CN105090659A - Liquid lead-in pipe of liquid storage trough - Google Patents
Liquid lead-in pipe of liquid storage trough Download PDFInfo
- Publication number
- CN105090659A CN105090659A CN201410191024.XA CN201410191024A CN105090659A CN 105090659 A CN105090659 A CN 105090659A CN 201410191024 A CN201410191024 A CN 201410191024A CN 105090659 A CN105090659 A CN 105090659A
- Authority
- CN
- China
- Prior art keywords
- liquid
- liquid storage
- storage tank
- vertical portion
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L43/00—Bends; Siphons
Abstract
The invention discloses a liquid lead-in pipe of a liquid storage trough. The liquid lead-in pipe comprises a foundation support, a guide pipe and a fastener. A through hole is formed in the center of the foundation support; a flange ring is formed on the outer circumference of the top of the foundation support, and the bottom of the foundation support is installed at an interface of the liquid storage trough. The guide pipe is in a bent shape and comprises a vertical part; the outer diameter of the vertical part is matched with the inner diameter of a through hole; the vertical part is inserted into the through hole, and the vertical part extends to be below a liquid surface in the liquid storage trough. The fastener is tightly connected with the vertical part of the guide pipe and the flange ring, and a position, for fixing the guide pipe, of the fastener also seals the vertical part of the guide pipe and the foundation support. According to the liquid lead-in pipe of the liquid storage trough, the guide pipe extends to be below the liquid surface of the liquid storage trough, so that when liquid is being led in, the liquid can be prevented from directly impacting the liquid surface, and bubbles can be reduced. By adopting the liquid lead-in pipe of the liquid storage trough, the bubbles can be reduced on the premise of keeping certain liquid flow and high production efficiency.
Description
Technical field
The present invention relates to the Liquid transfer technology in semiconductor equipment, more particularly, relate to a kind of liquid ingress pipe of liquid storage tank.
Background technique
In semiconductor processing, need to use a variety of liquid, the Liquid transfer technology therefore in semiconductor equipment is a ring important in semiconductor technology.Fig. 1 a and Fig. 1 b discloses the structure of liquid storage tank and the liquid ingress pipe used in prior art.Fig. 1 a discloses the appearance assumption diagram of liquid storage tank and liquid ingress pipe, and Fig. 1 b discloses the sectional structure chart of liquid storage tank and liquid ingress pipe.As illustrated in figs. ia and ib, structure of the prior art is as follows: the connection of liquid storage tank and liquid ingress pipe realizes mainly through conduit 102 and transform interface 104.Conduit 102, in bending type, generally includes horizontal component 121, vertical portion 122 and connects horizontal component and vertical portion curved portion 123.Transform interface 104 comprises two parts, upper end formation 141 and a lower end structure 142.Lower end structure 142 is for being connected with liquid storage tank 106.Liquid storage tank 106 has interface 161, connecting tube is formed on the bottom of lower end structure 142, and connecting tube has outside thread, and interface 161 has internal thread, and internal thread and outside thread coupling, lower end structure 142 is fixed on liquid storage tank 106.The screw thread of connecting tube and interface is all the screw thread meeting NPT standard.NPT (NationalPipeThread) is a kind of sealing thread, is connected by NPT, achieves sealing between lower end structure 142 and interface 161 simultaneously.The center of lower end structure 142 has through hole 144.Upper end formation 141 and lower end structure 142 are one, and upper end formation 141 is for being connected with conduit 102.The center of upper end formation 141 has attachment hole 143, the internal diameter of attachment hole 143 mates with the external diameter of the vertical portion 122 of conduit 102, because conduit 102 has unified diameter usually, the internal diameter of attachment hole 143 and the diameter matches of conduit 102 therefore in fact also can be thought.Upper end formation 141 is rotational fastener structures, upper end formation 141 can be made to clamp conduit 102 by rotating.Shown in figure 1b, in prior art, the diameter of through hole 144 is the diameters (diameter of vertical portion 122) being less than conduit 102, therefore, the vertical portion 122 of conduit 102 is merely able to the top extending to through hole 144, the i.e. intersection of upper end formation 141 and lower end structure 142, the liquid level 108 in this positional distance liquid storage tank also has quite long distance.When carrying out liquid and importing, liquid can pour liquid level 108 after leaving conduit 102, thus forms a large amount of bubbles 110.It is well known that bubble 110 is very disadvantageous in semiconductor processes, in order to reduce the impact of bubble, just fluid flow must be reduced, or wait for that the bubbles such as time enough are eliminated after importing liquid.But these ways all can affect treatment effeciency undoubtedly.
Summary of the invention
The present invention is intended to the liquid ingress pipe proposing a kind of liquid storage tank, can reduce the bubble produced when importing liquid when not affecting treatment effeciency.
