CN105097416B - A kind of TOF - Google Patents
A kind of TOF Download PDFInfo
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- CN105097416B CN105097416B CN201510454860.7A CN201510454860A CN105097416B CN 105097416 B CN105097416 B CN 105097416B CN 201510454860 A CN201510454860 A CN 201510454860A CN 105097416 B CN105097416 B CN 105097416B
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- ion
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- repeller
- hollow cavity
- ion beam
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Abstract
The invention discloses a kind of TOF, including：It is in the hollow cavity of vacuum field-off state under working condition；The first ion repeller being connected with hollow cavity respectively and the second ion repeller；It is arranged on the first focus deflection lens group of junction and the second focus deflection lens group of the first ion repeller and hollow cavity；It is arranged on tertiary focusing deflection lens group and the 4th focus deflection lens group of the junction of the second ion repeller and hollow cavity.In the embodiment of the present invention, using two ion repellers so that after ion beam reflects through an ion repeller, then reflected through another ion repeller, effectively expand the flight time in TOF for the ion beam, improve the mass resolving power of mass analyzer.In addition, for avoiding ion beam to lead to dissipate because the flight time increases, it is provided with four groups of focus deflection lens group it is ensured that the focusing of space in flight course for the ion beam and energy.
Description
Technical field
The present invention relates to the mass analyzer in mass spectrograph, more particularly, to a kind of TOF.
Background technology
In recent years, with the development of machinery and electronic technology, mass-spectrometric technique obtains and develops rapidly.
Using the mass spectrograph of TOF, compare using quadrupole rod, ion trap etc. as mass analyzer
Mass spectrograph for, have the characteristics that pulsatile once scanning can achieve full spectrum scanning, can greatly save analyzed sample feeding
Amount.For trace materialss, more reflect its huge superiority, such as to criminal case scene of a crime, lunar soil,
For the materials such as interstellar dust, sample acquirement is precious, how to use minimum sample, realizes the quick analysis to sample, is
One of key content of scientist's research.In recent years, the lifting of high-voltage pulse performance, promotes and adopts the flight time
The mass spectrograph of mass analyzer achieves quick development.
For TOF, how to extend the flight time and solve flight course in space and
The focusing of energy, is the problem needing to solve.
Content of the invention
It is an object of the invention to provide a kind of TOF, to solve how to extend flight time and solution
Certainly the focus issues of the space in flight course and energy, improve the mass resolving power of instrument.
The purpose of the present invention is achieved through the following technical solutions：
A kind of TOF, including：
Hollow cavity, under working condition, the hollow region of described hollow cavity is in vacuum field-off state；
Vacuum keeping apparatus, are arranged on the outer wall of described hollow cavity, for maintaining the hollow region of described hollow cavity
It is in vacuum state；
First ion repeller and the second ion repeller, are connected with described hollow cavity respectively；Described first ion is anti-
It is provided with the close and end face of described hollow cavity junction of emitter and enter the first of the first ion repeller for ion beam
Through hole and the second through hole leaving described first ion repeller for ion beam；Described second ion repeller near and described
Be provided with the end face of hollow cavity junction for ion beam enter the second ion repeller third through-hole and for ion beam from
Open the fourth hole of described second ion repeller；
First focus deflection lens group and described second focus deflection lens group, be arranged on described first ion repeller with
The junction of described hollow cavity；The axis of described first focus deflection lens group and predetermined ion beam pass through described the
The track of one through hole overlaps, and the axis of described second focus deflection lens group and predetermined ion beam pass through described second and lead to
The track in hole overlaps；
Tertiary focusing deflection lens group and the 4th focus deflection lens group, are arranged on described second ion repeller and described
The junction of hollow cavity；The axis of described tertiary focusing deflection lens group and predetermined ion beam are by described threeway
The track in hole overlaps, and the axis of described 4th focus deflection lens group passes through described fourth hole with predetermined ion beam
Track overlaps.
