CN104990887A - High-resolution infrared standard spectral measurement device and method - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及大气环境检测技术及光学领域，尤其涉及一种高分辨红外标准光谱测量方法及装置。The invention relates to atmospheric environment detection technology and the field of optics, in particular to a high-resolution infrared standard spectrum measurement method and device.
背景技术Background technique
红外光谱分析可用于研究分子的结构和化学键，具有高度特征性，可以采用与标准化合物的红外光谱对比的方法来做分析鉴定，利用化学键的特征波数来鉴别化合物的类型，并可用于定量测定，综合运用了现代计算机技术、数理统计以及化学计量学等多个学科的最新研究成果，并使之融为一体，以其独有的特点在很多领域，如环境、农业、石油、食品、生物化工、制药及医学等得到了广泛应用，在产品质量分析、在线检测以及工艺控制等方面也获得较大成功。Infrared spectrum analysis can be used to study the structure and chemical bonds of molecules. It is highly characteristic. It can be analyzed and identified by comparing with the infrared spectrum of standard compounds. The characteristic wavenumber of chemical bonds can be used to identify the type of compound and can be used for quantitative determination. It comprehensively uses the latest research results of modern computer technology, mathematical statistics, chemometrics and other disciplines, and integrates them into one. With its unique characteristics, it can be used in many fields, such as environment, agriculture, petroleum, food, biochemical It has been widely used in medicine, medicine and medicine, and has also achieved great success in product quality analysis, online detection and process control.
气体成分红外标准光谱是傅立叶变换红外(FTIR)光谱技术进行气体分析相关应用的基础，为气体成分浓度反演和未知成分的定性识别算法提供必要光谱信息。目前常用的可用于定性和定量分析的红外标准数据库主要包括三种：HITRAN数据库、NIST数据库和QAsoft数据库。HITRAN数据库提供了大气中存在的三十多种分子的谱线信息，NIST数据库提供了21种大气化合物分子的吸光度信息，QAsoft数据库共提供了310种大气化合物分子谱线信息。这些数据库的光谱数据种类能够满足常见气体分析需求，光谱数据存在一定误差，但是对于一些不在数据库内的气体成分，在进行分析之前，必须测量得到其标准光谱信息。Gas composition infrared standard spectrum is the basis of Fourier transform infrared (FTIR) spectroscopy for gas analysis related applications, and provides necessary spectral information for gas composition concentration inversion and unknown composition qualitative identification algorithms. At present, there are mainly three types of infrared standard databases that can be used for qualitative and quantitative analysis: HITRAN database, NIST database and QAsoft database. The HITRAN database provides the spectral line information of more than 30 kinds of molecules existing in the atmosphere, the NIST database provides the absorbance information of 21 atmospheric compound molecules, and the QAsoft database provides a total of 310 atmospheric compound molecular spectral line information. The types of spectral data in these databases can meet the needs of common gas analysis, and there are certain errors in the spectral data. However, for some gas components that are not in the database, their standard spectral information must be measured before analysis.
发明内容Contents of the invention
本发明的目的是提供一种高分辨红外标准光谱测量方法及装置，能够实现不同浓度、不同温度的气体成分高分辨红外标准光谱测量，从而满足红外光谱技术在气体检测中的具体应用需求。The purpose of the present invention is to provide a high-resolution infrared standard spectrum measurement method and device, which can realize high-resolution infrared standard spectrum measurement of gas components with different concentrations and different temperatures, so as to meet the specific application requirements of infrared spectroscopy technology in gas detection.
