CN105067670A - Ordered Cu-doped nano-porous tin oxide sensing device - Google Patents

Ordered Cu-doped nano-porous tin oxide sensing device Download PDF

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CN105067670A
CN105067670A CN201510392705.7A CN201510392705A CN105067670A CN 105067670 A CN105067670 A CN 105067670A CN 201510392705 A CN201510392705 A CN 201510392705A CN 105067670 A CN105067670 A CN 105067670A
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tin oxide
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graphene oxide
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邵绍峰
刘战辉
王世敏
洪琦棱
费佳蕾
雷雅婷
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Nanjing University of Information Science and Technology
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Nanjing University of Information Science and Technology
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Abstract

The invention discloses an ordered Cu-doped nano-porous tin oxide sensing device. The sensing device is produced through the following steps: 1, producing an interdigital electrode-based graphene oxide film through adopting a spin coating method; 2, producing a device coated with a composite sensing film through a spin coating method, drying, and carrying out hot steam treatment; 3, removing a template from the device obtained in step 2; and 4, carrying out a reduction reaction on the device obtained in step 3 under an ultraviolet radiation condition to obtain the nano-porous tin oxide sensing device. The ordered Cu-doped nano-porous tin oxide sensing device has an excellent sensing performance, and the response time and the recovery time to low concentration H2S gas are shorter than 20s respectively.

Description

一种有序Cu掺杂的纳米孔氧化锡传感器件An ordered Cu-doped nanoporous tin oxide sensor device

技术领域 technical field

本发明涉及一种气体传感器,具体涉及一种以氧化铜摻杂有序纳米孔氧化锡为传感材料的薄膜型高选择性的室温H2S气敏传感器件。 The invention relates to a gas sensor, in particular to a film-type high-selectivity room-temperature H2S gas - sensing device which uses copper oxide-doped ordered nanoporous tin oxide as a sensing material.

背景技术 Background technique

随着科学技术高速发展,现代工业在为人类带来巨大经济效益和文明进步的同时也带来了安全和环境问题,特别是石油煤炭等能源产业生产过程中存在大量易燃易爆和有毒物质。面对如此严重的安全及环境问题,各国政府加大对传感器技术的投入和研发。美国政府一直高度重视对传感器技术的研发支持,出于能源安全的需要出台计划开发新型传感器,用于检测有毒有害气体。2011年我国发布国家中长期规划明确将环境监测设备用气体传感器作为主要发展对象。然而,传统的气体传感器存在低浓度微弱信号的检测灵敏度偏低,选择性差等缺点。为了实现快速响应,大都采用加热方式,提高传感器工作温度(工作温度200-600℃)。加热系统的引入不仅增加了能耗,而且容易引爆可燃性气体,带来巨大安全隐患。如专利CN104502413制备所得氧化铜摻杂氧化锡基硫化氢气敏材料的最佳传感检测温度为240℃。 With the rapid development of science and technology, modern industry has brought huge economic benefits and civilization progress to mankind, but it has also brought safety and environmental problems, especially in the production process of energy industries such as petroleum and coal. There are a lot of flammable, explosive and toxic substances . Faced with such serious safety and environmental problems, governments of various countries have increased investment in and research and development of sensor technology. The U.S. government has always attached great importance to the research and development support of sensor technology, and has introduced plans to develop new sensors for the detection of toxic and harmful gases out of the needs of energy security. In 2011, my country released the national medium and long-term plan, which clearly defined gas sensors for environmental monitoring equipment as the main development object. However, traditional gas sensors have disadvantages such as low detection sensitivity of low-concentration weak signals and poor selectivity. In order to achieve fast response, most of them use heating method to increase the working temperature of the sensor (working temperature 200-600°C). The introduction of the heating system not only increases energy consumption, but also easily detonates flammable gases, which brings huge safety hazards. For example, the optimal sensing temperature of the copper oxide-doped tin oxide-based hydrogen sulfide gas-sensitive material prepared in patent CN104502413 is 240°C.