In the embodiment of the present invention, using two ion repellers so that after ion beam reflects through an ion repeller, then
Reflected through another ion repeller, effectively expanded the flight time in TOF for the ion beam,
Improve the mass resolving power of mass analyzer.In addition, for avoiding ion beam to lead to dissipate because the flight time increases, being provided with
Four groups of focus deflection lens group are it is ensured that the focusing of space in flight course for the ion beam and energy.
Brief description
The structural representation of the TOF that Fig. 1 provides for one embodiment of the invention；
The structural representation of the TOF that Fig. 2 provides for another embodiment of the present invention；
Fig. 3 is ion beam reflector D profile structural representation provided in an embodiment of the present invention；
Fig. 4 is deflection film structural representation provided in an embodiment of the present invention；
Fig. 5 is focus deflection lens group D profile structural representation provided in an embodiment of the present invention；
Fig. 6 is flight path schematic diagram in TOF provided in an embodiment of the present invention for the ion；
Fig. 7 is mass spectrum provided in an embodiment of the present invention.
Specific embodiment
Below in conjunction with accompanying drawing, TOF provided in an embodiment of the present invention is described in detail.
As shown in figure 1, TOF provided in an embodiment of the present invention at least includes：
Hollow cavity (1), vacuum keeping apparatus (2), the first ion repeller (3), the second ion repeller (4), first
Focus deflection lens group (5), the second focus deflection lens group (6), tertiary focusing deflection lens group (7) and the 4th focus deflection are saturating
Microscope group (8).
Vacuum keeping apparatus (2) are arranged on the outer wall of hollow cavity (1), for maintaining the hollow region of hollow cavity (1)
It is in vacuum state.
First ion repeller (3) and the second ion repeller (4), are connected with hollow cavity (1) respectively；First ion is anti-
It is provided with the close and end face of hollow cavity (1) junction of emitter (3) and enter the first ion repeller (3) for ion beam
First through hole and the second through hole leaving described first ion repeller (3) for ion beam；Second ion repeller (4) close
With the third through-hole being provided with the end face of hollow cavity (1) junction for ion beam entrance the second ion repeller (4) and confession
Ion beam leaves the fourth hole of the second ion repeller (4).
First focus deflection lens group (5) and the second focus deflection lens group (6), are arranged on the first ion repeller (3)
Junction with hollow cavity (1)；And, tertiary focusing deflection lens group (7) and the 4th focus deflection lens group (8), install
Junction in the second ion repeller (4) and hollow cavity (1).
Wherein, the first focus deflection lens group (5) is used for being focused and partially to by the ion beam of above-mentioned first through hole
Turn；Second focus deflection lens group (6) is used for being focused by the ion beam of above-mentioned second through hole and deflect；Tertiary focusing
Deflection lens group (7) is to being focused by the ion beam of above-mentioned third through-hole and deflect；4th focus deflection lens group (8) is right
It is focused by the ion beam of above-mentioned fourth hole and deflect.
Wherein, under in working order, the hollow region of hollow cavity (1) is in vacuum field-off state, provides for ion beam
Hollow field-free flight environment.
Wherein, ion repeller is used for ion beam is reflected, and increases ion beam move distance.
Wherein, focus deflection lens group is used for ion beam is focused, and adjusts the heading of ion beam.
In the embodiment of the present invention, using two ion repellers so that after ion beam reflects through an ion repeller, then
Reflected through another ion repeller, effectively expanded the flight time in TOF for the ion beam,
Improve the mass resolving power of mass analyzer.In addition, for avoiding ion beam to lead to dissipate because the flight time increases, being provided with
Four groups of focus deflection lens group are it is ensured that the focusing of space in flight course for the ion beam and energy.
In the embodiment of the present invention, the shape of hollow cavity (1) can for tubular it is preferred that for cylindric it should be pointed out that
It is that the shape of hollow cavity (1) can also be other shapes, and the present invention is not construed as limiting to this.Its making material can be stainless
As long as steel is it is noted that be unlikely to deform and gastight material, may be incorporated for making hollow cavity (1).
