at place of pressure welding portion is beyond desired scope.Namely, when the result after the temperature rising characteristic standardization of measuring object thing being converged on the standardization ceiling temperature rising characteristic shown in Figure 11 and between standardization lower limit temperature rising characteristic, can say the contact area at the place of pressure welding portion of this measuring object thing in desired scope and the contact at place of pressure welding portion in desired scope.
In addition, also can by carry out the result after by the temperature rising characteristic standardization obtained whether be in the standardization ceiling temperature rising characteristic shown in Figure 11 and between standardization lower limit temperature rising characteristic judgement be set to carry out whether converging on judgement between the 1st baseline threshold (in standardization ceiling temperature rising characteristic from heating start to the time reached standardization saturation temperature) and the 2nd baseline threshold (in standardization lower limit temperature rising characteristic from heating to the time reached standardization saturation temperature) from heating start time to the time reached standardization saturation temperature.Now, in step s 35, when from the start time of irradiating heating laser to measuring point to the time become in temperature rising characteristic relative to the propradation of the temperature of the process of time being the thermal equilibrium state of below regulation propradation do not converge on preset between the 1st baseline threshold and the 2nd baseline threshold, controller is judged to be contact area beyond the defective products of the scope of the area of desired size or contact beyond the defective products of the scope of desired pressure (when converging between the 1st baseline threshold and the 2nd baseline threshold, be judged to be it is non-defective unit).In addition, standardization saturation temperature, the 1st baseline threshold and the 2nd baseline threshold are pre-stored within storer.
In the above description, 1st baseline threshold is set in standardization ceiling temperature rising characteristic from heating start to the time reached standardization saturation temperature, the 2nd baseline threshold is set in standardization lower limit temperature rising characteristic from heat to the time reached standardization saturation temperature.But, also the 1st baseline threshold can be set to the time from heating to reach standardization saturation temperature 90% in standardization ceiling temperature rising characteristic, 2nd baseline threshold to be set in standardization lower limit temperature rising characteristic time to reach standardization saturation temperature 90% from heating, and when by the time Convergence in the result after the standardization of the temperature obtained rising characteristic to reach standardization saturation temperature 90% between the 1st baseline threshold and the 2nd baseline threshold be judged to be it is non-defective unit.In addition, the whether good decision method of pressure welding state is not limited to method described above.Such as, also can saturation temperature in the temperature rising characteristic obtained in the temperature range specified be judged to be it is non-defective unit, or the temperature rising characteristic obtained do not carried out standardization and be judged to be it is non-defective unit when the time Convergence to the temperature that reaches capacity is between the 1st baseline threshold and the 2nd baseline threshold, or be judged to be it is non-defective unit when the area that the curve map of the standardized temperature rising characteristic after carrying out standardization to the temperature rising characteristic obtained surrounds is in specialized range.
The example of the display of step S40 is shown in Figure 12.Example shown in Figure 12 shows the example showing the information relevant to the result of determination of controller at the picture 50M of the display 50G of controller 50.In this example embodiment, show result of determination and be " well " and the contact area and the situation of contact in desired scope that are judged to be place of pressure welding portion.In addition, in the example in figure 12, the example also showing the temperature rising characteristic figure after by the standardized temperature rising characteristic of measuring object thing (being represented by solid line in picture 50M), standardization lower limit temperature rising characteristic (being represented by single dotted broken line in picture 50M), standardization ceiling temperature rising characteristic (being represented by double dot dash line in picture 50M) and standardization ideal temperature rising characteristic (being illustrated by the broken lines in picture 50M) overlap in a part of picture 50M is shown.By means of only observation this temperature rising characteristic figure, although operator easily can judge that the pressure welding state of measuring object thing converges on allowed band, slightly to the skew of upper limit side, therefore very convenient when carrying out qualitative control etc.
In the above description, the whether good of pressure welding state in pressure welding portion of the elastic deformation portion 92B having inserted press-fit pin 92 in the inwall 91B of through hole 91 is judged.This pressure welding portion is not combined by pressure welding by welding, but in the result as above-mentioned judgement, when being judged to be that pressure welding state is non-defective unit, can, further by carrying out welding as described below, come more reliably to guarantee desired conductance.In addition, the welding step below illustrated can carry out between the step S35 shown in Fig. 5 and step S40, also can omit.
First, as precondition, at least one party in the pressure welding portion of 2 workpiece, be electroplate with fusing point than the respective low-melting alloy of the conductive component in the pressure welding portion of 2 workpiece or metal (such as plated solder or zinc-plated etc.).Such as, the inwall 91B of through hole 91 is plated scolding tin.And in heating steps, by controller, heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying workpiece heating and be that the heating laser of the output after the heat of the fusing point being less than plating irradiates to measuring point.
