CN104993001A - Selective filtering membrane, preparation method and solar cell module - Google Patents

Selective filtering membrane, preparation method and solar cell module Download PDF

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Publication number
CN104993001A
CN104993001A CN201510378792.0A CN201510378792A CN104993001A CN 104993001 A CN104993001 A CN 104993001A CN 201510378792 A CN201510378792 A CN 201510378792A CN 104993001 A CN104993001 A CN 104993001A
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China
Prior art keywords
filter coating
silicon layer
selectivity filter
preparation
amorphous silicon
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CN201510378792.0A
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Chinese (zh)
Inventor
刘石勇
牛新伟
李旺
朱登华
刘路
王仕鹏
黄海燕
陆川
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Zhejiang Chint Solar Energy Technology Co Ltd
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Zhejiang Chint Solar Energy Technology Co Ltd
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Priority to CN201510378792.0A priority Critical patent/CN104993001A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • H01L31/055Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means where light is absorbed and re-emitted at a different wavelength by the optical element directly associated or integrated with the PV cell, e.g. by using luminescent material, fluorescent concentrators or up-conversion arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention discloses a preparation method of a selective filtering membrane. The preparation method comprises the following steps: a), forming an amorphous silicon layer on a transparent substrate; b), forming a silicon oxide film on the amorphous silicon layer; and c), forming an amorphous silicon layer on the silicon oxide film, wherein the step b) and the step c) are at least alternately executed twice. The invention further correspondingly provides a selective filtering membrane, and a crystalline silicon solar cell module and a film solar cell module which employ the selective filtering membrane. According to the invention, solar cells, connecting lines, backboards and the like are all hidden at the back surfaces of the solar modules, the whole assemblies are integrated, and the beautifulness is greatly improved.