According to one embodiment of the invention, propose a kind of liquid ingress pipe of liquid storage tank, comprising: pedestal, conduit and fastening piece.The center of pedestal has through hole, and pedestal top peripheral forms flange ring, and the bottom of pedestal is arranged on the interface of liquid storage tank.Conduit is bending type, and conduit comprises vertical portion, and the external diameter of vertical portion mates with the internal diameter of through hole, and vertical portion is inserted in through hole, and vertical portion extends to below the liquid level in liquid storage tank.Vertical portion and the flange ring of fastening piece and conduit are fastenedly connected, the position of fastening piece A/C the vertical portion of sealing duct and pedestal.
In one embodiment, interface has internal thread, the bottom of pedestal has outside thread, internal thread and outside thread coupling, and the bottom of pedestal to be fixed on interface and sealing.
In one embodiment, internal thread and outside thread meet NPT standard.
In one embodiment, fastening piece is made up of two semi-annular parts, and two semi-annular parts are held the vertical portion of conduit tightly from both sides and link together, and the bottom of two semi-annular parts is fixed on described flange ring.
In one embodiment, two semi-annular parts have horizontal bolt hole and aligned with each other, two semi-circular shape parts are connected by bolt.Two semi-annular parts and flange ring have longitudinal bolt hole and aligned with each other, two semi-circular shape parts are by being bolted to flange ring.
In one embodiment, the external diameter of the vertical portion of conduit is 1 inch, and the internal diameter of through hole is 1 inch, the outer wall of the vertical portion of conduit and the inwall of through hole all smooth.
In one embodiment, conduit also comprises horizontal component, and horizontal component is vertical angle with vertical portion and is connected by curved portion.
In one embodiment, the vertical portion of conduit, curved portion and horizontal component are equal diameter.
Conduit extends under the liquid level of liquid storage tank by the liquid ingress pipe of liquid storage tank of the present invention, can avoid the direct impact liquid level of liquid, thus reduce the generation of bubble when carrying out liquid and importing.The liquid ingress pipe of liquid storage tank of the present invention can reduce bubble formation with keeping when higher manufacturing efficiency when maintaining certain fluid flow.
Accompanying drawing explanation
The above and other feature of the present invention, character and advantage are by more obvious by what become below in conjunction with the description of drawings and Examples, and reference character identical in the accompanying drawings represents identical feature all the time, wherein:
Fig. 1 a and Fig. 1 b discloses the structure of liquid storage tank and the liquid ingress pipe used in prior art.
Fig. 2 a, Fig. 2 b and Fig. 2 c disclose the structure of liquid storage tank according to one embodiment of the invention and liquid ingress pipe.
Fig. 3 a, Fig. 3 b and Fig. 3 c disclose the structure of pedestal according to one embodiment of the invention and fastening piece.
Embodiment
The present invention proposes a kind of liquid ingress pipe of liquid storage tank, and below liquid level conduit being extended to liquid storage tank, when importing liquid, liquid directly enters under liquid level like this, avoids liquid fall to pouring liquid level from eminence and produce the situation of bubble.
With reference to figure 2a, Fig. 2 b and Fig. 2 c, the liquid ingress pipe of this liquid storage tank comprises pedestal 204, conduit 202 and fastening piece 206.Fig. 2 a is the sectional drawing of the liquid ingress pipe of this liquid storage tank, the assembling stereogram of Fig. 2 b to be the exploded perspective figure of the liquid ingress pipe of this liquid storage tank, Fig. 2 c be liquid ingress pipe of this liquid storage tank.
The center of pedestal 204 has through hole 241, and pedestal 204 top peripheral forms flange ring 242, and the bottom 243 of pedestal 204 is arranged on the interface 281 of liquid storage tank 208.The interface 281 of liquid storage tank 208 is identical with interface 161 of the prior art, not change.Interface 281 has internal thread, and the bottom 243 of pedestal has outside thread, internal thread and outside thread coupling, and the bottom 243 of pedestal to be fixed on interface 281 and sealing.In one embodiment, the outside thread on the internal thread of interface 281 and the bottom 243 of pedestal meets NPT standard.NPT is sealing thread, and therefore by threaded engagement, pedestal is fixed and is connected to hermetically on the interface 281 of liquid storage tank 208.