发明内容 Contents of the invention

本发明的目的是为了解决现有技术中存在的缺陷,提供一种在室温下,即能对低浓度H2S快速响应的传感器件。 The object of the present invention is to solve the defects in the prior art, and provide a sensing device capable of responding quickly to low concentration H 2 S at room temperature.

为了达到上述目的,本发明提供了一种有序Cu掺杂的纳米孔氧化锡传感器件,通过以下步骤制备: In order to achieve the above object, the present invention provides a nanoporous tin oxide sensor device doped with ordered Cu, which is prepared by the following steps:

(1)氧化石墨烯/叉指电极制备:制备浓度为0.01-10mg/ml的极性氧化石墨烯溶液(优选浓度为1mg/ml,),调节氧化石墨烯极性溶液的pH值为9-10,采用旋涂法制备基于叉指电极的氧化石墨烯薄膜; (1) Preparation of graphene oxide/interdigital electrode: prepare a polar graphene oxide solution with a concentration of 0.01-10 mg/ml (preferably 1 mg/ml), and adjust the pH value of the graphene oxide polar solution to 9- 10. Fabrication of graphene oxide films based on interdigitated electrodes by spin coating method;

(2)镀有传感材料的器件制备:取质量比为1:100-8:100的铜盐和锡盐(优选摩尔比为4:100),溶于极性溶剂中,然后加入表面活性剂,调节pH值至获得澄清溶液;将所得澄清溶液采用旋涂法在步骤(1)中制备的器件上镀膜,即得镀有传感材料的器件;将所得镀有传感材料的器件干燥后,经热蒸汽处理1-4天;所述表面活性剂与锡盐的质量比为0.4:100-6:100(优选摩尔比为0.48:100)。 (2) Preparation of devices coated with sensing materials: Take copper salt and tin salt with a mass ratio of 1:100-8:100 (preferably a molar ratio of 4:100), dissolve them in a polar solvent, and then add surface active agent, adjust the pH value to obtain a clear solution; use the spin coating method to coat the obtained clear solution on the device prepared in step (1) to obtain a device coated with a sensing material; dry the obtained device coated with a sensing material Afterwards, it is treated with hot steam for 1-4 days; the mass ratio of the surfactant to the tin salt is 0.4:100-6:100 (preferably the molar ratio is 0.48:100).

(3)去除步骤(2)所得器件中的表面活性剂; (3) removing the surfactant in the device obtained in step (2);

(4)还原:将步骤(3)所得器件在紫外照射条件下进行还原反应,即得所述纳米孔氧化锡传感器件。 (4) Reduction: performing a reduction reaction on the device obtained in step (3) under the condition of ultraviolet irradiation to obtain the nanoporous tin oxide sensor device.

其中,步骤(1)中极性氧化石墨烯溶液为氧化石墨烯水溶液;所述步骤(2)中的极性溶剂采用无水乙醇。 Wherein, the polar graphene oxide solution in the step (1) is a graphene oxide aqueous solution; the polar solvent in the step (2) is absolute ethanol.

步骤(2)中热蒸汽处理的方法如下:将干燥后的器件放入密闭容器中,调节容器内的相对湿度70%-95%,再将容器放入鼓风干燥箱中调节温度为100~150℃。 The method of hot steam treatment in step (2) is as follows: put the dried device into an airtight container, adjust the relative humidity in the container to 70%-95%, and then put the container into a blast drying oven to adjust the temperature to 100~ 150°C.

步骤(3)中去除模板剂的方法如下:将步骤(2)经热蒸汽处理后的器件置于UV-O3环境下处理24-48h。 The method for removing the templating agent in step (3) is as follows: place the device after the hot steam treatment in step (2) in a UV-O 3 environment for 24-48h.