本发明的目的是通过以下技术方案实现的：The purpose of the present invention is achieved through the following technical solutions:
一种高分辨红外标准光谱测量装置，包括：红外光源1、第一抛物面镜2、分束片3、定镜4、动镜5、第一可旋转反射镜6、第一椭球面镜7、第二抛物面镜8、气体池入射红外窗片9、三块球面镜10～12、气体池出射红外窗片13、第三抛物面镜14、第二椭球面镜15、第二可旋转反射镜16、第三可旋转反射镜17、聚焦抛物面镜18、探测器19、计算机24及气体样品池25；其中：A high-resolution infrared standard spectrum measurement device, comprising: an infrared light source 1, a first parabolic mirror 2, a beam splitter 3, a fixed mirror 4, a moving mirror 5, a first rotatable mirror 6, a first ellipsoidal mirror 7, a first Two parabolic mirrors 8, gas pool incident infrared window 9, three spherical mirrors 10-12, gas pool outgoing infrared window 13, third parabolic mirror 14, second ellipsoidal mirror 15, second rotatable mirror 16, third Rotatable mirror 17, focusing parabolic mirror 18, detector 19, computer 24 and gas sample cell 25; wherein:
红外光源1辐射的连续红外光波通过第一抛物面镜2反射后，达到分束片3；其中一部分光穿过所述分束片3到达动镜5，被动镜5反射后延原光路返回，再次到达分束片3，经分束片3反射；另一部分光被所述分束片3反射达到定镜4，被定镜4反射后延原光路返回，经分束片3透射；The continuous infrared light wave radiated by the infrared light source 1 reaches the beam splitter 3 after being reflected by the first parabolic mirror 2; a part of the light passes through the beam splitter 3 and reaches the moving mirror 5, and after being reflected by the passive mirror 5, it extends the original optical path and returns to reach the beam splitter again. The beam splitter 3 is reflected by the beam splitter 3; another part of the light is reflected by the beam splitter 3 and reaches the fixed mirror 4, and after being reflected by the fixed mirror 4, the original optical path returns and is transmitted through the beam splitter 3;
所述经分束片3反射及经分束片3透射的光重新汇合，并在动镜5延直线运动的情况下产生干涉，干涉光经过第一可旋转反射镜6反射后，传播方向改变90度，并经过第一椭球面镜7反射，传播方向改变90度，再经过第二抛物面镜8反射后，穿过气体池入射红外窗片9进入气体样品池25，然后经过气体样品池25中的三块球面镜10～12连续多次反射后，穿过气体池出射红外窗片13射出，射出的光为记录了气体样品池中气体吸收信息的红外干涉光；The light reflected by the beam splitter 3 and transmitted by the beam splitter 3 recombine, and interferes when the moving mirror 5 moves along a straight line. After the interfering light is reflected by the first rotatable mirror 6, the propagation direction changes 90 degrees, and reflected by the first ellipsoidal mirror 7, the propagation direction changes by 90 degrees, and then reflected by the second parabolic mirror 8, passes through the gas pool incident infrared window 9 and enters the gas sample cell 25, and then passes through the gas sample cell 25 The three spherical mirrors 10-12 of the three spherical mirrors 10-12 reflect for multiple times in succession, and pass through the gas cell to emit the infrared window 13, and the emitted light is the infrared interference light that records the gas absorption information in the gas sample cell;
该红外干涉光经过抛物面镜14反射，达到第二椭球面镜15，经过第二椭球面镜15反射，传播方向改变90度，然后经过第二可旋转反射镜16反射，传播方向改变90度，再经过第三可旋转反射镜17反射，传播方向改变90度，到达聚焦抛物面镜18，经过反射聚焦后被探测器19接收并记录，计算机24从探测器19完成红外干涉信号的采集及处理。The infrared interference light is reflected by the parabolic mirror 14, reaches the second ellipsoidal mirror 15, is reflected by the second ellipsoidal mirror 15, and the propagation direction changes by 90 degrees, and then is reflected by the second rotatable mirror 16, and the propagation direction is changed by 90 degrees, and then passes through Reflected by the third rotatable mirror 17, the propagation direction changes by 90 degrees, and reaches the focusing parabolic mirror 18. After reflection and focusing, it is received and recorded by the detector 19. The computer 24 completes the collection and processing of infrared interference signals from the detector 19.
