CN104990650A - Multidirectional capacitance type slippage sensor - Google Patents
Multidirectional capacitance type slippage sensor Download PDFInfo
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- CN104990650A CN104990650A CN201510479434.9A CN201510479434A CN104990650A CN 104990650 A CN104990650 A CN 104990650A CN 201510479434 A CN201510479434 A CN 201510479434A CN 104990650 A CN104990650 A CN 104990650A
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Abstract
The invention discloses a multidirectional capacitance type slippage sensor which is used for bionic skin of an intelligent robot. The sensor comprises a rectangle flexible base, four corner of which are provided with square columns passing through the upper surface and the lower surface; two adjacent surfaces of the square column which are toward the inside are provided with flexible induction polar plates; the center of the flexible base is provided with a cylinder contact rod; four cuboids which are perpendicular to the wall of the contact rod and are interlay provided with flexible public polar plates are arranged on the wall of the contact rod wall; the upper side of the square column is provided with a flexible upper base plate which is parallel to the flexible base and is equal in size with the flexible base, and the center of the flexible upper base plate is provided with a through hole; and the upper surface of the contact rod is provided with an anti-skid rubber head. The multidirectional capacitance type slippage sensor is low in cost and high in sensitivity, and the detection direction is not limited in one direction.
Description
Technical field
The present invention relates to sensor technical field, more particularly, is a kind of multidirectional condenser type sliding feeling sensor for intelligent robot bionics skin.
Background technology
Tactile sensing device of robot's sensing technology is one of gordian technique realizing intelligent robot, and touch sensor is the direct acting necessary medium of machine human and environment, is to imitate staff to make it to have the perceptional functions such as sense of touch, sliding feel, heat feel.At present, power sense of touch aspect is mainly concentrated on to the research of sense of touch both at home and abroad, the application on flexibility, texture reproducing apparatus of haptic force of constantly bringing forth new ideas detection model, optimized force sense of touch algorithm, make these devices can flexibility, the texture force touch characteristic of reproducing virtual object scene preferably, and still less to the research of sliding visual information perception.It is the key link that robot realizes soft grasping that sliding feel detects, and the reliable perception of sliding visual information is that robot completes the predetermined reliable guarantee capturing function under complicated pluralism environment.Conventional sliding feeling sensor detects mechanism difference by it and mainly comprises: pressure resistance type, optical fiber type, piezoelectric type, Mageneto-sensitive type and condenser type sliding feeling sensor etc.
The people such as the Vatani Morteza of University of Akron of the U.S. devise a kind of wiping sense sensor based on multi-walled carbon nano-tubes/polymer composites, pressure resistance type wiping sense sensor exist volume greatly, the shortcoming such as not easy of integration and voltage dependent resistor (VDR) leakage current is unstable.Xi'an Jinhe Optical Technology Co., Ltd. Du Bing has carried a kind of optical fiber type sliding feel sensing device, there is the advantages such as simple, the reasonable in design and anti-electromagnetic interference capability of structure is strong, but optical fiber type sliding feeling sensor is when two actings in conjunction above to power, be difficult to retention wire sexual intercourse, and difficulty is demarcated in existence, precision is difficult to put forward advantages of higher.PVDF piezoelectric membrane is embedded into the sliding visual information perception of realization in elastic bionic skin by the people such as Japan Shouhei Shirafuji, realizes soft grasping function by regulating action power size.The people such as the Chen Weidong of University On The Mountain Of Swallows propose a kind of tactile and slip sensor based on pvdf membrane and photovoltaic principals, can obtain sense of touch, slidingly feel response curve, and determine the threshold value judging slip signals.Being most widely used of piezoelectric type wiping sense sensor, can detect sliding visual information and tactile data simultaneously, but sliding visual information exists certain difficulty with being separated of tactile data, and voltage-type wiping sense sensor exists piezoelectric response and Pyroelectric response simultaneously.The people such as Yuriy P. Kondratenko describe a kind of Mageneto-sensitive type and detect sliding structural model of feeling distance and amplitude, but Mageneto-sensitive type touch sensor each tactile sensing point consistance is poor, and Distribution of Magnetic Field inequality, resolution not easily improves.
Condenser type sliding feeling sensor is wide because having dynamic range, good linear response, remarkable advantages such as dynamic response is fast, structure is simple and being used widely.Intelligent robot, when capturing unknown properties object, must regulate according to wiping sense sensor detection signal the size applying holding force in real time, should ensure object will be protected again not damaged because holding force deficiency causes object to slide, and namely realizes soft grasping function.
