CN105008854A - Imaging system for transparent plate surface inspection - Google Patents
Imaging system for transparent plate surface inspection Download PDFInfo
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- CN105008854A CN105008854A CN201480009296.1A CN201480009296A CN105008854A CN 105008854 A CN105008854 A CN 105008854A CN 201480009296 A CN201480009296 A CN 201480009296A CN 105008854 A CN105008854 A CN 105008854A
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- light source
- transparent plate
- line sensor
- sensor camera
- plate body
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Abstract
Provided is an imaging system for transparent plate surface inspection capable of utilizing a phenomenon in which the path of reflected light from the front face and the path of reflected light from the back face separate depending on the plate thickness in the situation where the plane on which the light ray path center for a line sensor camera exists is perpendicular to the transparent plate and the plane is neither parallel nor perpendicular to the transport direction of the transparent plate, and capable of suppressing an increase in the number of mechanisms for providing a water layer on the back side of the transparent plate. A light source (1) is disposed in the direction in which the light ray path that is from the line sensor camera (2) to a visual field (5) and reflected by a glass plate (71) extends, under the condition that the glass plate (71) has no distortions. The direction that the illumination face for the stripe pattern of the light source (1) faces is defined so that the result of projecting the illumination face along the travel direction of the glass plate (71) is a line segment. Moreover, the lines that form the dark portions of the stripe pattern on the illumination face are parallel to the transport direction of the glass plate (71).
Description
Technical field
The present invention relates to the inspection of the surface configuration of transparent plate body used, obtain the transparent plate body surface inspection camera system that the opticpath produced because of the reflection of transparent plate surface when light source is made a video recording changes the picture formed.
Background technology
As an example of the method for the small distortion on the surface of inspection glass plate, there will be a known following method: use line sensor camera (line sensor camera), the candy strip (stripe pattern) of the opticpath reflected along the surface at glass plate and photographic light sources, checks the degree of the presence or absence of the distortion of glass pane surface, distortion based on the view data obtained by taking.Now, as candy strip, often use the pattern that the line as dark portion configures at certain intervals.It should be noted that, glass plate illuminated candy strip under the state of carrying in a certain direction of check object.The trace line corresponding with the dark portion of candy strip is there is in the image that the result of taking obtains.It should be noted that, the size of each pixel of line sensor camera is identical and equally spaced arrange.
Fig. 9 is the key diagram in the path of the general light represented between light source and line sensor camera.Side existing for the support 72 supported glass plate 71 is called dorsal part, its opposition side is called table side.Solid line shown in Fig. 9 represents the path of the light reflected at the face place of the table side of glass plate 71.And the dotted line shown in Fig. 9 represents the path of the light reflected at the face place of the dorsal part of glass plate 71.It should be noted that, the distance P shown in Fig. 9 depends on the thickness of slab of glass plate 71.
As the light source of segregation phenomenon and the configuration of line sensor camera that produce the distance P shown in Fig. 9, the form shown in Figure 10 can be considered.Arrow shown in Figure 10 represents the carrying direction of glass plate 71.Now, in the plane that the carrying direction with glass plate 71 is vertical, comprise the starting point of the opticpath extended from line sensor camera 82, the visual field 85 of line sensor camera 82, the center line along this shadow surface of the length direction of the shadow surface of the rectangle of light source 81.
Thus, the situation that the plane that the configuration shown in Figure 10 exists corresponding to the opticpath center of line sensor camera 82 is vertical with glass plate and vertical with the carrying direction of glass plate.
At this, the optical axis of camera refers to center by the lens of camera and the vertical line vertical with its lens face.Further, opticpath center refers to following opticpath: comprise the opticpath consistent with the optical axis of line sensor camera and the opticpath of reflection spot to light source from the glass plate (be assumed to do not produce distortion) corresponding with this opticpath.
Figure 10 illustrates that light source 81 irradiates candy strip to glass plate 71 in the plane that the carrying direction with glass plate 71 is vertical, and line sensor camera 82 carrys out the form of photographic light sources 81 via glass plate 71.Now, difference reflected light on the face of table side and the face of dorsal part of glass plate, therefore the trace line corresponding to 1 dark portion of candy strip occurs 2 in image.
Figure 11 is the schematic diagram of the example representing the image obtained by making a video recording.In fig. 11, as shown by the solid line, the trace line produced by the reflection at the face place at dorsal part is schematically shown in dotted line for the trace line produced by the reflection at the face place in table side.This two seed scars line distance is each other designated as separating distance D.Corresponding to the position of this two seed scars line, brightness value becomes minimum.The trace line produced by the reflection in the face of table side and the separating distance D of the trace line produced by the reflection in the face of dorsal part become the size of the thickness of slab depending on glass plate.
It should be noted that, such as, if certain by the trace line interval each other of the reflection generation at the face place of table side, then can be judged as that glass plate does not produce distortion.And, if this interval is uneven, then based on this interval, the degree of the distortion of glass plate can be evaluated.
And when glass plate produces distortion, separating distance D also reduces or becomes large.At this, when separating distance D reduces, it is close that brightness value becomes minimum pixel, and in image, generation is 2 streak lines or the 1 indefinite position of streak line.Figure 12 be represent separating distance D close to and to produce be the schematic diagram of the example of the image at 2 streak lines or the 1 indefinite position of streak line.When producing so indefinite position, the estimating precision of the distortion of glass plate declines.Especially, when the thickness of slab of glass plate is thinning, the interval of separating distance D (with reference to Figure 11) self reduces, and therefore in image, easily producing is 2 streak lines or the 1 indefinite position of streak line.Therefore, thickness of slab is thinner, and the estimating precision of distortion more easily declines.