Based on above-mentioned any embodiment, wherein, vacuum keeping apparatus (2) at least include vacuum pump, specifically can be using existing
Any vacuum pump product having, such as molecular pump.In hollow cavity (1) upper setting through hole, vacuum can be installed on this through hole
Pump, with by this through hole evacuation；Certainly, if there are other means evacuation it is also possible to not be provided on hollow cavity
The through hole of evacuation.Preferably, vacuum keeping apparatus (2) also include vacuum gauge, and the inside for showing above-mentioned hollow region is pressed
Strong change.On this through hole, vacuum gauge can be installed, so that vacuum gauge passes through this through hole in hollow cavity (1) upper setting through hole
The pressure of measurement hollow region simultaneously shows；Certainly, detect the means of pressure it is also possible to be not provided with this through hole if there are other.
Based on above-mentioned any embodiment it is preferred that the first ion repeller (3) and the second ion repeller (4) are second order
Net free type catoptric arrangement.
In order to ensure that above-mentioned hollow region is in vacuum field-off state, need to ensure the sealing of above-mentioned junction.A kind of excellent
That selects is achieved in that, hollow cavity (1) is provided with two seal grooves, and the first ion repeller (3) and described second ion are anti-
Emitter (4) is connected with a seal groove respectively.Ensure that above-mentioned junction is in sealing state by seal groove.
Wherein, if hollow cavity (1) be shaped as tubular it is preferred that two seal grooves are respectively arranged in tubular
The two ends of cavity body (1).
In order to fully improve ion beam flight time it is desirable to ion beam can from one end of ion repeller enter after,
Reach the other end and change direction again.In order to detect whether ion beam reaches the other end of ion repeller it is preferred that the present invention
In embodiment, the first ion repeller (3) and the second ion repeller (4) away from the one end with hollow cavity (1) junction
It is respectively arranged with through hole, and be connected with ion detector respectively under test mode.So that ion beam is detected by ion detector
Whether reach the other end of ion repeller.Which kind of ion detector is the embodiment of the present invention do not limit using it is preferred that adopting
Microchannel plate ion detector.
Based on above-mentioned any embodiment, need after installing to ensure：The axis of the first focus deflection lens group (5) is with advance
The ion beam determining is overlapped by the track of first through hole, the axis of the second focus deflection lens group (6) with predetermined from
Beamlet is overlapped by the track of the second through hole；The axis of tertiary focusing deflection lens group (7) and predetermined ion beam pass through
The track of third through-hole overlaps, and the axis of the 4th focus deflection lens group (8) passes through fourth hole with predetermined ion beam
Track overlap.
In the embodiment of the present invention it is preferred that focus deflection lens group be arranged on corresponding ion repeller near with
The outside (i.e. near the side of hollow region) of the end face of cavity body (1) junction.Focus deflection lens group can also be arranged on
The close inner side (i.e. away from the side of hollow region) with the end face of hollow cavity (1) junction of corresponding ion repeller.
In the embodiment of the present invention, focus deflection lens group can be fixed on corresponding ion repeller it is also possible to fix
On the inwall of hollow cavity, the present invention is not construed as limiting to this.
Based on above-mentioned any embodiment it is preferred that also including the ion beam microporous filter being provided with the through hole of predetermined quantity
Actuator, ion beam microporous filter actuator is arranged at the first focus deflection lens group (5) place, focuses on by first for controlling
The diameter of the ion beam of deflection lens group (5), the aperture of each through hole of ion beam microporous filter actuator is different.
Preferably, ion beam microporous filter actuator is made up of adjustable plate and firmware, adjustable plate is provided with aperture different
Predetermined quantity through hole, adjustable plate is fixed on the first focus deflection lens group (5) or the first ion repeller (3) by firmware
Or on the inwall of hollow cavity (1).