For this reason, a kind ofly sliding visual information is detected and the research coordinating touch sensor to realize the sliding feeling sensor of closed-loop control system seems particularly important.
Summary of the invention
The object of the invention is to overcome above-mentioned deficiency of the prior art, a kind of multidirectional condenser type sliding feeling sensor is provided, be intended to the perception problems solving sliding visual information in intelligent robot soft grasping process, improve sensitivity.
The present invention is that technical solution problem adopts following technical scheme:
Multidirectional condenser type sliding feeling sensor, comprises a square flexible substrate, and four angles, surface arrange the through square body of a upper and lower surface respectively thereon, and described square body two adjacently situated surfaces are inwardly provided with flexible induction pole plate; Being provided with one in flexible substrate center cylindrically touches dry, and touches each at a right angle, the cuboid that inside is provided with flexible public pole plate of Annex IV on dry wall; On square body, be provided with flexible upper substrate, flexible upper substrate is parallel with flexible substrate, equidimension and center leave up/down perforation circle, one anti-slip rubber contact is set at tactile dry upper surface.
The invention has the beneficial effects as follows:
1, condenser type sliding feeling sensor of the present invention has that structure is simple, reasonable in design, processing and fabricating is convenient, cost is low and high sensitivity.
2, condenser type sliding feeling sensor of the present invention has flexibility on the whole, and compared with traditional sliding feeling sensor, condenser type sliding feeling sensor of the present invention is four independently differential type condenser type sliding feeling sensors, improves its detection sensitivity.
3, its detection side of condenser type sliding feeling sensor of the present invention is to not being confined to single direction, can judge the sliding direction occurred of feeling according to the feature of eight parallel plate capacitor sensor output capacitance value changes.
4, condenser type sliding feeling sensor pole plate lead-in wire of the present invention can cause flexible substrate face, is easy to form condenser type sliding feeling sensor array, realizes large area, high resolving power sliding feel perceptional function.
5, capacitance type touch sensor of the present invention responds to by regulating cylindrical dry radius, the distance of flexible public pole plate distance flexible substrate, flexible public pole plate and the both sides flexibility touched the sensitivity that the parameters such as the distance of pole plate can change this condenser type sliding feeling sensor, has further expanded its range of application.
Accompanying drawing explanation
Fig. 1 is the overall perspective view of condenser type sliding feeling sensor of the present invention;
Fig. 2 is the fractionation stereographic map of condenser type sliding feeling sensor of the present invention;
Fig. 3 is that the cylindrical of condenser type sliding feeling sensor of the present invention touches cuboid that is dry and four each arrangements at a right angle;
Fig. 4 be condenser type sliding feeling sensor of the present invention do not add flexible upper substrate time vertical view;
Fig. 5 be condenser type sliding feeling sensor of the present invention initial time capacitor equivalent schematic diagram;
Fig. 6 is condenser type sliding feeling sensor of the present invention capacitance variations schematic diagram when X-direction is slided;
Fig. 7 is condenser type sliding feeling sensor of the present invention capacitance variations schematic diagram when Y direction is slided;
Fig. 8 is condenser type sliding feeling sensor of the present invention capacitance variations schematic diagram when sliding with X-direction is at 45 °;
Fig. 9 is dimensional parameters schematic diagram in the concrete case study on implementation of condenser type sliding feeling sensor of the present invention;
The flexible upper substrate of Figure 10 condenser type of the present invention sliding feeling sensor and square flexible substrate mould;
Figure 11 is condenser type sliding feeling sensor cuboid of the present invention, flexible public pole plate and cylindrical tactile dry mould;
Figure 12 is condenser type sliding feeling sensor square body mould of the present invention;
Experimental result when Figure 13 is condenser type sliding feeling sensor of the present invention detection slip signals.
Number in the figure: 1 anti-slip rubber contact; 2 flexible upper substrates; 3 square bodies; 4 flexible induction pole plates; 5 cuboids; 6 square flexible substrates; 7 cylindrical touching are done; 8 flexible public pole plates.