In order to prevent the decline of such estimating precision, propose the technology (for example, referring to patent documentation 1) of the layer (following, to be designated as water layer) of the dorsal part configuration water at glass plate.Figure 13 represents the key diagram being configured with the path of the light between the light source of the situation of water layer and line sensor camera at the dorsal part of glass plate.Water layer 73 is arranged between glass plate 71 and support 72.The refractive index of water layer 73 is roughly the same with the refractive index of glass plate 71, exists hardly thus at the light of the face place of the dorsal part of glass plate 71 reflection.Consequently, occur the trace line produced by the reflection at the face place of the table side at glass plate 71 in the picture, the trace line produced by the reflection at the face place at dorsal part is not almost occurred.Therefore, it is possible to be more clearly identified by the position of the trace line produced in the reflection at the face place of table side, based on the interval of trace line, the distortion of glass plate can be measured accurately.
Below, the image taking of the configuration shown in Figure 10 is described.It should be noted that, for convenience of explanation, at the position in the visual field 85 corresponding to line sensor camera 82, at dorsal part configuration water layer (omitting diagram in Fig. 10) of glass plate 71.Therefore, as the reflection at dorsal part place almost non-existent situation be described.This point in the form shown in Figure 15 described later too.
Under the state that glass plate 71 is handled upside down, line sensor camera 82 continues photographic light sources 81 via the visual field 85.Therefore, it is possible to glass plate 71 for face checks.
From each pixel scioptics of line sensor camera 82 towards the opticpath in the visual field 85 be not carry out changing but fixing according to the situation occurred of the distortion of glass plate 71.But, change according to the situation occurred of the distortion of glass plate 71 from the visual field 85 to the opticpath of light source 81.
The shadow surface 81a of light source 81 irradiates candy strip towards the direction, the visual field 85 of line sensor camera 82.In this example, shadow surface 81a is elongated rectangle, and the face that shadow surface 81a exists is crossing with the face that glass plate 71 exists, and the minor face of shadow surface 81a configures in the mode that the carrying direction with glass plate 71 is parallel.Further, in shadow surface 81a, each dark portion 81b is equally spaced arranged in the mode parallel with the minor face of shadow surface 81a.It should be noted that, on shadow surface, the position beyond dark portion is designated as bright portion.
Figure 14 represents the schematic diagram arriving the opticpath of light source 81 and the result after being projected in face vertical to the carrying direction with glass plate for the shadow surface 81a of light source 81 from the lens of the line sensor camera 82 shown in Figure 10 via the visual field 85.It should be noted that, strictly speaking, Figure 14 illustrates the result of axle along the carrying direction of the glass plate upstream lateral projection from downstream.In this manual, about representing other accompanying drawing of projection result, the result of axle along the carrying direction of the glass plate upstream lateral projection from downstream is also shown.
As previously mentioned, from each pixel scioptics of line sensor camera 82 towards the opticpath in the visual field 85 be not carry out changing but fixing according to the situation occurred of the distortion of glass plate 71.Being reflected to the shooting state of shadow surface 81a from the visual field 85 to the opticpath of light source 81 in the opticpath corresponding to certain pixel.If that is, corresponding to certain pixel from the visual field 85 to the opticpath of light source 81 dark portion on shadow surface 81a, then the output of this pixel represents black.And if from the visual field 85 to the opticpath of light source 81 bright portion on shadow surface 81a, then the output of this pixel represents white.Therefore, if glass plate 71 not distortion, then can not change from the visual field 85 to the opticpath of light source 81, the trace line therefore occurred in image becomes at equal intervals.On the other hand, when there is distortion in glass plate 71, changing for bright portion from the dark portion of shadow surface 81a from the visual field 85 to the opticpath of light source 81 corresponding to certain pixel, or be dark portion from the variation of bright portion, the trace line occurred in image thus becomes unequal interval.
The shadow surface 81a of light source 81 is become line segment as shown in figure 14 to the result of the face upslide movie queen vertical with the carrying direction of glass plate.Consequently, the opticpath from the visual field 85 to light source 81 corresponding to each pixel is crossing with any with the shadow surface 81a as line segment, uniquely determines respectively.
And, as other configuration of light source and line sensor camera, the form shown in Figure 15 can be considered.Arrow shown in Figure 15 represents the carrying direction of glass plate 71.Figure 15 corresponds to the opticpath center of line sensor camera 82 and is present in situation in the plane parallel and vertical with glass plate with the carrying direction of glass plate 71.
Under the state that glass plate 71 is handled upside down, line sensor camera 82 continues photographic light sources 81 via the visual field 85.And, from each pixel scioptics of line sensor camera 82 towards the opticpath in the visual field 85 be not carry out changing but fixing according to the situation occurred of the distortion of glass plate 71.These points are same with the form shown in Figure 10.
And in the form shown in Figure 15, shadow surface 81a and the glass plate 71 of light source 81 configure abreast, and the carrying direction of its minor face and glass plate 71 is arranged abreast.That is, shadow surface 81a and glass plate 71 irradiate candy strip just over the ground.In this example, shadow surface 81a is also elongated rectangle.Further, each dark portion 81b is arranged in the mode parallel with the minor face of shadow surface 81a.
Figure 16 represents from the lens of the line sensor camera 82 shown in Figure 15 via the schematic diagram of the visual field 85 towards the opticpath of light source 81 and the result after being projected in face vertical to the carrying direction with glass plate for the shadow surface 81a of light source 81.As has been explained above, from each pixel scioptics of line sensor camera 82 towards the opticpath in the visual field 85 be not because the situation occurred of the distortion of glass plate 71 carries out changing but fixing.Further, being reflected to the shooting state of shadow surface 81a from the visual field 85 to the opticpath of light source 81 in the opticpath corresponding to certain pixel.If that is, corresponding to certain pixel from the visual field 85 to the opticpath of light source 81 dark portion on shadow surface 81a, then the output of this pixel represents black.And if from the visual field 85 to the opticpath of light source 81 bright portion on shadow surface 81a, then the output of this pixel represents white.Therefore, if in glass plate 71 not distortion, then do not change from the visual field 85 to the opticpath of light source 81, the trace line therefore occurred in image becomes at equal intervals.On the other hand, when there is distortion in glass plate 71, changing for bright portion from the dark portion of shadow surface 81a from the visual field 85 to the opticpath of light source 81 corresponding to certain pixel, or be dark portion from the variation of bright portion, the trace line occurred in image thus becomes unequal interval.
