CN105110610A - Grazing incidence-type microporous x ray optical element hot-bending device - Google Patents
Grazing incidence-type microporous x ray optical element hot-bending device Download PDFInfo
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Abstract
The invention provides a grazing incidence-type microporous x ray optical element hot-bending device. The hot-bending device comprises a vacuum heating furnace, a vacuum pump, a control cabinet, a pressure control execution mechanism and a hot-bending mold mechanism. The hot-bending mold mechanism is installed in an isothermal region in the vacuum heating furnace. The pressure control execution mechanism is located right above the vacuum heating furnace and is connected to the vacuum heating furnace by opening bellows. The pressure output by the pressure control execution mechanism is applied to an optical element installed in the hot-bending mold mechanism by the hot-bending mold mechanism. The vacuum pump is connected to the vacuum heating furnace by a vacuum pipe. The control cabinet is used for controlling hot-bending device pressure, a temperature and a vacuum degree and comprises an industrial control computer, and the industrial control computer controls the pressure control execution mechanism, the vacuum heating furnace and the vacuum pump. In hot-bending device work, the vacuum pump keeps a vacuum degree in an isothermal region chamber of the vacuum heating furnace. The vacuum heating furnace keeps an isothermal region temperature in temperature range set by the control cabinet. Through operation of the pressure control execution mechanism, the pressure is applied to the optical element by the hot-bending mold mechanism so that the optical element is subjected to hot-bending.
Description
Technical field
The invention belongs to micropore x-ray optical element technology field, particularly a kind of bending apparatus of glancing incidence type micropore x-ray optical element.
Background technology
X-ray has the features such as wavelength is short, energy is large, penetrance is strong.And, all very low at the normal incidence reflectivity of the nearly all material of X-ray wave band.In order to realize pooling picture to X-ray, glancing incidence formula imaging system usually can be selected.Not yet find that there is the prior art of the bending apparatus about micropore x-ray optical element at present.
Summary of the invention
The object of the present invention is to provide a kind of bending apparatus of glancing incidence type micropore x-ray optical element, be suitable for the micropore x-ray optical element making different shapes, different curvature radius.
For achieving the above object, the technical solution adopted in the present invention is as follows:
A bending apparatus for glancing incidence type micropore x-ray optical element, comprises vacuum furnace, vacuum pump, housing, pressure-controlling topworks and hot bending die mechanism, wherein:
Hot bending die mechanism positions is in the inside isothermal region of vacuum furnace;
Pressure-controlling topworks is positioned at directly over vacuum furnace, is connected with vacuum furnace by open ended bellows, and the pressure that pressure-controlling topworks exports is applied to by hot bending die mechanism and is loaded on the in-house optical element of hot bending die;
Vacuum pump is connected with vacuum furnace by vacuum-lines;
Described housing is used for the pressure of bending apparatus, temperature and vacuum degree control, it has an industrial computer, control pressure controls the operation of topworks, vacuum furnace and vacuum pump: during bending apparatus work, kept the vacuum tightness in the isothermal region cavity of vacuum furnace by vacuum pump; The temperature of its isothermal region is kept within the scope of the temperature range that vacuum furnace sets at housing; And make pressure be applied to hot bending optical element on optical element via hot bending die mechanism by the operation of pressure-controlling topworks.
In further embodiment, in aforementioned hot bending apparatus, pressure-controlling topworks comprises: motor, speed reduction unit, connecting rod, leading screw and briquetting, wherein:
Motor is electrically connected with housing, receives the control signal that sends of housing and exports rotary torque by motor output shaft;
The input terminus of speed reduction unit is connected with motor output shaft, and its output terminal is connected with connecting rod;
The rotary torque that speed reduction unit exports is delivered on leading screw by connecting rod, makes guide screw movement;
The termination closing on vacuum furnace and the described briquetting of leading screw are fixed, and briquetting and screw synchronous move;
The other end of briquetting is connected with hot bending die mechanism, is passed to hot bending die mechanism guide screw movement to be produced pressure.
