CN104978448B - Bayesian model hybrid predicting circuit yield method based on Bernoulli Jacob's distribution - Google Patents

Bayesian model hybrid predicting circuit yield method based on Bernoulli Jacob's distribution Download PDF

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CN104978448B
CN104978448B CN201410146481.7A CN201410146481A CN104978448B CN 104978448 B CN104978448 B CN 104978448B CN 201410146481 A CN201410146481 A CN 201410146481A CN 104978448 B CN104978448 B CN 104978448B
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曾璇
李昕
杨帆
方晨蕾
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Fudan University
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Abstract

本方法属于集成电路领域,涉及一种基于伯努利分布的贝叶斯模型混合预测电路成品率的方法。该方法通过结合在集成电路设计的不同阶段的信息,加快对只具有“通过—不通过”两种状态的电路的成品率估计过程。该方法为“通过—不通过”的输出结果建立一个伯努利模型,将先验成品率设定为beta分布,并利用最大似然法确定beta分布中的超参数。再使用该超参数,结合比较少量的后验信息,估算出集成电路的成品率。该方法相比传统的蒙特‑卡洛方法估计成品率,在达到同一精度的情况下,需要的后验信息少了很多,能明显节省进行后仿真或者进行新一次测试的时间。

The method belongs to the field of integrated circuits, and relates to a method for predicting circuit yield based on a Bayesian model mixed with Bernoulli distribution. The method speeds up the process of yield estimation for circuits with only "pass-fail" states by combining information at different stages of integrated circuit design. This method establishes a Bernoulli model for the output result of "pass-fail", sets the prior yield rate as beta distribution, and uses the maximum likelihood method to determine the hyperparameters in the beta distribution. Then use this hyperparameter, combined with a relatively small amount of posterior information, to estimate the yield of the integrated circuit. Compared with the traditional Monte-Carlo method for estimating the yield, this method requires much less posterior information while achieving the same accuracy, which can significantly save the time for post-simulation or a new test.

Description

基于伯努利分布的贝叶斯模型混合预测电路成品率方法Bayesian Model Hybrid Prediction Method for Circuit Yield Based on Bernoulli Distribution

技术领域technical field

本方法属于集成电路领域,具体涉及一种基于伯努利分布的贝叶斯模型混合预测电路成品率的方法。The method belongs to the field of integrated circuits, and specifically relates to a method for predicting circuit yield based on a Bayesian model mixed with Bernoulli distribution.

技术背景technical background

研究显示,集成电路尺寸的不断缩小导致了制造过程中很大的不确定性,包括参数化的波动和某些致命性的缺陷,这两类的不确定性都可能会引起严重的成品率损失。因此,无论是在流片前验证或流片后测试的阶段,为了提高电路性能或者减少制造成本,对成品率的精确估计都是一个非常重要的工作。Studies have shown that the continuous shrinking of integrated circuit dimensions has led to large uncertainties in the manufacturing process, including parametric fluctuations and certain fatal defects, both of which may cause serious yield losses . Therefore, no matter in the pre-silicon verification or post-silicon testing stage, in order to improve circuit performance or reduce manufacturing costs, accurate estimation of yield is a very important task.

最近,现有技术提出了一系列新型的设计方法(例如硅片后调节)被用来解决芯片波动的问题,以维持目前集成电路尺寸不断缩小的步伐。这些新型的设计方法经实践显示非常有效,但反过来使得如今集成电路的复杂度不断增加。这样的现状导致了在成品率估计时必须要收集非常大量的随机数据样本,如:Recently, a series of new design methods (such as post-silicon wafer regulation) have been proposed in the prior art to solve the problem of chip fluctuations in order to maintain the current pace of continuous shrinking of integrated circuit dimensions. These new design methods have been shown to be very effective in practice, but in turn make the complexity of today's integrated circuits continue to increase. This situation leads to the need to collect a very large number of random data samples when estimating the yield rate, such as:

流片前验证:需要运行布图布线后仿真,而现今对于一个复杂电路的仿真是非常耗时的;Verification before tape-out: It is necessary to run post-layout simulation, and the simulation of a complex circuit is very time-consuming nowadays;

流片后测试:需要对实际硅片进行测试,来决定该芯片是“通过”还是“不通过”,实践显示,该任务也并不简单,只有对一小部分的硅片进行全面测试的成本才是可以接受的。Post-silicon testing: It is necessary to test the actual silicon wafer to determine whether the chip is "passed" or "failed". Practice has shown that this task is not simple, and only a small part of the silicon wafer is fully tested. is acceptable.

为了解决这个与数据收集相关的问题,有研究采用贝叶斯模型混合法拟准确地估计电路的统计参数(性能分布,成品率)。贝叶斯模型混合法借用了先验信息(如前仿真信息)来准确地估计后验的统计参数。该方法可以有效地减少在后验阶段进行验证、测试的成本。但是,传统的贝叶斯模型混合法只能有效地处理连续分布的性能参数(例如数字电路的延时,模拟放大器的增益等)。这是因为传统的方法假设实际的性能分布是连续的,在许多实际应用的场合,并不能通过测试一个硅片来准确得到关键路径的延时;常常只能知道该芯片是否满足要求,还是不满足,因此,传统的贝叶斯模型混合法仍然不适用准确地估计电路的统计参数。In order to solve this problem related to data collection, a mixture of Bayesian models is used to accurately estimate the statistical parameters (performance distribution, yield) of the circuit. The Bayesian model mixture method borrows prior information (such as pre-simulation information) to accurately estimate posterior statistical parameters. This method can effectively reduce the cost of verification and testing in the posterior stage. However, the traditional Bayesian model hybrid method can only effectively deal with continuously distributed performance parameters (such as the delay of digital circuits, the gain of analog amplifiers, etc.). This is because the traditional method assumes that the actual performance distribution is continuous. In many practical applications, the delay of the critical path cannot be accurately obtained by testing a silicon chip; often it is only possible to know whether the chip meets the requirements or not. Satisfied, therefore, the traditional Bayesian model mixture method is still not applicable to accurately estimate the statistical parameters of the circuit.

与本发明相关的现有技术有如下参考文献:The prior art relevant to the present invention has following references:

[1]X.Li,J.LeandL.Pileggi,StatisticalPerformanceModelingandOptimization,NowPublishers,2007.[1] X. Li, J. Le and L. Pileggi, Statistical Performance Modeling and Optimization, Now Publishers, 2007.

[2]SemiconductorIndustryAssociate,InternationalTechnologyRoadmapforSemiconductors,2011.[2] Semiconductor Industry Associate, International Technology Roadmap for Semiconductors, 2011.

[3]A.Srivastava,S.Shah,K.Agarwal,D.Sylvester,D.BlaauwandS.Director,“Accurateandefficientgate-levelparametricyieldestimationconsideringcorrelatedvariationsinleakagepowerandperformance,”IEEEDAC,pp.535-540.[3] A. Srivastava, S. Shah, K. Agarwal, D. Sylvester, D. Blaauwand and S. Director, "Accurate and efficient gate-level parametric yield estimation considering correlated variations in leakage power and performance," IEEE DAC, pp.535-540.

[4]X.Li,J.Le,P.GopalakrishnanandL.Pileggi,“Asymptoticprobabilityextraction fornonnormalperformancedistributions,”IEEETrans.onCAD,vol.26,no.1,pp.16-37,Jan.2007.[4] X. Li, J. Le, P. Gopalakrishnan and L. Pileggi, "Asymptotic probability extraction for nonnormal performance distributions," IEEETrans.onCAD, vol.26, no.1, pp.16-37, Jan.2007.

