CN105073281B - The sensor device and method that ambient enviroment for vehicle detects - Google Patents

The sensor device and method that ambient enviroment for vehicle detects Download PDF

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Publication number
CN105073281B
CN105073281B CN201480017488.7A CN201480017488A CN105073281B CN 105073281 B CN105073281 B CN 105073281B CN 201480017488 A CN201480017488 A CN 201480017488A CN 105073281 B CN105073281 B CN 105073281B
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China
Prior art keywords
diaphragm
acoustic transducer
transducer means
sensor
sensor device
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CN201480017488.7A
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Chinese (zh)
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CN105073281A (en
Inventor
D·巴尔特伊拉
T·特肋普托
D·施密德
M·舒曼
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Robert Bosch GmbH
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Robert Bosch GmbH
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521Constructional features
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/01Electrostatic transducers characterised by the use of electrets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • G01S15/93Sonar systems specially adapted for specific applications for anti-collision purposes
    • G01S15/931Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G01S2015/932Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles for parking operations
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10General applications
    • H04R2499/13Acoustic transducers and sound field adaptation in vehicles

Abstract

A kind of sensor device (1) is proposed according to the present invention, comprising: the first acoustic transducer means (10), there is at least one to be configured to the surface of diaphragm (12) for it, wherein the diaphragm (12) is suitable for transmitting ultrasonic wave.Such acoustic transducer means (10) are also referred to as flexural vibration device and can produce the sound wave with relatively high acoustic pressure.Sensor device (1) according to the present invention has the second acoustic transducer means (20) comprising multiple sensor elements (22a-22i), the multiple sensor element are arranged to an array.It herein proposes, the construction that the second acoustic transducer means (20) are arranged in the first acoustic transducer means (10) is on the surface (12) of diaphragm.According to the present invention, the second acoustic transducer means (20) include sensor element (22a-22i), and the sensor element is configured to electret transducer element.Such sensor device (1) is especially it is so structured that the ultrasonic sensor devices that the ambient enviroment for vehicle detects.

Description

The sensor device and method that ambient enviroment for vehicle detects
Background technique
Now, ultrasonic sensor (USS) for example supports the driver of vehicle in parking process.Here, USS is simultaneously Serve as transmitters and receivers.Transmitted ultrasonic signal is by object reflection.Then sought by propagation time calculating with it is right The distance of elephant.The lateral position of object is determined by means of triangulation.
Known ultrasonic sensor usually has piezoelectric element, the diaphragm connection of the piezoelectric element and ultrasonic sensor. It can make the diaphragm vibration of ultrasonic sensor, by the corresponding control of piezoelectric element to send acoustic signal.It is anti-in order to receive Signal is penetrated, the vibration of diaphragm is converted into corresponding voltage signal by piezoelectric element.
In the scope by the object distance computation of triangulation, reflection signal incidence angle determines the inaccurate of aspect Property leads to the unreliability of distance calculated.In the case that the problem particularly occurs in multiple reflective objects, to generate more Justice, the ambiguity are no longer able to realize the accurate determination of object's position.Therefore, for safety reasons, usually to driver Illustrate most short possible spacing.The use of supersonic array (USA) provides a possibility that a kind of improvement angle determines precision.This is more The arrangement of a single sensor element, the multiple single sensor element is ideally with the phase less than 1/2 wavelength Mutual spacing arrangement.Because USA generates smaller acoustic pressure by area usually smaller compared with traditional comparable USS, Usually divide sending function and receive capabilities.This means that needing additional assembly space, furthermore must install on vehicle can The add ons seen.
A kind of ultrasound transducer array as known to 03/092915 A2 of WO on diaphragm.By diamond or diamond-like-carbon Manufactured diaphragm is equipped with barrier layer and piezoelectric layer.Multiple the first and second electrode arrangements being spatially separated are over the piezoelectric layer. Piezoelectric layer can be motivated to be vibrated by applying alternating voltage between the first electrode and the second electrode.It can by arrangement electrode Individually to motivate each region of diaphragm to be vibrated, to be mounted with multiple ultrasonic transducers on diaphragm.
