CN105014660B - Plane articulation arm - Google Patents
Plane articulation arm Download PDFInfo
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- CN105014660B CN105014660B CN201410166408.6A CN201410166408A CN105014660B CN 105014660 B CN105014660 B CN 105014660B CN 201410166408 A CN201410166408 A CN 201410166408A CN 105014660 B CN105014660 B CN 105014660B
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- forearm
- arm
- vacuum cavity
- telescopic arm
- servomotor
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Abstract
The present invention relates to mechanical hand field, more particularly to a kind of plane articulation arm.Including：The vacuum cavity being made up of sealing plate and vacuum housing, inside vacuum cavity, the actuator that is placed on the sealing plate, the drive mechanism outside vacuum cavity；The actuator includes the first forearm being sequentially connected, second forearm, 3rd forearm and the 4th forearm, also include that arm connection pedestal and one end are provided with the telescopic arm of the first fixture, arm connection pedestal is connected with the first forearm and the 3rd forearm, and telescopic arm is fixed on arm connection pedestal by being arranged close to the spring thimble that arm connects on the outside of pedestal；The drive mechanism, for rotating to make telescopic arm in vacuum cavity carry out rotating, stretch by driving the second forearm and the 4th forearm.The plane articulation arm transmission range that the present invention is provided is big, efficiency high.
Description
Technical field
The present invention relates to mechanical hand field, more particularly to a kind of plane articulation arm.
Background technology
Vacuum mechanical-arm is a kind of mechanical hand for working under vacuum conditions, is mainly used in semi-conductor industry, realizes
Transmission of the wafer in vacuum chamber.With the development of semiconductor technology, the vacuum level requirements more and more higher to relevant device.Cause
The remaining of residual gas can be reduced for deposition film under UHV condition and affected, be reduced the impurity of surface and interface and lack
Fall into.
By the difference of the kind of drive, vacuum mechanical-arm can be divided into plane articulation arm and radial alignment motion (R- θ)
Type mechanical hand.As plane articulation arm can achieve multiple degree of freedom, action is more flexible, therefore plane joint type machinery
Handss application is relatively broad.
The vacuum of country's plane joint type vacuum mechanical-arm can only be to 10 at present-6Pa, after elongation, arm end is far from the center of circle
Less than 1.5 cavity diameters.Although external plane joint type vacuum mechanical-arm can realize vacuum 10-8Under sample transmission,
But have the following disadvantages：Transmitting range is less than cavity diameter；Linear mechanical hand transmitting range can be more than a radius, but
Single head pattern is, a type of sample can only be transmitted, product output rate is low.
Content of the invention
For solving above-mentioned technical problem, the present invention provides a kind of plane articulation arm, can reach transporting articles distance
Greatly, the purpose of efficiency high.
The plane articulation arm that the present invention is provided, including the vacuum cavity being made up of sealing plate and vacuum housing, puts
Actuator in vacuum cavity inner seal plate, the drive mechanism outside vacuum cavity；
The actuator includes the first forearm being sequentially connected, the second forearm, the 3rd forearm and the 4th forearm, also includes
Arm connection pedestal and one end are provided with the telescopic arm of the first fixture, and arm connection pedestal is connected with the first forearm and the 3rd forearm, is stretched
Contracting arm is fixed on arm connection pedestal by being arranged close to the spring thimble in the outside that arm connects pedestal；
The drive mechanism, for making telescopic arm by driving the second forearm and the 4th forearm to rotate in vacuum cavity
Carry out rotating, stretch.
The drive mechanism includes the first servomotor, the second servomotor and the 3rd servomotor；
When the first servomotor and the second servomotor drive the second forearm and the 4th forearm respectively with equal in magnitude, direction
When identical angular velocity is rotated, telescopic arm is rotated in vacuum cavity；When the first servomotor and the second servomotor are driven respectively
When dynamic second forearm and the 4th forearm are rotated with angular velocity equal in magnitude, in opposite direction, telescopic arm in the vacuum cavity radially
Flexible；
3rd servomotor be used for drive the vacuum cavity sealing plate lifting sealing plate lifting.
Further, plane articulation arm also includes steel band, the steel band by belt wheel be connected to the first forearm and
In the fixing axle of the 4th forearm, belt wheel transmission ratio is 1:1.