Based on above-mentioned any embodiment it is preferred that hollow cavity (1) is arranged with the junction of the first ion repeller (3)
There is the first electric field shielding plate, the first electric field shielding plate is provided with two through holes, respectively two with the first ion repeller (3)
Through hole corresponds to；Hollow cavity (1) is provided with the second electric field shielding plate, the second electric field with the junction of the second ion repeller (4)
Two through holes are provided with barricade, corresponding with two through holes of the second ion repeller (4) respectively, the first electric field shielding plate and
Second electric field shielding plate is used for making hollow region be in field-off state, and the electric field that shielding focus deflection lens group is formed is to hollow area
Domain is permeated, it is to avoid produce impact on ion beam in the movement locus of hollow region.
On this basis, if focus deflection lens group is arranged on the close of corresponding ion repeller and hollow cavity
(1) outside of the end face of junction.So, the first focus deflection lens group (5) and the second focus deflection lens group (6) are installed on
Between the end face of close above-mentioned junction of described first ion repeller (3) and described first electric field shielding plate；Tertiary focusing
Deflection lens group (7) and the 4th focus deflection lens group (8) are installed on the close above-mentioned junction of the second ion repeller (4)
Between end face and the second electric field shielding plate.
Based on above-mentioned any embodiment, each focus deflection lens group is by one group of single electron optical lens and one group of deflection
Plate forms.
As shown in Fig. 2 the structural representation of the TOF providing for one preferred embodiment of the present invention
Figure.Wherein：
Hollow cavity (1) is rustless steel cylinder, and its arm is provided with four through holes, two of which through hole is provided with point
Sub- pump (201), another two through hole is provided with vacuum gauge (202).
Tandem prime machine corresponding with molecular pump (201) not shown in molecular pump (201), vacuum gauge (202) and Fig. 2
Tool pump, constitutes above-mentioned vacuum keeping apparatus.
The two ends of hollow cavity (1) are provided with metal sealing groove, and two ends are respectively arranged with electric field shielding plate (12).
First ion repeller (3) and the second ion repeller (4) are connected with metal sealing groove respectively.
As shown in figure 3, this two ion repellers are second order no net catoptric arrangement.Second order no net catoptric arrangement can be real
The second order spatial of existing ion beam focuses on, and improves the mass resolution of the mass spectrum of instrument.It should be pointed out that it can also be adopted
The ion repeller of his structure, the present invention is not construed as limiting to this.
As shown in figure 3, be provided with two on the close and end face of the junction of hollow cavity (1) of ion repeller leading to
Hole；The boundary of single order electric field and second order electric field is provided with smooth metal plate (13), and, is provided with this smooth metal plate
Two through holes are corresponding with above-mentioned two through hole respectively；One through hole is provided with the other end of ion repeller, and in test
Stage is connected with microwave channel plate detector.
By adjusting the voltage parameter of ion repeller, it is possible to achieve the second order of ion beam is focused on, sets in the present embodiment
Put 12 millimeters of adjacent electrode piece spacing, single order electric field potential gradient 3.844V/mm, second order electric field potential gradient 2.743V/mm.One
Between both rank electric field and second order electric field, less electric potential gradient is poor, can weaken interpenetrating, simultaneously in light of electric field to each other
Two through holes of sliding metallic plate form similar condenser lenses effect, and ion beam is focused on again.
One end of first focus deflection lens group (5) is fixed on the first ion repeller (3), the electricity of the other end and homonymy
Field shield plate (12) connects, and its axis is overlapped by the track of first through hole with predetermined ion beam.
Focus deflection lens group is made up of one group of single electron optical lens and one group of deflecting plates.In the present embodiment, focus on partially
Turn in lens group one group of deflecting plates and include four, shape is arc, distribution is as shown in Figure 4.
It is additionally provided with ion beam microporous filter actuator (9) at the first focus deflection lens group (5) place, by adjustable plate with admittedly
Part is constituted, and adjustable plate is provided with the through hole of the different predetermined quantity in aperture, it is inclined that adjustable plate is fixed on the first focusing by firmware
Turn in lens group (5).
The structure of the first focus deflection lens group (5) and ion beam microporous filter actuator (9) is as shown in Figure 5.Wherein, from
Beamlet microporous filter actuator (9) is arranged between lens (10) and the deflecting plates (11) of the first focus deflection lens group (5).
