CN105018894A - Multi-carrier and multi-task processing technique of vacuum equipment - Google Patents
Multi-carrier and multi-task processing technique of vacuum equipment Download PDFInfo
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- CN105018894A CN105018894A CN201410158181.0A CN201410158181A CN105018894A CN 105018894 A CN105018894 A CN 105018894A CN 201410158181 A CN201410158181 A CN 201410158181A CN 105018894 A CN105018894 A CN 105018894A
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- 239000000463 material Substances 0.000 claims abstract description 244
- 238000004381 surface treatment Methods 0.000 claims abstract description 99
- 238000002360 preparation method Methods 0.000 claims abstract description 15
- 238000011282 treatment Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract 4
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Abstract
The invention provides a multi-carrier and multi-task processing technique of vacuum equipment and particularly relates to preparation of continuous vacuum process equipment with a surface treatment cavity, wherein at least two materials enter the surface treatment cavity in sequence, the material entering the surface treatment cavity earlier is constantly closer to a rear-section process cavity than the material entering the surface treatment cavity later, all the materials move in the surface treatment cavity back and forth simultaneously and individually, and finally all the materials leave the continuous vacuum process equipment in sequence; and thus, thin film structures combined randomly can be obtained on the materials. Since all the materials move in the surface treatment cavity back and forth simultaneously and individually, the moving route of each material in the surface treatment cavity can be designed according to different thin film structures so as to obtain thin film structures combined randomly. Therefore, thin film structures combined randomly can be obtained by equipment with relatively low manufacturing cost; and moreover, since at least two materials can move in the surface treatment cavity simultaneously, work hours can be reduced effectively and productivity can be improved.
Description
Technical field
The present invention relates to a kind of surface treatment vacuum technology, espespecially a kind of vacuum apparatus overloading tool is multiplex's treatment process simultaneously.
Background technology
General Proper null device is used for the processing such as plated film, etching, surface treatment, and there are the industries such as semi-conductor, photoelectricity, motor, electronics, people's livelihood articles for use in the field of its application, all needs through multiple tracks art breading to form the film layer structure of unlike material in process.In order to reach high-quality, high production capacity and the Action Target of low cost, existing vacuum apparatus mostly is continuous vacuum equipment.
The structure of existing continuous vacuum processing unit 40 as shown in Figure 7, comprise the FEOL chamber 41 sequentially connected, cushion chamber 42 before one technique, one process cavity 43, cushion chamber 44 and a last part technology chamber 45 after one technique, material is sent to the direction in this last part technology chamber 45 by this FEOL chamber 41, when this process cavity 43, surface-treated technique is carried out in the middle of it, as: plated film, the surface treatments such as etching, and this process cavity 43 can be designed to multiple process cavity be connected according to different process of surface treatment programs, in operating process, this FEOL chamber 41 and this last part technology chamber 45 can be used for vacuumizing or vacuum breaker, and before this technique after cushion chamber 42 to this technique the part of cushion chamber 44 only can vacuumize.
Single work technique of carrying out single material with this continuous vacuum processing unit 40 refers to Fig. 7, shown in Fig. 8, this continuous vacuum processing unit 40 is provided with two process cavity 43 (being respectively the first process cavity 43A and the second process cavity 43B), longitudinal direction is shown as time orientation, first, first material A1 is positioned at this FEOL chamber 41 place, and advance in the direction along with the evolution of time toward this last part technology chamber 45, technique is completed and after leaving this last part technology chamber 45 as the first material A1, second material A2 just to enter before this technique in cushion chamber 42 by this FEOL chamber 41, and before the first material A1 do not leave this last part technology chamber 45, second material A2 is positioned at this FEOL chamber 41 always to be waited for, the stroke of the 3rd material A3 is with the first material A1 and the second material A2, the finished product completing the technique shown in Fig. 8 is the laminate structure of three layers: bottom is material, it is respectively the film completed in the first process cavity 43A and the second process cavity 43B place, therefore, the mode of single-way moving is carried out by material, just sequentially stacking film can be obtained, there is technique single, the advantages such as production capacity is fast, but, just production capacity can be promoted owing to needing the quantity increasing process cavity 43, therefore but have shortcomings such as increasing equipment purchasing cost occupation of land space.