In form shown in Figure 15, also, the result that the face that the shadow surface 81a of light source 81 is vertical to the carrying direction with glass plate projects is become line segment as shown in figure 16.Therefore, the opticpath from the visual field 85 to light source 81 corresponding to each pixel is crossing with any with the shadow surface 81a as line segment, uniquely determines respectively.
The record of configuration such as in patent documentation 2 of the light source illustrated in Figure 15 and line sensor camera.
It should be noted that, suppose under the form shown in Figure 15, be assumed to shadow surface 81a and the not parallel and shadow surface 81a of glass plate 71 and roll tiltedly to the carrying direction of glass plate 71.That is, suppose to make the shadow surface 81a of light source 81 towards the downstream in the carrying direction of glass plate 71, and the state from shadow surface 81a and the just right state of glass plate 71, light source 81 being rotated.So, from the lens of line sensor camera 82 via the visual field 85 towards the opticpath of light source 81 and the result after face vertical to the carrying direction with glass plate for shadow surface 81a is projected as shown in figure 17.In this case, the projection result of shadow surface 81a becomes face.So, when the opticpath corresponding to certain pixel is present in dark portion on shadow surface 81a, produce the situation cannot determining the where taken on the line of dark portion uniquely.Such as, there is multiple selection in the opticpath of the line from the visual field 85 to the dark portion 81b of light source 81 in the opticpath 91 shown in Figure 17.Therefore, cannot uniquely determine from the opticpath of the reflection spot on the glass plate 71 opticpath 91 to dark portion 81b according to shooting image.Therefore, under the configuration shown in Figure 15, need the shadow surface 81a making light source 81 parallel with glass plate 71.It should be noted that, in fig. 17, only illustrate 1 dark portion 81b, but there is multiple dark portion 81b on shadow surface 81a.
Under the configuration shown in Figure 15, the dark portion of the reflected light in face of the table side of glass plate and the direction that the reflected light in the face of dorsal part is separated and the candy strip on light source towards identical.Therefore, the configuration shown in Figure 15 is the configuration of the segregation phenomenon not producing the distance P shown in Fig. 9.Figure 18 represents when not arranging water layer, under the configuration shown in Figure 15, from the lens of line sensor camera 82 towards the opticpath in the visual field 85 and the schematic diagram shadow surface 81a of light source 81 having been carried out the result after projecting.When not arranging water layer, as shown in the dotted line of Figure 18, also produce the reflection at the face place of the dorsal part at glass plate 71.And, at the central portion in the visual field of circuit sensor camera, the opticpath that the opticpath reflected at the face place of the table side of glass plate 71 and the face place at dorsal part reflect is roughly overlapping, therefore do not depend on separating distance D and by table side face reflection produce trace line overlapping with the trace line that the reflection in the face by dorsal part produces.Consequently, estimating precision declines.Even if when arranging water layer, when the reflection in the face by dorsal part and the trace line that produces do not disappear completely, also can produce same problem, estimating precision declines.
At first technical literature
Patent documentation
Patent documentation 1: Japanese Laid-Open 2012-21781 publication (paragraph 0033,0034)
Patent documentation 2: Japanese Laid-Open 2009-128098 publication (Fig. 1)
Summary of the invention
The problem that invention will solve
When with the glass plate of wide cut for check object, guaranteeing the whole width cannot taking glass plate under the state checking precision by means of only the line sensor camera of.Thus, when with the glass plate of wide cut for check object, as long as by multiple for the combination of light source and line sensor camera configuration.But, as shown in Figure 10, the plane that the opticpath center of line sensor camera exists vertical with glass plate and also vertical with the carrying direction of glass plate when, in order to avoid the group of light source and line sensor camera interferes each other, need according to the group be made up of light source and line sensor camera, is staggered along carrying direction in the visual field of line sensor camera.The example of situation about being staggered along carrying direction in the visual field of line sensor camera as shown in figure 19.Figure 19 illustrate glass plate 71 from top view to state.And the arrow shown in Figure 19 represents the carrying direction of glass plate 71.Further, in each group that is made up of light source and line sensor camera, omit the diagram of line sensor camera, the visual field 85 of light source 81 and line sensor camera is shown.In the example shown in Figure 19, the group be made up of being arranged 6 groups, with the visual field 85 at 6 positions for object is taken, the image of the whole transverse width for checking glass plate 71 being obtained thus light source 81 and line sensor camera (diagram is omitted).
But, when being staggered along carrying direction in the visual field 85 of line sensor camera according to the group be made up of light source 81 and line sensor camera, need to configure multiple mechanism for arranging water layer at the dorsal part of glass plate.Such as, in the example shown in Figure 19, need to be configured in these 3 positions of A, B, the C shown in Figure 19 for the mechanism's (diagram is omitted) arranging water layer.Consequently, the manufacturing cost of testing fixture increases.
On the other hand, as shown in figure 15, the plane existed at the opticpath center of circuit sensor camera vertical with glass plate and parallel with the carrying direction of glass plate, the configuration that the group be made up of light source 81 and line sensor camera 82 does not interfere each other can realize as illustrated in Figure 20.But in this case, also, when the reflection in the face by dorsal part and the trace line produced do not disappear completely, estimating precision easily declines.It should be noted that, Figure 20 is vertical view, and the arrow shown in Figure 20 represents the carrying direction of glass plate 71.