铜盐采用氯化铜、硝酸铜或硫酸铜,优选氯化铜;锡盐采用无水氯化锡、硝酸锡或硫酸锡,优选无水氯化锡;叉指电极采用金电极或铂电极,优选叉指金电极。 The copper salt adopts copper chloride, copper nitrate or copper sulfate, preferably copper chloride; the tin salt adopts anhydrous tin chloride, tin nitrate or tin sulfate, preferably anhydrous tin chloride; the interdigitated electrode adopts gold electrode or platinum electrode, Interdigitated gold electrodes are preferred.

步骤(1)中旋涂法采用旋涂速度为2000-4000rpm,每次旋涂时间30-60s;步骤(2)中旋涂法步骤为:在匀胶机内,通过控制匀胶机腔体的湿度为5%~50%,旋涂的速度为2000-4000rpm,每次旋涂时间为30-60s,镀膜的重复次数为1-10次。 The spin coating method in step (1) adopts a spin coating speed of 2000-4000rpm, and each spin coating time is 30-60s; the spin coating method step in step (2) is: in the homogenizer, by controlling the chamber of the homogenizer The humidity of the coating is 5%~50%, the speed of spin coating is 2000-4000rpm, the time of each spin coating is 30-60s, and the number of repetitions of coating is 1-10 times.

本发明相比现有技术具有以下优点: Compared with the prior art, the present invention has the following advantages:

1、本发明有序纳米孔Cu摻杂的纳米氧化锡传感器件的传感性能优异,对低浓度H2S气体响应时间和恢复时间均低于20s。 1. The ordered nanoporous Cu-doped nano-tin oxide sensor device of the present invention has excellent sensing performance, and the response time and recovery time to low-concentration H 2 S gas are both lower than 20s.

2、本发明传感器件的制备过程将复合传感材料的制备与传感器制作同步进行,简化实验步骤,增强传感材料制备的可重复性,提高传感材料的比表面积,形成优质p-n结,为载流子传输提供优良通道,活化晶粒表面吸附能力,促进表面反应活性,提高灵敏度以及缩短响应时间,将传感检测温度将至室温,大大增强的气敏元件的工作使用广度,并有利于降低能耗。 2. In the preparation process of the sensing device of the present invention, the preparation of the composite sensing material and the production of the sensor are carried out simultaneously, the experimental steps are simplified, the repeatability of the preparation of the sensing material is enhanced, the specific surface area of the sensing material is increased, and a high-quality p-n junction is formed, which is Carrier transport provides excellent channels, activates the surface adsorption capacity of grains, promotes surface reactivity, improves sensitivity and shortens response time, reduces the sensing temperature to room temperature, greatly enhances the working range of the gas sensor, and is conducive to Reduce energy consumption.

3、本发明运用热蒸法所得有序纳米孔氧化锡传感材料,结构有序,热稳定性强;运用UV-O3法去除表面活性剂,避免了传统焙烧的方法对薄膜结构的破坏;运用UV还原法充分运用紫外激发氧化锡的还原能力,对氧化石墨烯进行了有效的还原,与传统的还原方法相比,该方法环境友好,操作方便,成本低。 3. In the present invention, the ordered nanoporous tin oxide sensing material obtained by the thermal steaming method has an ordered structure and strong thermal stability; the UV - O method is used to remove the surfactant, which avoids the destruction of the film structure by the traditional roasting method ;Using the UV reduction method to make full use of the reduction ability of the ultraviolet-excited tin oxide, the graphene oxide is effectively reduced. Compared with the traditional reduction method, this method is environmentally friendly, easy to operate, and low in cost.