[5]P.Desrumaux,Y.Dupret,J.Tingleft,S.Minehane,M.Redford,L.LatorreandP.Nouet,“Anefficientcontrolvariatesmethodforyieldestimationofanalog circuitsbasedonalocalmodel,”IEEEICCAD,pp.415-421,2012.[5] P. Desrumaux, Y. Dupret, J. Tingleft, S. Minehane, M. Redford, L. Latorre and P. Nouet, "An efficient control variables method for yield estimation of analog circuits based on a local model," IEEEIC CAD, pp.415-421, 2012.

[6]S.Mitra,S.SeshiaandN.Nicolici,“Post-siliconvalidationopportunities,challengesandrecentadvances,”IEEEDAC,pp.12-17,2010.[6] S. Mitra, S. Seshia and N. Nicolici, "Post-silicon validation opportunities, challenges and recent advances," IEEEDAC, pp.12-17, 2010.

[7]X.Li,“Post-siliconperformancemodelingandtuningofanalog/mixed-signal circuitsviaBayesianmodelfusion,”IEEEICCAD,pp.551-552,2012.[7] X.Li, "Post-silicon performance modeling and tuning of analog/mixed-signal circuits via Bayesian model fusion," IEEEIC CAD, pp.551-552, 2012.

[8]J.Rivers,M.Gupta,J.Shin,P.KudvaandP.Bose,“Errortoleranceinserverclassprocessors,”IEEETrans.onCAD,vol.30,no.7,pp.945-959,Jul.2011.[8] J. Rivers, M. Gupta, J. Shin, P. Kudva and P. Bose, "Error tolerance in server class processors," IEEETrans.onCAD, vol.30, no.7, pp.945-959, Jul.2011.

[9]A.Tang,F.Hsiao,D.Murphy,I.Ku,J.Liu,S.Souza,N.Wang,H.Wu,Y.Wang,M.Tang,G.Virbila,M.Pham,D.Yang,Q.Gu,Y.Wu,Y.Kuan,C.Chien,M.Chang,“Alow-overheadself-healingembeddedsystemforensuringhighyield andlong-termsustainabilityof60GHz4Gb/sradio-on-a-chip”,IEEEISSCC,pp.316-318,2012.[9] A. Tang, F. Hsiao, D. Murphy, I. Ku, J. Liu, S. Souza, N. Wang, H. Wu, Y. Wang, M. Tang, G. Virbila, M. Pham , D.Yang, Q.Gu, Y.Wu, Y.Kuan, C.Chien, M.Chang, "Alow-overheadself-healingembeddedsystemforensuringhighieldandlong-termssustainabilityof60GHz4Gb/sradio-on-a-chip", IEEEISSCC, pp.316- 318, 2012.

[10]B.Sadhu,M.Ferriss,A.Natarajan,S.Yaldiz,J.Plouchart,A.Rylyakov,A.Valdes-Garcia,B.Parker,A.Babakhani,S.Reynolds,X.Li,L.Pileggi,R.Harjani,J.TiernoandD.Friedman,“Alinearized,low-phase-noiseVCO-based25GHzPLLwithautonomicbiasing,”IEEEJSSC,vol.48,no.5,pp.1138-1150,May.2013.[10] B. Sadhu, M. Ferriss, A. Natarajan, S. Yaldiz, J. Plouchart, A. Rylyakov, A. Valdes-Garcia, B. Parker, A. Babakhani, S. Reynolds, X. Li, L. .Pileggi, R.Harjani, J.Tierno and D.Friedman, "Alinearized, low-phase-noise VCO-based 25GHz PLL with autonomic biasing," IEEEJSSC, vol.48, no.5, pp.1138-1150, May.2013.