As known to 10 2,004 050 794 A1 of DE it is a kind of for directionally send the supersonic array of ultrasonic signal and use In the application for the receiver for receiving ultrasonic echo.Supersonic array and ultrasonic receiver are spatially mutual in published equipment Discretely arrange.Emit signal along the direction determined by supersonic array.The direction can be swung herein, so as to gradually with sound Valve scans vehicle-periphery.Ultrasonic echo is received by one or more receivers, wherein receiver be not for direction is determining and Prepare.Direction is calculated by signal propagation time and the direction of the launch.
A kind of sensor device as known to also undocumented DE 102012205996.2, the sensor device include first There is at least one to be configured to the surface of diaphragm for acoustic transducer means, first acoustic transducer means, and wherein the diaphragm is suitable for Emit sound wave.Such acoustic transducer means are also referred to as bending vibration device and can produce the sound with relatively high acoustic pressure Wave measures at the distance of 30cm, typically about 103-109dB on perpendicular bisector.Sensor device is filled with the second sonic transducer It sets, which includes multiple sensor elements, and the multiple sensor element is arranged to an array.It mentions herein Out, it is on the surface of diaphragm that the second acoustic transducer means, which are arranged in the construction of the first acoustic transducer means,.Such sonic transducer Device especially can be structured as the ultrasonic sensor devices detected for the ambient enviroment of vehicle.
It is integrated into a component by two sonic transducer schemes, can be filled in an advantageous manner by the first sonic transducer The detection relevant to angle realized high acoustic pressure and realize reflected acoustic wave by the second acoustic transducer means is set, without The component of two separation, described two additional construction spaces of isolated part requirement.
Summary of the invention
The sensor device as known to DE 102012205996.2 is extended and improved according to the present invention, and mode is to propose Constitute the second acoustic transducer means, i.e. the sensor element of array is configured to electret transducer element.
Electret transducer element according to the present invention is interpreted as the energy converter to work according to electret principle.Here, passing Sensor component has cap rock, and the cap rock is designed as vibrating diaphragm.When being reached when acoustic signal, for example by the sound of object reflection, Cap rock moves and causes the variation of capacitor, and the variation of the capacitor can measure.Then amplified by way of electricity and analysis is handled The signal.By by sensor arrangement at an array, can with other information, such as
The material that charge can be stored in longer time and temperature range is referred to as electret.In electret transducer In --- be different from such as capacitor-type microphone --- internal dc voltage has been passed through during manufacturing process it is corresponding Charging is applied in electret.It eliminates herein and the necessity of the external voltage source of DC voltage is provided, this causes cost Advantage.Electret is being located between two electrodes in electret transducer, so that charge generates electric field.In some known constructions In, electret is diaphragm and therefore actively vibrates together.In other known construction, electret is fixed on no motion of electricity On extremely.
As charging possibility, different methods is available.It is having a preference for for construction according to the present invention, be used for It is corona charging and contact charging to the method that electret charges.But the side is not limited to for a possibility that charging Method.General introduction about the known method for charging for example " Electrets " (G.M.Sessler, Springer-Verlag, The second edition, 1987) in provide.
Sensor device according to the present invention has the advantage that the vibration die-away time of the first acoustic transducer means can be with It is adjusted by active with therefore active attenuation and is shortened.Here, the piezoelectric element motivated is used for example as actuator and Two acoustic transducer means are used as sensor.Therefore, can or largely abandon through the decaying of respective material or Attenuating material is utilized only supportively.This causes that significant higher acoustic pressure can be used, without increasing measurable minimum Spacing.Furthermore, it may be necessary to abandon it is additional, serve as transformer () coil, the coil is known For generating the required voltage in big bandwidth and piezoelectric ceramics in the reception operation of ultrasonic sensor in system.The function Property for example instead can directly be realized in analysis and processing unit in sensor device according to the present invention.It is analyzing Merge in processing unit and handles these signals.This is required because after sending diaphragm do not have it is static in the case where On the one hand it identifies that the transient state of diaphragm is vibrated and is on the other hand identified by the received reflecting vibrations of the second acoustic transducer means (to return Wave).Analysis and processing unit, which can be separated and individually be analyzed, handles these signals.
Therefore, according to the present invention, vibrating diaphragm undertakes the function of transmitter, is held by the array that multiple sensor elements form Carry on a shoulder pole the function of receiver.