In further embodiment, in aforementioned hot bending apparatus, hot bending die mechanism comprises: base, hot bending die, set ring, lower link and upper connecting rod, and hot bending die is made up of mold and bed die, wherein:
Base is placed in the inside isothermal region of vacuum furnace, and hot bending die is arranged in the locating slot of base, and set ring is arranged on hot bending die with the mold of stationary heat bending mould and bed die;
Lower link and set ring immovable fitting, be arranged on the top of mold;
One end of upper connecting rod is connected with lower link by screw thread, and its other end is connected with the briquetting of pressure-controlling topworks;
The pressure transmitted by aforementioned briquetting is applied on hot bending die via upper connecting rod, lower link successively, and then makes the optical element be loaded between the mold of hot bending die and bed die become sphere by flat board.
In further embodiment, in aforementioned hot bending mould mechanism, described hot bending die is removably mounted in the locating slot of base.
In further embodiment, the briquetting of described pressure-controlling topworks has a centre hole, and the other end of the upper connecting rod of described hot bending die mechanism is fastenedly connected by this centre hole and briquetting.
In further embodiment, the material of described hot bending die is stainless steel, and its linear expansivity is 30 × 10
-7~ 90 × 10
-7/ DEG C.
In further embodiment, described vacuum pump is oilless vacuum pump, and vacuum tightness is better than 1 × 10
-2mbar.
According to improvement of the present invention, also propose a kind of method utilizing aforementioned hot bending apparatus to prepare glancing incidence type micropore x-ray optical element, comprise the following steps:
Step 1, clean hot bending die, be placed in hot bending die by optical element to be processed, be then placed on by hot bending die on the base in the isothermal region of vacuum furnace;
Step 2, cover the bell of vacuum furnace, utilize vacuum pump evacuation, start to heat up with certain temperature rise rate simultaneously, after reaching preset temperature, start to enter keeping warm mode, after insulation for some time, start pressurization, continue insulation simultaneously, vacuumize;
Step 3, when pressure reaches preset value (1kg ~ 40kg), after pressurize for some time, pressure is unloaded but, enter annealing operation, eliminate the stress in optical element;
Step 4, when the temperature of optical element drops to room temperature, taken out by hot bending die from vacuum furnace, the micropore x-ray optical element prepared is removed in hot bending die die sinking.
In further embodiment, in abovementioned steps 2, after temperature reaches preset temperature, soaking time is at least 120min.
In further embodiment, in abovementioned steps 3, after pressure reaches preset value, the dwell time is at least 20min.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation of the bending apparatus of the glancing incidence type micropore x-ray optical element illustrated according to certain embodiments of the invention.
Fig. 2 is the structural representation of the hot bending die mechanism illustrated according to certain embodiments of the invention.
Fig. 3 is the structural representation of the hot bending die illustrated according to certain embodiments of the invention.
Fig. 4 is the schematic diagram that the square x-ray micropore optical element utilizing the institute of the bending apparatus shown in Fig. 1 of the present invention hot bending to be formed is described.
Fig. 5 is the schematic diagram that the radiation x-ray micropore optical element utilizing the bending apparatus institute hot bending shown in Fig. 1 of the present invention to be formed is described.
Embodiment
As shown in Figure 1, according to embodiments of the invention, a kind of bending apparatus of glancing incidence type micropore x-ray optical element, comprises vacuum furnace 1, vacuum pump 2, housing 3, pressure-controlling topworks 4 and hot bending die mechanism 5.
Composition graphs 1, hot bending die mechanism 5 is placed in the inside isothermal region of vacuum furnace 1.
Pressure-controlling topworks 4 is positioned at directly over vacuum furnace 1, is connected with vacuum furnace 1 by open ended bellows, and the pressure that pressure-controlling topworks 4 exports is applied to by hot bending die mechanism 5 and is loaded on the in-house optical element of hot bending die.
Vacuum pump 2 is connected with vacuum furnace 1 by vacuum-lines.