[11]P.Gupta,Y.Agarwal,L.Dolecek,N.Dutt,R.Gupta,R.Kumar,S.Mitra,A.Nicolau,T.Rosing,M.Srivastava,S.SwansonandD.Sylvester,“Underdesignedandopportunisticcomputinginpresenceofhardwarevariability,”IEEETrans.onCAD,vol.32,no.1,pp.8-23,Jan.2013.[11] P. Gupta, Y. Agarwal, L. Dolecek, N. Dutt, R. Gupta, R. Kumar, S. Mitra, A. Nicolau, T. Rosing, M. Srivastava, S. Swanson and D. Sylvester," Underdesigned and opportunisticcomputinginpresenceofhardwarevariability,"IEEETrans.onCAD,vol.32,no.1,pp.8-23,Jan.2013.

[12]X.Li,W.Zhang,F.Wang,S.SunandC.Gu,“Efficientparametricyieldestimationofanalog/mixed-signalcircuitsviaBayesianmodelfusion,”IEEE ICCAD,pp.627-634,2012.[12]X.Li, W.Zhang, F.Wang, S.Sun and C.Gu, "Efficient parametric ield estimation of analog/mixed-signal circuits via Bayesian model fusion," IEEE ICCAD, pp.627-634, 2012.

[13]C.Gu,E.ChiproutandX.Li,“Efficientmomentestimationwithextremelysmall samplesizeviaBayesianinferenceforanalog/mixed-signalvalidation,”IEEE DAC,2013.[13] C. Gu, E. Chiprout and X. Li, “Efficient moment estimation with extremely small samplesize via Bayesian inference for analog/mixed-signal validation,” IEEE DAC, 2013.

发明内容Contents of the invention

本发明的目的是为克服现有技术存在的缺陷,提供一种基于伯努利分布的贝叶斯模型混合法,用于混合预测电路成品率。The purpose of the present invention is to overcome the defects in the prior art, and provide a Bayesian model mixing method based on Bernoulli distribution, which is used for mixing prediction circuit yield.

本方法通过结合在集成电路设计的不同阶段的信息,加快对只具有“通过—不通过”两种状态的电路的成品率估计过程。该方法为“通过—不通过”的输出结果建立一个伯努利模型,将先验成品率设定为beta分布,并利用最大似然法确定beta分布中的超参数。再使用该超参数,结合比较少量的后验信息,估算出集成电路的成品率。该方法相比传统的蒙特-卡洛方法估计成品率,在达到同一精度的情况下,需要的后验信息少了很多,能明显节省进行后仿真或者进行新一次测试的时间。The method speeds up the process of yield estimation for circuits with only "go-no-go" states by combining information from different stages of integrated circuit design. This method establishes a Bernoulli model for the output result of "pass-fail", sets the prior yield rate as beta distribution, and uses the maximum likelihood method to determine the hyperparameters in the beta distribution. Then use this hyperparameter, combined with a relatively small amount of posterior information, to estimate the yield of the integrated circuit. Compared with the traditional Monte-Carlo method for estimating the yield, this method requires much less posterior information while achieving the same accuracy, which can significantly save the time for post-simulation or a new test.

本发明的方法可以有效地处理传统方法所不能处理的仿真或测试产生二元输出时的情况;对于只具有“通过—不通过”两种输出状态的测试情况,只需先验的成品率和后验的成品率在一定范围内接近,本发明在达到同样精度的情况下能明显减小所需要收集的后验数据点的数量,从而大大降低了验证、测试的成本。The method of the present invention can effectively handle the situation when the simulation or test that the traditional method cannot handle produces a binary output; for the test situation with only two output states of "pass-fail", only the prior yield and The posterior yield is close within a certain range, and the present invention can significantly reduce the number of posterior data points to be collected while achieving the same accuracy, thereby greatly reducing the cost of verification and testing.