In addition, refer to shown in Fig. 9 with multiplex's technique that this continuous vacuum processing unit 40 carries out single material, this continuous vacuum processing unit 40 is provided with two process cavity 43 (being respectively the first process cavity 43A and the second process cavity 43B), longitudinal direction is shown as time orientation, first, first material A1 is positioned at this FEOL chamber 41 place, and advance toward cushion chamber 44 after this technique along with the evolution of time, return cushion chamber 42 before this technique again, go to cushion chamber 44 after this technique again, finally leave this continuous vacuum processing unit 40 by this last part technology chamber 45, before the first material A1 not yet leaves this continuous vacuum processing unit 50, second material A2 waits for always in this FEOL chamber 41, and the stroke of the second material A2 and the 3rd material A3 is with the first material A1, the film completed in this first process cavity place 43A and this second process cavity 43B place is defined as the first film and the second film, the finished product then completing the technique shown in Fig. 9 is the laminate structure of seven layers: bottom is material, it is sequentially the first film, second film, second film, the first film, the first film and the second film, therefore, by the movement that material carries out back and forth, just the membrane structure of arbitrary combination can be obtained, there is the advantage that equipment manufacturing cost is lower for the membrane structure of arbitrary combination, but, but longer man-hour is needed, and easily cause production capacity slack-off, therefore, single work technique of described single material and the shortcoming of multiplex's technique, the necessity be improved in fact.
Summary of the invention
Main purpose of the present invention is to provide a kind of vacuum apparatus overloading tool multiplex's treatment process simultaneously, to solve the shortcoming for the technique of continuous vacuum processing unit in prior art.
Technical scheme of the present invention is to provide a kind of vacuum apparatus overloading tool multiplex's treatment process simultaneously, includes:
Material more than preparation two panels;
Prepare a continuous vacuum processing unit: this continuous vacuum processing unit have sequentially connect a FEOL chamber, a surface treatment chamber and a last part technology chamber, wherein, this surface treatment chamber to have before the technique sequentially connected cushion chamber after cushion chamber, one first process cavity, one second process cavity and a technique; And
Mobile material: each material is sequentially entered in this continuous vacuum processing unit by this FEOL chamber, and the material constant proportion comparatively early entering this surface treatment chamber is more late enters the material in this surface treatment chamber closer to this last part technology chamber, wherein, each material carries out back and forth in this surface treatment chamber with the time and individual other moves, wherein, when each material carries out surface treatment by when this first process cavity and this second process cavity, last each material sequentially leaves this continuous vacuum processing unit by this last part technology chamber.
Described vacuum apparatus overloading tool is multiplex's treatment process simultaneously, wherein
In the step of the material more than preparation two panels, two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In preparation one continuous vacuum processing unit step, one the 3rd process cavity of purchasing further between cushion chamber after second process cavity and technique in surface treatment chamber, and in the first process cavity and the identical surface treatment carried out in the 3rd process cavity;
In the step of mobile material:
First material enters surface treatment chamber in FEOL chamber, and the order be displaced in surface treatment chamber to be sequentially after cushion chamber after cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, technique, technique, technique, the first process cavity, technique, the first process cavity, the second process cavity, technique cushion chamber after cushion chamber, the second process cavity and technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material is positioned at cushion chamber after technique for the first time, second material is positioned at FEOL chamber, cushion chamber after the first material second time is positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially cushion chamber before technique, 3rd process cavity, cushion chamber before technique, 3rd process cavity, cushion chamber before technique, cushion chamber before technique, second process cavity, cushion chamber before technique, second process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
Described vacuum apparatus overloading tool is multiplex's treatment process simultaneously, wherein
In the step of the material more than preparation two panels, two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In preparation one continuous vacuum processing unit step, one the 3rd process cavity of purchasing further between cushion chamber after second process cavity and technique in surface treatment chamber, and be identical surface treatment in the first process cavity with what carry out in the 3rd process cavity;
In the step of mobile material:
First material enters surface treatment chamber in FEOL chamber, and the order be displaced in surface treatment chamber is sequentially cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, the second process cavity, technique, the 3rd process cavity, technique, the second process cavity, technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material first time was positioned at the second process cavity, second material is positioned at FEOL chamber, cushion chamber after the first material first time was positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially the second process cavity, cushion chamber before technique, first process cavity, cushion chamber before technique, second process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
In one embodiment of the invention, described vacuum apparatus overloading tool is multiplex's treatment process simultaneously, wherein
In the step of the material more than preparation two panels, two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In preparation one continuous vacuum processing unit step, one the 3rd process cavity of purchasing further between cushion chamber after second process cavity and technique in surface treatment chamber, and be identical surface treatment in the first process cavity with what carry out in the 3rd process cavity;
In the step of mobile material:
First material enters surface treatment chamber in FEOL chamber, and the order be displaced in surface treatment chamber is sequentially cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, the first process cavity, technique, the second process cavity, technique, the 3rd process cavity, technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material first time was positioned at the first process cavity, second material is positioned at FEOL chamber, cushion chamber after the first material first time was positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially the first process cavity, cushion chamber before technique, second process cavity, cushion chamber before technique, first process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
By above-mentioned technique means, the accessible effect of the present invention is promoted to be had: each material can carry out back and forth in this surface treatment chamber with the time and individual other moves, the mobile route of each material in surface treatment chamber can be designed according to different membrane structures, and obtain the membrane structure of arbitrary combination, therefore the membrane structure obtaining arbitrary combination compared with the equipment of low cost can be utilized, and the material of more than two panels can be had to move in surface treatment chamber with the time, effectively can reduce work hours, improve production capacity.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of the present invention first preferred embodiment.
