CN105074430A - Imaging system - Google Patents
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- CN105074430A CN105074430A CN201480017517.XA CN201480017517A CN105074430A CN 105074430 A CN105074430 A CN 105074430A CN 201480017517 A CN201480017517 A CN 201480017517A CN 105074430 A CN105074430 A CN 105074430A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/02—Food
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/066—Modifiable path; multiple paths in one sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
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- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectroscopy & Molecular Physics (AREA)
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- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
Abstract
The present invention provides an imaging system capable of reducing the generation of interference patterns in a state in which a beam of highly coherent electromagnetic waves is enlarged to a prescribed illumination area and used for illumination by moving the prescribed illumination region within a range of motion that is narrower than the illumination region.
Description
Technical field
The present invention relates to a kind of imaging system and the formation method that use high coherent electromagnetic wave.
Background technology
So-called special hertz (terahertz) ripple the frequency band (from 3mm to the wavelength band scope of 30 μm) of 100GHz to 10THz is called as high coherent electromagnetic wave.Special Hertz wave is located at the electromagnetic wave in the frequency band between infrared ray and radiowave, and have the attribute penetrating paper, plastics, fabric, cigarette, water, semiconductor etc., and have the distinctive absorption spectra of material.In addition, special Hertz wave is more safer than X ray, and is therefore expected to be applied to nondestructive inspection etc.
Propose various technology to use special Hertz wave.Such as, patent documentation 1 (PTL1) discloses a kind of special Hertz wave generation unit, special Hertz wave detecting unit, special hertz time-domain spectroscopy equipment etc. that comprise electromagnetic wave parts for special Hertz wave.Disclosed in PTL1, special Hertz wave generation unit comprises a kind of waveguide, this waveguide comprise propagate light electric light (electro-optic) crystal, for special Hertz wave is got back to optically-coupled component space and two electrodes from the light propagated through waveguide.More specifically, the document 1 quoted indicates by applying electric field via electrode to waveguide, spread state to the light propagated through electro-optic crystal changes, and wherein this produces the phase matching between the light propagated through waveguide and the special Hertz wave generated by second nonlinear process.
Patent documentation 2 (PTL2) discloses a kind of imaging device, this imaging device be separated into from both direction to electro-optic crystal radiated electromagnetic wave, by electromagnetic wave interactional electro-optic crystal two not co polarized component and based on be separated not co polarized component catch image.PTL2 has the signal processing unit for performing difference processing to the signal of image based on not co polarized component.Imaging device according to PTL2 can obtain the image with high S/N ratio.
In addition, patent documentation 3 (PTL3) comprises a kind of electromagnetic wave imaging equipment, this electromagnetic wave imaging equipment comprises for detecting electromagnetic wave to object radiation pulsed to be measured and from object to electromagnetic first optical system of electro-optic crystal radiation detection and for having the second optical system relative to the probing wave detecting the pulse surface that electromagnetic pulse surface tilts to electro-optic crystal radiation, wherein having have passed through the probing wave of electro-optic crystal by camera calibration.
As described above, special Hertz wave is the electromagnetic wave in the frequency band between infrared ray and radiowave, and has the attribute as light, and therefore in the following description, the term relevant with light for illustration of.
Reference listing
Patent documentation
PTL1: Japanese patent application publication No. 2011-203718
PTL2: Japanese patent application publication No. 2012-108117
PTL3: Japanese patent application publication No. 2012-122981
Summary of the invention
Technical matters
Any PTL instruction in PTL1 to 3 to electro-optic crystal radiation two electromagnetic waves, and catches the electromagnetic wave from electro-optic crystal.But, the problem that all unexposed image with obtaining by catching special Hertz wave of any PTL in PTL associates.
According to the research etc. of the present inventor, when finding wherein by using the high-coherence light source just like special Hertz wave to catch object to be measured or object, to be difficult to from the image recognition of catching object to be measured or object.More specifically, when using high-coherence light source wherein, catch interference figure with the mode irradiation light that the shape and darkness with the object of originally intending to catch or object is overlapping, and this makes the shape and the darkness that are difficult to identify object or the object of originally intending to catch as a result.Such as, found that the dust of the small quantity mixed in object or object, hair etc. are by by using the imaging technique of special Hertz wave to identify, and are difficult to the dust, hair etc. from image identification small quantity due to the effect of interference figure.