为了达到上述目的,本发明的技术方案是:一种基于伯努利分布的贝叶斯模型混合估计成品率的方法(BMF-BD),它可以用图1描述,其步骤如下:In order to achieve the above object, the technical solution of the present invention is: a method (BMF-BD) for estimating the yield rate based on the Bayesian model of Bernoulli distribution, which can be described in Figure 1, and its steps are as follows:

步骤201:读取前阶段与后阶段的数据,这些数据经过预先的处理,已经编码为“0—1”的格式,0代表测试未通过,1代表测试通过;Step 201: Read the data of the previous stage and the latter stage. These data have been pre-processed and encoded into the format of "0-1", 0 means the test failed, and 1 means the test passed;

步骤202:得到的数据分为两组:对于流片前仿真的应用情况,对应的是布局布线前仿真(前阶段)和布局布线后仿真(后阶段),对于流片后测试的应用,对应的是较早一批的测试结果(前阶段)和最新一批的测试结果(后阶段);该步骤中,通过对前阶段的成品率的学习,将先验信息以合适的形式编码,其包括分步骤21和分步骤22:Step 202: The obtained data are divided into two groups: for the application of pre-silicon simulation, corresponding to the pre-layout simulation (pre-stage) and post-layout simulation (post-stage), for the application of post-silicon test, corresponding to The test results of the earlier batch (pre-stage) and the latest batch of test results (post-stage); in this step, through the learning of the yield rate of the previous stage, the prior information is encoded in a suitable form, and its Including sub-step 21 and sub-step 22:

分步骤21:采用最大似然法求得前阶段的成品率:Sub-step 21: Use the maximum likelihood method to obtain the yield of the previous stage:

由于电路的测试输出只有两位“0—1”,因此可以认为是一个有伯努利分布的随机变量:Since the test output of the circuit has only two bits "0-1", it can be considered as a random variable with Bernoulli distribution:

其统计特性可以表示为:Its statistical properties can be expressed as:

其中,β∈[0,1]代表了所要估计的成品率;Among them, β∈[0,1] represents the estimated yield;

根据公式According to the formula

可以得到前阶段的成品率信息,其中,M是前阶段中通过测试的点数,N是总共参与测试的点数;You can get the yield information of the previous stage, where M is the number of points that passed the test in the previous stage, and N is the total number of points that participated in the test;

分步骤22:前阶段的成品率一般和后阶段的不同,但因为前阶段与后阶段的电路具有相似性,因此后阶段的成品率应该与前阶段类似,为了表征这样的不确定性,将待估计的参数β看作一个具有beta分布的随机变量:Sub-step 22: The yield rate of the former stage is generally different from that of the latter stage, but because the circuits of the former stage and the latter stage are similar, the yield rate of the latter stage should be similar to that of the former stage. In order to represent such uncertainties, we will The parameter β to be estimated is regarded as a random variable with a beta distribution:

其中,a、b被称为超参数,它们控制了该概率密度函数的形状(如图2所示),这个beta函数在某一个特定的值βM上取到最大,该特定值的表达式为:Among them, a and b are called hyperparameters, and they control the shape of the probability density function (as shown in Figure 2). This beta function is maximized at a specific value β M , and the expression of the specific value for:

为了给超参数a、b定下约束,令βM与前阶段得到的成品率相等:In order to set constraints on the hyperparameters a and b, let β M be equal to the yield obtained in the previous stage:

因此,参数β的分布表达式也可以写作:Therefore, the distribution expression for the parameter β can also be written as:

上式即为先验信息的表达式;The above formula is the expression of prior information;

步骤203:Step 203:

为了得到上式中超参数a的值,结合后阶段得到的数据,利用最大似然法得到其值:In order to obtain the value of the hyperparameter a in the above formula, combined with the data obtained in the later stage, the maximum likelihood method is used to obtain its value:

上式中,x代表取得的后阶段数据点,M表征其中通过测试(结果为“1”)的数据点个数,N为总的数据点个数,将上式对β从0到1积分:In the above formula, x represents the data points obtained in the later stage, M represents the number of data points that passed the test (the result is "1"), N is the total number of data points, and the above formula is integrated from 0 to 1 for β :