Fig. 2 is the finished product schematic diagram of the present invention first preferred embodiment technique.
Fig. 3 is the process flow diagram of the present invention second preferred embodiment.
Fig. 4 is the finished product schematic diagram of the present invention second preferred embodiment technique.
Fig. 5 is the process flow diagram of the present invention the 3rd preferred embodiment.
Fig. 6 is the finished product schematic diagram of the present invention the 3rd preferred embodiment technique.
Fig. 7 is the structural representation of continuous vacuum processing unit in prior art.
Fig. 8 is the single material list work process flow diagram for continuous vacuum processing unit in prior art.
Fig. 9 is the single material multiplex (MUX) process flow diagram for continuous vacuum processing unit in prior art.
Main element nomenclature
10 continuous vacuum processing unit 11 FEOL chambeies
12 last part technology chamber, surface treatment chambeies 13
Cushion chamber 122A first process cavity before 121 techniques
122B second process cavity 122C the 3rd process cavity
Cushion chamber T1, T1 after 123 techniques ', T1 " very first time
T2, T2 ', T2 " second the time T3, T3 ', T3 " the 3rd time
T4, T4 ', T4 " the 4th the time T5, T5 ', T5 " the 5th time
T6, T6 ', T6 " the 6th the time T7, T7 ', T7 " the 7th time
T8, T8 ', T8 " the 8th the time T9, T9 ', T9 " the 9th time
T10, T10 ', T10 " the tenth the time T11, T11 ', T11 " the 11 time
T12 the 12 time T13 the 13 time
T14 the 14 time T15 the 15 time
S1, S1 ', S1 " first material S2, S2 ', S2 " the second material
S3, S3 ', S3 " the 3rd material S, S ', S " material
F1, F1 ', F1 " the first film F2, F2 ', F2 " the second film
40 continuous vacuum processing unit 41 FEOL chambeies
Cushion chamber 43 process cavity before 42 techniques
43A first process cavity 43B second process cavity
Cushion chamber 45 last part technology chamber after 44 techniques
A1 first material A2 second material
A3 the 3rd material
Embodiment
For technical characteristic of the present invention and practical effect can be understood in detail, and can realize according to the content of specification sheets, hereby further with preferred embodiment as indicated in the drawings, be described in detail as follows:
Refer to shown in Fig. 1, vacuum apparatus overloading tool provided by the invention simultaneously multiplex's treatment process is applied to a continuous vacuum processing unit 10, this continuous vacuum processing unit 10 comprises the FEOL chamber 11 sequentially connected, one surface treatment chamber 12 and a last part technology chamber 13, wherein, this surface treatment chamber 12 comprises cushion chamber 121 before the technique sequentially connected, one first process cavity 122A, one second process cavity 122B, cushion chamber 123 after one the 3rd process cavity 122C and a technique, for carrying out surface treatment processing place in this surface treatment chamber 12, or, surface treatment chamber 12 can be more piece serial connection, to meet the needs of technique, in addition, the present invention does not limit to the quantity of each process cavity in this surface treatment chamber 12, as long as be at least provided with two process cavity can implement.
In operation, mainly this surface treatment chamber 12 technical process is different from the existing technique for continuous vacuum processing unit.Only can vacuumize in this surface treatment chamber 12, and this FEOL chamber 11 can carry out vacuumizing or vacuum breaker with this last part technology chamber 13.In addition, this first process cavity 122A is identical with the technique of carrying out in the 3rd process cavity 122C, that is can obtain the identical film of structure by this first process cavity 122A with the 3rd process cavity 122C, then represents with first and the 3rd respectively to distinguish.In addition, material enters this continuous vacuum processing unit 10 by this FEOL chamber 11, leaves this continuous vacuum processing unit 10 by this last part technology chamber 13.