Embodiment
As depicted in figs. 1 and 2, the structure of the present embodiment condenser type sliding feeling sensor is: arrange a square flexible substrate 6, and four angles, surface arrange the square body 3 that a upper and lower surface is through, leave flexible induction pole plate 4 towards two adjacently situated surfaces of inner side respectively thereon; Place one at its center and cylindrically touch dry 7, and touch each at a right angle, the cuboid 5 that flexible public pole plate 8 is left in inside of Annex IV on dry wall; Arrange one at square body upper surface and leave the flexible upper substrate 2 of up/down perforation circle with flexible substrate equidimension and center; At tactile dry upper surface, one anti-slip rubber contact 1 is set;
Square body 3 right-angle side is coplanar with square flexible substrate 6 right-angle side respectively, arranges in matrix pattern, and flexible induction pole plate 4 is all left on all the other two sides of square body 3, and the length of side of square flexible substrate 6 is greater than square body 3 length of side of twice;
One cylindrical touching is set in square flexible substrate 6 upper surface center and does 7, cylindrical tactile dry 7 its height are identical with square body 3, as shown in Figure 3, at the cylindrical cuboid 5 touching circumscribed four each distributions at a right angle on dry 7 walls, cuboid 5 is highly less than and cylindrically touches dry 7 height and with cylindrical, its height center point touches that to do 7 central points coplanar;
As shown in Figure 4, arrange a flexible electrode 8 in cuboid 5 inner geometry center, flexible electrode 8 is wrapped up by cuboid 5, and there are two non-contacting square bodies 3 each cuboid both sides, and parallel with square body 3 one corresponding surface;
Touch dry 7 upper surfaces at square body 3 arrange one with square flexible substrate 6 equidimension and the flexible upper substrate 2 of up/down perforation circle is left at center with cylindrical, flexible upper substrate 2 center radius of a circle be greater than cylindrical touch dry 1 radius, cuboid 5 upper and lower surface and flexible upper substrate 2 and the equal noncontact of square flexible substrate 6; Arrange an anti-slip rubber contact 1 at cylindrical tactile dry 7 upper surfaces, anti-slip rubber contact 1 exceeds flexible upper substrate 2 upper surface.
The height of described flexible induction electrode is greater than the height of the public pole plate of described flexibility.
Described four public pole plates of flexibility do at right angles arrangement around described cylindrical touching, and the public pole plate of described flexibility and flexible upper substrate, square flexible substrate and flexibility respond to pole plate noncontact.
Described flexibility induction pole plate and the public pole plate of flexibility with organosilicon conductive silver glue for material.
The through square body of described flexible substrate, flexible upper substrate, upper and lower surface, cylindrically touch dry, cuboid and anti-slip rubber contact is all material with silicon rubber.
The structural model of condenser type sliding feeling sensor of the present invention can be equivalent to the differential type parallel plate capacitor of four arrangements in matrix pattern, improves the sensitivity of sliding feel sensing; Meanwhile, can judge the direction of sliding according to the Variation Features of four capacitances, its detection side is to being no longer confined to single direction.It detects mechanism: when X-direction or Y direction occur to slide, under anti-slip rubber contact drives, cylindrical touching does run-off the straight, because flexibility induction polar plate area is greater than flexible public polar plate area, two differential type capacitive transducer pole plate gaps of parallel with glide direction two flexibility public pole plates composition and equivalent polar plate area are thought and are not changed, corresponding capacitance type sensor exports constant, correspondingly, pole-changing sheet separation is equivalent to sliding differential type capacitive transducer of feeling that vertical two the public pole plates in direction are formed, a capacitance is caused to increase, a capacitance reduces.
Capacitor plate lead-in wire can cause flexible substrate face, is easy to form condenser type sliding feeling sensor array, realizes large area, high resolving power sliding feel perceptional function.
Sliding rubber contact is a little more than flexible upper substrate, under the effect of friction force, drive cylindrical touching to do run-off the straight, meanwhile, corresponding displacement is there is to cylindrical tactile dry tangent cuboid, respond to pole plate with flexibility and jointly form pole-changing sheet separation formula capacitance type sensor, thus realize the sliding object detected of feeling.
Condenser type sliding feeling sensor manufacture craft of the present invention is mainly based on 3D printing technique and silicon rubber fluid forming technique.The 3 d modeling softwares such as SolidWorks or AutoCAD are utilized to design each several part mould needed for condenser type sliding feeling sensor structure of the present invention, silicon rubber is injected mould molding, after material cured, condenser type sliding feeling sensor each several part assembly of the present invention is taken out and obtains in the demoulding, is finally assembled into during each together.