Telescopic arm adopts C-type steel structure.
Arrange outside the sealing plate of the vacuum cavity and support pedestal, the support pedestal is by sealing plate with the machine of execution
Structure is connected.
Bracing frame is provided with the sealing plate of the vacuum cavity bottom, the other end is provided with the second folder on telescopic arm
Tool, is provided with the first press mechanism on the housing of the vacuum chamber, the second press mechanism, near the first fixture on telescopic arm
Position is provided with pin；
Bracing frame be used for support decline after telescopic arm, the first press mechanism be used for push spring thimble, make telescopic arm with
The pin of spring thimble departs from；Second press mechanism is used for lower pressing in pins so that slides into the connection pedestal of the arm at pin and passes through
Pin is fixed with telescopic arm.
First fixture and the second fixture are identical or differ.
The driver part and the execution unit are made using stainless steel material, or using deflation rate in a vacuum
Other low metal material.
The plane articulation arm that the present invention is provided, can make transmitting range be close to 2 times of vacuum cavity diameter, maximum journey
The space of the utilization place chamber of degree；And two distinct types of article can be transmitted, biography piece efficiency is both improve, is improve again
Using motility.
Description of the drawings
Fig. 1 is plane articulation arm structural representation provided in an embodiment of the present invention；
Fig. 2 is four forearm schematic diagrams of plane articulation arm provided in an embodiment of the present invention；
Fig. 3 is sealing plate upper support frame schematic diagram provided in an embodiment of the present invention；
Fig. 4 is the press mechanism schematic diagram on vacuum housing provided in an embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Hereinafter implement
Example is for illustrating the present invention, but is not limited to the scope of the present invention.
Present invention aims to the deficiencies in the prior art, there is provided a kind of transmission range is big, the plane of efficiency high is closed
Nodal pattern mechanical hand.
Referring to Fig. 1 to Fig. 2, plane articulation arm provided in an embodiment of the present invention, which includes：
The vacuum cavity 1 being made up of sealing plate and vacuum housing, the actuator being placed in 1 inner seal plate of vacuum cavity
2, the drive mechanism 3 outside vacuum cavity 1；
In the embodiment of the present invention, sealing plate can realize vacuum sealing using welding bellows, as long as but being not limited to corrugated tube
Can realize that vacuum-packed device can.
Wherein actuator 2 includes the first forearm 20 being sequentially connected, the second forearm 21, the 3rd forearm 22 and the 4th forearm
23, also include that arm connection pedestal 26 and one end are provided with the telescopic arm 24 of the first fixture 240, arm connection pedestal 26 and the first forearm
20 and the 3rd forearm 22 connect, telescopic arm 24 by be arranged close to arm connect pedestal 26 on the outside of spring thimble 27 be fixed on arm
On connection pedestal 26；
Drive mechanism 3, for rotating to make telescopic arm 24 in vacuum chamber by driving the second forearm 21 and the 4th forearm 23
Carry out rotating, stretch in body 1.
Specifically, drive mechanism 3 includes the first servomotor 30, the second servomotor 31 and the 3rd servomotor 32.
First servomotor 30 and the second servomotor 31 drive the second forearm 21 and the 4th forearm 23 respectively, watch when first
Take motor 30 and the second servomotor 31 drives the second forearm 21 and the 4th forearm 23 respectively with equal in magnitude, direction identical angle
When speed is rotated, telescopic arm 24 is rotated in vacuum cavity 1, and radial expansion does not occur；When the first servomotor 30 and second
When servomotor 31 drives the second forearm 21 and the 4th forearm 23 to rotate with angular velocity equal in magnitude, in opposite direction respectively, stretch
The radial expansion in the vacuum cavity 1 of contracting arm 24：When the first servomotor 30 and the second servomotor 31 drive the second forearm respectively
21 and the 4th forearm 23 when being that angular velocity close to each other is rotated with equal in magnitude, opposite direction, telescopic arm 24 extends；Watch when first
Take motor 30 and the second servomotor 31 to drive the second forearm 21 and the 4th forearm 23 respectively be mutual with equal in magnitude, opposite direction
When the angular velocity for deviating from is rotated, telescopic arm 24 shortens.