It is particularly preferred that the sensor element for constituting the second acoustic transducer means is arranged in the structure of the first acoustic transducer means Make in the following region for the surface of diaphragm: the region when motivating diaphragm vibration along perpendicular to diaphragm plane direction without Deviated or be only subjected to small offset.This is, for example, following region: diaphragm is with determining transmission frequency in this region There is node of oscillations when excitation.The arrangement has the advantage that acoustic transducer element is also only passed through in the judder of diaphragm It is not subjected to offset by small mechanical load and along the direction of vibration of diaphragm or is only subjected to small offset.It follows that film The vibration of piece influences array element as small as possible.Here, the center of diaphragm be usually peak excursion and therefore maximum shadow Loud region, and fringe region is the region with minimum influence.
Preferably, the first acoustic transducer means (transmitter) are designed as the bending vibration for having piezoelectric ceramics as actuator Device.According to the present invention, the second acoustic transducer means with multiple sensor elements (array) utilize electret as energy converter Principle.Here, the second acoustic transducer means preferably have cap rock, the cap rock is designed as vibrating diaphragm.The cap rock for example may be used With cover all the sensors element, i.e. for all the sensors element be it is public or only covering determine group sensor element Or single sensor element.When reaching when signal, for example by the sound of object reflection, cap rock moves and causes the variation of capacitor, The variation of the capacitor can measure.It can then be amplified by way of electricity and be analyzed and handle the signal.
Cap rock for example can be by metal material --- and such as aluminium or high-quality steel are made, or can also be answered by compo Object --- such as CFK or GFK are made for conjunction.Bonding agent can conductively construct in of the invention first is implemented.
, must be by applying electric wire if bonding agent is nonconducting in substitution of the invention is implemented --- for example twist Zygonema or metal wire realize the electrical contact with cap rock, and the cap rock is counter electrode.In order not to generate short circuit, in the implementation The partial region for being applied with array of the diaphragm of bending vibration device must be nonconducting.This can for example pass through the part area The electroxidation (anodic oxidation) in domain is realized.As long as diaphragm is made of conductive aluminum as a result, nonconducting ceramics are generated.Then, exist Printed conductor can be applied on ceramics, such as pass through vapour plating, sputtering, silk-screen printing or other coating methods.
Such as by conduction as long as the electret with FEP, PTFE or similar material itself (as long as it as film presence) Bonding agent is adhered on shaped electrode.Preferably (downward) is vaporized on side to be contacted electret film in this case, because There is very low surface energy for FEP or PTFE, to be bonded almost impossible.Bonding for example can also be by with lower section Formula avoids: electret being heated up to the temperature close to its fusion temperature and is then laminated on diaphragm.If electret with The form of dissolution exists, such as Teflon AF (amorphous fluoropolymer) or the Cytop (fluororesin) of Asahi Glass company, then The electret can be applied such as spot printing (Auftropfen) or weaving (Spinnen) by other methods.
In the preferred implementation of sensor device according to the present invention, the first acoustic transducer means include tank shape element, institute Stating tank shape element includes bottom surface and edge surface, wherein the bottom surface is preferably configured as diaphragm.In order to motivate diaphragm vibration, be equipped with The piezoelectric element of the film contact.Therefore, the first acoustic transducer means correspond to conventional ultrasonic transducer in the implementation, Sensor device to so implement can simply substitute conventional ultrasonic sensor installation, without matching --- example As kept.The construction that the sensor element of second acoustic transducer means is preferably placed in tank shape element is the bottom surface of diaphragm On side outside upper, especially bottom surface direction.
Printed conductor is preferably applied on diaphragm, and mode is, such as applies by being bonded and be vapor-deposited with printed conductor The construction of film to first acoustic transducer means is on the surface of diaphragm.Film can especially be related to Kapton or Teflon film.Such film is primarily characterized in high-fire resistance and good electrical insulation characteristics.
In a kind of substitution of the invention is implemented, the second acoustic transducer means are applied on printed circuit board flexible, Described in printed circuit board flexible there is printed conductor and electrode, wherein the printed circuit board flexible especially with the film Piece bonding.This can be realized the particularly simple manufacture of sensor device according to the present invention.
In order to be protected with anti-tamper, the sensor element of the second acoustic transducer means is equipped with coating, such as has There is compo compound.In addition, in order to which additional sealing and protection are influenced with moisture proof and other environment, it is preferable that At least one of sensor element of second acoustic transducer means can be by the covering for example in the form of cover or sealing film Element covering.