In order to ensure that condenser type sliding feeling sensor of the present invention has certain flexibility, possess the features such as tensility to a certain extent, described flexibility induction pole plate 4 and flexible public pole 8 select the YC-02 type organosilicon conductive silver glue of the special tackifier company limited of Nanjing Heineken to be material, YC-02 type organosilicon conductive silver glue first, second component can be solidified under room temperature after 10:1 Homogeneous phase mixing in mass ratio voluntarily, and has the advantages such as good electric conductivity, tensility and flexibility after solidification.The through square body 3 of square flexible substrate 6, flexible upper substrate 2, upper and lower surface, cylindrically touch dry 7, cuboid 5 and anti-slip rubber contact 1 selects the GD401 type silicon rubber of Zhong Hao Chenguang Research Institute of Chemical Industry company limited to be material.
As shown in Figure 5, condenser type sliding feeling sensor of the present invention can be equivalent to four couples of parallel plate capacitor (C
1(C
11, C
12), C
2(C
21, C
22), C
3(C
31, C
32) and C
4(C
41, C
42)), often pair of parallel plate capacitor forms a pair differential type capacitive transducer, in theory, when condenser type sliding feeling sensor is not by friction force effect, and four couples of equal (C of parallel plate capacitor output valve
11=C
12, C
21=C
22, C
31=C
32, C
41=C
42).Anti-slip rubber contact 1 run-off the straight under friction force drives when being subject to friction force effect, thus the run-off the straight of interlock four flexibility public pole plates 8, cause four pairs of differential type capacitive transducers to export and change, judge accordingly to slide visual information.
The mechanism that condenser type sliding feeling sensor of the present invention specifically detects sliding visual information is as follows: when along X-axis positive dirction occur slide time, its capacitance variations schematic diagram as shown in Figure 6, anti-slip rubber contact 1 link under, C
1and C
3two flexible public pole plates 8, all along the run-off the straight of X-axis positive dirction, are equivalent to parallel plate capacitor C
12and C
32pole plate gap reduce, therefore C
12and C
32capacitance increases, C
11and C
31capacitance reduces, C when being finally reflected in differential capacitance
1and C
2capacitance increases.Meanwhile, C
2the upwards run-off the straight of flexible public pole plate 8, C
4the run-off the straight downwards of flexible public pole plate 8, variable quantity is identical, is C in theory when showing capacitance variation
21, C
22and C
41, C
42all reduce.Because public pole plate 8 length flexible when condenser type sliding feeling sensor designs is slightly larger than the length of flexibility induction pole plate 4, and the height of flexible public pole plate 8 is less than the height of flexible induction pole plate 4, like this public pole plate 8 of flexibility occur tilted upward time, not there is significant change in its parallel plate capacitor equivalence polar plate area, can think now C in actual applications
2and C
4capacitance does not change.In like manner, if when condenser type sliding feeling sensor of the present invention occurs to slide along Y-axis positive dirction, as shown in Figure 7, differential pair C
2and C
4output valve becomes large, differential pair C
1and C
3export constant.If condenser type sliding feeling sensor of the present invention is along when occurring to slide with X-axis positive dirction direction at 45 °, as shown in Figure 8, under anti-slip rubber contact 1 links, C
1and C
4two flexible public pole plates 8 all along with the direction at 45 ° run-off the straight of X-axis positive dirction, be equivalent to parallel plate capacitor C
12, C
21, C
32and C
42pole plate gap reduce, parallel plate capacitor C
11, C
22, C
31and C
41pole plate gap increase, finally show as differential pair C
1, C
2, C
3, C
4output capacitance value all increase.So, according to differential pair C
1, C
2, C
3, C
4output capacitance value Variation Features can judge when to occur the direction sliding and occur to slide.
In actual applications, linked together by public for the flexibility of four differential pair capacitive transducers pole plate 8 and carry out grounding, each like this electric capacity is just equivalent to a single electrode parallel plate capacitor sensor.Signals collecting for single electrode capacitive transducer can select AD7747 or the AD7147 electric capacity digital processing chip of AD company, and it possesses I
2c compatible type serial line interface and sheet environment self-calibration function.According to condenser type sliding feeling sensor design feature of the present invention, select and there are 13 appearances of a street inputs, up to the AD7747-1 of 16 CDC precision, be easy to the Acquire and process of 8 passage stagged electrode structure capacitance signals.For the sliding feel sensor array be made up of condenser type sliding feeling sensor of the present invention, the ranks surface sweeping circuit that AD7147-1 and hyperchannel single-pole double-throw switch (SPDT) ADG734 can be used to form carries out capacitor array signals collecting.Meanwhile, chip adopts active ac shield technology, not only can effectively reduce the noise existed in sensor use procedure, and eliminate the cross jamming problem between array.