3rd servomotor 32, for drive the sealing plate of vacuum cavity 1 lifting.Sealing plate lifting can cause overall
The lifting of mechanical hand.
In the embodiment of the present invention, sealing plate adopts corrugated tube, then the 3rd servomotor 32 drives bellows seal to rise, then
The axle of corrugated tube internally and then can rise so that overall machinery is risen on hand.
The first fixture 240 on telescopic arm 24 is used for clamping article to be transmitted.
Further, the mechanical hand also includes that steel band 25, steel band 25 are connected to the first forearm 20 and the 4th by belt wheel
In the fixing axle of forearm 23, belt wheel transmission ratio is 1:1, the first forearm 20 and 23 keeping parallelism of the 4th forearm can be so made, therefore
Telescopic arm 24 is maintained on the middle separated time of the second forearm 21 and the 4th forearm 23, i.e., telescopic arm 24 is flexible all the time in vacuum cavity
1 radial direction.
The flexible mode of the 24 span centre heart of telescopic arm of the present invention enables the distance for transmitting article to be close to the 2 of vacuum cavity diameter
Times, radial transfer precision reaches 0.1mm.
Below as a example by transmitting a silicon chip, the course of work of the mechanical hand is described in detail：
First servomotor 30 and the second servomotor 31 are simultaneously rotated in the opposite direction, then the second forearm 21 and the 4th forearm 23
It is that angular velocity close to each other is rotated with equal in magnitude, opposite direction, telescopic arm 24 can so extends, telescopic arm 24 leads to after extending
The valve for crossing the connection of 1 upper flange of vacuum cavity enters the Sample Room of vacuum cavity 1, is directed at the lower section of silicon chip, by the 3rd servo
The control sealing plate of motor 32 rises makes the mechanical hand rise overally, and has lifted silicon chip with the first fixture 240；Then the first servo is electric
Machine 30 and the second servomotor 31 are simultaneously rotated in the opposite direction again, and the second forearm 21 and the 4th forearm 23 are with equal in magnitude, opposite direction
Angular velocity for mutually deviating from is rotated, and now telescopic arm 24 shrinks and for the silicon chip that the first fixture 240 has been lifted to be transported to vacuum chamber
Valve in body 1, on closing vacuum cavity 1.Then 31 equidirectional rotation of the first servomotor 30 and the second servomotor, then
The 23 equidirectional rotation of two forearms 21 and the 4th forearm, then telescopic arm 24 rotate in vacuum cavity 1, when telescopic arm 24 is turned to very
Cavity body 1 is rotated by the first servomotor 30 and 31 opposite direction of the second servomotor with when vacuum cavity junction is sent into,
The second forearm 21 and the rotation of 23 opposite direction of the 4th forearm, such telescopic arm 24 is made to extend and for silicon chip be sent to vacuum cavity to be sent into
In；Mechanical hand controls sealing plate by the 3rd servomotor 32 and declines and entire lowering, and silicon chip is stayed in vacuum cavity to be sent into
On interior fixture, telescopic arm 24 is shunk back in vacuum cavity 1 with identical process again.
Further, telescopic arm 24 can adopt C-type steel structure, and the flexural deformation after telescopic arm 24 can so extended reaches
Minimum.
Further, arrange outside the sealing plate of vacuum cavity 1 and support pedestal 4, the support pedestal 4 by sealing plate with
Actuator 2 is connected, and for consolidating actuator 2, prevents actuator 2 from shaking.
Further, referring further to Fig. 3 and Fig. 4, bracing frame 5, telescopic arm are provided with the sealing plate of 1 bottom of vacuum cavity
On 24, the end of the other end is provided with the second fixture 241, is provided with the first press mechanism 6, under second on the housing of vacuum chamber
Press mechanism 7, the position on telescopic arm 24 near the first fixture 240 are provided with pin 8.