According to the object of one exemplary embodiment of the present invention be to provide a kind of can alleviate to the generation of interference figure easily and highly effective imaging system.
In addition, the present invention alleviates method by providing a kind of can alleviating to the interference figure of the generation of interference figure.
To the solution of problem
According to an aspect of the present invention, can obtain a kind of imaging system, this imaging system comprises and the beam of high coherent electromagnetic wave is amplified to predetermined irradiation area to irradiate the optical system of predetermined irradiation area and to be used for the mobile device of mobile predetermined irradiation area in the moving range being less than irradiation area.In this case, predetermined irradiation area is the otherwise planar surface area vertical with the beam of high coherent electromagnetic wave.
According to a further aspect in the invention, a kind of interference figure can be obtained and alleviate method, the method comprises to be irradiated predetermined irradiation area with high coherent electromagnetic wave, moves and irradiate light in the scope being less than predetermined irradiation area, namely, make irradiation light carry out shake mobile or in rotary moving, thus therefore alleviate the interference figure generated by irradiating this irradiation area.
Advantageous effects of the present invention
In the present invention, alleviated by the generation of interference figure of irradiating photogenerated, and originally intended the shape etc. of the object to be measured of catching or object and can clearly be identified.
Accompanying drawing explanation
Fig. 1 is the schematic configuration view of the imaging system for illustration of the first exemplary embodiment according to the present invention.
Fig. 2 is the schematic configuration view of the imaging system for illustration of the second exemplary embodiment according to the present invention.
Fig. 3 is the figure for illustration of the image of catching, and wherein (A) is the figure do not applied wherein in situation of the present invention, and (B) is the figure applied wherein in situation of the present invention.
Fig. 4 is the schematic configuration view of the imaging system for illustration of the 3rd exemplary embodiment according to the present invention.
Fig. 5 be a diagram that the polarization of the irradiation light be used as in Fig. 4, that is, the figure of the direction of vibration of electric field.
Fig. 6 is the schematic configuration view of the imaging system for illustration of the 4th exemplary embodiment according to the present invention.
Fig. 7 be a diagram that the polarization of the irradiation light be used as in Fig. 6, that is, the figure of the direction of vibration of electric field.
Embodiment
With reference to Fig. 1, show a kind of imaging system according to one exemplary embodiment of the present invention.Imaging system shown in Fig. 1 is regarded as identification of object 12, such as, and the foreign matter (such as, fabric, metalwork, hair) mixed in the flour that two-dimentional flat surfaces 10 is placed.In the example present, object is regarded as being positioned in the predetermined predetermined inspection area on two-dimentional flat surfaces 10.In example in the accompanying drawings, provide and generate special Hertz wave as the light source 14 of high coherent electromagnetic wave and the lens combination 16 of amplifying from the special Hertz wave of light source 14, and lens combination 16 launches special Hertz wave as the beam being amplified to two-dimentional formula region from light source 14.
The beam being amplified to the special Hertz wave from lens combination 16 in two-dimentional formula region is reflected by catoptron 18, and irradiation object 12 is placed the inspection area of two-dimentional flat surfaces 10 thereon subsequently.In this case, two dimension flat surfaces 10 is arranged to vertical with the beam of the special Hertz wave reflected by catoptron 18, and the optical system be made up of lens combination 12 and catoptron 18 is adjusted, thus the irradiation area 20 of special Hertz wave is made to irradiate the whole subject area of two-dimentional flat surfaces 10.In this case, optical system is made the diameter of irradiation area 20 become D by adjustment.
Imaging system shown in Fig. 1 comprises the shake shake travel mechanism 22 of catoptron 18 and the image capture device 24 for catching the image in irradiation area 20.Image capture device 24 can be such as infrared ray camera or can be CCD camera etc.
Catoptron 18 shakes in shake travel mechanism 22 for shaking catoptron 18, thus makes the irradiation area 20 of diameter D not exceed the diameter D of irradiation area 20.Shake travel mechanism 22 can be in microscopic ranges mechanically rotating mirror 18 mechanism or can be for the mechanism according to electric signal oscillating mirror 18.
More specifically, shake travel mechanism 22 can the shake movement based on catoptron 18, the shake moving range d of irradiation area D do not exceed in the such degree of the diameter D of irradiation area 20 and shakes catoptron 18.More specifically, shake moving range d is the scope of the diameter D being less than irradiation area 20, and relation d<D or d<<D is satisfied.