The problem more than described not only produces in the inspection of glass plate, also produces in the inspection of the transparent plate body beyond glass plate.
Therefore, the object of the present invention is to provide a kind of transparent plate body surface inspection camera system, the plane that the opticpath center of line sensor camera exists and the carrying direction of this plane and transparent plate body vertical with transparent plate body is both in not parallel also off plumb situation, the phenomenon that the path of reflected light in the face of utilization table side is depended on thickness of slab with the path of the reflected light in the face of dorsal part and is separated, and the increase of the number of the mechanism for arranging water layer at the dorsal part of transparent plate body can be suppressed.
For solving the scheme of problem
The feature of transparent plate body surface inspection camera system of the present invention is to possess: line sensor camera, takes the transparent plate body be handled upside down, and configure in the mode that the visual field is orthogonal with the carrying direction of transparent plate body from vergence direction; And light source, do not produce the condition of distortion in transparent plate body under, be configured in the extending direction that reflected by transparent plate body from line sensor camera towards the opticpath in the visual field of this line sensor camera, and described light source irradiation candy strip, the shadow surface of the candy strip of light source towards being that the mode becoming line segment is determined with the result that this shadow surface is projected along the direct of travel of transparent plate body, the line that shadow surface becomes the dark portion of candy strip is parallel with the carrying direction of transparent plate body.
Preferably, do not produce the condition of distortion in transparent plate body under, when assume comprise the opticpath consistent with the optical axis of line sensor camera and from the plane of the opticpath of the reflection spot the transparent plate body corresponding with this opticpath to light source, this plane meets and the carrying direction of transparent plate body both not parallel also off plumb condition.
And the feature of transparent plate body surface inspection camera system of the present invention is to possess: line sensor camera, takes the transparent plate body be handled upside down, and configure in the mode that the visual field is orthogonal with the carrying direction of transparent plate body, and light source, there is the shadow surface of rectangle, and irradiate candy strip from this shadow surface, configure described line sensor camera and described light source as follows: assuming that comprise the starting point of the opticpath extended from line sensor camera, the visual field of line sensor camera, along the state that the plane of the central shaft of the shadow surface of the length direction of shadow surface is orthogonal with carrying direction, from the state of this supposition, centered by the visual field, axle makes line sensor camera and light source become the state of mutual reverse rotation, the shadow surface of the candy strip of light source towards being that the mode becoming line segment is determined with the result that this shadow surface is projected along the direct of travel of transparent plate body, the line that shadow surface becomes the dark portion of candy strip is parallel with the carrying direction of transparent plate body.
Also can be possess multiple group be made up of line sensor camera and light source, each group that is made up of line sensor camera and the light source mode be arranged on straight line with the visual field of each line sensor camera configures.
Also can be have the backside reflection cancellation unit of the backside reflection cancellation of transparent plate body.
Invention effect
According to the present invention, the plane that the opticpath center of line sensor camera exists and the carrying direction of this plane and transparent plate body vertical with transparent plate body is both in not parallel also off plumb situation, the phenomenon that the path of reflected light in the face of utilization table side is depended on thickness of slab with the path of the reflected light in the face of dorsal part and is separated, and the increase of the number of the mechanism for arranging water layer at the dorsal part of transparent plate body can be suppressed.
Accompanying drawing explanation
Fig. 1 is the stereographic map of the example representing transparent plate body surface inspection camera system of the present invention.
Fig. 2 schematically shows from the lens of line sensor camera 2 via the stereographic map of the visual field 5 towards the shadow surface of the opticpath of light source 1 and light source 1.
Fig. 3 is the schematic diagram representing the result projected towards the opticpath of light source 1 and the shadow surface 1a of light source 1 face vertical to the carrying direction with glass plate via the visual field 5 from line sensor camera 2 shown in Fig. 2.
Fig. 4 represents that the result projected with the face that the shadow surface 1a of light source 1 is vertical to the carrying direction with glass plate becomes the schematic diagram of the projection result of the situation of the posture of the mode determination light source 1 in face.
Fig. 5 is the schematic diagram of the result that face that the alignment of the dark portion represented becoming candy strip is vertical with the carrying direction of glass plate projects.
Fig. 6 is the key diagram of the example representing candy strip of the present invention.
Fig. 7 is the schematic diagram of the projection result representing the situation that supposition dark portion is parallel with the minor face of shadow surface 1a.
Fig. 8 represents the key diagram by situations multiple for the group configuration that is made up of light source 1 and line sensor camera 2.
Fig. 9 is the key diagram in the path of the general light represented between light source and line sensor camera.
Figure 10 is the stereographic map of an example of the configuration representing light source and line sensor camera.
Figure 11 is the schematic diagram of the example represented by taking the image obtained.
Figure 12 is the schematic diagram of the example representing the image creating 2 streak lines or the 1 indefinite position of streak line.
Figure 13 represents the key diagram being configured with the path of the light between the light source of the situation of water layer and line sensor camera at the dorsal part of glass plate.
Figure 14 is the schematic diagram arriving the result that the shadow surface 81a of the opticpath of light source 81 and light source 81 face vertical to the carrying direction with glass plate projects from the lens of line sensor camera 82 via the visual field 85 represented shown in Figure 10.
Figure 15 is the stereographic map of other example of the configuration representing light source and line sensor camera.
Figure 16 is the schematic diagram representing the result projected towards the opticpath of light source 81 and the shadow surface 81a of light source 81 face vertical to the carrying direction with glass plate via the visual field 85 from the lens of line sensor camera 82 shown in Figure 15.