附图说明 Description of drawings

图1为本发明实施例1中制备的传感器件的SEM图; Fig. 1 is the SEM figure of the sensor device prepared in the embodiment of the present invention 1;

图2为本发明实施例1中经热蒸法处理后及经UV-O3处理后的传感膜的一维SAXS散射图; Fig. 2 is the one-dimensional SAXS scattering diagram of the sensing film after thermal steaming treatment and UV-O treatment in Example 1 of the present invention;

图3为本发明实施例1中制备的传感器件表面传感膜的TEM图; Fig. 3 is the TEM picture of the surface sensing film of the sensor device prepared in Example 1 of the present invention;

图4为本发明实施例1中制备的传感器件的传感性能图。 FIG. 4 is a diagram of the sensing performance of the sensor device prepared in Example 1 of the present invention.

图1中,1-石墨烯,2-叉指电极。 In Figure 1, 1-graphene, 2-interdigitated electrodes.

具体实施方式 Detailed ways

下面结合具体实施例对本发明进行详细说明。 The present invention will be described in detail below in conjunction with specific embodiments.

实施例1 Example 1

1、在室温下,配置氧化石墨烯溶液(溶剂为去离子水)1mg/ml,调节pH值为9-10,启动匀胶机,移液器取100ul溶液,控制匀胶机的转速为2000rpm,旋涂时间为30s。 1. At room temperature, configure graphene oxide solution (solvent is deionized water) 1mg/ml, adjust the pH value to 9-10, start the homogenizer, take 100ul solution with a pipette, and control the speed of the homogenizer to 2000rpm , spin coating time is 30s.

2、将涂有氧化石墨烯的器件(叉指金电极)在60℃条件下干燥。称取0.04g氯化铜和1g无水四氯化锡,溶解于无水乙醇中,加入0.4g的表面活性剂F127,然后加入1ml浓盐酸,混合均匀得到澄清溶液。启动匀胶机,将涂有氧化石墨烯的器件固定在匀胶机腔体内,控制腔体的湿度为10%,旋涂速度为4000rpm,旋涂时间为30s,旋涂重复1次。将上述新制备传感材料的器件干燥后,将器件放入密闭容器中,调节容器内的相对湿度70%,再将容器放入鼓风干燥箱中调节温度为100℃,反应时间为4天。 2. Dry the device (interdigitated gold electrode) coated with graphene oxide at 60°C. Weigh 0.04g of copper chloride and 1g of anhydrous tin tetrachloride, dissolve them in absolute ethanol, add 0.4g of surfactant F127, then add 1ml of concentrated hydrochloric acid, mix well to obtain a clear solution. Start the homogenizer, fix the graphene oxide-coated device in the chamber of the homogenizer, control the humidity of the chamber to 10%, spin-coat at a speed of 4000rpm, spin-coat for 30s, and repeat the spin-coating once. After drying the above-mentioned newly prepared sensor material device, put the device into a closed container, adjust the relative humidity in the container to 70%, and then put the container into a blast drying oven to adjust the temperature to 100°C, and the reaction time is 4 days .

3、在UV/O3环境下36h,最后在UV光照射下持续8h,得到基于石墨烯/金电极制备有序纳米孔Cu摻杂SnO2传感器件。 3. Under UV/O 3 environment for 36h, and finally under UV light irradiation for 8h, an ordered nanoporous Cu-doped SnO 2 sensor device based on graphene/gold electrodes was obtained.

图1为制备所得石墨烯/金电极制备有序Cu摻杂纳米孔SnO2传感器件的SEM图,从图中可以看出通过石墨烯1的桥联,使得叉指电极2的性能得到了巨大的提升。 Figure 1 is the SEM image of the ordered Cu-doped nanoporous SnO2 sensor device prepared by the prepared graphene/gold electrode. It can be seen from the figure that the performance of the interdigitated electrode 2 has been greatly improved through the bridging of graphene 1. improvement.

图2为步骤2处理后、以及经过UV-O3处理后的传感膜的SAXS图,从图中可以看出,两者均具有良好的结构有序性。 Figure 2 is the SAXS image of the sensing film after step 2 treatment and after UV- O3 treatment. It can be seen from the figure that both have good structural order.