In this case, based in the imaging of plain scan, the scanning of point-like irradiation area is greater than the scope of irradiation area.But, as described above, based in the imaging of plain scan, need to perform image capture for a long time, and be not suitable in the short time, find very little foreign matter based on the imaging of plain scan.Contrast with plain scan, the present invention performs imaging by shaking irradiation area 20 when whole irradiation area 20 is illuminated in the scope being less than irradiation area 20.During shake is mobile, object is disposed in irradiation area, and image is caught by image capture device 24 when object does not depart from irradiation area.
As described above, utilize the shake in the scope d of the diameter D being less than irradiation area 20 to move, the interference figure caused by imaging in shake moving range by average.As a result, interference figure is alleviated in the image of being caught by image capture device 24, and interference figure is more impossible is seen in visual aspects.
In this case, when the diameter D of irradiation area 20 is 10mm and 0.35mm with shake moving range d respectively, can eliminate in visual aspects the interference figure occurred in the picture.This means that, when shaking moving range d and being configured to about 3 to 5% of the diameter of irradiation area 20, interference figure occurs at the non-explicitly of visual aspects.
Imaging system as shown in Figure 1 uses image capture device 24 to catch reflected image from the object be disposed in irradiation area 20.But, the present invention is not limited thereto.Image through irradiation area 20 can be observed.
With reference to Fig. 2, the imaging system according to the second exemplary embodiment of the present invention is illustrated.Be different from Fig. 1 of imaging system as shown in Figure 2 replaces catoptron 18 as shown in Figure 1, provides the parallel flat 26 allowing the beam from the special Hertz wave of light source 14 and lens combination 16 pass through.As parallel flat, such as, for special Hertz wave, there is transparent glass plate and can be used as parallel flat 26.In this case, in the beam of special Hertz wave incident on glass plate 26, owing to shaking the Angulation changes of the beam of mobile and incident on glass plate 26 special Hertz wave, so there is the reflectivity change of the beam launched from glass plate 26.As a result, the irradiation area 20 of diameter D reciprocally moves along shake moving range d.
Image capture device 24 catches the image of reflected light from shake irradiation area 20.Irradiation area 20 to move and by average due to the shake of irradiation area 20, and therefore interference figure can not be observed in the image of being caught by image capture device 24 in visual aspects, and image can be obtained with the foreign matter made it possible in clearly identification of object.
Shake travel mechanism 22 shown in Fig. 1 and Fig. 2 is attached to catoptron 18 or glass plate 26.More specifically, shake travel mechanism 22 can have provide at the two ends of the central shaft of catoptron 18 for such as rotating in microscopic ranges with galvanometer mirror form in response to electric signal and the mechanism of mobile mirror 18 or glass plate 26.
On the other hand, shake travel mechanism 22 can be the mechanism of the glass plate for being used as parallel flat 26 around the shaft vibration vertical with optical axis provided in illumination path as shown in Figure 2.Alternatively, parallel flat 26 can be arranged obliquely relative to the optical axis irradiating light, and can by using ultrasonic motor or general motor around the optical axis rotating parallel flat board 26 of illumination path.As described above, dull and stereotyped by rotating parallel, also can in the scope d being less than irradiation area 20 mobile irradiation area 20.In this case, scope d can be called as moving range relative to irradiation area.System as shown in Figure 2 is moving parallel flat board 26 in horizontality, and the driving mechanism that therefore can simplify for parallel flat 26 or shake travel mechanism 22.
Image capture device 24 also can be such as made up of bolograph type infrared ray image capture device, in this bolograph type infrared ray image capture device, arrange thermoelectric conversion element in two-dimensional matrix mode.
With reference to Fig. 3 (A) and Fig. 3 (B), in Fig. 3 (A), the example not applying the present invention and captured image is shown.In this case, Fig. 3 (A) shows and wherein in flour, mixes the situation of hair 30 as foreign matter.Under not applying situation of the present invention as shown in Fig. 3 (A), interference figure 32 occurs in background.In such state that interference figure 32 occurs wherein, the hair 30 as foreign matter is covered by bar shaped interference figure 32, and this makes to be difficult in many cases identify hair 30.
On the other hand, Fig. 3 (B) shows image when shaking irradiation area according to the present invention wherein.As can be expressly understood from Fig. 3 (B), eliminated bar shaped interference figure from the background of the hair 30 as foreign matter, and only emphasize the hair 30 as foreign matter.