Housing 3 is for the pressure of bending apparatus, temperature and vacuum degree control, it has an industrial computer, control pressure controls the operation of topworks 4, vacuum furnace 1 and vacuum pump 2: during bending apparatus work, keep the vacuum tightness in the isothermal region cavity of vacuum furnace by vacuum pump 2; The temperature of its isothermal region is kept within the scope of the temperature range that vacuum furnace 1 sets at housing 3; And make pressure be applied to hot bending optical element on optical element via hot bending die mechanism by the operation of pressure-controlling topworks 4.
Shown in composition graphs 1, as a specific examples, pressure-controlling topworks 4 comprises: motor 4a, speed reduction unit 4b, connecting rod 4c, leading screw 4d and briquetting 4e.
Motor 4a is electrically connected with housing 3, receives the control signal that sends of housing 3 and exports rotary torque by motor output shaft.
The input terminus of speed reduction unit 4b is connected with motor output shaft, and its output terminal is connected with connecting rod 4c.
Speed reduction unit 4b, such as fixed axis gear speed reduction unit or planetary reducer, carrying out reduction of speed for exporting the rotation of motor, slowing down, export lower rotating speed according to reduction ratio.
The rotary torque that speed reduction unit 4b exports is delivered on leading screw 4d by connecting rod 4c, and leading screw 4d is moved.
The termination closing on vacuum furnace and the described briquetting 4e of leading screw 4d fix, and briquetting 4e and leading screw 4d is synchronized with the movement.
The other end of briquetting 4e is connected with hot bending die mechanism 5, produces pressure be passed to hot bending die mechanism 5 to be moved by leading screw 4d.
Leading screw 4d, preferably adopts ball-screw.
Shown in composition graphs 2, hot bending die mechanism 5 comprises: base 6, hot bending die 7, set ring 8, lower link 10 and upper connecting rod 11.As shown in Figure 3, hot bending die 7 is made up of mold 13 and bed die 14.
In diagram, label 9 represents the optical element treating hot bending.
As Fig. 2, base 6 is placed in the inside isothermal region of vacuum furnace 1, and hot bending die 7 is arranged in the locating slot of base 6, and set ring 8 is arranged on hot bending die with the mold 3 of stationary heat bending mould and bed die 14.
Lower link 10 and set ring 8 immovable fitting, be arranged on the top of mold 13.
One end of upper connecting rod 11 is connected with lower link 10 by screw thread, and its other end is connected with the briquetting 4e of pressure-controlling topworks.
The pressure transmitted by aforementioned briquetting 4e is applied on hot bending die 7 via upper connecting rod 11, lower link 10 successively, and then makes the optical element 9 be loaded between the mold 13 of hot bending die 7 and bed die 14 become sphere by flat board.
Preferably, in aforementioned hot bending mould mechanism 5, described hot bending die 7 is removably mounted in the locating slot of base.So, user according to its wish, can make various different types of x-ray optical element: for spherical optics element, and in the scope of radius-of-curvature from 50mm to 5000mm, shape can be circular or square or other shapes needed arbitrarily; Square optical component size is: (10mm ~ 150mm) × (10mm ~ 150mm), round diameter (10mm ~ 200mm); For aspheric surface, as hyperboloid, parabola, according to different demands, only changing the shape of hot bending die, size namely can the difform hyperboloid of hot bending, parabola.
Shown in composition graphs 2, the briquetting 4e of pressure-controlling topworks 4 has a centre hole, and the other end of the upper connecting rod 11 of described hot bending die mechanism is fastenedly connected by this centre hole and briquetting.
The material of described hot bending die 7 is stainless steel, and its linear expansivity is 30 × 10
-7~ 90 × 10
-7/ DEG C.
Described vacuum pump 1 is oilless vacuum pump, and vacuum tightness is better than 1 × 10
-2mbar.
According to improvement of the present invention, also propose a kind of method utilizing aforementioned hot bending apparatus to prepare glancing incidence type micropore x-ray optical element, comprise the following steps:
Step 1, clean hot bending die, be placed in hot bending die by optical element to be processed, be then placed on by hot bending die on the base in the isothermal region of vacuum furnace;
Step 2, cover the bell of vacuum furnace, utilize vacuum pump evacuation, start to heat up with certain temperature rise rate simultaneously, after reaching preset temperature, start to enter keeping warm mode, after insulation for some time, start pressurization, continue insulation simultaneously, vacuumize;
Step 3, when pressure reaches preset value (1kg ~ 40kg), after pressurize for some time, pressure is unloaded but, enter annealing operation, eliminate the stress in optical element;
Step 4, when the temperature of optical element drops to room temperature, taken out by hot bending die from vacuum furnace, the micropore x-ray optical element prepared is removed in hot bending die die sinking.