所述气体样品池25采用光路多次反射怀特型结构，其外部设有玻璃密封罩26，其内部的三块球面镜10～12镀有红外金膜和保护膜，光谱范围2～14um，反射率＞90％，多次反射光程最长为5米，三块球面镜10～12中主球面镜10置于气体样品池25底部，副球面镜11与12置于气体样品池25顶部；The gas sample cell 25 adopts a white-type structure with multiple reflections on the optical path, and a glass sealing cover 26 is arranged on the outside, and the three spherical mirrors 10-12 inside are coated with an infrared gold film and a protective film, and the spectral range is 2-14um. >90%, the longest multiple reflection optical path is 5 meters, the main spherical mirror 10 is placed at the bottom of the gas sample pool 25 among the three spherical mirrors 10-12, and the auxiliary spherical mirrors 11 and 12 are placed at the top of the gas sample pool 25;
所述气体样品池25的底部还开了两个通光孔分别安装了气体池入射红外窗片9气体池出射红外窗片13；所述气体样品池25的顶部设置进出气孔，通过气管与标气配气系统21连接；玻璃密封罩26外还包裹有加热带，加热带内设置温度传感器与温控系统20连接。The bottom of described gas sample cell 25 has also opened two light-through holes, respectively installed gas cell incident infrared window 9 gas cell outgoing infrared window 13; The gas distribution system 21 is connected; the glass sealing cover 26 is also wrapped with a heating belt, and a temperature sensor is arranged in the heating belt to connect with the temperature control system 20 .
所述标气配气系统21分别与零气22和目标气体23相连，通过控制零气22和目标气体23的流量，实现不同浓度的目标气体浓度配制。The standard gas distribution system 21 is respectively connected with the zero gas 22 and the target gas 23, and by controlling the flow of the zero gas 22 and the target gas 23, the concentration preparation of the target gas with different concentrations is realized.
一种高分辨红外标准光谱测量方法，该方法通过前述的装置实现红外涉光信号的采集及处理，从而获得高分辨红外标准光谱；具体的：A high-resolution infrared standard spectrum measurement method, the method realizes the collection and processing of infrared light-related signals through the aforementioned device, thereby obtaining a high-resolution infrared standard spectrum; specifically:
计算机24采集到的红外干涉信号为记录了气体样品池中零气吸收信息的红外干涉信号，以及记录了气体样品池中目标气体吸收信息的红外干涉信号；The infrared interference signal collected by the computer 24 is an infrared interference signal that records the absorption information of the zero gas in the gas sample cell, and an infrared interference signal that records the absorption information of the target gas in the gas sample cell;
当计算机24采集到的上述干涉信号后，分别对上述干涉信号进行干涉信号至光谱图的转换，获得零气光谱与目标气体吸收光谱；After the above-mentioned interference signal is collected by the computer 24, the above-mentioned interference signal is respectively converted from the interference signal to the spectrogram to obtain the zero gas spectrum and the target gas absorption spectrum;
将目标气体吸收光谱除以零气光谱得到目标气体透过率谱τ，对目标气体透过率谱τ取负对数运算：A＝-lnτ，得到的目标气体吸光度谱A即为目标气体的红外标准光谱。Divide the target gas absorption spectrum by the zero gas spectrum to obtain the target gas transmission rate spectrum τ, and take the negative logarithm operation on the target gas transmission rate spectrum τ: A=-lnτ, the obtained target gas absorption spectrum A is the target gas Infrared Standard Spectrum.
所述干涉信号至光谱图的转换步骤包括：The conversion step of described interference signal to spectrogram comprises:
将红外干涉信号进行Mertz相位修正；Perform Mertz phase correction on the infrared interference signal;
将原双边干涉信号补零到同要求频谱的数据长度，然后对干涉信号进行截断处理，采用的截断函数为矩形函数；The original bilateral interference signal is filled with zeros to the data length of the required spectrum, and then the interference signal is truncated, and the truncation function adopted is a rectangular function;
再对干涉信号进行非线性修正，最后进行傅里叶变换，完成干涉光信号到光谱图的转换。Then the nonlinear correction is performed on the interference signal, and finally Fourier transform is performed to complete the conversion from the interference optical signal to the spectrogram.