First preferred embodiment of multiplex's treatment process while of this vacuum apparatus overloading tool, is described below according to time direct of travel below:
1, very first time T1: the first material S1 enters in this FEOL chamber 11;
2, pre-treatment is carried out in cushion chamber 121 before the second time T2: the first material S1 enters this technique;
3, the 3rd time T3: the second material S2 enters in this FEOL chamber 11, waits for after the first material S1 enters this technique simultaneously in cushion chamber 123;
4, carry out pre-treatment in cushion chamber 121 before the 4th time T4: the second material S2 enters this technique, the first material S1 still waits in cushion chamber 123 after this technique simultaneously;
5, the 5th time T5: the second material S2 enters in the 3rd process cavity 122C and carries out surface treatment, and the first material S1 still waits in cushion chamber 123 after this technique simultaneously;
6, carry out aftertreatment in cushion chamber 121 before the 6th time T6: the second material S2 enters this technique, the first material S1 enters in the first process cavity 122A and carries out surface treatment simultaneously;
7, after the 7th time T7: the first material S1 enters this technique, cushion chamber 123 carries out aftertreatment, and the second material S2 enters in the 3rd process cavity 122C and carries out surface treatment simultaneously;
8, before the 8th time T8: the second material S2 enters this technique, cushion chamber 121 carries out aftertreatment, and the first material S1 enters in this first process cavity 122A and carries out surface treatment simultaneously;
9, the 9th time T9: the second material S2 waits in cushion chamber 121 before this technique, and the first material S1 enters in this second process cavity 122B and carries out surface treatment;
10, after the tenth time T10: the first material S1 enters this technique, cushion chamber 123 carries out aftertreatment, and the second material S2 enters in this second process cavity 122B and carries out surface treatment;
11, before the 11 time T11: the second material S2 enters this technique, cushion chamber 121 carries out aftertreatment, and the first material S1 enters in this second process cavity 122B and carries out surface treatment;
12, after the 12 time T12: the first material S1 enters this technique, cushion chamber 123 carries out aftertreatment, and the second material S2 enters in this second process cavity 122B and carries out surface treatment;
13, the 13 time T13: the first material S1 enter this last part technology chamber 13, the second material S2 enter this technique after cushion chamber 123 carry out aftertreatment;
14, the 14 time T14: the first material S1 leaves this continuous vacuum processing unit 10, the second material S2 and enters this last part technology chamber 13;
15, the 15 time T15: the second material S2 leaves this continuous vacuum processing unit 10, and the 3rd material S3 enters this FEOL chamber 11.
As shown in Figure 2, sequentially stacking on a material S have a first film F1, a first film F1, one second film F 2 and one second film F 2 to the finished product machined.And the 3rd material S3, the 4th material ... etc. the follow-up material entering this continuous vacuum processing unit 10, because technical process is same as the first material S1 and the second material S2, therefore do not repeat them here.
The while of this vacuum apparatus overloading tool, the second preferred embodiment of multiplex's treatment process refers to shown in Fig. 3, is described below below according to time direct of travel:
1, very first time T1 ': the first material S1 ' enters in this FEOL chamber;
2, pre-treatment is carried out in cushion chamber 121 before the second time T2 ': the first material S1 ' enters this technique;
3, the 3rd time T3 ': the first material S1 ' enters in this second process cavity 122B and carries out surface treatment, and the second material S2 ' enters in this FEOL chamber 11 simultaneously;
4, carry out aftertreatment in cushion chamber 123 after the 4th time T4 ': the first material S1 ' enters this technique, the second material S2 ' enters in this second process cavity 122B and carries out surface treatment simultaneously;
5, carry out aftertreatment in cushion chamber 121 before the 5th time T5 ': the second material S2 ' enters this technique, this first material S1 ' enters in the 3rd process cavity 122C and carries out surface treatment simultaneously;
6, the 6th time T6 ': the second material S2 ' enters in this first process cavity 122A and carries out surface treatment, carries out aftertreatment after the first material S1 ' enters this technique simultaneously in cushion chamber 123;
7, carry out aftertreatment in cushion chamber 121 before the 7th time T7 ': the second material S2 ' enters this technique, the first material S1 ' enters in this second process cavity 122B and carries out surface treatment simultaneously;
8, carry out aftertreatment in cushion chamber 123 after the 8th time T8 ': the first material S1 ' enters this technique, the second material S2 ' enters in this second process cavity 122B and carries out surface treatment simultaneously;
9, carry out aftertreatment in cushion chamber 123 after the 9th time T9 ': the second material S2 ' enters this technique, the first material S1 ' enters this last part technology chamber 13 simultaneously;
10, the tenth time T10 ': the first material S1 ' leaves this continuous vacuum processing unit 10, and the second material S2 ' enters this last part technology chamber 13 simultaneously;
11, the 11 time T11 ': the second material S2 ' leaves this continuous vacuum processing unit 10, and the 3rd material S3 ' enters this FEOL chamber 11 simultaneously.