为了使得上式最大(也即取得观测结果x的可能最大),使用线性搜索的方法获得一个最优的超参数a满足下式:In order to maximize the above formula (that is, to obtain the maximum possible observation result x), use the linear search method to obtain an optimal hyperparameter a that satisfies the following formula:

超参数的大小表征了对于先验信息的确信程度;The size of the hyperparameters characterizes the degree of confidence in the prior information;

步骤204:使用最大后验法得到后验成品率,根据贝叶斯公式,参数β的后验分布正比于先验分布和似然函数的乘积:Step 204: Use the maximum a posteriori method to obtain the posterior yield. According to the Bayesian formula, the posterior distribution of the parameter β is proportional to the product of the prior distribution and the likelihood function:

经过归一化得到:After normalization, we get:

上式即为参数β的后验分布表达式,可以看到,该式也是一个beta分布,其值取得最大时的参数β的值即为BMF方法估计的成品率:The above formula is the posterior distribution expression of the parameter β. It can be seen that this formula is also a beta distribution, and the value of the parameter β when its value is maximized is the yield rate estimated by the BMF method:

步骤205:输出估计得到的成品率数值βMAPStep 205: Output the estimated yield value β MAP .

本发明方法针对具有二元输出的电路成品率估计,具有如下优点:The method of the present invention has the following advantages for the circuit yield estimation with binary output:

1.结合了先验信息与后验信息,比较传统的蒙特卡洛方法,在达到同样精度的情况下需要的后验点数比较小,明显地降低了测试验证所需要的时间等成本。1. Combining prior information and posterior information, compared with the traditional Monte Carlo method, the number of posterior points required to achieve the same accuracy is relatively small, which significantly reduces the time and other costs required for test verification.

2.比较现有技术的BMF方法,本方法可以处理只具有“通过—不通过”两种状态的电路,具有现实实用性。2. Compared with the BMF method in the prior art, this method can deal with circuits with only two states of "pass-fail", which is practical and practical.

附图说明Description of drawings

图1是本发明基于伯努利分布的贝叶斯模型混合预测电路成品率的方法的流程图。FIG. 1 is a flowchart of a method for predicting circuit yield based on a Bernoulli distribution-based Bayesian model of the present invention.

图2是beta分布的示意图。Figure 2 is a schematic diagram of the beta distribution.

图3是实施例1中SRAM电路的简化电路图。FIG. 3 is a simplified circuit diagram of the SRAM circuit in Embodiment 1. FIG.

图4是SRAM电路使用不同的成品率分析方法得到的误差对比结果。Figure 4 shows the error comparison results obtained by using different yield analysis methods for SRAM circuits.

图5是两批制造完成的硅片使用不同的成品率分析方法得到的误差对比结果。Fig. 5 is the error comparison result obtained by using different yield analysis methods for two batches of manufactured silicon wafers.

为使本发明的上述目的、特征和优点能更加明显易懂,下面通过几个具体的实例进一步说明。In order to make the above objects, features and advantages of the present invention more obvious and understandable, several specific examples are used to further illustrate below.

具体实施方式Detailed ways

本发明基于伯努利分布的贝叶斯模型混合预测电路成品率的方法的典型实例是一台包含4GB内存、2.66GHz处理器以及硬盘驱动器的工作站,该工作站执行实现基于伯努利分布的贝叶斯模型混合预测电路成品率的方法BMF-BD。A typical example of the method for predicting circuit yield based on the Bayesian model of Bernoulli distribution in the present invention is a workstation that includes 4GB memory, a 2.66GHz processor and a hard disk drive. Yassian Model Hybrid Method for Predicting Circuit Yield BMF-BD.