In condenser type sliding feeling sensor range ability of the present invention, accurate pressure meter is used to repeat sliding loading experiment of feeling to described condenser type sliding feeling sensor, the single electrode electric capacity output valve of the capacitance signal acquisition system Real-time Collection condenser type sliding feeling sensor be simultaneously made up of AD7147-1, can judge the direction when occurring to slide and slide according to condenser type sliding feeling sensor curve of output.
For verifying the performance of condenser type sliding feeling sensor of the present invention, do example as follows:
As shown in Figure 9, in instances, anti-slip rubber contact 1 is highly 4mm, and radius is 1.5mm; Flexible upper substrate 2 and square flexible substrate 6 length of side are 24mm, and thickness is 2mm, and wherein, the through radius of circle of flexible upper substrate 2 center upper and lower surface is 3mm; Cylindrical tactile dry 7 radiuses are 1.5mm, are highly 10mm; Cuboid 5 one height faceted pebble with cylindrical touch do 7 tangent, four each arrangements at a right angle of cuboid 5, be highly 7mm, the length of side is 11.5mm, and width is 2mm; Flexible public pole plate 8 is wrapped up by cuboid 5, and its length parameter chooses 8mm, 0.5mm and 6mm respectively; Square body 3 peripheral cylinder parameter choose height 10mm, length and width is 8mm, and the internal run-through square length of side is 4mm; The corresponding length parameter of flexibility induction pole plate 4 of each square body 3 liang of medial surfaces is respectively 8mm, 0.5mm and 6mm.In this example, the GD401 type silicon rubber of Zhong Hao Chenguang Research Institute of Chemical Industry company limited selected by silicon rubber, the master chip that capacitance signal process selects AD7147-1 CDC (Capacitance-to-Digital Converter) to gather as capacitance signal, STM32F103VET6 high-performance microprocessor, as the main control chip of capacitance signal Acquire and process, sets up capacitance signal Acquire and process system.
Flexible upper substrate 2 is similar with square flexible substrate 6 mould, as shown in Figure 10, Figure 10 (a) is the template of flexible upper substrate 2, all being greater than pros' dignity upper surface of flexible upper substrate 2 in the length of side and thickness, to draw a length of side be 24mm, thickness is 2mm and the figure that Radius is 3mm circle is left in center, and excised to bottom stretching by this figure; Figure 10 (b) is the mould of square flexible substrate 6.Silicon rubber to be injected in mould the demoulding after cured and just can obtain flexible upper substrate 2 and square flexible substrate 6.
Figure 11 be cuboid 5, cylindrical touch dry, 7 and the unitary mould of the public pole plate 8 of flexibility, first four the public pole plates of flexibility 8 made by YC-02 type organosilicon are put in four grooves of this cross mould respectively, and flexible public pole plate 8 does not all contact with groove three side inwall.Again silicon rubber is injected in groove, mold height is 7mm, be highly the circular columns of 1.5mm in cruciform model center upper and lower surface all bonding after the demoulding, ensure that cylindrical tactile dry 7 overall heights are 10mm and the easier run-off the straight of flexible public pole plate 8 under friction force effect.
Figure 12 is the mould of square body 3, shapingly to obtain after square body 3 at its two adjacent surfaces bonding flexibility induction pole plate 4, condenser type sliding feeling sensor each several part assembly of the present invention has made complete all, and the assembly surface then contacted each other at needs is coated with one deck silicon rubber and carries out bonding assembled.