It is that cladding element preferably can be structured as tank shape and the first and second acoustic transducer means or is completely covered The diaphragm of two acoustic transducer means and the first acoustic transducer means.
Sensor device according to the present invention is suitable for motor vehicle or robot ambient enviroment detection, particularly suitable for parking Auxiliary system is also suitable for autonomous driving platform.
Furthermore according to the present invention, a kind of method that the ambient enviroment for especially vehicle detects is set, wherein applying basis Sensor of the invention device.The method proposes that first acoustic transducer means send acoustic signal, the acoustic signal It can be reflected on one or more objects, second acoustic transducer means receive reflection signal, and carry out the reflection The analysis relevant to angle of signal is handled.Analysis processing relevant to angle is especially appreciated that as by the second acoustic transducer means Sensor element be arranged as acoustic transducer array can be based on by the time difference between the received sound wave of respective sensor element With the location and shape of the following object of phase difference detection: sound wave is reflected on the object.
It is proposed in a kind of preferred implementation according to the method for the present invention, after sending acoustic signal, in the following manner It realizes the decaying of the first acoustic transducer means: especially carrying out the reverse phase control of the first acoustic transducer means.Here, rising tone transducing Device device be used as control regulating loop, so as to determine the first acoustic transducer means diaphragm vibration current phase And/or frequency and/or amplitude.The current phase and/or frequency of the vibration of diaphragm obtained about the first acoustic transducer means The information of rate and/or amplitude is for so controlling the first acoustic transducer means, so that realizing transient state vibration quickly and efficiently Decaying.
Sensor device according to the present invention for example applies the vehicle driver system in the vehicle for daily road traffic In vehicle on system, airport, in the vehicle in harbour, in the vehicle in warehouse, in the vehicle on construction site, in road construction Vehicle in, but be also used in the space ship docked with other space ships, or be used for machine and robot.
Detailed description of the invention
Fig. 1 shows the implementation of the first acoustic transducer means;
Fig. 2 shows the sensor devices of first embodiment according to the present invention;
Fig. 3 illustrates the sensor device of second embodiment according to the present invention with sectional view and vertical view;
Fig. 4 is shown in section the sensor device of third embodiment according to the present invention;
Fig. 5 is shown in section the sensor device of fourth embodiment according to the present invention.
Specific embodiment
Fig. 1 is schematically to have an X-rayed the one embodiment illustrated for the first acoustic transducer means 10.First sound transducing Device device 10 includes tank shape element 11, and the tank shape element can for example be made of plastics or aluminium.The element 11 includes being configured to The bottom surface 12 of diaphragm 12 and circular edge surface 14.Bottom surface 12 constructs substantially circularly.Diaphragm 12 for example can be with element 11 It constructs, or is fixed on circular edge surface 14 as individual component one-piece.Edge surface 14 deviates from bottom surface 12 along it Seamed edge direction have circular protrusion 16.The protrusion 16 is used to element 11 being fixed on not showing on such as motor vehicle In the receiving portion of sensor housing out.Unshowned piezoelectric element is in known manner on diaphragm 12 so be arranged on, so that The piezoelectric element can motivate diaphragm 12 to be vibrated, and be achieved in the transmitting that sound wave passes through the first acoustic transducer means 10.It is logical Often, the frequency of the sound wave emitted is located in the range of 40kHz to 120kHz, i.e., in ultrasonic range.Pass through described structure It makes, the advantageous eradiation of the first acoustic transducer means 10 has the sound wave of high sound pressure.In the diagram of Fig. 1, diaphragm 12 is in vibration In, this is indicated by the central arch of diaphragm 12.Diaphragm 12 has middle section 12b, middle section vibration shown in excitation The peak excursion (vibration antinode) along the direction perpendicular to diaphragm face 12 is subjected to when mode.
In addition, diaphragm 12 has the region 12a of general toroidal, region vibration mode shown in motivating in its edge When be subjected to along the direction perpendicular to diaphragm face 12 smallest offset or be even not subjected to along the direction perpendicular to diaphragm face 12 It deviates (node of oscillations).Advantageously, the sensor element of the second acoustic transducer means arranged according to the present invention is arranged in It is only subjected to small offset or is even not subjected in the region of offset, to avoid the mechanical load of sensor element and/or to lead to Cross measurement error caused by movement.Vibration mode shown here is only a kind of possibility for the vibration mode of diaphragm 12 motivated Example.The vibration mode of higher order has vibration antinode or node of oscillations in other regions in known manner.