As shown in Figure 4, sequentially stacking on a material S ' have the second film F 2 ', the first film F1 ' and the second film F 2 ' to the finished product machined.And the 3rd material S3 ', the 4th material ... etc. the follow-up material entering this continuous vacuum processing unit, because technical process is same as the first material S1 ' and the second material S2 ', therefore do not repeat them here.
The while of this vacuum apparatus overloading tool, the 3rd preferred embodiment of multiplex's treatment process refers to shown in Fig. 5, is described below below according to time direct of travel:
1, very first time T1 ": the first material S1 " enter in this FEOL chamber 11;
2, the second time T2 ": the first material S1 " enter this technique before carry out pre-treatment in cushion chamber 121;
3, the 3rd time T3 ": the first material S1 " enter in this first process cavity 122A and carry out surface treatment, the second material S2 simultaneously " enter in this FEOL chamber 11;
4, the 4th time T4 ": the first material S1 " enter this technique after carry out aftertreatment in cushion chamber 123, the second material S2 simultaneously " enter in this first process cavity 122A and carry out surface treatment;
5, the 5th time T5 ": the second material S2 " enter this technique before carry out aftertreatment, this first material S1 simultaneously in cushion chamber 121 " enter in this second process cavity 122B and carry out surface treatment;
6, the 6th time T6 ": the second material S2 " enter in this second process cavity 122B and carry out surface treatment, simultaneously the first material S1 " and enter this technique after carry out aftertreatment in cushion chamber 123;
7, the 7th time T7 ": the second material S2 " enter this technique before carry out aftertreatment in cushion chamber 121, the first material S1 simultaneously " enter in the 3rd process cavity 122C and carry out surface treatment;
8, the 8th time T8 ": the first material S1 " enter this technique after carry out aftertreatment in cushion chamber 123, the second material S2 simultaneously " enter in this first process cavity 122A and carry out surface treatment;
9, the 9th time T9 ": the second material S2 " enter this technique after carry out aftertreatment in cushion chamber 123, the first material S1 simultaneously " enter this last part technology chamber 13;
10, the tenth time T10 ": the first material S1 " leave this continuous vacuum processing unit, the second material S2 simultaneously " enter this last part technology chamber 13;
11, the 11 time T11 ": the second material S2 " leave this continuous vacuum processing unit, the 3rd material S3 simultaneously " enter this FEOL chamber 11.
The finished product machined as shown in Figure 6, in a material S " on sequentially stackingly have a first film F1 ", one second film F 2 " and a first film F1 ".And the 3rd material S3 ", the follow-up material entering this continuous vacuum processing unit such as the 4th material, because technical process is same as the first material S1 " with the second material S2 ", therefore not repeat them here.
In the technique that the present invention proposes, have at least the material S of more than two panels can carry out surface treatment in this surface treatment chamber 12 simultaneously, the material S that the material S comparatively early entering this surface treatment chamber 12 relatively enters this surface treatment chamber 12 all the time evening is closer to this last part technology chamber 13 (that is the material S comparatively early entering this face, place treating chamber 12 cannot exchange context each other with the more late material S entering this surface treatment chamber 12), and need to carry out back and forth in this surface treatment chamber 12 and individual other moves according to technique, number of times back and forth then sets according to different process demand, therefore, material S more than two panels can be positioned at this surface treatment chamber 12 and carry out respective technique, for the membrane structure of arbitrary combination, as long as Material for design S just can be reached by the cavity of specifying.