One end of second focus deflection lens group (6) is fixed on the first ion repeller (3), the electricity of the other end and homonymy
Field shield plate (12) connects, and its axis is overlapped by the track of the second through hole with predetermined ion beam.Its structure can be joined
According to the structure of above-mentioned first focus deflection lens group, here is omitted.
One end of tertiary focusing deflection lens group (7) is fixed on the second ion repeller (4), the electricity of the other end and homonymy
Field shield plate (12) connects, and its axis is overlapped by the track of third through-hole with predetermined ion beam.Its structure can be joined
According to the structure of above-mentioned first focus deflection lens group, here is omitted.
One end of 4th focus deflection lens group (8) is fixed on the second ion repeller (4), the electricity of the other end and homonymy
Field shield plate (12) connects, and its axis is overlapped by the track of fourth hole with predetermined ion beam.Its structure can be joined
According to the structure of above-mentioned first focus deflection lens group, here is omitted.
Above-mentioned focus deflection lens group can be adjusted in longitudinally (y direction as shown in Figure 5) deflection angle to ion beam
Section, is controlled to ion beam focusing situation simultaneously.Sputter through sample target surface in ion beam and produce, enter the first ion repeller
(3) before, ion filter larger for space divergence is fallen by ion beam microporous filter actuator (9), it is to avoid produce the larger background back of the body
Scape noise, is conducive to improving instrument Sensitivity, improves instrument quality resolution capability.
Through bombarding to solid sample target as a secondary source using oxygen source, produce secondary ion bundle, to secondary ion bundle
Extract and analyzed by TOF provided in an embodiment of the present invention after focusing on.Accordingly, secondary ion bundle is in flight
Flight path in temporal quality analyzer is as shown in fig. 6, in whole process, ion beam movement locus form " N " font structure.
Performance for the TOF for time of flight secondary ion massspectrometry instrument for the present invention is carried out
Test, with the fixing sample of zircon as test sample, is examined for its performance using the time of flight secondary ion massspectrometry instrument voluntarily researched and developed
Examine instrument.In experimentation, experimental situation temperature is fixed as 20 DEG C, air humidity concentration 10%.Using double plasma oxygen from
Component, as primary ion source, bombards to zircon target sample.When single order electric field potential gradient is 3.844V/mm, second order electricity
Field potential gradient is 2.743V/mm, and it is diameter 8mm that ion beam microporous filter actuator selects clear size of opening, and mass spectrograph is internal true
When reciprocal of duty cycle is 1.7 × 10-5Pa, the zircon sample target mass spectrum recording is as shown in Figure 7.
Although preferred embodiments of the present invention have been described, but those skilled in the art once know basic creation
Property concept, then can make other change and modification to these embodiments.So, claims are intended to be construed to including excellent
Select embodiment and fall into being had altered and changing of the scope of the invention.
Obviously, those skilled in the art can carry out the various changes and modification essence without deviating from the present invention to the present invention
God and scope.So, if these modifications of the present invention and modification belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprise these changes and modification.
Claims (8)
1. a kind of TOF is it is characterised in that include：
Hollow cavity (1), under working condition, the hollow region of described hollow cavity (1) is in vacuum field-off state；
Vacuum keeping apparatus (2), are arranged on the outer wall of described hollow cavity (1), for maintaining the hollow of described hollow cavity (1)
Region is in vacuum state；
First ion repeller (3) and the second ion repeller (4), are connected with described hollow cavity (1) respectively；Described first from
It is provided with anti-for ion beam entrance the first ion on the close and end face of described hollow cavity (1) junction of sub- reflector (3)
The first through hole of emitter (3) and the second through hole leaving described first ion repeller (3) for ion beam；Described second ion is anti-
It is provided with the close and end face of described hollow cavity (1) junction of emitter (4) and enter the second ion repeller for ion beam
(4) third through-hole and the fourth hole leaving described second ion repeller (4) for ion beam；
First focus deflection lens group (5), is arranged on the connection of described first ion repeller (3) and described hollow cavity (1)
Place, for being focused by the ion beam of described first through hole and deflect；
Second focus deflection lens group (6), is arranged on the connection of described first ion repeller (3) and described hollow cavity (1)
Place, for being focused by the ion beam of described second through hole and deflect；
Tertiary focusing deflection lens group (7), is arranged on described second ion repeller (4) and the connection of described hollow cavity (1)
Place, for being focused by the ion beam of described third through-hole and deflect；
4th focus deflection lens group (8), is arranged on described second ion repeller (4) and the connection of described hollow cavity (1)
Place, for being focused by the ion beam of described fourth hole and deflect.