Sensor device 1 according to the present invention is schematically illustrated in Fig. 2 with perspective.Sensor device 1 includes the One acoustic transducer means 10, first acoustic transducer means are constructed according to acoustic transducer means 10 shown in FIG. 1.It is identical Part be equipped with identical reference marker.
The construction that second acoustic transducer means 20 are arranged in element 11 is second sonic transducer on the bottom surface of diaphragm 12 Device includes sensor element 22a, 22b, 22c, 22d, 22f, 22g, 22h, 22i of eight like configurations.Second sonic transducer Device 20 is configured to acoustic transducer array.Spacing difference between neighboring sensor elements is identical.Central location on diaphragm 12 Without sensor element, because most strong in diaphragm flexes vibration hour offset in this region, as as being obtained Fig. 1.For The mechanical load and measurement accuracy of sensor element 22a-22i are avoided, sensor element 22a-22i is arranged in the side of diaphragm 12 In edge region, compared with the peak excursion (as shown in FIG. 1) in diaphragm center, the fringe region is vibrated in diaphragm flexes Small offset is only subjected in the mode motivated in this example.Alternatively, also it is contemplated that sensor element other arrangement, Sensor element with more or fewer column or row and/or larger number or more smallest number.
Sensor element 22a-22i is preferably the half of the wavelength of sound wave respectively with the spacing in the direction y in the x-direction, sensing Device device 1 is designed for this.Therefore, for the application in the typical frequencies and air of 50kHz, from sensor element To the midpoint measurement apart from farthest sensor element, spacing is about 3mm at midpoint.Essence when deviation causes reflection point to be spatially separating Degree loss.
Because after certain vibration die-away time of sensor device 1 just carry out received acoustic signal reliable spy It surveys, so proposing that sensor device 1 is made to decay after sending acoustic signal.It is reduced at least by decaying by the first sound Transducer apparatus 10 sends acoustic signal and is detected by the second acoustic transducer means 20 necessary between reflected acoustic signal The duration of passage, to guarantee the reliable measurements especially in the near field of sensor device 1.If according to the present invention Driving assistance system of the sensor device 1 for motor vehicle or the object-detection in parking assisting system, then by so-called dead The reduction of time (Totzeit) can also identify the object with the small spacing to sensor.Minimum detectable spacing is with known Mode determined by the transient state vibration duration of sensor device 1.
The decaying of first acoustic transducer means 10 preferably passes through the active control of the piezoelectric element of the first acoustic transducer means It realizes, the vibration reverse phase with diaphragm 11.Second acoustic transducer means 20 are used as the sensor of the vibration for diaphragm 11 herein, And it may be constructed regulating loop, which can be realized the decaying quickly and efficiently of diaphragm.Therefore it is possible that subtracting Attenuating material is abandoned less or completely --- the use of such as foamed plastic.
The arrangement of sensor element 22a-22i shown in figure 2 is substituted, also it is contemplated that other are arranged, such as with change The arrangement of the spacing of change.Sensor element 22a-22i has substantially circular surface in shown example.Alternatively, Other shapes are also possible, such as rectangle, rectangular or polygon shape.
Sensor element 22a-22i respectively includes an electret elements and a public cap rock, the cap rock design For vibrating diaphragm.When reaching when signal, for example by the sound of object reflection, cap rock moves and causes the variation of capacitor, the capacitor Variation be measurable.As a result, in the upper generation voltage signal of each of sensor element 22a-22i.Pass through sensor Element 22a-22i is arranged as acoustic transducer array can be based on by between the received sound wave of respective sensor element 22a-22i The location and shape of time difference and the following object of phase difference detection: sound wave is reflected on the object.Information example obtained It can such as be continued with by the driver assistance system of motor vehicle.