获取记录了气体样品池中零气吸收信息的红外干涉信号，以及记录了气体样品池中目标气体吸收信息的红外干涉信号的步骤包括：The steps of obtaining the infrared interference signal recording the absorption information of the zero gas in the gas sample cell and the infrared interference signal recording the absorption information of the target gas in the gas sample cell include:
将零气22通过标气配气系统21充入气体样品池25，并打开温控系统20，将气体样品池25的温度设置到预期目标温度，待气体池内气体温度稳定后，通过气体池入射红外窗片9进入气体样品池25，再通过气体池出射红外窗片13射出光为记录了气体样品池中零气吸收信息的红外干涉光，从而由计算机24采集到记录了气体样品池中零气吸收信息的红外干涉信号；Fill the zero gas 22 into the gas sample cell 25 through the standard gas distribution system 21, and turn on the temperature control system 20, set the temperature of the gas sample cell 25 to the expected target temperature, and after the gas temperature in the gas cell is stable, inject it through the gas cell The infrared window 9 enters the gas sample cell 25, and then exits the infrared window 13 through the gas cell. The emitted light is the infrared interference light that records the zero gas absorption information in the gas sample cell, so that the computer 24 collects and records the zero gas absorption information in the gas sample cell. Infrared interference signal of gas absorption information;
之后，将已知浓度的目标气体23充入通过标气配气系统21充入气体样品池25，并持续充入一段时间，待气体样品池25内的零气全部排出且气体样品池25内气体温度稳定后，通过气体池入射红外窗片9进入气体样品池25，再通过气体池出射红外窗片13射出光为记录了气体样品池中目标气体吸收信息的红外干涉光，从而由计算机24采集到记录了气体样品池中目标气体吸收信息的红外干涉信号。Afterwards, the target gas 23 of known concentration is charged into the gas sample cell 25 through the calibration gas distribution system 21, and continues to be charged for a period of time, until the zero gas in the gas sample cell 25 is completely discharged and the gas sample cell 25 After the gas temperature is stabilized, the incident infrared window 9 enters the gas sample cell 25 through the gas cell, and then the infrared window 13 emits light through the gas cell, which is infrared interference light that records the absorption information of the target gas in the gas sample cell, thereby being controlled by the computer 24 The infrared interference signal recording the absorption information of the target gas in the gas sample cell is collected.
由上述本发明提供的技术方案可以看出，其根据气体成分红外光谱吸收特性，确定各气体成分的特征信息(吸收波段、吸收峰、检测限和标准吸光度等)，可适用于不同浓度、不同温度的气体成分高分辨红外标准光谱测量，可用于傅里叶变换红外光谱技术在大气环境检测中的气体成分定量分析和定性识别，能满足红外光谱技术在气体检测中的具体应用需求。It can be seen from the above-mentioned technical solution provided by the present invention that it determines the characteristic information (absorption band, absorption peak, detection limit and standard absorbance, etc.) The high-resolution infrared standard spectrum measurement of gas components at temperature can be used for quantitative analysis and qualitative identification of gas components in atmospheric environment detection by Fourier transform infrared spectroscopy technology, and can meet the specific application requirements of infrared spectroscopy technology in gas detection.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域的普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings on the premise of not paying creative efforts.
图1为本发明实施例提供的一种高分辨红外标准光谱测量装置的结构示意图。Fig. 1 is a schematic structural diagram of a high-resolution infrared standard spectrum measurement device provided by an embodiment of the present invention.
具体实施方式Detailed ways
下面结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明的保护范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本发明实施例提供一种高分辨红外标准光谱测量装置，其结构示意图如图1所示，主要包括：红外光源1、第一抛物面镜2、分束片3、定镜4、动镜5、第一可旋转反射镜6、第一椭球面镜7、第二抛物面镜8、气体池入射红外窗片9、三块球面镜10～12、气体池出射红外窗片13、第三抛物面镜14、第二椭球面镜15、第二可旋转反射镜16、第三可旋转反射镜17、聚焦抛物面镜18、探测器19、计算机24及气体样品池25；其中：The embodiment of the present invention provides a high-resolution infrared standard spectrum measurement device, its structural schematic diagram is shown in Figure 1, mainly including: infrared light source 1, first parabolic mirror 2, beam splitter 3, fixed mirror 4, moving mirror 5, The first rotatable mirror 6, the first ellipsoidal mirror 7, the second parabolic mirror 8, the gas pool incident infrared window 9, three spherical mirrors 10-12, the gas pool outgoing infrared window 13, the third parabolic mirror 14, the second Two ellipsoid mirrors 15, the second rotatable mirror 16, the third rotatable mirror 17, focusing parabolic mirror 18, detector 19, computer 24 and gas sample cell 25; wherein:
红外光源1辐射的连续红外光波通过第一抛物面镜2反射后，达到分束片3；其中一部分光穿过所述分束片3到达动镜5，被动镜5反射后延原光路返回，再次到达分束片3，经分束片3反射；另一部分光被所述分束片3反射达到定镜4，被定镜4反射后延原光路返回，经分束片3透射；The continuous infrared light wave radiated by the infrared light source 1 reaches the beam splitter 3 after being reflected by the first parabolic mirror 2; a part of the light passes through the beam splitter 3 and reaches the moving mirror 5, and after being reflected by the passive mirror 5, it extends the original optical path and returns to reach the beam splitter again. The beam splitter 3 is reflected by the beam splitter 3; another part of the light is reflected by the beam splitter 3 and reaches the fixed mirror 4, and after being reflected by the fixed mirror 4, the original optical path returns and is transmitted through the beam splitter 3;
所述经分束片3反射及经分束片3透射的光重新汇合，并在动镜5延直线运动的情况下产生干涉，干涉光经过第一可旋转反射镜6反射后，传播方向改变90度，并经过第一椭球面镜7反射，传播方向改变90度，再经过第二抛物面镜8反射后，穿过气体池入射红外窗片9进入气体样品池25，然后经过气体样品池25中的三块球面镜10～12连续多次反射后，穿过气体池出射红外窗片13射出，射出的光为记录了气体样品池中气体吸收信息的红外干涉光；The light reflected by the beam splitter 3 and transmitted by the beam splitter 3 recombine, and interferes when the moving mirror 5 moves along a straight line. After the interfering light is reflected by the first rotatable mirror 6, the propagation direction changes 90 degrees, and reflected by the first ellipsoidal mirror 7, the propagation direction changes by 90 degrees, and then reflected by the second parabolic mirror 8, passes through the gas pool incident infrared window 9 and enters the gas sample cell 25, and then passes through the gas sample cell 25 The three spherical mirrors 10-12 of the three spherical mirrors 10-12 reflect for multiple times in succession, and pass through the gas cell to emit the infrared window 13, and the emitted light is the infrared interference light that records the gas absorption information in the gas sample cell;
该红外干涉光经过抛物面镜14反射，达到第二椭球面镜15，经过第二椭球面镜15反射，传播方向改变90度，然后经过第二可旋转反射镜16反射，传播方向改变90度，再经过第三可旋转反射镜17反射，传播方向改变90度，到达聚焦抛物面镜18，经过反射聚焦后被探测器19接收并记录，计算机24从探测器19完成红外干涉信号的采集及处理。The infrared interference light is reflected by the parabolic mirror 14, reaches the second ellipsoidal mirror 15, is reflected by the second ellipsoidal mirror 15, and the propagation direction changes by 90 degrees, and then is reflected by the second rotatable mirror 16, and the propagation direction is changed by 90 degrees, and then passes through Reflected by the third rotatable mirror 17, the propagation direction changes by 90 degrees, and reaches the focusing parabolic mirror 18. After reflection and focusing, it is received and recorded by the detector 19. The computer 24 completes the collection and processing of infrared interference signals from the detector 19.
所述的气体样品池25采用光路多次反射怀特型结构，其外部设有玻璃密封罩26，其内部的三块球面镜10～12镀有红外金膜和保护膜，光谱范围2～14um，反射率＞90％，多次反射光程最长为5米，三块球面镜10～12中主球面镜11置于气体样品池25底部，副球面镜10与12置于气体样品池25顶部；The gas sample cell 25 adopts a white-type structure with multiple reflections on the optical path, and a glass sealing cover 26 is arranged on the outside, and three spherical mirrors 10-12 inside are coated with an infrared gold film and a protective film, and the spectral range is 2-14um. rate>90%, the longest multiple reflection optical path is 5 meters, the main spherical mirror 11 of the three spherical mirrors 10-12 is placed at the bottom of the gas sample pool 25, and the auxiliary spherical mirrors 10 and 12 are placed at the top of the gas sample pool 25;
所述气体样品池25的底部还开了两个通光孔分别安装了气体池入射红外窗片9气体池出射红外窗片13；所述气体样品池25的顶部设置进出气孔，通过气管与标气配气系统21连接；玻璃密封罩26外还包裹有加热带，加热带内设置温度传感器与温控系统20连接。The bottom of described gas sample cell 25 has also opened two light-through holes, respectively installed gas cell incident infrared window 9 gas cell outgoing infrared window 13; The gas distribution system 21 is connected; the glass sealing cover 26 is also wrapped with a heating belt, and a temperature sensor is arranged in the heating belt to connect with the temperature control system 20 .