Figure 17 represents that supposition shadow surface 81a rolls the schematic diagram of the projection result of oblique situation to the carrying direction of glass plate 71.
Figure 18 represents when not arranging water layer, under the configuration shown in Figure 15, from the schematic diagram of the result that the lens of line sensor camera 82 project towards the opticpath in the visual field 85 and the shadow surface 81a of light source 81.
Figure 19 represents staggered along carrying direction in the visual field of line sensor camera and configure the key diagram of the configuration of the situation of the light source shown in Figure 10 and line sensor camera.
Figure 20 is the vertical view representing the configuration that the group be made up of light source and line sensor camera shown in Figure 15 does not interfere each other.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.In the following description, illustrate that the transparent plate body of check object is the situation of glass plate, but the present invention also can be applied to the inspection of the transparent plate body beyond glass plate.
Fig. 1 is the stereographic map of the example representing transparent plate body surface inspection camera system of the present invention.Transparent plate body surface inspection camera system of the present invention possesses light source 1 and line sensor camera 2.Light source 1 irradiates candy strip to the glass plate 71 of the check object becoming distortion, and line sensor camera 2 is by taking the picture of the candy strip of the light source 1 in the prolongation of the opticpath reflected on the surface at glass plate 71 and synthetic image.
Glass plate 71 is supported by the support (illustrating omission in FIG) of glass plate and is carried.Arrow shown in Fig. 1 represents the carrying direction of glass plate 71.And, the face of the dorsal part at the position corresponding with the visual field 5 of circuit sensor camera 2 is provided with water layer (illustrating omission in FIG).It should be noted that, in each accompanying drawing afterwards, also omit the support of glass plate, the diagram of water layer.
Line sensor camera 2 is same with the line sensor camera 82 shown in Figure 10, the successively photographic light sources 1 via the visual field 5.Therefore, it is possible to glass plate 71 for face checks.
But, in the configuration shown in Figure 10, the plane that the opticpath center of line sensor camera 82 exists is arranged in vertical with glass plate 71 and also vertical with the carrying direction of glass plate 71 mode, and line sensor camera 82 is photographic light sources 81 via glass plate 71.Relative to this, in transparent plate body surface inspection camera system of the present invention, the plane existed at the opticpath center of circuit sensor camera 2 (with reference to Fig. 1) is vertical with glass plate 71 and with under the carrying direction of glass plate 71 both out of plumb also uneven state, with line sensor camera 2, via glass plate 71, the mode of photographic light sources 1 configures circuit sensor camera 2.It should be noted that, the glass plate of the situation that the plane existed the opticpath center of line sensor camera 2 (opticpath that the later opticpath of the reflection spot on the opticpath consistent with the optical axis of line sensor camera 2 and the glass plate corresponding with this opticpath is consistent) specifies meets not produce and is out of shape such condition (in other words, smooth such condition).But line sensor camera 2 is considered and the interference of carrying mechanism and be configured in the top of glass plate 71.And line sensor camera 2 configures in the mode that the visual field 5 of line sensor camera 2 is orthogonal with the carrying direction of glass plate 71.And, in FIG, exemplify line sensor camera 2 and be configured in than the visual field 5 more by carrying the situation of the position in the downstream in direction, but line sensor camera 2 also can be configured in the position than upstream side, the visual field 5.
Further illustrate the posture of line sensor camera 2.As described later, light source 1 has the shadow surface of elongated rectangle, and irradiates candy strip from this shadow surface.Same with the situation shown in Figure 10, assuming that vertical with glass plate 71 and also vertical with the carrying direction of the glass plate mode of the plane existed with the opticpath center of line sensor camera 2 configures the state of circuit sensor camera 2.In this case, the visual field 5 is orthogonal with the carrying direction of glass plate 71.And, under the state that this assumes, comprise extend from line sensor camera 2 the starting point of opticpath, line sensor camera 2 the visual field 5, along this shadow surface of the length direction of the shadow surface of light source 1 central shaft and the plane that formed is orthogonal with the carrying direction of glass plate 71.From this state centered by the visual field 5 axle make line sensor camera 2 postrotational position configuration circuit sensor camera 2.The posture of line sensor camera 2 now corresponds to the posture of the line sensor camera 2 shown in Fig. 1.It should be noted that, consider and the interference of carrying mechanism and line sensor camera 2 is positioned at the condition more such than the place closer to the top, face of the table side of glass plate 71 as long as rotation amount when axle makes line sensor camera 2 rotate centered by the visual field 5 from the state of above-mentioned supposition meets, be not particularly limited.
By determining the posture of line sensor camera 2 like this, the plane that the opticpath center of line sensor camera 2 exists thus become vertical with glass plate 71 and with carrying direction both not parallel also off plumb states of glass plate 71.
And the visual field 5 under the posture of the line sensor camera 2 shown in Fig. 1 is identical with the visual field 5 under the state of above-mentioned supposition.
Like this, the visual field 5 can be fixed and determine the posture of line sensor camera 2.And, from each pixel scioptics of line sensor camera 2 towards the opticpath in the visual field 5 be not carry out changing but fixing according to the situation occurred of the distortion of glass plate 71.But, change according to the situation occurred of the distortion of glass plate 71 from the visual field 5 to the opticpath of light source 1.
Light source 1 has the shadow surface of elongated rectangle, irradiates candy strip from this shadow surface.In the example depicted in figure 1, in light source 1, the face towards glass plate 71 side is shadow surface.The shadow surface of light source 1 arranges dark portion at certain intervals abreast.About the candy strip of the shadow surface of light source 1 of the present invention, be described below.
(in other words light source 1 does not deform such condition at glass plate 71, the smooth such condition of glass plate 71) under, be configured in the opticpath that is equivalent to from the lens of line sensor camera 2 towards the visual field 5 by the position the opticpath of the situation after the reflection of the face of the table side of glass plate 71.