Description

Selectivity filter coating, preparation method and solar module
Technical field
The invention belongs to solar cell preparation field, specifically, relate to a kind of selectivity filter coating, preparation method and solar module.
Background technology
In worldwide energy crisis, when regenerative resource is fewer and feweri and environmental pollution is more and more serious, the energy-conserving and environment-protective energy, more and more by the concern of people, New Energy Industry is able to fast development, the energy-conserving and environment-protective energy, more and more by the concern of people.Solar energy is most important basic power source in various regenerative resource, and as one of civilian clean energy resource, it receives the lower support energetically to local government of country.Therefore as solar energy generation technology solar radiant energy being converted to electric energy, namely photovoltaic industry develops rapidly especially.
The globality of solar module outward appearance is not in the market fine.For crystal silicon solar batteries assembly, from the appearance, not only can see navy blue cell piece, argenteous welding, can also see the backboard of white or black, overall sensation unsightly.Even if outward appearance is silicon-based film solar cells assembly relatively preferably, on whole solar cell, also can see the line of a lot of strip.Photovoltaic module visually lacks aesthetic feeling and will limit it in some application to the higher field of appearance requirement, such as BIPV (Building Integrated PV (Photovoltaic), BIPV).BIPV is one of photovoltaic solar technological innovation, and its principle adopts photovoltaic module to be directly used as roof boarding, to replace traditional color steel roofing structure.
Therefore be badly in need of a kind of method that can solve prior art defect, effectively can improve the aesthetic measure of existing photovoltaic module, do not reduce simultaneously or can improve the photoelectric conversion efficiency of photovoltaic cell.
Summary of the invention
In order to solve the problem of existing photovoltaic solar cell overall appearance aesthetic property difference, the invention provides a kind of preparation method of selectivity filter coating.
According to an aspect of the present invention, provide a kind of preparation method of selectivity filter coating, described preparation method comprises the steps:
A) amorphous silicon layer is formed on a transparent substrate;
B) on described amorphous silicon layer, silicon oxide film is formed;
C) on described silicon oxide film, amorphous silicon layer is formed;
At least alternately perform described step b) and described step c) twice.
According to a specific embodiment of the present invention, described amorphous silicon layer adopts the mist deposition of silane and hydrogen to be formed.
According to another embodiment of the present invention, the thickness range of described amorphous silicon layer is 1nm ~ 50nm.
According to another embodiment of the present invention, described silicon oxide film adopts the mist deposition of carbon dioxide, silane and hydrogen to be formed.
According to another embodiment of the present invention, the thickness range of described silicon oxide film is 20nm ~ 200nm.
According to another embodiment of the present invention, the depositing temperature of described amorphous silicon layer and/or described silicon oxide film is 100 DEG C ~ 500 DEG C.
According to another embodiment of the present invention, the pressure forming described amorphous silicon layer and/or described silicon oxide film is: 0.1mbar ~ 5mbar.
According to another embodiment of the present invention, the power density forming described amorphous silicon layer and/or described silicon oxide film is 0.1mW/cm 2~ 10mW/cm 2.
According to another aspect of the present invention, provide a kind of selectivity filter coating, described selectivity filter coating comprises successively: transparent substrates, amorphous silicon layer, silicon oxide film, amorphous silicon layer;
Described silicon oxide film and described amorphous silicon layer are alternately distributed, and at least alternately twice;
Described selectivity filter coating adopts the preparation method of any one selectivity filter coating provided by the invention to be prepared from.
According to a further aspect of the invention, provide a kind of crystal silicon solar batteries assembly, described crystal silicon solar assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent encapsulation material, solar cell, encapsulating material and backboard;
Described selectivity filter coating adopts selectivity filter coating provided by the invention.
According to a further aspect of the invention, provide a kind of Thinfilm solar cell assembly, described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent substrates, solar cell, encapsulating material and backboard;
Described selectivity filter coating adopts selectivity filter coating provided by the invention.
According to a further aspect of the invention, provide a kind of Thinfilm solar cell assembly, described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent encapsulation material, solar cell and substrate;