In abovementioned steps 2, after temperature reaches preset temperature, soaking time is at least 120min.
In abovementioned steps 3, after pressure reaches preset value, the dwell time is at least 20min.
In the whole process of preparation, in the stove of vacuum furnace, vacuum tightness all requires to remain on to be better than 10
-2in the state of mbar.
Below in conjunction with a concrete example, the realization of more detailed description aforementioned preparation process.
On the whole, whole preparation process comprises: optical element prepares, die-filling, shove charge, hot bending and taking-up optical element five steps.
(1) optical element prepares
First select to need the optical element of hot bending to clean.In this example, exemplarily, select square optical element, size: 45mm × 45mm, thickness 2.04mm, hot bending becomes the spherical optical element of radius-of-curvature 700mm.
(2) die-filling
Select suitable hot bending die according to the above-mentioned optical element dimension will carrying out hot bending, in this example, select that counterdie is of a size of 45mm × 45mm, radius-of-curvature is the hot bending die of 700mm.With the inside and outside surface of alcohol washes hot bending die, after hot bending die dries, optical element is loaded gently in hot bending die counterdie, the patrix of hot bending mould is fixed on the lower top of leading screw by the screw thread on it.
(3) shove charge
Open process furnace bell, the above-mentioned hot bending die that optical element is housed is sent in process furnace.By the levelness of level bar Correction Die, after mould is up to the standard, loads onto various hot bending annex, cover the bell of vacuum furnace.Control starter motor by housing, rotational lead screw, transport hot bending mould patrix downwards, make it just to enter in counterdie.
(4) hot bending
Then start to heat up, vacuumize, pressure process.Temperature, the pressure and other parameters of the optical element softening temperature determination hot bending of hot bending as required, is controlled the operation of topworks 4, vacuum furnace 1 and vacuum pump 2, realizes the control to temperature, vacuum tightness and pressure by housing control pressure.
In this example, hot bending temperature is defined as 650 DEG C, pressure is defined as 30 kilograms, temperature rise rate 1 DEG C/min, soaking time 120min, compression rate 0.3 kilogram/min, dwell time 20min, unload but pressure after pressurize completes, start to enter cycle of annealing, power-off when being cooled to 280 DEG C with the rate of temperature fall of 0.5 DEG C/min.
In whole hot bending process, in process furnace, vacuum tightness all requires to remain on to be better than 10
-2in the state of mbar.
The parameter that this step is all and operational process, be all stored in the industrial computer of housing with the form of program, during operation, only needs to recall corresponding program and run.All processes are run automatically, and operator are without the need to field surveillance.
(5) optical element is got
When waiting for that the temperature of process furnace is down to room temperature, turn off bending apparatus power supply, open heating furnace cover, take out hot bending die, optical element, so far all hot bending end of processing of optical element are taken out in die sinking.
Fig. 4 is the square x-ray micropore optical element utilizing bending apparatus of the present invention to be made by preceding method, and optical element is the square of 45mm × 45mm, and thickness is 1mm; Optical element is uniformly distributed the square hole that aperture is 20 μm × 20 μm, pore wall thickness about 3 μm; Spherically, sphere curvature radius 750mm, this optical element can realize the focusing of X-ray to optical element by the total reflection of square hole inwall to Grazing Incidence X-Ray.
Fig. 5 is the radial X-ray micropore optical element utilizing bending apparatus of the present invention to be made by preceding method, optical element is the circle of φ 60mm, thickness is 2mm, optical element is uniformly distributed the square hole that aperture is 20 μm × 20 μm, square hole arranges radially, along different concentric arrays; Spherically, sphere curvature radius 700mm, this optical element can realize better X-ray focusing effect to optical element.