Conduit 202 is in bending type, and conduit 202 comprises vertical portion 222.In the illustrated embodiment in which, conduit 202 also comprises horizontal component 221, and horizontal component 221 and vertical portion 222 are vertical angle and are connected by curved portion 223.In different applications, alternative horizontal component 221 of also can assigning to the rake in other angle, imports demand to adapt to different liquid.If adopt the incline section of other angle, incline section and vertical portion 222 can be connected by corresponding adjustment curved portion 223.In the illustrated embodiment in which, the vertical portion 222 of conduit 202, curved portion 223 and horizontal component 221 are equal diameter, and which and catheter of the prior art seemingly, are modal modes.In other application, also can use anisodiametric conduit as required, only need carry out the linking between each several part conduit according to the actual requirements.The vertical portion 222 of the mainly conduit that the present invention pays close attention to.The external diameter of vertical portion 222 mates with the internal diameter of through hole 241, and vertical portion 222 is inserted in through hole 241, and as shown in Figure 2 a, vertical portion 222 extends to the liquid level less than 282 in liquid storage tank 208.The outer wall of the vertical portion 222 of conduit and the outer wall of through hole 241 are all smooth (smooth expression do not have screw thread).Smooth surface and the size of coupling make the vertical portion 222 of conduit can slide up and down in through hole 241, the object slided up and down is the height of the bottom in order to regulate vertical portion 222, guarantee to extend to the liquid level less than 282 of liquid storage tank 208, to adapt to liquid level heights different in liquid storage tank 282.In one embodiment, the external diameter of the vertical portion 222 of conduit is 1 inch, and the internal diameter of through hole 241 is also 1 inch.
The Main Function of fastening piece 206 is positions of A/C after the vertical portion 222 of conduit is adjusted to the right place.Fastening piece 206 is fastenedly connected with the vertical portion 222 of conduit 202 and the flange ring 242 of pedestal 204, the position of fastening piece 206 A/C the vertical portion 222 of sealing duct and pedestal 204.
With reference to figure 3a, Fig. 3 b and Fig. 3 c.Fig. 3 a and Fig. 3 b discloses the structure of fastening piece, and Fig. 3 c discloses the structure of pedestal.Fastening piece 206 is by two semi-annular parts: first component 261 and second component 262 are formed.
Two semi-annular parts are held the vertical portion of conduit tightly from both sides and link together, and the bottom of two semi-annular parts is fixed on described flange ring.Fig. 3 a discloses first component 261, and first component 261 has longitudinal bolt hole 263 and horizontal bolt hole 264, first component 261 is a complete semicircular ring substantially.Fig. 3 b discloses second component 262, and second component 262 is not complete semicircular ring, is clipped one piece, carry out construction bolt with slot milling at bolt hole 266 place of the transverse direction of second component 262.Second component 262 also has longitudinal bolt hole 265.The flange ring 242 of pedestal 204 has longitudinal bolt hole 244.
When installing, after adjusting to the right place in the position of conduit 202, two semi-annular parts hold the vertical portion 222 of conduit tightly from both sides, two semi-annular parts, the bolt hole 264 and 266 of the transverse direction on first component 261 and second component 262 is aligned with each other, and bolt is stretched into bolt hole from second component 262 by the space clipped and tightens.After conduit held tightly by fastening piece, be compact siro spinning technology between the two, reach sealing effect.As shown in Fig. 3 c and Fig. 2 c, flange ring 242 offers multiple longitudinal bolt hole 244, illustrated is 6.As shown in Figure 3 a and Figure 3 b shows, the quantity of bolt hole 263 and 265 longitudinal on first component 261 and second component 262 is respectively one, when securing fasteners to pedestal, as long as select one group of bolt hole 244 on flange ring 242, is convenient to position.Bolt is through bolt hole 263 and 265 longitudinal on first component and second component, and bolt hole 244 on corresponding flange ring 242 tightening, fixation fastener and flange ring.Also be compact siro spinning technology between fastening piece and flange ring, reach sealing effect.So, conduit 202 to be fixed on pedestal 204 and to complete the sealing of joint by fastening piece 206.
Conduit extends under the liquid level of liquid storage tank by the liquid ingress pipe of liquid storage tank of the present invention, can avoid the direct impact liquid level of liquid, thus reduce the generation of bubble when carrying out liquid and importing.The liquid ingress pipe of liquid storage tank of the present invention can reduce bubble formation with keeping when higher manufacturing efficiency when maintaining certain fluid flow.
Above-described embodiment is available to be familiar with person in the art to realize or to use of the present invention; those skilled in the art can make various modifications or change to above-described embodiment and not depart from invention thought of the present invention; thus protection scope of the present invention not limit by above-described embodiment, and should be the maximum magnitude meeting the inventive features that claims are mentioned.
Claims (8)
1. a liquid ingress pipe for liquid storage tank, is characterized in that, comprising:
Pedestal, the center of described pedestal has through hole, and described pedestal top peripheral forms flange ring, and the bottom of described pedestal is arranged on the interface of liquid storage tank;
Conduit, conduit is bending type, and described conduit comprises vertical portion, and the external diameter of described vertical portion mates with the internal diameter of described through hole, and vertical portion is inserted in described through hole, and described vertical portion extends to below the liquid level in liquid storage tank;
Fastening piece, vertical portion and the flange ring of fastening piece and conduit are fastenedly connected, the position of fastening piece A/C the vertical portion of sealing duct and pedestal.