实施例1Example 1

使用65nmCMOS工艺设计的SRAM电路(如图3所示),其读路径由以下部分组成:SRAM的6管单元,时序逻辑和敏感放大器;一旦字线WL被激活,位线BL和BL_开始放电,根据6管单元内部的储存数值的不同,由敏感放大器输出比较的结果:0或是1,作为读取的结果输出,由于制造中的波动的关系,电路有一定的工作错误的几率,也即读取的结果与实际储存的不符;The SRAM circuit designed using 65nm CMOS process (as shown in Figure 3), its read path consists of the following parts: SRAM 6-tube unit, sequential logic and sensitive amplifier; once the word line WL is activated, the bit lines BL and BL_ start to discharge , according to the difference of the stored value inside the 6-tube unit, the comparison result is output by the sensitive amplifier: 0 or 1, which is output as the read result. Due to the fluctuation in the manufacturing process, the circuit has a certain probability of working error, and also That is, the read result does not match the actual stored one;

为了将本发明提出的方法与传统的分析方法的精度进行比较,本实施例中将使用的BMF-BD和蒙特卡洛两种方法进行了成品率的分析;In order to compare the accuracy of the method proposed by the present invention with the traditional analysis method, the BMF-BD and Monte Carlo methods to be used in this embodiment have carried out the analysis of the yield;

首先,对布局布线前的电路使用hspice运行得到5000个蒙特卡洛仿真点,得到此时的成品率为βE=89.88%;在实际应用中,认为在后仿真之前这些信息就是已知的,这样获得前仿真的结果就不必再耗费额外的时间成本;之后,取后仿真点5000点,求得其成品率βEXACT=90.66%,再在这5000个点中取少量点,分别运行BMF-BD方法与蒙特卡洛方法估计成品率,使点数从20到200间变化,估算相对误差:First, use hspice to run the circuit before layout and routing to get 5000 Monte Carlo simulation points, and the yield rate at this time is βE=89.88%. In practical applications, it is considered that this information is known before post-simulation, so There is no need to spend extra time to obtain the results of the pre-simulation; after that, take 5000 points of the post-simulation point to obtain its yield β EXACT = 90.66%, and then take a small number of points from these 5000 points and run BMF-BD respectively Method and Monte Carlo method to estimate the yield, make the number of points change from 20 to 200, and estimate the relative error:

为了消除采点的随机性带来的误差,将相对误差和点数变化的关系绘制于图(如图4所示),图中显示,即使后仿真点只有20个,In order to eliminate the error caused by the randomness of the sampling points, the relationship between the relative error and the change of the number of points is drawn in the figure (as shown in Figure 4). The figure shows that even if there are only 20 post-simulation points,

BMF-BD方法也可以获得比较好的精度,为了达到同样的精度,蒙特卡洛方法至少需要160个点,由于运行BMF-BD方法的时间是可以忽略不计的,也就是说,本方法比传统的蒙特卡洛方法得到了8倍的速度提升。The BMF-BD method can also obtain relatively good accuracy. In order to achieve the same accuracy, the Monte Carlo method needs at least 160 points. Since the time for running the BMF-BD method is negligible, that is to say, this method is faster than the traditional method. The Monte Carlo method got an 8x speedup.

实施例2一个硅片测试实例Example 2 of a silicon wafer test

测试一个硅片(来自一主要的半导体公司),前后两个测试结果来自两批不同的成品,该两批成品的数目分别为2305和2010个测试点;本实施例中,每一个芯片被标记为“通过”或“不通过”,由前后两批测得的成品率分别为βE=90.63%,βEXACT=90.25%,其中,前一批的成品率测试结果被当做是前阶段的信息;Test a silicon chip (from a major semiconductor company), the two test results come from two different batches of finished products, the numbers of the two batches of finished products are 2305 and 2010 test points respectively; in this embodiment, each chip is marked It is "Pass" or "Fail", and the yield rate measured by the two batches before and after is β E =90.63%, β EXACT =90.25%, among them, the yield test result of the previous batch is regarded as the information of the previous stage ;

类似实施例1,相对误差和点数变化的关系绘制于图(如图5所示),结果显示,BMF-BD方法在显示出明显优势,为了达到一样的精度,蒙特卡洛方法需要200个点时,BMF-BD方法只需要20个点,本方法达到了10倍的速度提升。Similar to Example 1, the relationship between the relative error and the number of points is plotted in the figure (as shown in Figure 5). The results show that the BMF-BD method shows obvious advantages. In order to achieve the same accuracy, the Monte Carlo method needs 200 points When , the BMF-BD method only needs 20 points, and this method achieves a 10-fold speedup.