Further illustrate the position of light source 1.Same with the situation shown in Figure 10, assuming that vertical with glass plate 71 and also vertical with the carrying direction of the glass plate mode of the plane existed with the opticpath center of line sensor camera 2 is configured with the state of line sensor camera 2.The visual field 5 is now identical with the visual field 5 shown in Fig. 1.As previously mentioned, under the state of this supposition, comprise extend from line sensor camera 2 the starting point of opticpath, line sensor camera 2 the visual field 5, along the plane of the central shaft of this shadow surface of the length direction of the shadow surface of light source 1 and the carrying direction of glass plate 71 orthogonal.From this state, centered by the visual field 5, axle makes light source 1 rotate.Further, light source 1 is configured in the opticpath of the situation that the opticpath from each pixel scioptics of the line sensor camera 2 shown in Fig. 1 towards the visual field 5 is reflected by the face of the table side of glass plate 71.As has been explained above, line sensor camera 2 is also configured in the position that axle rotates centered by the visual field 5 from the above-mentioned state assumed.That is, line sensor camera 2 and these both sides of light source 1 are configured in the position that axle rotates centered by the visual field 5 from the above-mentioned state assumed.But the direction that axle rotates centered by the visual field 5 from the above-mentioned state assumed is contrary direction in circuit sensor camera 2 and light source 1.Further, the rotation amount of the line sensor camera 2 from the above-mentioned state assumed is preferably equal with the rotation amount of light source 1.
Further, at the allocation position of such light source 1, with the result after the shadow surface of light source 1 is projected to the face that the carrying direction with glass plate is vertical be the shadow surface of the mode determination light source 1 becoming line segment towards.Consequently, the posture of light source 1 is determined.In FIG, the posture of this light source 1 is represented.
About light source 1 shadow surface towards, be described with reference to Fig. 2 and Fig. 3.Fig. 2 schematically shows from the lens of line sensor camera 2 via the stereographic map of the visual field 5 towards the shadow surface 1a of the opticpath of light source 1 and light source 1.In fig. 2, about light source 1, only illustrate shadow surface 1a, omit the diagram of the outward appearance of light source 1.And, about line sensor camera 2, also omit the diagram of the outward appearance of line sensor camera 2.Arrow shown in Fig. 2 carrying direction that represent glass plate 71 same with Fig. 1.
Fig. 3 be represent shown in Fig. 2 from camera 2 via the schematic diagram of the visual field 5 towards the opticpath of light source 1 and the result after face vertical to the carrying direction with glass plate for the shadow surface 1a of light source 1 is projected.Shadow surface 1a shown in Fig. 2, when the face vertical to the carrying direction with glass plate projects, becomes line segment as shown in Figure 3.The posture of the light source 1 shown in Fig. 1 meets this condition.
It should be noted that, in the present embodiment, as projection result, illustrate and illustrate that axle along the carrying direction of glass plate is from the result behind downstream upstream lateral projection, but the result after axle along the carrying direction of glass plate also can be used from upstream side to downstream lateral projection.No matter be which kind of situation, structure of the present invention can both be described.
As has been explained above, from each pixel scioptics of line sensor camera 2 towards the opticpath in the visual field 5 be not carry out changing but fixing according to the situation occurred of the distortion of glass plate 71.By relative to being reflected to the shooting state of shadow surface 1a from the visual field 5 to the opticpath of light source 1 in the opticpath of certain pixel.If that is, corresponding to certain pixel from the visual field 5 to the opticpath of light source 1 dark portion on shadow surface 1a, then the output of this pixel represents black.And if this opticpath bright portion on shadow surface 1a, then the output of this pixel represents white.Therefore, if glass plate 71 not distortion, then do not change from the visual field 5 to the opticpath of light source 1, the trace line therefore occurred in image becomes at equal intervals.On the other hand, when glass plate 71 exists distortion, the dark portion from the visual field 5 to the opticpath of light source 1 from shadow surface 1a corresponding to certain pixel changes to bright portion, or changes from bright portion to dark portion, and the trace line occurred in image thus becomes unequal interval.
Suppose the posture the shadow surface 1a of light source 1 to be become the mode determination light source 1 in face to the result of the face upslide movie queen vertical with the carrying direction of glass plate.Fig. 4 is the schematic diagram of the projection result represented in this case.In the diagram, although only illustrate 1 dark portion 1b, dark portion 1b is provided with multiple.And, in the diagram, in the face of projection result becoming shadow surface 1a, there are bright portion and these both sides of dark portion.Therefore, same with the situation shown in Figure 17, when the opticpath corresponding to certain pixel is present in dark portion 1b on shadow surface 1a, produce the situation cannot determining the where taken on the line of dark portion 1b uniquely.Such as, there is multiple selection in the opticpath from the visual field 5 to the dark portion 1b of light source 1 in the opticpath 7 shown in Fig. 4.Therefore, cannot determine uniquely according to photographed images from the opticpath of the reflection spot on the glass plate 71 opticpath 7 to dark portion.
Therefore, the result that the face that the shadow surface 1a of light source 1 is vertical to the carrying direction with glass plate projects is become the such condition of line segment by light source 1 demand fulfillment shown in Fig. 1.By meeting this condition, the state of each pixel of line sensor camera 2 can be determined uniquely.
Next, shadow surface 1a (with reference to Fig. 2) the upper candy strip arranged at light source 1 is described.In shadow surface 1a, under the posture of the light source 1 determined as described above, the line becoming dark portion is arranged in the mode that the carrying direction with glass plate 71 is parallel.Further, the line becoming dark portion equally spaced arranges multiple.The each line becoming dark portion is parallel to each other.In candy strip, the position beyond dark portion is bright portion.