Described selectivity filter coating adopts selectivity filter coating provided by the invention.
Selectivity filter coating provided by the invention through long-wave band sunlight, can absorb for solar cell and converts electric energy to, add the absorption of solar cell to sunlight, improve the photoelectric conversion efficiency of solar cell.Simultaneously, selectivity filter coating is applied among photovoltaic module, no matter be crystal silicon solar batteries assembly or Thinfilm solar cell assembly, all can realize the back side of solar cell, connecting line and backboard etc. all being hidden in solar module, whole solar module is made to present the silvery white or faint yellow of one, greatly improve the aesthetics of solar module, and effectively expand the application places of solar module.
Accompanying drawing explanation
By reading the detailed description done non-limiting example done with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Figure 1 shows that the schematic flow sheet of an embodiment of the preparation method according to a kind of selectivity filter coating provided by the invention;
Figure 2 shows that the structural representation of an embodiment according to a kind of selectivity filter coating provided by the invention;
Figure 3 shows that the structural representation of an embodiment according to a kind of crystal silicon solar batteries assembly provided by the invention;
Figure 4 shows that the structural representation of an embodiment according to a kind of Thinfilm solar cell assembly provided by the invention;
Figure 5 shows that the structural representation of an embodiment according to a kind of Thinfilm solar cell assembly provided by the invention;
Figure 6 shows that transmitance (T) and reflectivity (R) spectrogram of an embodiment of selectivity filter coating provided by the invention;
Figure 7 shows that the pictorial diagram of an embodiment of crystal silicon solar batteries assembly provided by the invention.
In accompanying drawing, same or analogous Reference numeral represents same or analogous parts.
Embodiment
Disclosing hereafter provides many different embodiments or example is used for realizing different structure of the present invention.Of the present invention open in order to simplify, hereinafter the parts of specific examples and setting are described.In addition, the present invention can in different example repeat reference numerals and/or letter.This repetition is to simplify and clearly object, itself does not indicate the relation between discussed various embodiment and/or setting.It should be noted that parts illustrated in the accompanying drawings are not necessarily drawn in proportion.Present invention omits the description of known assemblies and treatment technology and process to avoid unnecessarily limiting the present invention.
With reference to figure 1 and Fig. 2, the preparation method of selectivity filter coating provided by the invention comprises:
Step S101, transparent substrates 110 is formed amorphous silicon layer 120.Optionally, described transparent substrates 110 is glass.Wherein, described amorphous silicon layer 120 adopts silane (SiH 4) and hydrogen (H 2) mist deposition formed.In order to reach better effect, by regulating the ratio of silane gas and hydrogen, the refractive index of described amorphous silicon layer 120 is controlled about 3.5, such as: between 3.4 ~ 3.6.
Optionally, the various ways such as chemical vapour deposition (CVD), plasma activated chemical vapour deposition can be adopted to deposit and to form amorphous silicon layer 120.
Preferably, the thickness range of described amorphous silicon layer 120 is 1nm ~ 50nm, such as: 1nm, 25nm or 50nm.
After forming amorphous silicon layer 120, continue to perform step S102, on described amorphous silicon layer 120, form silicon oxide film 130.Wherein, described silicon oxide film 130 adopts carbon dioxide (CO 2), silane (SiH 4) and hydrogen (H 2) mist deposition formed.In order to reach better effect, the refractive index of silicon oxide film 130 controls about 1.5 ~ 2.5 by the ratio by regulation of carbon dioxide and silane gas, such as: 1.2,2 or 2.5.
Optionally, the various ways such as chemical vapour deposition (CVD), plasma activated chemical vapour deposition can be adopted to deposit and to form silicon oxide film 130.
Preferably, the thickness range of described silicon oxide film 130 is 20nm ~ 200nm, such as: 20nm, 120nm or 200nm.
Perform step S103 further, described silicon oxide film 130 forms amorphous silicon layer 120.The formation method of described amorphous silicon layer 120, Material selec-tion and thickness range are all described above, just repeat no more at this.
At least alternately perform described step S102 and described step S103 twice.
In order to saving resource, cost-saving, preferably, described amorphous silicon layer 120 and/or described silicon oxide film 130 complete in the same apparatus.Preferably, the depositing temperature forming described amorphous silicon layer 120 and/or described silicon oxide film 130 is 100 DEG C ~ 500 DEG C, such as: 100 DEG C, 300 DEG C or 500 DEG C.Preferably, the pressure forming described amorphous silicon layer 120 and/or described silicon oxide film 130 is: 0.1mbar ~ 5mbar, such as: 0.1mbar, 2.6mbar or 5mbar.Preferably, the power density forming described amorphous silicon layer 120 and/or described silicon oxide film 130 is 0.1mW/cm 2~ 10mW/cm 2, such as: 0.1mW/cm 2, 5.2mW/cm 2or 10mW/cm 2.