所述标气配气系统21主要由两个流量分别为5L/min和50mL/min的气体流量控制器、不锈钢管、混合器、单向阀、机箱和控制软件组成，其分别与零气22和目标气体23相连，通过控制零气22和目标气体23的流量，实现不同浓度的目标气体浓度配制。The standard gas distribution system 21 is mainly composed of two gas flow controllers with flow rates of 5L/min and 50mL/min, stainless steel tubes, a mixer, a check valve, a chassis and control software, which are respectively connected to the zero gas 22 It is connected with the target gas 23, and by controlling the flow of the zero gas 22 and the target gas 23, the concentration preparation of the target gas with different concentrations can be realized.
本发明实施例还提供一种高分辨红外标准光谱测量方法，该方法通过前述的装置实现红外涉光信号的采集及处理，从而获得高分辨红外标准光谱；具体的：The embodiment of the present invention also provides a high-resolution infrared standard spectrum measurement method, which realizes the acquisition and processing of infrared light-related signals through the aforementioned device, thereby obtaining a high-resolution infrared standard spectrum; specifically:
计算机24采集到的红外干涉信号为记录了气体样品池中零气吸收信息的红外干涉信号，以及记录了气体样品池中目标气体吸收信息的红外干涉信号；The infrared interference signal collected by the computer 24 is an infrared interference signal that records the absorption information of the zero gas in the gas sample cell, and an infrared interference signal that records the absorption information of the target gas in the gas sample cell;
当计算机24采集到的上述干涉信号后，分别对上述干涉信号进行干涉信号至光谱图的转换，获得零气光谱与目标气体吸收光谱；After the above-mentioned interference signal is collected by the computer 24, the above-mentioned interference signal is respectively converted from the interference signal to the spectrogram to obtain the zero gas spectrum and the target gas absorption spectrum;
将目标气体吸收光谱除以零气光谱得到目标气体透过率谱τ，对目标气体透过率谱τ取负对数运算：A＝-lnτ，得到的目标气体吸光度谱A即为目标气体的红外标准光谱。Divide the target gas absorption spectrum by the zero gas spectrum to obtain the target gas transmission rate spectrum τ, and take the negative logarithm operation on the target gas transmission rate spectrum τ: A=-lnτ, the obtained target gas absorption spectrum A is the target gas Infrared Standard Spectrum.
其中，所述干涉信号至光谱图的转换步骤包括：Wherein, the conversion step of the interference signal to the spectrogram comprises:
将红外干涉信号进行Mertz相位修正；Perform Mertz phase correction on the infrared interference signal;
将原双边干涉信号补零到同要求频谱的数据长度，然后对干涉信号进行截断处理，采用的截断函数为矩形函数；The original bilateral interference signal is filled with zeros to the data length of the required spectrum, and then the interference signal is truncated, and the truncation function adopted is a rectangular function;
再对干涉信号进行非线性修正，最后进行傅里叶变换，完成干涉光信号到光谱图的转换。Then the nonlinear correction is performed on the interference signal, and finally Fourier transform is performed to complete the conversion from the interference optical signal to the spectrogram.