2. TOF according to claim 1 is it is characterised in that also include being provided with predetermined quantity
Ion beam microporous filter actuator (9) of through hole, described ion beam microporous filter actuator (9) is arranged at described first and focuses on partially
Turn lens group (5) place, for controlling the diameter of the ion beam by described first focus deflection lens group (5), described ion beam
The aperture of each through hole of microporous filter actuator (9) is different.
3. TOF according to claim 1 and 2 it is characterised in that：
Described first ion repeller (3) is second order net free type catoptric arrangement；
Described second ion repeller (4) is second order net free type catoptric arrangement.
4. TOF according to claim 1 and 2 is it is characterised in that described first ion repeller
(3) and described second ion repeller (4) the one end with described hollow cavity (1) junction is provided with through hole, and
Test phase is connected with ion detector respectively.
5. TOF according to claim 1 and 2 is it is characterised in that described hollow cavity (1) is arranged
There are two seal grooves；
Described first ion repeller (3) and described second ion repeller (4) are connected with a described seal groove respectively.
6. TOF according to claim 1 and 2 is it is characterised in that described hollow cavity (1) and institute
The junction stating the first ion repeller (3) is provided with the first electric field shielding plate, and described first electric field shielding plate is provided with two
Individual through hole is corresponding with two through holes of the first ion repeller (3) respectively；
The junction of described hollow cavity (1) and described second ion repeller (4) is provided with the second electric field shielding plate, and described the
Two through holes are provided with two electric field shielding plates, corresponding with two through holes of the second ion repeller (4) respectively, described first electricity
Field shield plate and described second electric field shielding plate are used for making described hollow region be in field-off state.
7. TOF according to claim 6 is it is characterised in that described first focus deflection lens group
And described second focus deflection lens group (6) is installed on the end of the close described junction of described first ion repeller (3) (5)
Between face and described first electric field shielding plate；
Described tertiary focusing deflection lens group (7) and the 4th focus deflection lens group (8) are installed on described second ion repeller
(4) between the end face of close described junction and described second electric field shielding plate.
8. TOF according to claim 1 and 2 is it is characterised in that each focus deflection lens group
By one group of single electron optical lens (10) and one group of deflecting plates (11) composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510454860.7A CN105097416B (en) | 2015-07-29 | 2015-07-29 | A kind of TOF |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510454860.7A CN105097416B (en) | 2015-07-29 | 2015-07-29 | A kind of TOF |
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| Publication Number | Publication Date |
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| CN105097416A CN105097416A (en) | 2015-11-25 |
| CN105097416B true CN105097416B (en) | 2017-03-01 |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017780A (en) * | 1989-09-20 | 1991-05-21 | Roland Kutscher | Ion reflector |
| CN2622854Y (en) * | 2003-05-20 | 2004-06-30 | 中国科学院安徽光学精密机械研究所 | Linear multiple reflecting flight time mass-spectrograph |
| GB2403063A (en) * | 2003-06-21 | 2004-12-22 | Anatoli Nicolai Verentchikov | Time of flight mass spectrometer employing a plurality of lenses focussing an ion beam in shift direction |
| CN103871829A (en) * | 2012-12-10 | 2014-06-18 | 中国科学院大连化学物理研究所 | Reflection type time-of-flight mass spectrometer with quality filtering function, and use method thereof |
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