The sensor of second embodiment according to the present invention is shown in Fig. 3 with sectional view (Fig. 3 A) and top view (Fig. 3 B) Device 1, wherein the cap rock 125 of sensor element 22a-22i is invisible in figure 3b.First acoustic transducer means 110 include tank Shape element 111 is used as bottom surface with diaphragm 112.First acoustic transducer means 110 are configured with 115 conduct of piezoelectric ceramics The bending vibration device of actuator, the piezoelectric ceramics are controlled by electric connecting terminal 117.In the implementation, in the first sonic transducer There are four sensor elements 122, the sensor element to be used as sensor array and one for setting on the diaphragm 112 of device 110 It rises and constitutes the second acoustic transducer means 120.The sensor element 122 of second acoustic transducer means 120 utilizes electret principle.? This, the cap rock 125 of array is designed as vibrating diaphragm.When sound wave reaches, particularly, cap rock 125 moves and in each biography Cause the variation of capacitor at sensor component.The variation of capacitor represents received signal.
The cap rock 125 for example not only can be by metal material --- and such as aluminium or high-quality steel are made, but also can be by fibre Plastic composite --- such as CFK or GFK are made dimension.Cap rock 125 and the diaphragm 112 of the first acoustic transducer means 110 are in difference Bonding location 128 at be bonded.Used adhesives for example can be conductive.It, must if adhesives is non-conductive The electrical contact of cap rock 125 Yu grounding electrode 137 must be realized by applying twisted wire or metal wire 130, the cap rock is second The counter electrode of acoustic transducer means 120, as shown in FIG. 3.In order not to generate short circuit, the first acoustic transducer means 110 The partial region 114 of diaphragm 112 must be nonconducting, the arrangement sonic transducer dress in first acoustic transducer means 110 Set 120.This can for example be realized by the electroxidation (anodic oxidation) of partial region 114.As long as diaphragm 112 is by conduction as a result, Aluminium is made, then generates nonconducting ceramics.Then, printed conductor can be applied on the ceramics, such as vapour can be passed through Change plating, sputtering, silk-screen printing or other coating processes to realize.Alternatively, printed conductor 132 can be vapor-deposited with print by applying The film of conducting wire 132 processed, especially Teflon film come be applied to the first acoustic transducer means 110 construction be diaphragm surface On 112.Sensor element 122 and for example with the electret of FEP, PTFE is constituted, it, can be with as long as it is as film presence It is adhered on shaped electrode by electrically conducting adhesive.Preferably (downward) is vaporized on to be contacted one to electret film in this case On side, because FEP or PTFE has very low surface energy, to be bonded almost impossible.If electret with Dissolved form exists, and such as Teflon AF (amorphous fluoropolymer) or the Cytop (fluororesin) of Asahi Glass company, then may be used To pass through other methods --- apply the electret such as drop (Auftropfen) or weaving (Spinnen).Connector 135 It can be connect by electric bonding agent 129 with printed conductor 132 or by soldering or melting welding.Connector 135 or to connector 135 Electric feeder line pass through shell 111 in channel shape notch 138 and connect with the electronic device of analysis and processing unit (not shown).
The substitution that sensor device 1 according to the present invention is shown in section in Fig. 4 is implemented.First acoustic transducer means 210 include tank shape element 211, is used as bottom surface with diaphragm 212.First acoustic transducer means 210 are configured with piezoelectricity pottery Bending vibration device of the porcelain 215 as actuator, the piezoelectric ceramics are controlled by electric connecting terminal 217.In the implementation, first The diaphragm 212 of acoustic transducer means 210 is equipped with multiple sensor elements 222, and the sensor element is used as sensor array And the second acoustic transducer means 220 are constituted together.According to the present invention, the sensor element 222 of the second acoustic transducer means 220 Utilize electret principle.Here, the cap rock 225 of array is designed as vibrating diaphragm.In the implementation, it is different from Fig. 3, the rising tone changes Energy device device 220 is applied on printed circuit board 232 flexible (in addition to cap rock 225), and the printed circuit board flexible is Through with required element, such as printed conductor and electrode.The cost of the diaphragm 212 of the first acoustic transducer means is not needed as a result, Intensive processing.Printed circuit board 232 has connector 235 flexible, and the connector flexible can lacking in diaphragm tank It is guided in mouth 238.Compared with variant schemes shown in fig. 3, complicated contact is eliminated in this way.Printed circuit Plate 232 is connect by bonding material layer 240 with diaphragm.Cap rock 225 is fixed on printing electricity flexible by bonding location 228,229 On road plate 232.