And, when being judged to be non-defective unit in determination step, the output of heating LASER Light Source is risen to be adjusted to be the heat that carries out with not destroying workpiece heating by controller and be the output after the heat of more than the fusing point of plating, then with the stipulated time, heating laser is irradiated to measuring point, make plating molten thus, thus make 2 workpiece weldings in pressure welding portion.This step of carrying out welding is welding step.Like this, confirm not to be 2 workpiece combined by pressure welding by welding are desired pressure welding states after, can suitably and easily welding is carried out to pressure welding portion, therefore, it is possible to more reliably guarantee desired conductance.In addition, by meltings such as the trickle whiskers based on plating shaving portion, tin etc., thus the higher pressure welding state (electric conducting state) of reliability can be obtained.In addition, the operation removing plating shaving sheet is not needed yet.In addition, in the above description, after the heating step, perform welding step, but also side by side can carry out welding step with heating steps.Now, in heating steps, by controller, heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying workpiece heating and be that the heating laser of the output after the heat of more than the fusing point of plating irradiates to measuring point.Thus, and separately carry out heating steps and compare with the situation of welding step, can terminate to check with the short time.
Above, temperature rising characteristic during several about 10ms after the optics non-destructive testing apparatus illustrated in the present embodiment utilizes and starts heating by heating laser to the temperature that reaches capacity judges the state of measuring object thing, and therefore the supervision time is very short.In addition, for the inspection of the pressure welding state in pressure welding portion, can check in a non contact fashion, therefore without the need to the oscillator of ultrasonic oscillator or sensor being fixed near pressure welding portion or pressure welding portion, can be easy and check with the short time uncomplicatedly.In addition, by judging that the conducted state of heat judges the pressure welding state of conductive component (inwall of through hole) and conductive component (the elastic deformation portion of press-fit pin), therefore, it is possible to suitably judge electric conducting state.Therefore, compared with utilizing the method for image confirming insertion position, can suitably check the electric conducting state that originally will check, can check with higher reliability.In addition, even if the saturation temperature of each temperature rising characteristic is different separately, to make the mode becoming the standardization saturation temperature preset, temperature rising characteristic is carried out compressing or expanding obtaining standardized temperature rising characteristic at temperature direction, thus independently judge after the standardization of temperature rising characteristic, therefore, it is possible to judge more accurately in the mode being unified into standardization saturation temperature from the different of saturation temperature.
In addition, by possessing heating LASER Light Source 21 for implementing treatment step described above, optically focused collimating apparatus 10, heating laser lightguide, at least 1 infrared detector (hot line detecting device), infrared ray lightguide (hot line lightguide) and controller 50, certainly also can form utilize controller to judge whether contact area as the place of pressure welding portion of 2 parts of measuring object thing in allowed band and the optics non-destructive testing apparatus of contact whether in allowed band.
The treatment step, formation, structure, outward appearance, shape etc. of optics non-destructive detection method of the present invention and optics non-destructive testing apparatus, can carry out various change, add, delete in the scope not changing main idea of the present invention.Such as also can form and infrared detector is set to 1, albedo measurement laser is irradiated from the LASER Light Source of albedo measurement to measuring point, utilize optical sensor etc. to detect the albedo measurement laser reflected from measuring point, and revise the optics non-destructive testing apparatus etc. of the detected value detected by infrared detector based on the reflectivity calculated.That is, at least 1 infrared detector (hot line detecting device) is possessed.
In addition, the position of the example of the infrared emission characteristic (Fig. 6) illustrated in the present embodiment and the 1st Infrared wavelength (λ 1) shown in this infrared emission characteristic, the 2nd Infrared wavelength (λ 2) is an example, is not limited thereto.In addition, above (>=), following (≤), be greater than (>), be less than (<), there is the such performance of B between A and C (A < B < C) etc., can equal sign be comprised, also can not comprise equal sign.In addition, the numerical value used in description of the present embodiment is an example, is not limited to this numerical value.
In addition, in description of the present embodiment, be illustrated for the pressure welding portion behind the elastic deformation portion of the inwall pressure welding press-fit pin of through hole, but 2 workpiece are not limited thereto, the whether good of pressure welding portion that can be applicable to various 2 workpiece be made up of conductive component judges.In addition, the kind of plating is not limited to plated solder and zinc-plated, can use various plating.