Below for the square x-ray micropore optical element shown in Fig. 4, the enforcement of preceding method is described further.
Should be appreciated that implementation method described below, in implementation process, can formulate according to the concrete size of specific product and/or performance requriements and regulate, select concrete processing parameter.
(1) sheet glass is cleaned
First select to need the optical element of hot bending to clean, this selects square x-ray micropore optical element, size: 45mm × 45mm, thickness 1mm, and hot bending becomes the spherical optical element of radius-of-curvature 750mm.
(2) die-filling
Select suitable hot bending die according to the above-mentioned optical element dimension will carrying out hot bending, counterdie is of a size of 45mm × 45mm, radius-of-curvature is the hot bending die of 750mm in selection here.With the inside and outside surface of alcohol washes hot bending die, after hot bending die dries, optical element is loaded gently in hot bending die counterdie, the patrix of hot bending mould is fixed on the lower top of leading screw by the screw thread on it.
(3) shove charge
Open process furnace bell, the above-mentioned hot bending die that optical element is housed is sent in process furnace.By the levelness of level bar Correction Die, after mould is up to the standard, loads onto various hot bending annex, cover process furnace bell, starter motor, rotational lead screw, transport hot bending mould patrix downwards, make it just to enter in counterdie.
(4) hot bending
Then start to heat up, vacuumize, pressure process.Temperature, the pressure and other parameters of the optical element softening temperature determination hot bending of hot bending as required, in this example, hot bending temperature is defined as 650 DEG C, and pressure is defined as 30 kilograms, temperature rise rate 1 DEG C/min, soaking time 120min, compression rate 0.3 kilogram/min, dwell time 20min, unload but pressure after pressurize completes, start to enter cycle of annealing, power-off when being cooled to 280 DEG C with the rate of temperature fall of 0.5 DEG C/min.In whole hot bending process, in process furnace, vacuum tightness all requires to remain on to be better than 10
-2in the state of mbar.The parameter that this step is all and operational process, be all stored in industrial computer with the form of program, during operation, only needs to recall corresponding program and run.All processes are run automatically, and operator are without the need to field surveillance.
(5) optical element is got
When waiting for that the temperature of process furnace is down to room temperature, turn off bending apparatus power supply, open heating furnace cover, take out optical element, so far all hot bending end of processing of optical element.
Although the present invention with preferred embodiment disclose as above, so itself and be not used to limit the present invention.Have in technical field of the present invention and usually know the knowledgeable, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore, protection scope of the present invention is when being as the criterion depending on those as defined in claim.
Claims (10)
1. a bending apparatus for glancing incidence type micropore x-ray optical element, is characterized in that, comprises vacuum furnace, vacuum pump, housing, pressure-controlling topworks and hot bending die mechanism, wherein:
Hot bending die mechanism positions is in the inside isothermal region of vacuum furnace;
Pressure-controlling topworks is positioned at directly over vacuum furnace, is connected with vacuum furnace by open ended bellows, and the pressure that pressure-controlling topworks exports is applied to by hot bending die mechanism and is loaded on the in-house optical element of hot bending die;
Vacuum pump is connected with vacuum furnace by vacuum-lines;
Described housing is used for the pressure of bending apparatus, temperature and vacuum degree control, it has an industrial computer, control pressure controls the operation of topworks, vacuum furnace and vacuum pump: during bending apparatus work, kept the vacuum tightness in the isothermal region cavity of vacuum furnace by vacuum pump; The temperature of its isothermal region is kept within the scope of the temperature range that vacuum furnace sets at housing; And make pressure be applied to hot bending optical element on optical element via hot bending die mechanism by the operation of pressure-controlling topworks.
2. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 1, it is characterized in that, in aforementioned hot bending apparatus, pressure-controlling topworks comprises: motor, speed reduction unit, connecting rod, leading screw and briquetting, wherein:
Motor is electrically connected with housing, receives the control signal that sends of housing and exports rotary torque by motor output shaft;
The input terminus of speed reduction unit is connected with motor output shaft, and its output terminal is connected with connecting rod;
The rotary torque that speed reduction unit exports is delivered on leading screw by connecting rod, makes guide screw movement;
The termination closing on vacuum furnace and the described briquetting of leading screw are fixed, and briquetting and screw synchronous move;
The other end of briquetting is connected with hot bending die mechanism, is passed to hot bending die mechanism guide screw movement to be produced pressure.
3. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 2, it is characterized in that, in aforementioned hot bending apparatus, hot bending die mechanism comprises: base, hot bending die, set ring, lower link and upper connecting rod, hot bending die is made up of mold and bed die, wherein:
Base is placed in the inside isothermal region of vacuum furnace, and hot bending die is arranged in the locating slot of base, and set ring is arranged on hot bending die with the mold of stationary heat bending mould and bed die;
Lower link and set ring immovable fitting, be arranged on the top of mold;
One end of upper connecting rod is connected with lower link by screw thread, and its other end is connected with the briquetting of described pressure-controlling topworks;
The pressure transmitted by described briquetting is applied on hot bending die via upper connecting rod, lower link successively, and then makes the optical element be loaded between the mold of hot bending die and bed die become sphere by flat board.
4. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 3, it is characterized in that, in aforementioned hot bending mould mechanism, described hot bending die is removably mounted in the locating slot of base.
5. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 3, it is characterized in that, the briquetting of described pressure-controlling topworks has a centre hole, and the other end of the upper connecting rod of described hot bending die mechanism is fastenedly connected by this centre hole and briquetting.
6. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 3, it is characterized in that, the material of described hot bending die is stainless steel, and its linear expansivity is 30 × 10
-7~ 90 × 10
-7/ DEG C.
7. the bending apparatus of glancing incidence type micropore x-ray optical element according to claim 1, it is characterized in that, described vacuum pump is oilless vacuum pump, and vacuum tightness is better than 1 × 10
-2mbar.
8. utilize the bending apparatus of aforementioned glancing incidence type micropore x-ray optical element according to claim 3 to prepare a method for glancing incidence type micropore x-ray optical element, it is characterized in that, the method comprises the following steps:
Step 1, clean hot bending die, be placed in hot bending die by optical element to be processed, be then placed on by hot bending die on the base in the isothermal region of vacuum furnace;
Step 2, cover the bell of vacuum furnace, utilize vacuum pump evacuation, start to heat up with certain temperature rise rate simultaneously, after reaching preset temperature, start to enter keeping warm mode, after insulation for some time, start pressurization, continue insulation simultaneously, vacuumize;
Step 3, when pressure reaches preset value (1kg ~ 40kg), after pressurize for some time, pressure is unloaded but, enter annealing operation, eliminate the stress in optical element;
Step 4, when the temperature of optical element drops to room temperature, taken out by hot bending die from vacuum furnace, the micropore x-ray optical element prepared is removed in hot bending die die sinking.
9. the method preparing glancing incidence type micropore x-ray optical element according to claim 8, it is characterized in that, in abovementioned steps 2, after temperature reaches preset temperature, soaking time is at least 120min.
10. the method preparing glancing incidence type micropore x-ray optical element according to claim 8, it is characterized in that, in abovementioned steps 3, after pressure reaches preset value, the dwell time is at least 20min.
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| CN108147650A (en) * | 2018-01-05 | 2018-06-12 | 深圳市普天达自动化设备有限公司 | A kind of heating in vacuum based on high frequency hot-bending machine is pressed together method |
| CN111847852A (en) * | 2020-07-23 | 2020-10-30 | 北方夜视技术股份有限公司 | Lobster eye optical device spherical surface forming system and method |
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| CN111847852A (en) * | 2020-07-23 | 2020-10-30 | 北方夜视技术股份有限公司 | Lobster eye optical device spherical surface forming system and method |
| CN111847852B (en) * | 2020-07-23 | 2023-11-14 | 北方夜视技术股份有限公司 | Spherical forming system and method for lobster eye optical device |
| CN112537904A (en) * | 2020-10-30 | 2021-03-23 | 北方夜视技术股份有限公司 | Gas pressurization precision spherical forming device and method for lobster eye micropore optical element |
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| CN105110610B (en) | 2017-08-29 |
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