As shown in Figure 2, the specific embodiment of selectivity filter coating prepared by preparation method provided by the invention is.Described selectivity filter coating comprises successively: transparent substrates 110, amorphous silicon layer 120, silicon oxide film 130, amorphous silicon layer 120; Described silicon oxide film 120 and described amorphous silicon layer 130 are alternately distributed, and have replaced three times.Described silicon oxide film 120 and described amorphous silicon layer 130 are alternately distributed to be needed at least alternately just can reach good effect twice.
In addition, replace, the thickness of multilayer silicon oxide film 120 is preferably consistent at every turn; Equally, the thickness of Multi-layer amorphous silicon layer 130 is also preferably consistent.Thickness distribution is consistent, and each rete can be made more even.Outward appearance is better.
With reference to figure 3, Figure 3 shows that the structural representation of an embodiment according to a kind of crystal silicon solar batteries assembly provided by the invention.Described crystal silicon solar assembly from top to bottom comprises successively: front glass sheet 200, selectivity filter coating 100, transparent encapsulation material 300, solar cell 400, encapsulating material 500 and backboard 600.Wherein, described selectivity filter coating 100 adopts selectivity filter coating provided by the invention.
Figure 4 shows that the structural representation of an embodiment according to a kind of Thinfilm solar cell assembly provided by the invention.Described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet 200, selectivity filter coating 100, transparent substrates 700, solar cell 400, encapsulating material 500 and backboard 600.Wherein, described selectivity filter coating 100 adopts selectivity filter coating provided by the invention.
Figure 5 shows that the structural representation of an embodiment according to a kind of Thinfilm solar cell assembly provided by the invention.Described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet 200, selectivity filter coating 100, transparent encapsulation material 500, solar cell 400 and substrate 700.Wherein, described selectivity filter coating 100 adopts selectivity filter coating provided by the invention.
With reference to figure 6, Figure 6 shows that and adopt PECVD (Plasma Enhanced Chemical VaporDeposition, plasma enhanced chemical vapor deposition) method deposits selectivity filter coating provided by the invention on a glass substrate, tests the spectrogram of transmitance (T) and the reflectivity (R) obtained.Wavelength is reflected substantially lower than the visible ray of 600nm, makes selectivity filter coating present silvery white, makes the connecting line at the selectivity filter coating back side etc. invisible; The long-wave band sunlight that wavelength is greater than 600nm then can be absorbed by battery through selectivity filter coating and convert electric energy to.
Selectivity filter coating provided by the invention is applied to the preparation of solar module, the crystal silicon solar batteries prepared assembly/Thinfilm solar cell assembly can present the silvery white or faint yellow of one, and the aesthetic property of outward appearance obtains and promotes significantly.Therefore, crystal silicon solar batteries assembly/Thinfilm solar cell assembly provided by the invention not only can be widely used in BIPV field, also can be applicable to electronic product, automobile industry, yacht etc. have strict demand field to outward appearance.As shown in Figure 7, this photovoltaic module can incorporate other products surface, becomes the energy almost hidden and lose.In addition, the preparation technology of selectivity filter coating is simple and easy to do, is easy to industrially promote.
Although describe in detail about example embodiment and advantage thereof, being to be understood that when not departing from the protection range of spirit of the present invention and claims restriction, various change, substitutions and modifications can being carried out to these embodiments.For other examples, those of ordinary skill in the art should easy understand maintenance scope in while, the order of processing step can change.
In addition, range of application of the present invention is not limited to the technique of the specific embodiment described in specification, mechanism, manufacture, material composition, means, method and step.From disclosure of the present invention, to easily understand as those of ordinary skill in the art, for the technique existed at present or be about to develop, mechanism, manufacture, material composition, means, method or step later, wherein their perform the identical function of the corresponding embodiment cardinal principle that describes with the present invention or obtain the identical result of cardinal principle, can apply according to the present invention to them.Therefore, claims of the present invention are intended to these technique, mechanism, manufacture, material composition, means, method or step to be included in its protection range.