Specifically, the bracing frame 5 is used for supporting the telescopic arm 24 after declining, the first press mechanism 6 to be used for pushing spring top
Pin 27, departs from telescopic arm 24 and the pin of spring thimble 27；Second press mechanism 7 is used for lower pressing in pins 8 so that slide into pin
Follow closely the connection pedestal 26 of the arm at 8 to fix with telescopic arm 24 by pin 8, the slip of arm connection pedestal 26 is by the second forearm 21
Rotate with the opposite direction of the 4th forearm 23 and slide.So mechanical hand achieves the switching in crawl direction, and the second fixture 241 is used
To capture article to be transmitted.
In actual applications, mechanical hand integral-rotation, makes the two ends of telescopic arm 24 just against bracing frame 5, then mechanical
Subordinate drop allows telescopic arm 24 just to fall on bracing frame 5.After now the spring thimble 27 on vacuum housing is compressed, telescopic arm 24
Depart from the pin of spring thimble 27；Then the first servomotor 30 and the rotation of 31 opposite direction of the second servomotor so that second
Forearm 21 and 23 opposite direction of the 4th forearm are rotated, with swing arm linker seat 26 along 24 edge of telescopic arm V-shaped groove toward telescopic arm
24 other end slides, and in sliding process, telescopic arm 24 is maintained at motionless on bracing frame 5.Pin is slided into when arm connects pedestal 26
When following closely 8, arm connection pedestal 26 is fixed together with telescopic arm 24 by pin 8, it is achieved that the opposite direction crawl of telescopic arm 24 is treated
Transporting articles.
Further, the first fixture 240 can be with identical with the second fixture 241, it is also possible to differs, when identical, the first folder
Tool 240 is identical with the article of the transmission of the second fixture 241；When differing, the article of the first fixture 240 and the transmission of the second fixture 241
Difference, can specifically arrange size, variform fixture, to meet transmission size, variform article.
In order to ensure the vacuum of the mechanical hand vacuum cavity 1, in the present invention, driver part and execution unit be not using
Rust Steel material is made, or using other low metal materials of deflation rate in a vacuum.Bearing can also adopt ceramic material.
The plane articulation arm that the present invention is provided, can make transmitting range be close to 2 times of vacuum cavity diameter, maximum journey
The space of the utilization place chamber of degree；And two distinct types of article can be transmitted, biography piece efficiency is both improve, is improve again
Using motility.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of without departing from the technology of the present invention principle, some improvement and modification can also be made, these improve and modification
Also protection scope of the present invention should be regarded as.
Claims (6)
1. a kind of plane articulation arm, it is characterised in that include：The vacuum cavity being made up of sealing plate and vacuum housing
(1) actuator (2), being placed in vacuum cavity (1) inner seal plate, vacuum cavity (1) drive mechanism (3) outward；
Described actuator (2) include the first forearm (20) being sequentially connected, the second forearm (21), the 3rd forearm (22) and the 4th
Forearm (23), also includes that arm connection pedestal (26) and one end are provided with the telescopic arm (24) of the first fixture (240), and arm connects pedestal
(26) it is connected with the first forearm (20) and the 3rd forearm (22), telescopic arm (24) connects pedestal (26) outward by being arranged close to arm
The spring thimble (27) of side is fixed on arm connection pedestal (26)；
Drive mechanism (3), for rotating to make telescopic arm (24) by driving the second forearm (21) and the 4th forearm (23)
In vacuum cavity (1) carry out rotating, stretch；
Bracing frame (5) is provided with the sealing plate of the vacuum cavity (1) bottom, and the upper the other end of telescopic arm (24) is provided with
Second fixture (241), is provided with the first press mechanism (6) on the housing of the vacuum chamber, the second press mechanism (7) stretches
The upper position near the first fixture (240) of arm (24) is provided with pin (8)；
Bracing frame (5) is used for supporting the telescopic arm (24) after declining, described first press mechanism (6) to be used for pushing spring thimble
(27), depart from telescopic arm (24) and the pin of spring thimble (27)；Described second press mechanism (7) are used for lower pressing in pins (8),
So that arm connection pedestal (26) for sliding into pin (8) place is fixed with telescopic arm (24) by pin (8)；
First fixture (240) is identical with the second fixture (241) or differs.