图3为制备所得石墨烯/金电极制备有序Cu摻杂纳米孔SnO2传感器件表面传感膜的透射电镜照片,从图中可以看出纳米粒子粒径为5nm左右,纳米孔沿着110晶面长程有序的排列,平均孔径为10nm左右。 Fig. 3 is the TEM photo of the prepared graphene/gold electrode to prepare ordered Cu-doped nanoporous SnO sensor surface sensing film. It can be seen from the figure that the particle size of the nanoparticles is about 5nm, and the nanopores are along the 110 The crystal planes are arranged in a long-range order, and the average pore size is about 10nm.

图4为制备所得石墨烯/金电极制备有序Cu摻杂纳米孔SnO2传感器件在室温下的气敏性能测试图,从图中可以看出,灵敏度随着H2S浓度从20ppm-200ppm变化,再由200ppm将至20ppm。传感器的响应时间和恢复时间都小于20s。 Fig. 4 is the gas-sensing performance test chart of the ordered Cu-doped nanoporous SnO2 sensor device prepared by the prepared graphene/gold electrode at room temperature. It can be seen from the figure that the sensitivity increases with the concentration of H2S from 20ppm - 200ppm Change, and then reduced from 200ppm to 20ppm. The response time and recovery time of the sensor are both less than 20s.

实施例2 Example 2

1、在室温下,配置氧化石墨烯溶液5mg/ml,调节pH值为9-10,启动匀胶机,移液器取100ul溶液,控制匀胶机的转速为2000rpm,旋涂时间为45s。 1. At room temperature, prepare a graphene oxide solution of 5 mg/ml, adjust the pH value to 9-10, start the homogenizer, take 100ul of the solution with a pipette, control the speed of the homogenizer to 2000rpm, and spin coating time to 45s.

2、将涂有氧化石墨烯的器件60℃条件下干燥。称取0.08g硝酸铜和1.5g四硝酸化锡,溶解于无水乙醇中,加入0.36g的表面活性剂P123,然后加入1ml浓盐酸,混合均匀得到澄清溶液。启动匀胶机,将涂有氧化石墨烯的器件固定在匀胶机腔体内,控制腔体的湿度为30%,旋涂速度为4000rpm,旋涂时间为45s,旋涂重复5次。将上述新制备传感材料的器件干燥后,将器件放入密闭容器中,调节容器内的相对湿度80%,再将容器放入鼓风干燥箱中调节温度为120℃,反应时间为2天。 2. Dry the device coated with graphene oxide at 60°C. Weigh 0.08g of copper nitrate and 1.5g of tin tetranitrate, dissolve them in absolute ethanol, add 0.36g of surfactant P123, then add 1ml of concentrated hydrochloric acid, mix well to obtain a clear solution. Start the homogenizer, fix the graphene oxide-coated device in the chamber of the homogenizer, control the humidity of the chamber to 30%, spin-coating speed to 4000rpm, spin-coating time to 45s, and repeat the spin-coating 5 times. After drying the above-mentioned newly prepared sensor material device, put the device into a closed container, adjust the relative humidity in the container to 80%, and then put the container into a blast drying oven to adjust the temperature to 120°C, and the reaction time is 2 days .

3、在UV/O3环境下36h,最后在UV光照射下持续8h,得到基于石墨烯/金电极制备有序Cu摻杂纳米孔SnO2传感器件。 3. Under UV/O 3 environment for 36 hours, and finally under UV light irradiation for 8 hours, an ordered Cu-doped nanoporous SnO 2 sensor device based on graphene/gold electrodes was obtained.