Claims (12)

1. a preparation method for selectivity filter coating, described preparation method comprises the steps:
A) amorphous silicon layer is formed on a transparent substrate;
B) on described amorphous silicon layer, silicon oxide film is formed;
C) on described silicon oxide film, amorphous silicon layer is formed;
It is characterized in that,
At least alternately perform described step b) and described step c) twice.
2. preparation method according to claim 1, wherein, described amorphous silicon layer adopts the mist deposition of silane and hydrogen to be formed.
3. preparation method according to claim 1, wherein, the thickness range of described amorphous silicon layer is 1nm ~ 50nm.
4. preparation method according to claim 1, wherein, described silicon oxide film adopts the mist deposition of carbon dioxide, silane and hydrogen to be formed.
5. preparation method according to claim 1, wherein, the thickness range of described silicon oxide film is 20nm ~ 200nm.
6. preparation method according to claim 1, wherein, the depositing temperature of described amorphous silicon layer and/or described silicon oxide film is 100 DEG C ~ 500 DEG C.
7. preparation method according to claim 1, wherein, the pressure forming described amorphous silicon layer and/or described silicon oxide film is: 0.1mbar ~ 5mbar.
8. preparation method according to claim 1, wherein, the power density forming described amorphous silicon layer and/or described silicon oxide film is 0.1mW/cm 2~ 10mW/cm 2.
9. a selectivity filter coating, described selectivity filter coating comprises successively: transparent substrates, amorphous silicon layer, silicon oxide film, amorphous silicon layer;
Described silicon oxide film and described amorphous silicon layer are alternately distributed, and at least alternately twice;
It is characterized in that,
Described selectivity filter coating adopts any one preparation method in claim 1 ~ 8 to be prepared from.
10. a crystal silicon solar batteries assembly, described crystal silicon solar assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent encapsulation material, solar cell, encapsulating material and backboard;
It is characterized in that,
Described selectivity filter coating adopts the selectivity filter coating disclosed in claim 9.
11. 1 kinds of Thinfilm solar cell assemblies, described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent substrates, solar cell, encapsulating material and backboard;
It is characterized in that,
Described selectivity filter coating adopts the selectivity filter coating disclosed in claim 9.
12. 1 kinds of Thinfilm solar cell assemblies, described Thinfilm solar cell assembly from top to bottom comprises successively: front glass sheet, selectivity filter coating, transparent encapsulation material, solar cell and substrate;
It is characterized in that,
Described selectivity filter coating adopts the selectivity filter coating disclosed in claim 9.
CN201510378792.0A 2015-06-29 2015-06-29 Selective filtering membrane, preparation method and solar cell module Pending CN104993001A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105262427A (en) * 2015-11-11 2016-01-20 连云港神舟新能源有限公司 Double-sided solar-cell-module double-sided light receiving device
CN110501772A (en) * 2019-08-02 2019-11-26 济南大学 Surpass the ultrahigh resolution colored filter and its preparation method and application on surface based on amorphous silicon hydride
CN113506721A (en) * 2021-06-25 2021-10-15 上海华虹宏力半导体制造有限公司 Method for forming amorphous silicon film

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1588647A (en) * 2004-08-15 2005-03-02 李毅 Non crystal silicon standard solar cell
US20110265866A1 (en) * 2010-04-28 2011-11-03 Min-Seok Oh Solar cell and method for manufacturing the same
CN103227226A (en) * 2013-05-09 2013-07-31 南开大学 Photonic crystal amorphous silicon membrane solar battery
KR20140091632A (en) * 2013-01-11 2014-07-22 엘지전자 주식회사 Solar cell and method for manufacturing the same
CN204144286U (en) * 2014-08-30 2015-02-04 海润光伏科技股份有限公司 The two glass battery component of solar energy with reflection paster
CN104600142A (en) * 2014-12-24 2015-05-06 英利集团有限公司 Photovoltaic module

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1588647A (en) * 2004-08-15 2005-03-02 李毅 Non crystal silicon standard solar cell
US20110265866A1 (en) * 2010-04-28 2011-11-03 Min-Seok Oh Solar cell and method for manufacturing the same
KR20140091632A (en) * 2013-01-11 2014-07-22 엘지전자 주식회사 Solar cell and method for manufacturing the same
CN103227226A (en) * 2013-05-09 2013-07-31 南开大学 Photonic crystal amorphous silicon membrane solar battery
CN204144286U (en) * 2014-08-30 2015-02-04 海润光伏科技股份有限公司 The two glass battery component of solar energy with reflection paster
CN104600142A (en) * 2014-12-24 2015-05-06 英利集团有限公司 Photovoltaic module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105262427A (en) * 2015-11-11 2016-01-20 连云港神舟新能源有限公司 Double-sided solar-cell-module double-sided light receiving device
CN110501772A (en) * 2019-08-02 2019-11-26 济南大学 Surpass the ultrahigh resolution colored filter and its preparation method and application on surface based on amorphous silicon hydride
CN113506721A (en) * 2021-06-25 2021-10-15 上海华虹宏力半导体制造有限公司 Method for forming amorphous silicon film

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