Claims (5)

1. an optics non-destructive detection method, the pressure welding state at place of pressure welding portion is judged, described pressure welding portion is the pressure welding portion of 2 workpiece combined not by welding but by pressure welding, and described pressure welding portion is the pressure welding portion that the described pressure welding portion of side's workpiece and the described pressure welding portion of the opposing party's workpiece are made up of conductive component mutually, the feature of described optics non-destructive detection method is
In described optics non-destructive detection method, the surface of the side's workpiece near described pressure welding portion and be the surface set measuring point of the conductive component comprising described pressure welding portion, utilize heating LASER Light Source, at least 1 hot line detecting device, controller, the heating laser of described heating LASER Light Source injection regulation optical maser wavelength, described at least 1 hot line detecting device can detect hot line, described controller controls described heating LASER Light Source and imports the detection signal from described hot line detecting device
Described optics non-destructive detection method comprises:
Heating steps, in this heating steps, by described controller, described heating LASER Light Source is controlled, the described heating laser after being adjusted to the heat heated with not destroying described workpiece is irradiated to described measuring point, described measuring point is heated;
Temperature rising characteristic obtains step, obtain in step in this temperature rising characteristic, while carry out the heating in described heating steps, while utilize described hot line detecting device the hot line radiated from described measuring point to be detected to the temperature obtaining described measuring point by described controller, and obtain temperature propradation that is the temperature rising characteristic of the described measuring point corresponding with the heat time; And
Determination step, in this determination step, based on the hot spot of impact that is the described temperature rising characteristic of described measuring point that are subject to amount of thermal conduction, what judged the place of described pressure welding portion of described 2 workpiece by described controller comprises the whether good of the pressure welding state of contact area and contact.
2. optics non-destructive detection method according to claim 1, is characterized in that,
At least one party in the described pressure welding portion of described 2 workpiece, is electroplate with fusing point than the respective low-melting alloy of the conductive component in the described pressure welding portion of described 2 workpiece or metal,
In described heating steps, by described controller, described heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying described workpiece heating and be that the described heating laser of the output after the heat of the fusing point being less than described plating irradiates to described measuring point
Described optics non-destructive detection method also comprises welding step, in this welding step, when being judged to be non-defective unit in described determination step, the output of described heating LASER Light Source is risen to be adjusted to be the heat that carries out with not destroying described workpiece heating by described controller and be the output after the heat of more than the fusing point of described plating, then irradiated heating laser to described measuring point with the stipulated time by the output after adjusting with described, thus make described plating molten make described 2 workpiece weldings at place of described pressure welding portion.
3. optics non-destructive detection method according to claim 1, is characterized in that,
At least one party in the described pressure welding portion of described 2 workpiece, is electroplate with fusing point than the respective low-melting alloy of the conductive component in the described pressure welding portion of described 2 workpiece or metal,
In described heating steps, by described controller, described heating LASER Light Source is controlled, be by being adjusted to the heat that carries out with not destroying described workpiece heating and be that the described heating laser of the output after the heat of more than the fusing point of described plating irradiates to described measuring point.
4., according to the optics non-destructive detection method in claims 1 to 3 described in any one, it is characterized in that,
In described determination step, utilize described controller, when the time from irradiate the start time of described heating laser to described measuring point to becoming thermal equilibrium state do not converge on preset between the 1st baseline threshold and the 2nd baseline threshold, be judged to be to be described contact area beyond the defective products of the scope of the area of desired size or the described contact defective products beyond the scope of desired pressure, described thermal equilibrium state is the state that the propradation of temperature relative with the process of time in described temperature rising characteristic becomes below regulation propradation.
5. an optics non-destructive testing apparatus, require the optics non-destructive detection method in 1 ~ 3 described in any one for enforcement of rights, the feature of this optics non-destructive testing apparatus is to possess:
Described heating LASER Light Source;
Optically focused collimating apparatus, its make the directional light along optical axis from side incidence towards be set as focal position described measuring point optically focused and from opposite side injection, and make from the radiation of described measuring point and reflection and from the light of opposite side incidence convert to along optical axis directional light that is measure light and penetrate from side;
Laser lightguide is used in heating, and it converts described heating laser to directional light and the side of the described optically focused collimating apparatus that leads;
At least 1 described hot line detecting device;
Hot line lightguide, it will be the hot line that comprises of described measurement light and is that the hot line corresponding with the heat of radiating from described measuring point leads described hot line detecting device; And
Described controller.
CN201510300277.0A 2014-06-05 2015-06-03 Optical non-destructive inspection method and optical non-destructive inspection apparatus Pending CN105136858A (en)

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