Fig. 5 is the schematic diagram of the result after face that the alignment of the dark portion represented becoming candy strip is vertical with the carrying direction of glass plate projects.As shown in Figure 5, when dark portion being set on shadow surface 1a in the mode that the line becoming dark portion is parallel with the carrying direction of glass plate 71, becoming when the alignment of the dark portion 1b face vertical with the carrying direction of glass plate projects and become a little.Using after the dark portion 1b of shadow surface 1a projects to the face that the carrying direction with glass plate is vertical as a result, dark portion 1b equally spaced arranges as point.
The state of observing from front of the candy strip determined so as shown in Figure 6.As shown in Figure 6, in the present embodiment, the dark portion 1b in candy strip tilts relative to the minor face of shadow surface 1a.
Suppose on shadow surface 1a, same with the situation shown in Figure 10, dark portion is parallel with the minor face of shadow surface 1a.So, under glass plate 71 does not produce the such condition of distortion, light source 1 is configured in the position on the extending direction that is equivalent to be reflected from line sensor camera 2 towards the opticpath in the visual field 5 by the face of the table side of glass plate 71, and when meeting the result after being projected in the face that the shadow surface 1a of light source 1 is vertical to the carrying direction with glass plate and becoming the such condition of line segment, the result after making face that the alignment of the dark portion becoming candy strip is vertical with the carrying direction of glass plate project as shown in Figure 7.That is, the result after being projected to the face that the carrying direction with glass plate is vertical by dark portion 1b becomes line segment as shown in Figure 7, and has width.Consequently, such as, even if produce distortion on the surface of glass plate 71, also cannot determine that, in the where of each dark portion with width shooting pixel, therefore producing the trace line occurred in image becomes equally spaced situation etc., the inspection precise decreasing of distortion uniquely.
Therefore, in the present invention, not, with the minor face of shadow surface 1a, dark portion is set abreast, but dark portion 1b is set as illustrated in Fig. 6.Strictly speaking, under the posture of light source 1, dark portion 1b is set to meet the mode becoming line such condition parallel with the carrying direction of glass plate 71 of dark portion.
Shown in result Fig. 5 as the aforementioned after being projected to the face that the carrying direction with glass plate is vertical by the dark portion 1b of shadow surface 1a, dark portion 1b equally spaced arranges as point.Therefore, if not distortion on glass plate 71, then the trace line occurred in image becomes at equal intervals.And if produce distortion, then the trace line occurred in image produces uneven, based on trace line interval each other, can evaluate the distortion of glass plate.Further, in projection result, dark portion 1b, as an appearance, therefore in the picture, there will not be the situation that the width of 1 streak line is wide, can evaluate the distortion of glass plate accurately.
And, in the present invention, the plane that the opticpath center of line sensor camera 2 exists is vertical with glass plate 71 and not parallel with the carrying direction of glass plate 71, therefore, it is possible to utilize the segregation phenomenon of the distance P shown in Fig. 9 (phenomenon that the path of reflected light in the face of table side is depended on thickness of slab with the path of the reflected light in the face of dorsal part and is separated).In other words, even if in the reflection in the face by dorsal part and the trace line produced cannot be eliminated completely by water layer, also the state (with reference to Figure 18) that the opticpath that there will not be the face place of the table side of glass plate 71 to reflect is overlapping with the opticpath that the face place of dorsal part is reflected, can prevent the decline of estimating precision.
In addition, in transparent plate body surface inspection camera system of the present invention, the plane that the opticpath center of line sensor camera 2 exists vertical with glass plate 71 and with the carrying direction out of plumb of glass plate 71.Therefore, when from directly over observe, make light source 1 and line sensor camera 2 not overlapping with the extended line of other line sensor camera and other light source respectively, not to the interference in the visual field of line sensor camera, can be multiple by the group configuration be made up of light source 1 and line sensor camera 2.Therefore, even if arrange multiple by the group be made up of light source 1 and line sensor camera 2, and configure each group in the mode that the visual field 5 of the line sensor camera 2 of each group becomes linearity, also can not produce interference at each group.
Fig. 8 represents as described above by the key diagram of situations multiple for the group configuration be made up of light source 1 and line sensor camera 2.Fig. 8 illustrate each light source and each line sensor camera from directly over the situation observed.In fig. 8, the constitutional diagram be made up of light source 1 and line sensor camera 2 illustrates 4 groups.And the visual field 5 of the line sensor camera 2 of each group linearly arranges.Consequently, the distortion of the glass plate 71 of the wide cut shown in Fig. 8 can be checked accurately.Further, the visual field 5 of the line sensor camera 2 of each group linearly arrange and the non-changing of the relative positions, water layer (diagram omission) is therefore set on the face of the dorsal part at glass plate 71 if mechanism arrange 1 at the position corresponding with the visual field 5.Therefore, in the present invention, even if the plane existed at the opticpath center of circuit sensor camera is vertical with glass plate and in the uneven situation in carrying direction of this plane and glass plate, also can suppress the increase of the number of the mechanism for arranging water layer at the dorsal part of glass plate.
It should be noted that, utilize water layer can eliminate the reflection (backside reflection) in the face of the dorsal part of glass plate 71, the mechanism therefore for arranging water layer at the dorsal part of glass plate also can be called backside reflection cancellation unit.
It should be noted that, the camera used in the above-described embodiment is if not line sensor camera but area sensor cameras (area sensor camera), then the line becoming the dark portion of candy strip also can be not parallel with glass handling direction.
Area sensor cameras can also be used as the replacement of multiple line sensor camera.In this case, the line becoming the dark portion of candy strip needs parallel with glass handling direction.
In detail and describe the application with reference to specific embodiment, but do not depart from the spirit and scope of the present invention and the situation of various change and correction of can applying is self-evident to those skilled in the art.