SAXS图表明步骤2处理后的有序传感膜,以及经过UV-O3处理后的传感膜具有良好的结构有序性。制备所得传感器件表面传感膜的透射电镜照片表明,纳米粒子粒径为5nm左右,纳米孔沿着110晶面长程有序的排列,平均孔径为7nm左右。对制备所得传感器件在室温下进行气敏性能测试,灵敏度随着H2S浓度从20ppm-200ppm变化,再由200ppm将至20ppm,传感器的响应时间和恢复时间都小于20s。 The SAXS figure shows that the ordered sensing film after step 2 treatment, and the sensing film after UV- O3 treatment have good structural order. The transmission electron micrographs of the sensing film on the surface of the prepared sensor device show that the particle size of the nanoparticles is about 5nm, the nanopores are arranged in a long-range order along the 110 crystal plane, and the average pore size is about 7nm. The gas-sensing performance test of the prepared sensor device was carried out at room temperature. The sensitivity changed from 20ppm to 200ppm with the concentration of H 2 S, and then decreased from 200ppm to 20ppm. The response time and recovery time of the sensor were both less than 20s.

实施例3 Example 3

1、在室温下,配置氧化石墨烯溶液10mg/ml,调节pH值为9-10,启动匀胶机,移液器取100ul溶液,控制匀胶机的转速为2000rpm,旋涂时间为60s。 1. At room temperature, prepare a graphene oxide solution of 10mg/ml, adjust the pH value to 9-10, start the homogenizer, take 100ul solution with a pipette, control the speed of the homogenizer to 2000rpm, and spin coating time to 60s.

2、将涂有氧化石墨烯的器件60℃条件下干燥。称取0.042g硫酸铜和1.3g硫酸化锡,溶解于无水乙醇中,加入0.36g的表面活性剂F127,然后加入1ml浓盐酸,混合均匀得到澄清溶液。启动匀胶机,将涂有氧化石墨烯的器件固定在匀胶机腔体内,控制腔体的湿度为50%,旋涂速度为4000rpm,旋涂时间为60s,重复旋涂10次。将上述新制备传感材料的器件干燥后,将器件放入密闭容器中,调节容器内的相对湿度95%,再将容器放入鼓风干燥箱中调节温度为150℃,反应时间为1天。 2. Dry the device coated with graphene oxide at 60°C. Weigh 0.042g of copper sulfate and 1.3g of tin sulfate, dissolve them in absolute ethanol, add 0.36g of surfactant F127, then add 1ml of concentrated hydrochloric acid, mix well to obtain a clear solution. Start the homogenizer, fix the graphene oxide-coated device in the chamber of the homogenizer, control the humidity of the chamber to 50%, spin-coat at a speed of 4000rpm, spin-coat for 60s, and repeat the spin-coating 10 times. After drying the above-mentioned newly prepared sensing material device, put the device into an airtight container, adjust the relative humidity in the container to 95%, and then put the container into a blast drying oven to adjust the temperature to 150°C, and the reaction time is 1 day .

3、在UV/O3环境下48h,最后在UV光照射下持续8h,得到基于石墨烯/金电极制备有序Cu摻杂纳米孔SnO2传感器件。 3. Under UV/O 3 environment for 48h, and finally under UV light irradiation for 8h, an ordered Cu-doped nanoporous SnO 2 sensor device based on graphene/gold electrodes was obtained.

SAXS图表明热蒸法处理后的有序传感膜,以及经过UV-O3处理后的传感膜具有良好的结构有序性。制备所得传感器件表面传感膜层的透射电镜照片表明,纳米粒子粒径为5nm左右,纳米孔沿着110晶面长程有序的排列,平均孔径为9nm左右。对制备所得传感器件在室温下进行气敏性能测试,灵敏度随着H2S浓度从20ppm-200ppm变化,再由200ppm将至20ppm,传感器的响应时间和恢复时间都小于20s。 The SAXS figure shows that the ordered sensing film after thermal evaporation treatment, and the sensing film after UV- O3 treatment have good structural order. The transmission electron microscope photos of the sensing film layer on the surface of the prepared sensor device show that the particle size of the nanoparticles is about 5nm, the nanopores are arranged in a long-range order along the 110 crystal plane, and the average pore size is about 9nm. The gas-sensing performance test of the prepared sensor device was carried out at room temperature. The sensitivity changed from 20ppm to 200ppm with the concentration of H 2 S, and then decreased from 200ppm to 20ppm. The response time and recovery time of the sensor were both less than 20s.