Claims (4)
1. vacuum apparatus overloading tool multiplex's treatment process simultaneously, is characterized in that, include:
Material more than preparation two panels;
Prepare a continuous vacuum processing unit, this continuous vacuum processing unit have sequentially connect a FEOL chamber, a surface treatment chamber and a last part technology chamber, wherein, this surface treatment chamber to have before the technique sequentially connected cushion chamber after cushion chamber, one first process cavity, one second process cavity and a technique; And
Mobile material, each described material is sequentially entered in this continuous vacuum processing unit by this FEOL chamber, and the material constant proportion comparatively early entering this surface treatment chamber is more late enters the material in this surface treatment chamber closer to this last part technology chamber, wherein, each material carries out back and forth with the time and divides other to move in this surface treatment chamber, wherein, when each described material carries out surface treatment by when this first process cavity and this second process cavity, last each described material sequentially leaves this continuous vacuum processing unit by this last part technology chamber.
2. vacuum apparatus overloading tool as claimed in claim 1 multiplex's treatment process simultaneously, is characterized in that, in the step of the material more than described preparation two panels, and two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In described preparation one continuous vacuum processing unit step, to purchase further between cushion chamber after this second process cavity and this technique in this surface treatment chamber one the 3rd process cavity, and carry out identical surface treatment in this first process cavity with in the 3rd process cavity;
In the step of described mobile material:
This first material enters this surface treatment chamber in this FEOL chamber, and the order be displaced in this surface treatment chamber to be sequentially after cushion chamber after cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, technique, technique, technique, the first process cavity, technique, the first process cavity, the second process cavity, technique cushion chamber after cushion chamber, the second process cavity and technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material is positioned at cushion chamber after technique for the first time, second material is positioned at FEOL chamber, cushion chamber after the first material second time is positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially cushion chamber before technique, 3rd process cavity, cushion chamber before technique, 3rd process cavity, cushion chamber before technique, cushion chamber before technique, second process cavity, cushion chamber before technique, second process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
3. vacuum apparatus overloading tool as claimed in claim 1 multiplex's treatment process simultaneously, is characterized in that, in the step of the material more than described preparation two panels, and two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In described preparation one continuous vacuum processing unit step, one the 3rd process cavity of purchasing further between cushion chamber after second process cavity and technique in surface treatment chamber, and carry out identical surface treatment in the first process cavity with in the 3rd process cavity;
In the step of described mobile material:
First material enters surface treatment chamber in FEOL chamber, and the order be displaced in surface treatment chamber is sequentially cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, the second process cavity, technique, the 3rd process cavity, technique, the second process cavity, technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material first time was positioned at the second process cavity, second material is positioned at FEOL chamber, cushion chamber after the first material first time was positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially the second process cavity, cushion chamber before technique, first process cavity, cushion chamber before technique, second process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
4. vacuum apparatus overloading tool as claimed in claim 1 multiplex's treatment process simultaneously, is characterized in that, in the step of the material more than described preparation two panels, and two panels of altogether purchasing material, and be defined as the first material and the second material respectively;
In described preparation one continuous vacuum processing unit step, one the 3rd process cavity of purchasing further between cushion chamber after second process cavity and technique in surface treatment chamber, and carry out identical surface treatment in the first process cavity with in the 3rd process cavity;
In the step of described mobile material:
First material enters surface treatment chamber in FEOL chamber, and the order be displaced in surface treatment chamber is sequentially cushion chamber after cushion chamber after cushion chamber after cushion chamber before technique, the first process cavity, technique, the second process cavity, technique, the 3rd process cavity, technique, finally enter last part technology chamber, and leave continuous vacuum processing unit by last part technology chamber; And
When the first material first time was positioned at the first process cavity, second material is positioned at FEOL chamber, cushion chamber after the first material first time was positioned at technique, second material just enters in surface treatment chamber, and the mobile order of the second material in surface treatment chamber is sequentially the first process cavity, cushion chamber before technique, second process cavity, cushion chamber before technique, first process cavity, and when the first material enters last part technology chamber, second material enters cushion chamber after technique, when the first material leaves continuous vacuum processing unit, second material enters last part technology chamber, finally leave continuous vacuum processing unit by last part technology chamber.
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| CN102650046A (en) * | 2012-05-23 | 2012-08-29 | 徐明生 | Device for largely and continuously preparing two-dimensional nanometer films in large |
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| CN101463471A (en) * | 2009-01-12 | 2009-06-24 | 浙江嘉远格隆能源股份有限公司 | Continuous thin film vacuum deposition method and apparatus |
| CN102650046A (en) * | 2012-05-23 | 2012-08-29 | 徐明生 | Device for largely and continuously preparing two-dimensional nanometer films in large |
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Application publication date: 20151104 |