2. the liquid ingress pipe of liquid storage tank as claimed in claim 1, it is characterized in that described interface has internal thread, the bottom of described pedestal has outside thread, internal thread and outside thread coupling, and the bottom of pedestal to be fixed on interface and sealing.
3. the liquid ingress pipe of liquid storage tank as claimed in claim 2, it is characterized in that, described internal thread and outside thread meet NPT standard.
4. the liquid ingress pipe of liquid storage tank as claimed in claim 1, it is characterized in that, described fastening piece is made up of two semi-annular parts, and two semi-annular parts are held the vertical portion of conduit tightly from both sides and link together, and the bottom of two semi-annular parts is fixed on described flange ring.
5. the liquid ingress pipe of liquid storage tank as claimed in claim 4, is characterized in that, described two semi-annular parts has horizontal bolt hole and aligned with each other, and two semi-circular shape parts are connected by bolt;
Described two semi-annular parts and flange ring have longitudinal bolt hole and aligned with each other, two semi-circular shape parts are by being bolted to flange ring.
6. the liquid ingress pipe of liquid storage tank as claimed in claim 1, it is characterized in that, the external diameter of the vertical portion of described conduit is 1 inch, and the internal diameter of described through hole is 1 inch, the outer wall of the vertical portion of described conduit and the inwall of through hole all smooth.
7. the liquid ingress pipe of liquid storage tank as claimed in claim 1, it is characterized in that, described conduit also comprises horizontal component, and horizontal component is vertical angle with vertical portion and is connected by curved portion.
8. the liquid ingress pipe of liquid storage tank as claimed in claim 7, is characterized in that, the vertical portion of described conduit, curved portion and horizontal component are equal diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191024.XA CN105090659A (en) | 2014-05-07 | 2014-05-07 | Liquid lead-in pipe of liquid storage trough |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191024.XA CN105090659A (en) | 2014-05-07 | 2014-05-07 | Liquid lead-in pipe of liquid storage trough |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105090659A true CN105090659A (en) | 2015-11-25 |
Family
ID=54571692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410191024.XA Pending CN105090659A (en) | 2014-05-07 | 2014-05-07 | Liquid lead-in pipe of liquid storage trough |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105090659A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110295638A (en) * | 2018-03-22 | 2019-10-01 | 住友建机株式会社 | Excavator |
-
2014
- 2014-05-07 CN CN201410191024.XA patent/CN105090659A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110295638A (en) * | 2018-03-22 | 2019-10-01 | 住友建机株式会社 | Excavator |
| CN110295638B (en) * | 2018-03-22 | 2023-11-03 | 住友建机株式会社 | Excavator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20170009433A1 (en) | Fast installation structure on faucet table | |
| CN203203210U (en) | Drain pipe connecting structure for indoor unit of air conditioner and indoor unit of air conditioner | |
| CN104110817A (en) | Air-conditioning indoor unit and drain pipe connecting structure thereof | |
| CN203671031U (en) | Pipeline fixing hoop | |
| CN105090659A (en) | Liquid lead-in pipe of liquid storage trough | |
| CN106224145A (en) | the fuel oil pump assembly of motorcycle | |
| CN205013917U (en) | Hydraulic pipe -line universal connection head | |
| JP2017044339A (en) | High-speed connection structure of pipe | |
| CN204372403U (en) | Be connected ring | |
| CN204176223U (en) | A kind of improved type deep camber elbow | |
| CN205136103U (en) | Floor fan and top tube fixed structure thereof | |
| CN203082430U (en) | Pipe fitting and pipeline connecting part | |
| CN106592710B (en) | Connecting assembly of wall-buried water pipe | |
| CN205551145U (en) | Soft takeover unscrambler of metal | |
| CN206018102U (en) | A kind of gas distribution joint | |
| CN210684708U (en) | Bendable lengthened funnel | |
| CN204879216U (en) | Tee bend of elbow type | |
| CN205978939U (en) | Water separator | |
| CN205956909U (en) | Crystal ball lamp 's threaded connection structure | |
| CN203795541U (en) | Downcomer with adjustable installation size | |
| CN104896195A (en) | Hot water pipe support mechanism | |
| TWM484695U (en) | Tube fixing structure for air conditioning machine | |
| CN205689979U (en) | A kind of conduit coupling in irrigation | |
| CN202100513U (en) | Air drafting head | |
| CN103115193A (en) | Water pipe support seat for water pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151125 |
|
| WD01 | Invention patent application deemed withdrawn after publication |