Therefore, be easy to clearly identify foreign matter from the image shown in Fig. 3 (B).
With reference to Fig. 4, show the imaging system according to the 3rd exemplary embodiment of the present invention.Although imaging system has the mirror of imaging system just as shown in Figure 1 as shown in Figure 4, imaging system is different from Fig. 1 is as shown in Figure 4 that imaging system as shown in Figure 4 comprises two mirrors 18A, 18B instead of single mirror.By using two mirrors, one of mirror (that is, mirror 18) A is in the X direction around Z axis shake, and another mirror (namely, mirror 18B) in the Y direction around X-axis shake, thus irradiation area 20 shakes in two dimensions in two-dimentional flat surfaces 10.Even if utilize such layout, the shake of interference figure also irradiated area 20 move average, and therefore can not in visual aspects from the image observation interference figure of being caught by image capture device, and image can be obtained to make it possible to the foreign matter in clearly identification of object.
Incidentally carry a bit, when polarized light (that is, with the electric field that irregular manner vibrates in particular directions) is used as the irradiation light in as shown in Figure 4 layout wherein, polarised direction can change on the direction different from set direction.Occur in plane of incidence (vertical with the plane of reflection and include the surface of irradiating light beam and folded light beam) the orthogonal situation of these such as two mirrors wherein.This is illustrated with reference to Fig. 5, should be understood that the direction of vibration of electric field is vibrating relative on the vertical direction of direct of travel, but after passing two mirrors, the direction of vibration of electric field is vibrating relative in the horizontal direction of direct of travel.Figure 6 illustrates the imaging system according to the 4th exemplary embodiment of the present invention.Imaging system as shown in Figure 6 comprises the orthogonal two pairs of mirrors of its plane of incidence to 18 and 18 '.Among them, mirror comprises shake mobile device 22A, 22B to 18 (18A and 18B), and another mirror does not comprise shake mobile device to (that is, mirror is to 18 ').
Fig. 7 illustrates the direction of vibration of the electric field in Fig. 6.First, relative to the light that the vertical direction of direct of travel vibrates light through mirror to 18 after vibrating relative in the horizontal direction of direct of travel, and light through another mirror to 18 ' after, light is vibrating relative on the vertical direction of direct of travel again.As described above, in order to be moved average interference figure by the shake of irradiation area 20, be apparent that at least one mirror of shake mirror centering is to just enough.
According to imaging system of the present invention described above, can not apply with the beam irradiation object of the irradiation light than the large several order of magnitude of diffraction restriction for preventing the complex measures that reflects and for preventing the measure of the diffraction to illuminating optical system and object.Therefore, utilize the present invention, advantage is once to be captured in the scope in the wide visual field, and can improve image capture quality in large quantities, and can perform image capture process at a high speed.
Industrial applicibility
In above exemplary embodiment, only described the situation wherein using special Hertz wave, but the present invention also can be applied to a kind of imaging system using high relevant visible light lasers etc.In this case, image capture device is without the need to using infrared ray image capture device, and image capture device can be CCD camera.
Hereafter in supplementary remarks, feature of the present invention will be described.
[supplementing remarks 1]
A kind of imaging system, comprising: optical system, the beam of high coherent electromagnetic wave is amplified to predetermined irradiation area to irradiate predetermined irradiation area by this optical system; And mobile device, this mobile device is used for mobile predetermined irradiation area in the moving range being less than irradiation area.
[supplementing remarks 2]
A kind of imaging system, wherein irradiation area is the flat surfaces vertical with the beam of irradiation light incident on irradiation area.
[supplementing remarks 3]
A kind of imaging system, comprising: image capture apparatus, this image capture apparatus is for being captured in the image of the object arranged in irradiation area.
[supplementing remarks 4]
A kind of imaging system, wherein high coherent electromagnetic wave is the electromagnetic wave of special hertz band.
[supplementing remarks 5]
A kind of imaging system, wherein mobile device is the shake mobile device for shaking irradiation area in the moving range that can alleviate the interference figure generated by irradiation.
[supplementing remarks 6]
A kind of imaging system, wherein optical system comprise launch high coherent electromagnetic wave light source, for the lens combination that high coherent electromagnetic wave is amplified to predetermined irradiation area and the photosystem be used for from lens combination to irradiation area navigation rays bundle.