上述实施例的结果表明,相对于现有技术而言,本发明的BMF-BD方法在精度和速度上具有很强的竞争性,是一种高效实用的成品率预测方法。The results of the above examples show that, compared with the prior art, the BMF-BD method of the present invention is highly competitive in accuracy and speed, and is an efficient and practical yield prediction method.

Claims (2)

1. a kind of method of the Bayesian model hybrid predicting circuit yield based on Bernoulli Jacob's distribution, which is characterized in that it is wrapped Include step:
Step 201:The data of last stage and rear stage are read, those data are encoded to the format of " 0-1 " through anticipating, In, 0 represents not by test, and 1, which represents test, passes through;
Step 202:Obtained data are divided into two groups, wherein:For the applicable cases emulated before flow, corresponding is layout cloth Emulation and placement-and-routing's post-simulation before line;For the application tested after flow, corresponding is relatively early batch of test result and most New batch of test result;
Step 203:
In conjunction with the data that the rear stage obtains, the value of hyper parameter a is obtained using maximum likelihood method:
In above formula, βEIndicate that the known yield rate of previous stage, β indicate that the latter half needs the yield rate estimated;X representatives take The rear number of stages strong point obtained, for M characterizations wherein by the data point number of test, the test result is " 1 ", and N is total data Point number;
p(x,β|When a) indicating known hyper parameter a, the joint probability density of x and β;p(x|When β) indicating known β, the probability of x is close Degree;p(β|When a) indicating known hyper parameter a, the probability density of β;Above formula integrates β from 0 to 1:
In order to enable above formula maximum is to obtain the possibility maximum of observed result x, it is optimal using the method acquisition one of linear search Hyper parameter a meet following formula:
Wherein, the size of hyper parameter is characterized firmly believes degree for prior information;
Step 204:Posteriority yield rate is obtained using maximum a posteriori;
According to Bayesian formula, the Posterior distrbutionp of parameter beta is proportional to the product of prior distribution and likelihood function:
It is obtained by normalization:
Above formula is the Posterior distrbutionp expression formula of parameter beta, it can be seen that the formula is also a beta distribution, when value obtains maximum Parameter beta value be Bayesian model fusion method estimation yield rate:
Step 205:The finished product rate score β that output estimation obtainsMAP
2. method as described in claim 1, which is characterized in that pass through the yield rate to the last stage in the step 202 Study, prior information is encoded in an appropriate form, specifically as follows step by step:
Step by step 21:The yield rate of last stage is acquired using maximum likelihood method:
Since the test output of circuit only has two " 0-1 ", therefore, it is considered that being a stochastic variable for thering is Bernoulli Jacob to be distributed:
Its statistical property is expressed as:
Wherein, β ∈ [0,1]The yield rate to be estimated is represented,
According to formula:
Obtain the yield information of last stage, wherein M is the points by test in the last stage, and N is the point for participating in test in total Number;
Step by step 22:The uncertainty for characterizing the yield rate and the yield rate in rear stage of last stage, parameter beta to be estimated is regarded as One stochastic variable with beta distributions:
Wherein, a, b are referred to as hyper parameter, they control probability density function p (β |A, b) shape, this beta function exists Some specific value βMOn get maximum, the expression formula of the particular value is:
Constraint is fixed to hyper parameter a, b, enables βMIt is equal with the yield rate that the last stage obtains:
The distribution expression formula writing of parameter beta as a result,:
Above formula is the expression formula of prior information.
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