Specific experiment is embodied as: condenser type sliding feeling sensor of the present invention is fixed on experiment base station, eight appearances of a street export the multichannel electric capacity signal extraction system being connected to above-mentioned proposition respectively, treat that by one slip object (selecting a pencil in example) is placed in condenser type sliding feeling sensor anti-slip rubber contact 1 upper surface, treat that slip object slides to from left to right in turn along X-axis under the interlock of pressure meter.The Output rusults of a capacitance signal extraction system examinations capacitive transducer, it exports implements Dependence Results as shown in figure 13, wherein C
1output, C
2output, C
3outputand C
4outputbe respectively the difference output after corresponding capacitive transducer normalization, such as: C
1output=| C
11/ C
11 is initial-C
12/ C
12 is initial|, other exports by that analogy.As can be seen from Figure 13, when occurring in turn along X-axis both forward and reverse directions to slide, C
1outputand C
3outputoutput pulsation is comparatively large, and illustrate that at crest place maximum displacement occurs anti-slip rubber contact 1, trough shows that anti-slip rubber contact mediates.C
2outputand C
4outputoutput pulsation is less, meets above-mentioned theory analysis, just can judge sliding visual information according to the data variance of each difference output, realizes the sliding function detected of feeling.
Claims (9)
1. a multidirectional condenser type sliding feeling sensor, is characterized in that: comprise a square flexible substrate, and four angles, surface arrange the through square body of a upper and lower surface respectively thereon, and described square body two adjacently situated surfaces are inwardly provided with flexible induction pole plate; Being provided with one in flexible substrate center cylindrically touches dry, and touches each at a right angle, the cuboid that inside is provided with flexible public pole plate of Annex IV on dry wall; On square body, be provided with flexible upper substrate, flexible upper substrate is parallel with flexible substrate, equidimension and center leave up/down perforation circle, one anti-slip rubber contact is set at tactile dry upper surface.
2. a kind of multidirectional condenser type sliding feeling sensor according to claim 1, it is characterized in that: described square body right-angle side is coplanar with flexible substrate right-angle side respectively, arrange in matrix pattern, the length of side of described flexible substrate is greater than the described square body length of side of twice.
3. a kind of multidirectional condenser type sliding feeling sensor according to claim 1 and 2, it is characterized in that: described cylindrical to touch dry height identical with described square body, be less than at the described cylindrical cuboid height touched on dry wall and cylindrically touch dry height and its height center point is coplanar with cylindrical tactile dry central point.
4. a kind of multidirectional condenser type sliding feeling sensor according to claim 1 or 3, it is characterized in that: the public pole plate of described flexibility is arranged on cuboid inner geometry center, the public pole plate of described flexibility is wrapped up by cuboid, each cuboid and both sides square body noncontact, and parallel with described square body one corresponding surface.
5. a kind of multidirectional condenser type sliding feeling sensor according to claim 1 or 4, it is characterized in that: described flexible upper substrate center radius of a circle is greater than and describedly cylindrically touches dry radius, described cuboid upper and lower surface and flexible upper substrate and the equal noncontact of flexible substrate.
6. a kind of multidirectional condenser type sliding feeling sensor according to claim 1 or 5, is characterized in that: the height of described flexible induction electrode is greater than the height of the public pole plate of described flexibility.
7. a kind of multidirectional condenser type sliding feeling sensor according to claim 1 or 6, it is characterized in that: described four public pole plates of flexibility do at right angles arrangement around described cylindrical touching, and the public pole plate of described flexibility and flexible upper substrate, square flexible substrate and flexibility respond to pole plate noncontact.
8. a kind of multidirectional condenser type sliding feeling sensor according to claim 1, is characterized in that: described flexibility induction pole plate and the public pole plate of flexibility with organosilicon conductive silver glue for material.
9. a kind of multidirectional condenser type sliding feeling sensor according to claim 1, is characterized in that: the through square body of described flexible substrate, flexible upper substrate, upper and lower surface, cylindrically touch dry, cuboid and anti-slip rubber contact is all material with silicon rubber.
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| CN108827349A (en) * | 2018-06-15 | 2018-11-16 | 清华大学深圳研究生院 | A kind of omnidirection sliding feeling sensor |
| WO2019104961A1 (en) * | 2017-11-30 | 2019-06-06 | 东南大学 | Artificial finger tip sliding touch sensor |
| CN109974916A (en) * | 2019-04-03 | 2019-07-05 | 东南大学 | A kind of type polar distance variable capacitance formula three-dimensional force sensor structure |
| CN111437595A (en) * | 2020-04-23 | 2020-07-24 | 腾讯科技（深圳）有限公司 | Slip sensation simulator, controlled robot and gamepad |
| CN113340477A (en) * | 2021-05-27 | 2021-09-03 | 东南大学 | Differential capacitance type touch sensor |
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| CN113340477B (en) * | 2021-05-27 | 2022-08-05 | 东南大学 | Differential capacitance type touch sensor |
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