[supplementing remarks 7]
A kind of imaging system, the photosystem wherein for guiding to irradiation area comprises for from lens combination to the mirror of irradiation area reflected ray bundle.
[supplementing remarks 8]
A kind of imaging system, wherein shakes mobile device according to galvanometer mirror form, for shaking the mechanism of mirror in the moving range being less than irradiation area.
[supplementing remarks 9]
A kind of imaging system, the photosystem wherein for guiding to irradiation area comprises the parallel flat the illumination path being inserted in and extending from lens combination.
[supplementing remarks 10]
A kind of imaging system, wherein mobile device is the shake mobile device for shaking parallel flat in moving range around the axle vertical with optical axis.
[supplement remarks 11
A kind of imaging system, wherein shaking mobile device is for the whirligig around the axle rotating parallel flat board vertical with optical axis.
[supplementing remarks 12]
A kind of interference figure alleviates method, comprising: irradiate predetermined irradiation area with high coherent electromagnetic wave, mobile irradiation light in the scope being less than predetermined irradiation area, and therefore alleviates the interference figure generated by irradiating this irradiation area.
[supplementing remarks 13]
A kind of imaging system, comprise: optical system, this optical system for forming the irradiation area of the beam of high coherent electromagnetic wave on two-dimentional flat surfaces, and mobile device, at least one for relatively moving in the moving range being less than irradiation area in two-dimentional flat surfaces and optical system of this mobile device.
Label list
10 two-dimentional flat surfaces 10
12 objects
14 light sources
16 lens combinations
18 catoptrons
18A mirror
18B mirror
20 irradiation areas
22 shake travel mechanisms
22A shakes travel mechanism
22B shakes travel mechanism
24 image capture devices
26 parallel flats
The application based on its disclosure is incorporated into this completely, is filed in the 2013-072864 Japanese patent application submitted on March 29th, 2013 and is filed in the 2014-019269 Japanese patent application on February 4th, 2014 by reference, and requires the right of priority of these two parts of Japanese patent applications.
Claims (16)
1. an imaging system, comprising: optical system, and the beam of high coherent electromagnetic wave is amplified to predetermined irradiation area to irradiate described predetermined irradiation area by described optical system; And mobile device, described mobile device is used for mobile described predetermined irradiation area in the moving range being less than described irradiation area.
2. an imaging system, wherein said irradiation area is the flat surfaces vertical with the described beam of irradiation light incident on described irradiation area.
3. the imaging system according to claims 1 or 2, comprising: image capture apparatus, and described image capture apparatus is for being captured in the image of the object arranged in described irradiation area.
4. the imaging system according to the arbitrary claim in claims 1 to 3, wherein said high coherent electromagnetic wave is the electromagnetic wave of special hertz band.
5. the imaging system according to the arbitrary claim in Claims 1-4, wherein said mobile device is the shake mobile device for shaking described irradiation area in the described moving range that can alleviate the interference figure generated by described irradiation.
6. the imaging system according to the arbitrary claim in claim 1 to 5, wherein said optical system comprise launch described high coherent electromagnetic wave light source, for described high coherent electromagnetic wave being amplified to the lens combination of described predetermined irradiation area and being used for guiding from described lens combination to described irradiation area the photosystem of described beam.
7. imaging system according to claim 5, the described photosystem wherein for guiding to described irradiation area comprises the mirror for reflecting described beam from described lens combination to described irradiation area.
8. imaging system according to claim 7, wherein said mirror comprises mirror pair, and the right plane of incidence of described mirror is mutually vertical.
9. imaging system according to claim 8, each mirror in wherein said mirror comprises described shake mobile device.
10. imaging system according to claim 7, comprising: multiple mirror pair, and the right plane of incidence of described mirror is mutually vertical, and wherein:
At least one mirror is to comprising described shake mobile device, and other mirror is to not comprising described shake mobile device.
11. imaging systems according to the arbitrary claim in claim 5 to 7, wherein said shake mobile device is according to galvanometer mirror form, for shaking the mechanism of described mirror in the described moving range being less than described irradiation area.
12. imaging systems according to claim 6, the described photosystem wherein for guiding to described irradiation area comprises the parallel flat the illumination path being inserted in and extending from described lens combination.
13. imaging systems according to claim 12, wherein said mobile device is the shake mobile device for shaking described parallel flat in described moving range around the axle vertical with optical axis.