其中，获取记录了气体样品池中零气吸收信息的红外干涉信号，以及记录了气体样品池中目标气体吸收信息的红外干涉信号的步骤包括：Wherein, the steps of obtaining the infrared interference signal recording the absorption information of the zero gas in the gas sample cell and the infrared interference signal recording the absorption information of the target gas in the gas sample cell include:
将零气22通过标气配气系统21充入气体样品池25，并打开温控系统20，将气体样品池25的温度设置到预期目标温度，待气体池内气体温度稳定后；红外光源1辐射的连续红外光波，按照图1所示的结构，经由第一抛物面镜2、分束片3、定镜4、动镜5、第一可旋转反射镜6、第一椭球面镜7、第二抛物面镜8处理后，通过气体池入射红外窗片9进入气体样品池25，再通过气体池出射红外窗片13射出光为记录了气体样品池中零气吸收信息的红外干涉光，此时的红外干涉光再按照图1所示的结构，经由第二椭球面镜15、第二可旋转反射镜16、第三可旋转反射镜17、聚焦抛物面镜18、探测器19处理后，由计算机24采集到记录了气体样品池中零气吸收信息的红外干涉信号；Charge the zero gas 22 into the gas sample cell 25 through the standard gas distribution system 21, and turn on the temperature control system 20, set the temperature of the gas sample cell 25 to the expected target temperature, and after the temperature of the gas in the gas cell is stabilized; the infrared light source 1 radiates The continuous infrared light wave, according to the structure shown in Figure 1, passes through the first parabolic mirror 2, the beam splitter 3, the fixed mirror 4, the moving mirror 5, the first rotatable mirror 6, the first ellipsoid mirror 7, the second paraboloid After the mirror 8 is processed, the incident infrared window 9 enters the gas sample cell 25 through the gas cell, and then the infrared window 13 emitted light through the gas cell is the infrared interference light that has recorded the zero gas absorption information in the gas sample cell. According to the structure shown in Figure 1, the interference light is processed by the second ellipsoidal mirror 15, the second rotatable mirror 16, the third rotatable mirror 17, the focusing parabolic mirror 18, and the detector 19, and is collected by the computer 24. Record the infrared interference signal of the zero gas absorption information in the gas sample cell;
之后，将已知浓度的目标气体23充入通过标气配气系统21充入气体样品池25，并持续充入一段时间，待气体样品池25内的零气全部排出(可通过副球面镜10上方的排气孔排出)且气体样品池25内气体温度稳定后，通过气体池入射红外窗片9进入气体样品池25，再通过气体池出射红外窗片13射出光为记录了气体样品池中目标气体吸收信息的红外干涉光，从而由计算机24采集到记录了气体样品池中目标气体吸收信息的红外干涉信号；光路传播过程与上一段内容类似。Afterwards, the target gas 23 of known concentration is charged into the gas sample cell 25 by the standard gas gas distribution system 21, and continues to be charged for a period of time, and the zero gas in the gas sample cell 25 is all discharged (can pass through the auxiliary spherical mirror 10 exhaust hole above) and after the temperature of the gas in the gas sample cell 25 is stable, the incident infrared window 9 enters the gas sample cell 25 through the gas cell, and the infrared window 13 emits light through the gas cell to record the gas in the gas sample cell. The infrared interference light of the target gas absorption information is collected by the computer 24 to record the infrared interference signal of the target gas absorption information in the gas sample cell; the optical path propagation process is similar to the previous paragraph.
需要说明的是，该方法是基于前述装置来实现，因此计算机24采集红外干涉信号的具体过程可参见前述实施例中的描述，此处不再赘述。It should be noted that this method is implemented based on the aforementioned device, so the specific process of collecting the infrared interference signal by the computer 24 can refer to the description in the aforementioned embodiment, and will not be repeated here.
本发明实施例上述方案根据气体成分红外光谱吸收特性，确定各气体成分的特征信息(吸收波段、吸收峰、检测限和标准吸光度等)，可适用于不同浓度、不同温度的气体成分高分辨红外标准光谱测量，可用于傅里叶变换红外光谱技术在大气环境检测中的气体成分定量分析和定性识别，能满足红外光谱技术在气体检测中的具体应用需求。Embodiments of the present invention The above scheme determines the characteristic information of each gas component (absorption band, absorption peak, detection limit, standard absorbance, etc.) according to the infrared spectrum absorption characteristics of gas components, and can be applied to gas components with different concentrations and different temperatures. High-resolution infrared Standard spectrum measurement can be used for quantitative analysis and qualitative identification of gas components in atmospheric environment detection by Fourier transform infrared spectroscopy, and can meet the specific application requirements of infrared spectroscopy in gas detection.
以上所述，仅为本发明较佳的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明披露的技术范围内，可轻易想到的变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应该以权利要求书的保护范围为准。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person familiar with the technical field can easily conceive of changes or changes within the technical scope disclosed in the present invention. Replacement should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.
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