The Japanese patent application (Japanese Patent Application 2013-030061) that the application filed an application based on February 19th, 2013, and its content is incorporated herein as reference.
Industrial applicibility
The present invention is applicable to the Computer image genration of the inspection of the surface configuration being applied to the transparent plate body such as glass plate.
Label declaration
1,81 light sources
1a, 81a shadow surface
1b, 81b dark portion
2,82 line sensor cameras
5,85 visuals field
71 glass plates
Claims (5)
1. a transparent plate body surface inspection camera system, is characterized in that, possesses:
Line sensor camera, takes the transparent plate body be handled upside down, and configures in the mode that the visual field is orthogonal with the carrying direction of described transparent plate body from vergence direction; And
Light source, do not produce the condition of distortion in described transparent plate body under, be configured in extending direction that the opticpath from described line sensor camera towards the visual field of this line sensor camera reflects by described transparent plate body, and described light source irradiation candy strip
The shadow surface of the candy strip of described light source towards being that the mode becoming line segment is determined with the result that this shadow surface is projected along the direct of travel of transparent plate body,
The line that described shadow surface becomes the dark portion of candy strip is parallel with the carrying direction of described transparent plate body.
2. transparent plate body surface inspection camera system according to claim 1, wherein,
Do not produce the condition of distortion in transparent plate body under, when assume comprise the opticpath consistent with the optical axis of line sensor camera and from the plane of the opticpath of reflection spot to light source the described transparent plate body corresponding with this opticpath, this plane meets and the carrying direction of the transparent plate body condition that both not parallel also out of plumb is such.
3. a transparent plate body surface inspection camera system, is characterized in that, possesses:
Line sensor camera, takes the transparent plate body be handled upside down, and configures in the mode that the visual field is orthogonal with the carrying direction of described transparent plate body; And
Light source, has the shadow surface of rectangle, and irradiates candy strip from this shadow surface,
Configure described line sensor camera and described light source as follows: assuming that comprise the starting point of the opticpath extended from described line sensor camera, described line sensor camera the visual field, along the plane of the central shaft of the described shadow surface of the length direction of the described shadow surface state orthogonal with described carrying direction, from the state of this supposition, centered by the described visual field, axle makes described line sensor camera and described light source become the state of mutual reverse rotation
The shadow surface of the candy strip of described light source towards being that the mode becoming line segment is determined with the result that this shadow surface is projected along the direct of travel of transparent plate body,
The line that described shadow surface becomes the dark portion of candy strip is parallel with the carrying direction of described transparent plate body.
4. the transparent plate body surface inspection camera system according to any one of claim 1 ~ claim 3, wherein,
Described transparent plate body surface inspection camera system possesses multiple group be made up of described line sensor camera and described light source, and each group that is made up of described line sensor camera and the described light source mode be arranged on straight line with the visual field of each line sensor camera configures.
5. the transparent plate body surface inspection camera system according to any one of claim 1 ~ claim 4, wherein,
Described transparent plate body surface inspection camera system has the backside reflection cancellation unit of the backside reflection cancellation of transparent plate body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013030061A JP2016085034A (en) | 2013-02-19 | 2013-02-19 | Image-capturing system for transparent plate-like body surface inspection |
| JP2013-030061 | 2013-02-19 | ||
| PCT/JP2014/053212 WO2014129358A1 (en) | 2013-02-19 | 2014-02-12 | Imaging system for transparent plate surface inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105008854A true CN105008854A (en) | 2015-10-28 |
| CN105008854B CN105008854B (en) | 2018-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480009296.1A Active CN105008854B (en) | 2013-02-19 | 2014-02-12 | Transparent plate body surface inspection camera system |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2016085034A (en) |
| KR (1) | KR102071451B1 (en) |
| CN (1) | CN105008854B (en) |
| TW (1) | TWI637164B (en) |
| WO (1) | WO2014129358A1 (en) |
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| CN106066158A (en) * | 2015-04-22 | 2016-11-02 | 新东超精密有限公司 | Determinator |
| CN107607549A (en) * | 2017-09-27 | 2018-01-19 | 深圳精创视觉科技有限公司 | Glass defect detection device |
| CN110455828A (en) * | 2019-09-02 | 2019-11-15 | 蚌埠中光电科技有限公司 | A kind of large scale TFT substrate glass nondestructive micro-waviness detection method |
| CN110849911A (en) * | 2019-11-25 | 2020-02-28 | 厦门大学 | Glass defect image acquisition device, glass defect detection equipment and detection method |
| CN115555290A (en) * | 2022-10-20 | 2023-01-03 | 四川大学 | Glass apron slight defect check out test set based on degree of deep learning |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6642223B2 (en) * | 2016-04-13 | 2020-02-05 | Ａｇｃ株式会社 | Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method |
| JP6228695B1 (en) * | 2017-02-27 | 2017-11-08 | 株式会社ヒューテック | Defect inspection equipment |
| CN112880600A (en) * | 2021-04-29 | 2021-06-01 | 深圳博升光电科技有限公司 | Imaging device and equipment for detecting glass |
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| CN110455828A (en) * | 2019-09-02 | 2019-11-15 | 蚌埠中光电科技有限公司 | A kind of large scale TFT substrate glass nondestructive micro-waviness detection method |
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| CN115555290A (en) * | 2022-10-20 | 2023-01-03 | 四川大学 | Glass apron slight defect check out test set based on degree of deep learning |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201443424A (en) | 2014-11-16 |
| KR20150116863A (en) | 2015-10-16 |
| WO2014129358A1 (en) | 2014-08-28 |
| JP2016085034A (en) | 2016-05-19 |
| TWI637164B (en) | 2018-10-01 |
| KR102071451B1 (en) | 2020-01-30 |
| CN105008854B (en) | 2018-11-09 |
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