14. imaging systems according to claim 12, wherein said shake mobile device is the whirligig for rotating described parallel flat around the axle vertical with optical axis.
15. 1 kinds of interference figures alleviate method, comprising: irradiate predetermined irradiation area with high coherent electromagnetic wave, mobile described irradiation light in the scope being less than described predetermined irradiation area, and therefore alleviate the interference figure generated by irradiating described irradiation area.
16. 1 kinds of formation methods, comprise: irradiate predetermined irradiation area with high coherent electromagnetic wave, mobile described irradiation light in the scope being less than described predetermined irradiation area, and the foreign matter of the object being arranged in described irradiation area is detected by irradiating described irradiation light.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-072864 | 2013-03-29 | ||
| JP2013072864 | 2013-03-29 | ||
| JP2014019269 | 2014-02-04 | ||
| JP2014-019269 | 2014-02-04 | ||
| PCT/JP2014/058706 WO2014157431A1 (en) | 2013-03-29 | 2014-03-19 | Imaging system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105074430A true CN105074430A (en) | 2015-11-18 |
Family
ID=51624394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480017517.XA Pending CN105074430A (en) | 2013-03-29 | 2014-03-19 | Imaging system |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20160077021A1 (en) |
| EP (1) | EP2980561A4 (en) |
| JP (1) | JPWO2014157431A1 (en) |
| KR (1) | KR20150137097A (en) |
| CN (1) | CN105074430A (en) |
| RU (1) | RU2015146616A (en) |
| WO (1) | WO2014157431A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016050935A (en) * | 2014-08-29 | 2016-04-11 | キヤノン株式会社 | Inspection device and inspection method |
| JPWO2016178317A1 (en) * | 2015-05-07 | 2018-02-22 | 日本電気株式会社 | Optical device |
| CN105044017B (en) * | 2015-06-26 | 2018-02-09 | 北京航天易联科技发展有限公司 | A kind of THz wave safety check imaging device |
| KR102129678B1 (en) | 2018-10-02 | 2020-07-03 | 한양대학교 산학협력단 | Specimen Inspection Device and Specimen Inspection Method |
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| RU2237267C2 (en) * | 2001-11-26 | 2004-09-27 | Волков Леонид Викторович | Method for forming images in millimeter and submillimeter waves range (variants) and system for forming images in millimeter and submilimeter waves range |
| JP3729156B2 (en) * | 2002-06-07 | 2005-12-21 | 株式会社日立製作所 | Pattern defect detection method and apparatus |
| JP5043488B2 (en) * | 2007-03-30 | 2012-10-10 | キヤノン株式会社 | Detection apparatus and imaging apparatus |
| US8045181B2 (en) * | 2009-05-21 | 2011-10-25 | General Electric Company | Inspection system and method with multi-image phase shift analysis |
| JP5709562B2 (en) | 2010-03-04 | 2015-04-30 | キヤノン株式会社 | Terahertz wave generating element and terahertz time domain spectrometer |
| JP2012108117A (en) | 2010-10-25 | 2012-06-07 | Olympus Corp | Imaging device |
| JP5609696B2 (en) | 2010-11-15 | 2014-10-22 | 富士通株式会社 | Electromagnetic imaging device |
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2014
- 2014-03-19 US US14/781,208 patent/US20160077021A1/en not_active Abandoned
- 2014-03-19 EP EP14773413.1A patent/EP2980561A4/en not_active Withdrawn
- 2014-03-19 RU RU2015146616A patent/RU2015146616A/en unknown
- 2014-03-19 JP JP2015508644A patent/JPWO2014157431A1/en active Pending
- 2014-03-19 WO PCT/JP2014/058706 patent/WO2014157431A1/en active Application Filing
- 2014-03-19 CN CN201480017517.XA patent/CN105074430A/en active Pending
- 2014-03-19 KR KR1020157030976A patent/KR20150137097A/en not_active Application Discontinuation
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Also Published As
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| RU2015146616A (en) | 2017-05-05 |
| KR20150137097A (en) | 2015-12-08 |
| JPWO2014157431A1 (en) | 2017-02-16 |
| WO2014157431A1 (en) | 2014-10-02 |
| US20160077021A1 (en) | 2016-03-17 |
| EP2980561A4 (en) | 2016-11-23 |
| EP2980561A1 (en) | 2016-02-03 |
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