CN105099122A - 一种动磁式长行程超精密直线运动机构 - Google Patents
一种动磁式长行程超精密直线运动机构 Download PDFInfo
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109327126A (zh) * | 2018-11-14 | 2019-02-12 | 哈尔滨工业大学 | 一种基于并列动磁钢的直线运动装置 |
CN109490004A (zh) * | 2018-12-29 | 2019-03-19 | 珠海九源电力电子科技有限公司 | 一种对称式电磁驱动实验系统及控制方法 |
CN109968052A (zh) * | 2019-04-01 | 2019-07-05 | 哈尔滨工业大学 | 一种无线缆直线电机进给系统 |
CN110524500A (zh) * | 2019-09-27 | 2019-12-03 | 复旦大学 | 磁浮导轨运动平台 |
CN110676974A (zh) * | 2019-11-01 | 2020-01-10 | 东莞市智赢智能装备有限公司 | 一种平板式气浮直线模组 |
CN110821958A (zh) * | 2019-12-06 | 2020-02-21 | 中国工程物理研究院机械制造工艺研究所 | 一种轴向可动静压气浮主轴 |
CN111189479A (zh) * | 2018-11-14 | 2020-05-22 | 由田新技股份有限公司 | 倒吊式双面光学检测设备 |
CN112880475A (zh) * | 2021-03-22 | 2021-06-01 | 贵州航天特种车有限责任公司 | 一种用于炮弹发射的导轨式电磁发射装置 |
CN113765259A (zh) * | 2021-08-31 | 2021-12-07 | 华中科技大学 | 一种永磁电动悬浮式直线驱动装置 |
CN114175476A (zh) * | 2019-07-19 | 2022-03-11 | 雅科贝思私人有限公司 | 具有集成空气静压轴承导向的铁芯直线电机施力装置 |
CN115815764A (zh) * | 2023-01-06 | 2023-03-21 | 苏州友得利金属制品有限公司 | 具有布气结构的焊接导电嘴和导电嘴布气方法及焊接枪 |
CN118549335A (zh) * | 2024-07-25 | 2024-08-27 | 深圳德康威尔科技有限公司 | 焊线质检装置、焊线质检系统及焊线质检方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112072886B (zh) * | 2020-09-08 | 2021-07-23 | 苏州贝基电子科技有限公司 | 无刷磁导低通直线电机 |
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US6107703A (en) * | 1997-09-24 | 2000-08-22 | Canon Kabushiki Kaisha | Linear motor mechanism for exposure apparatus, and device manufacturing method using the same |
US20080001482A1 (en) * | 2006-06-29 | 2008-01-03 | Canon Kabushiki Kaisha | Stage apparatus |
US20090115261A1 (en) * | 2007-11-07 | 2009-05-07 | Kou-I Szu | Air Floating Linear Motor |
CN102158040A (zh) * | 2011-03-25 | 2011-08-17 | 哈尔滨工业大学 | 高精度电磁力控制直线电机及其控制系统 |
CN202317689U (zh) * | 2011-11-15 | 2012-07-11 | 华中科技大学 | 一种带气浮支承和电磁驱动的超精密工作台 |
CN102723842A (zh) * | 2012-07-09 | 2012-10-10 | 哈尔滨工业大学 | 多自由度长行程磁悬浮工作台 |
CN103872876A (zh) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | 直线电机及平台装置 |
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2015
- 2015-09-09 CN CN201510569390.9A patent/CN105099122B/zh active Active
Patent Citations (7)
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US6107703A (en) * | 1997-09-24 | 2000-08-22 | Canon Kabushiki Kaisha | Linear motor mechanism for exposure apparatus, and device manufacturing method using the same |
US20080001482A1 (en) * | 2006-06-29 | 2008-01-03 | Canon Kabushiki Kaisha | Stage apparatus |
US20090115261A1 (en) * | 2007-11-07 | 2009-05-07 | Kou-I Szu | Air Floating Linear Motor |
CN102158040A (zh) * | 2011-03-25 | 2011-08-17 | 哈尔滨工业大学 | 高精度电磁力控制直线电机及其控制系统 |
CN202317689U (zh) * | 2011-11-15 | 2012-07-11 | 华中科技大学 | 一种带气浮支承和电磁驱动的超精密工作台 |
CN102723842A (zh) * | 2012-07-09 | 2012-10-10 | 哈尔滨工业大学 | 多自由度长行程磁悬浮工作台 |
CN103872876A (zh) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | 直线电机及平台装置 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111189479A (zh) * | 2018-11-14 | 2020-05-22 | 由田新技股份有限公司 | 倒吊式双面光学检测设备 |
CN109327126A (zh) * | 2018-11-14 | 2019-02-12 | 哈尔滨工业大学 | 一种基于并列动磁钢的直线运动装置 |
CN109490004A (zh) * | 2018-12-29 | 2019-03-19 | 珠海九源电力电子科技有限公司 | 一种对称式电磁驱动实验系统及控制方法 |
CN109968052B (zh) * | 2019-04-01 | 2021-12-14 | 哈尔滨工业大学 | 一种无线缆直线电机进给系统 |
CN109968052A (zh) * | 2019-04-01 | 2019-07-05 | 哈尔滨工业大学 | 一种无线缆直线电机进给系统 |
CN114175476A (zh) * | 2019-07-19 | 2022-03-11 | 雅科贝思私人有限公司 | 具有集成空气静压轴承导向的铁芯直线电机施力装置 |
CN110524500A (zh) * | 2019-09-27 | 2019-12-03 | 复旦大学 | 磁浮导轨运动平台 |
CN110676974A (zh) * | 2019-11-01 | 2020-01-10 | 东莞市智赢智能装备有限公司 | 一种平板式气浮直线模组 |
CN110821958A (zh) * | 2019-12-06 | 2020-02-21 | 中国工程物理研究院机械制造工艺研究所 | 一种轴向可动静压气浮主轴 |
CN110821958B (zh) * | 2019-12-06 | 2024-05-14 | 中国工程物理研究院机械制造工艺研究所 | 一种轴向可动静压气浮主轴 |
CN112880475A (zh) * | 2021-03-22 | 2021-06-01 | 贵州航天特种车有限责任公司 | 一种用于炮弹发射的导轨式电磁发射装置 |
CN113765259A (zh) * | 2021-08-31 | 2021-12-07 | 华中科技大学 | 一种永磁电动悬浮式直线驱动装置 |
CN115815764A (zh) * | 2023-01-06 | 2023-03-21 | 苏州友得利金属制品有限公司 | 具有布气结构的焊接导电嘴和导电嘴布气方法及焊接枪 |
CN115815764B (zh) * | 2023-01-06 | 2024-01-23 | 苏州友得利金属制品有限公司 | 具有布气结构的焊接导电嘴和导电嘴布气方法及焊接枪 |
CN118549335A (zh) * | 2024-07-25 | 2024-08-27 | 深圳德康威尔科技有限公司 | 焊线质检装置、焊线质检系统及焊线质检方法 |
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