2. plane articulation arm according to claim 1, it is characterised in that the drive mechanism includes the first servo
Motor (30), the second servomotor (31) and the 3rd servomotor (32)；
When the first servomotor (30) and the second servomotor (31) drive respectively the second forearm (21) and the 4th forearm (23) with
When equal in magnitude, direction identical angular velocity is rotated, telescopic arm (24) is rotated in vacuum cavity (1)；When the first servomotor
(30) and the second servomotor (31) drives the second forearm (21) and the 4th forearm (23) respectively with equal in magnitude, in opposite direction
When angular velocity is rotated, telescopic arm (24) is in the interior radial expansion of vacuum cavity (1)；
3rd servomotor (32) is used for driving the vacuum cavity（1）Sealing plate lifting.
3. plane articulation arm according to claim 1, it is characterised in that the plane articulation arm is also wrapped
Steel band (25) is included, steel band (25) are connected to by belt wheel in the fixing axle of the first forearm (20) and the 4th forearm (23), band
Wheel gear ratio is 1:1.
4. plane articulation arm according to claim 1, it is characterised in that telescopic arm (24) adopt C-type steel
Structure.
5. plane articulation arm according to claim 1, it is characterised in that in the sealing of the vacuum cavity (1)
Arrange outside plate and support pedestal (4), support pedestal (4) is connected with actuator (2) by the sealing plate.
6. plane articulation arm according to claim 1, it is characterised in that the driver part and the enforcement division
Part is made using stainless steel material, or using other low metal materials of deflation rate in a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410166408.6A CN105014660B (en) | 2014-04-23 | 2014-04-23 | Plane articulation arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410166408.6A CN105014660B (en) | 2014-04-23 | 2014-04-23 | Plane articulation arm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105014660A CN105014660A (en) | 2015-11-04 |
| CN105014660B true CN105014660B (en) | 2017-03-15 |
Family
ID=54405142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410166408.6A Active CN105014660B (en) | 2014-04-23 | 2014-04-23 | Plane articulation arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105014660B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109037140A (en) * | 2018-08-17 | 2018-12-18 | 浙江雅市晶科技有限公司 | A kind of grabbing device for the semiconductor haulage equipment having anti-collision |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764013A (en) * | 1994-05-11 | 1998-06-09 | Daitron Technology Co., Ltd. | Plate material conveyance robot |
| CN1792572A (en) * | 2005-11-11 | 2006-06-28 | 北京航空航天大学 | Three-freedom dynamic sensing interexchanging apparatus |
| CN101549493A (en) * | 2008-06-19 | 2009-10-07 | 大连理工大学 | Double-arm glass substrate carrying robot |
| CN201881384U (en) * | 2010-11-30 | 2011-06-29 | 沈阳新松机器人自动化股份有限公司 | Arm mechanism of planar multi-joint robot |
| CN102152297A (en) * | 2011-03-16 | 2011-08-17 | 哈尔滨工业大学 | Series type R-shaft expanding mechanical arm |
| CN103560102A (en) * | 2013-10-29 | 2014-02-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Mechanical arm operating system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3590969B2 (en) * | 1993-11-22 | 2004-11-17 | ソニー株式会社 | Articulated arm type transfer device |
| JP3488393B2 (en) * | 1999-02-24 | 2004-01-19 | 平田機工株式会社 | Articulated robot device |
-
2014
- 2014-04-23 CN CN201410166408.6A patent/CN105014660B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764013A (en) * | 1994-05-11 | 1998-06-09 | Daitron Technology Co., Ltd. | Plate material conveyance robot |
| CN1792572A (en) * | 2005-11-11 | 2006-06-28 | 北京航空航天大学 | Three-freedom dynamic sensing interexchanging apparatus |
| CN101549493A (en) * | 2008-06-19 | 2009-10-07 | 大连理工大学 | Double-arm glass substrate carrying robot |
| CN201881384U (en) * | 2010-11-30 | 2011-06-29 | 沈阳新松机器人自动化股份有限公司 | Arm mechanism of planar multi-joint robot |
| CN102152297A (en) * | 2011-03-16 | 2011-08-17 | 哈尔滨工业大学 | Series type R-shaft expanding mechanical arm |
| CN103560102A (en) * | 2013-10-29 | 2014-02-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Mechanical arm operating system |
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| Publication number | Publication date |
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| CN105014660A (en) | 2015-11-04 |
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