本发明的制备方法充分发挥热蒸法,通过配制溶胶溶液,然后通过后续处理低温实现结晶,并且在结晶的过程中实现了自组装,所得薄膜的有序性得到了提高。晶粒具有纳米级尺寸,平均粒径为5nm左右,并且通过UV/O3处理后薄膜的有序性进一步的提高;本发明的制备工艺简单,对设备的要求不高,易于规模化生产;本发明所得到的有序纳米孔传感材料的结构致密,纳米孔排列长程有序,且具有良好的传感性能。 The preparation method of the present invention makes full use of the thermal steaming method, and realizes crystallization through subsequent processing at low temperature by preparing a sol solution, and realizes self-assembly during the crystallization process, and the order of the obtained film is improved. The crystal grains have a nanoscale size, the average particle size is about 5nm, and the order of the film is further improved after UV/ O3 treatment; the preparation process of the present invention is simple, the requirements for equipment are not high, and it is easy to scale production; The ordered nanopore sensing material obtained by the invention has a compact structure, long-range order of the nanopores, and good sensing performance.

Claims (6)

1. the nano-pore tin oxide sensors part of an orderly Cu doping, it is characterized in that, described nano-pore tin oxide sensors part is prepared by following steps: (1) graphene oxide/interdigital electrode preparation: preparation concentration is the polar graphite oxide alkene solution of 0.01-10mg/ml, the pH value regulating graphene oxide polar solvent is 9-10, adopts spin-coating method preparation based on the graphene oxide film of interdigital electrode; (2) the device preparation of sensing material is coated with: get mantoquita and pink salt that mass ratio is 1:100-8:100, be dissolved in polar solvent, then add surfactant, adjust ph is to obtaining settled solution; Plated film on the device adopting spin-coating method to prepare in step (1) gained settled solution, must be coated with the device of sensing material; After device drying, through vapours process 1 ~ 4 day; The mass ratio of described surfactant and pink salt is 0.4:100-6:100; (3) surfactant in removal step (2) obtained device; (4) reduce: step (3) obtained device is carried out reduction reaction under ultraviolet irradiation condition, obtains described nano-pore tin oxide sensors part.
2. nano-pore tin oxide sensors part according to claim 1, is characterized in that, described step (1) Semi-polarity graphene oxide solution is graphene oxide water solution; Polar solvent in described step (2) adopts absolute ethyl alcohol.
3. nano-pore tin oxide sensors part according to claim 1 and 2, is characterized in that, the method removing template in described step (3) is as follows: process 24-48h under step (2) obtained device is placed in UV-O3 environment.
4. nano-pore tin oxide sensors part according to claim 1 and 2, it is characterized in that, vapours disposal route in described step (2) is as follows: dried device is put into closed container, regulate the relative humidity 70%-95% in container, then container is put into air dry oven and regulate temperature to be 100 ~ 150 DEG C.
5. nano-pore tin oxide sensors part according to claim 3, is characterized in that, described mantoquita adopts cupric chloride, copper nitrate or copper sulphate; Described pink salt adopts anhydrous stannic chloride, nitric acid tin or STANNOUS SULPHATE CRYSTALLINE; Described interdigital electrode adopts gold electrode or platinum electrode.
6. nano-pore tin oxide sensors part according to claim 3, is characterized in that, in described step (1), spin-coating method adopts spin speed to be 2000-4000rpm, each spin-coating time 30-60s; In described step (2), spin-coating method step is: in sol evenning machine, and be 5% ~ 50% by controlling the humidity of sol evenning machine cavity, the speed of spin coating is 2000-4000rpm, and each spin-coating time is 30-60s, and the multiplicity of plated film is 1-10 time.
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