The embodiment being shown in FIG. 5 of the invention is largely correspond to the example described in association with Fig. 4.Phase Same element is equipped with identical reference marker.Difference with the embodiment being shown in FIG. 4 is, is equipped with the second sonic transducer and fills 220 cap rock 326 is set, constructs to the cap rock tank shape, there is circular edge 330, the edge is substantially perpendicular to film 212 ground of piece extends.By the construction of cap rock, continuous optical surface is on the one hand provided, on the other hand provides and is used for Another possibility of seal sensor device 1.The sealing carries out at bonding location 350 in the example shown.

Claims (12)

1. a kind of sensor device (1), is used for the ambient enviroment detection of vehicle, the sensor device includes:
There is first acoustic transducer means (10,110,210) at least one to be configured to the surface (12,112,212) of diaphragm, Wherein, the diaphragm (12,112,212) is suitable for transmitting ultrasonic wave;
Second acoustic transducer means (20,120,220) comprising multiple sensor elements (22a-22i, 122,222), described Two acoustic transducer means are configured to array;
Wherein, second acoustic transducer means (20,120,220) be arranged in first acoustic transducer means (10,110, 210) construction be diaphragm surface (12,112,212) on,
It is characterized in that, the sensor element (22a-22i, 122,222) is configured to electret transducer element, wherein institute Stating the first acoustic transducer means (10,110,210) includes tank shape element (11,111,211), and the tank shape element has edge surface (14) and it is configured to the bottom surfaces of diaphragm (12,112,212), wherein in order to motivate the vibration of the diaphragm (12,112,212), if There is the piezoelectric element (115,215) with the diaphragm (12,112,212) contact, wherein second acoustic transducer means (20, 120,220) sensor element (22a-22i, 122,222) is arranged in the outside for being configured to the bottom surface of diaphragm (12,112,212) On.
2. sensor device (1) according to claim 1, which is characterized in that
The construction of first acoustic transducer means (10) is that the surface (12) of diaphragm has in the vibration for motivating the diaphragm (12) It is subjected to small offset when dynamic or is not subjected to the region (12a) of offset, and the sensor of second acoustic transducer means (20) Element (22a-22i) is arranged in the region (12a) of the diaphragm (12).
3. sensor device (1) according to any one of the preceding claims, which is characterized in that in order to which the rising tone changes Can sensor element (22a-22i, 122) of device device (20,120) electrically connect, first acoustic transducer means (10, 110) construction be diaphragm surface (12,112) on be applied with printed conductor.
4. sensor device (1) according to claim 3, which is characterized in that the printed conductor (132) is steamed by applying It is the surface of diaphragm that the film for being coated with the printed conductor (132), which is applied to the construction of first acoustic transducer means (110), (112) on.
5. sensor device (1) according to claim 1 or 2, which is characterized in that second acoustic transducer means (220) it is applied on printed circuit board flexible (232), wherein the printed circuit board (232) flexible has printed conductor And electrode, wherein the printed circuit board flexible is Nian Jie with the diaphragm (112).
6. sensor device (1) described in any one of -2,4 according to claim 1, which is characterized in that the rising tone transducing The sensor element (22a-22i, 122) of device device (20) has cap rock (125,225,326), and the structure of sedimentary cover is vibrating membrane Piece.
7. sensor device according to claim 6, which is characterized in that construct to the cap rock tank shape, and described Two acoustic transducer means (220) and the diaphragm (212) are covered by the cap rock (326) completely.
8. sensor device (1) described in any one of -2,4,7 according to claim 1, which is characterized in that the rising tone changes At least one of sensor element (22a-22i) of energy device device (20) is covered by the cladding element protected.
9. sensor device described in any one of -2,4,7 according to claim 1, which is characterized in that the sensor device is Ultrasonic sensor devices.
10. sensor device described in any one of -2,4,7 according to claim 1, which is characterized in that the rising tone transducing Device device is configured to supersonic array.
11. sensor device according to claim 4, which is characterized in that the film is Teflon film.
12. one kind using sensor device according to any one of claim 1 to 11 (1) for carrying out The method of the ambient enviroment detection of vehicle, which is characterized in that
First acoustic transducer means (10) send acoustic signal, the acoustic signal can on one or more objects quilt Reflection,
Second acoustic transducer means (20) receive reflection signal,
Carry out analysis relevant to the angle processing of the reflection signal.
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WO2014146828A3 (en) 2014-12-04

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