CN1049641C - Process of synthesizing porous preform for optical fiber and apparatus thereof - Google Patents
Process of synthesizing porous preform for optical fiber and apparatus thereof Download PDFInfo
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- CN1049641C CN1049641C CN94116713A CN94116713A CN1049641C CN 1049641 C CN1049641 C CN 1049641C CN 94116713 A CN94116713 A CN 94116713A CN 94116713 A CN94116713 A CN 94116713A CN 1049641 C CN1049641 C CN 1049641C
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
- C03B2207/54—Multiple burner arrangements combined with means for heating the deposit, e.g. non-deposition burner
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Abstract
To improve the deposition efficiency of a fine particle on a porous preform and to enhance the density of the preform at the time of blowing a fine glass particle current against a target to produce the preform by controlling the flow of the fine particles. A raw gas is hydrolyzed in a flame 6 from a flame generating means 4 to form a fine glass particle. The current of the particles is blown agsinst a target 10 to form the porous preform for an optical fiber. The target 10 is rotated in the direction orthogonal to the axis and moved in the axial direction relatively to the flame generating means 4. In this method, a straightening gas is impressed so that the fine particle current passing through the target 10 surface from the direction crossing a plane including the center of rotation of the target 10 and the center of the fine particle current from the opposite side is pressed toward the target 10.
Description
The invention relates to optical fiber with the synthetic method of sintered glass mother metal and the invention of device thereof, particularly about adhesion rate (yield) high the optical fiber synthetic method of porous mother metal and the invention of device thereof.
Prior art, to make the optical fiber mother metal usually be to make core and tectal some with the VAD method with the sintered glass mother metal, use the synthetic tectal rest part of outer attached method (OVD method) after the vitrifying again, like this sintered glass mother metal of Xing Chenging finally the formation center be the core of 10 μ m, its outer tectal optical fiber that is with 125 μ m diameters.
In the no matter the sort of manufacture craft of above-mentioned sintered glass mother metal, generally all use hydrogen-oxygen spray gun, unstripped gas, for example SiCl
4, GeCl
4Steam in oxyhydrogen flame, added water decomposition, formed SiO
2, GeO
2The glass microparticle, this glass microparticle is blown invests on the rotary target, adhere to (accumulation) on this target.
Along with the expansion of optical fiber range of application, require optical fiber to reduce manufacturing price.One of countermeasure of taking is for this reason, must make the sintered glass mother metal expeditiously.
Carrying out up to now, the trial of various efficient manufacturing sintered glass mother metals.
The Japanese Patent spy opens the method that makes the flame that goes out from lance ejection in the VAD method rock the deposition efficiency of little, flame stabilization, raising sintered glass mother metal of having announced for clear 62-171939 number.
The Japanese Patent spy opens clear 63-123831 communique and has announced in the VAD method, and high-temperature gas is led to sintered glass mother metal and spray gun periphery, prevents from the transparent glass mother metal to produce the method for bubble.
Japanese patent laid-open 1-242431 communique announced with cavity surround accumulation portion, fan be set, to the venting port plenum ventilation by force of cavity, make the airflow the chamber in stable, thereby make the flame of spray gun and glass microparticle flow method of stabilizing.
Announced in the VAD method method that gas is sneaked into outside with gas curtain spray gun flame being sealed up, prevented for Japanese patent laid-open 2-252633 number.
But in the above-mentioned method that these used in the past, glass microparticle adhering on target is insufficient, with condition and different, on average can only make 50% the adhering at the most of glass microparticle of generation with spray gun structure.
Scrubbed from venting port and discard and fail to be attached to glass microparticle on the target, the glass microparticle is wasted.
Moreover, scrub the high problem of processing costs in addition.
Thereby much less, the raising of deposit efficiency also is necessary for reducing fibre-optic cost from now on.
As solution to the problems described above, applicant of the present invention has proposed relative with target, at the optical fiber of the violent blowing gas stream in rear portion of the glass microparticle stream that is positioned at a side opposite with spray gun with the synthetic method of porous mother metal (for example: special be willing to flat 4-301700 number).
Narrate the synthetic method summary of this optical glass fibre below with reference to Fig. 1 and Fig. 2 with the porous mother metal.
Fig. 1 is the pie graph of the optical fiber of outer attached (OVD) method with the synthesizer of porous mother metal.Triple tube spray gun 4 centers feed argon gas and SiCl
4, its outside imports hydrogen, and the more lateral imports oxygen, forms the flame of glass microparticle.This flame 6 blows suddenly, piles up on the target of being made up of core 2 and the tectum that is piled up in core 2 peripheries.Target 10 rotates on arrow R direction on one side, on one side on direction T move left and right.
Shown in the diagram of Fig. 2, the glass microparticle stream 112 that spray gun 4 produces is flowed through around the target 10 and is gone, but help to adhere to be only limited to streamline mobile glass microparticle 112 along the most close target 10.Moreover in the behind 13 of target 10, glass microparticle stream breaks away from target 10 surfaces, does not adhere to just to be deflated discharge.
Therefore, blow suddenly with air current A behind at it, to prevent flow shedding target 10.Improve the efficient that the glass microparticle adheres to this on target.
The object of the present invention is to provide, use the method and the device thereof of the porous mother metal of using with the higher optical fiber of the method diverse ways combined coefficient of above-mentioned improvement.
The invention provides the synthesizer of the porous mother metal that optical fiber uses, comprise: in flame, add the flame generating unit that water decomposition is made the unstripped gas of the porous mother metal that optical fiber uses, formed the glass microparticle, this glass granules is sprayed to target as particle flux
Described target be a kind of its can relatively move with described flame generating unit on axially, with the axle orthogonal directions on rotatable target, it is characterized in that, further comprise,
On the position of the level crossing that constitutes at the center of the described flame that axle center, described flame generating unit with described target send, having with symmetric angle configurations provides the rectifying device that makes the residual glass microparticle that is not piled up in from described flame generating unit ejection on the aforementioned target flow to the rectification gas on aforementioned target surface.
The present invention also provides a kind of and carries out flame at the flame that optical fiber is produced with the flame generating unit with the unstripped gas of porous mother metal and add water decomposition, form the glass microparticle, with this glass microparticle be microparticle stream spray to the orthogonal direction of axle on rotate, the target that is moving with respect to aforementioned flame generating unit makes it use the synthetic method of porous mother metal attached to employed optical fiber in the method for the manufacturing optical fiber on the target with the porous mother metal in the axial direction, it is characterized in that, this method is from the level crossing at the center of the rotation center that comprises aforementioned target and aforementioned microparticle stream, add rectification gas on the direction in opposite directions, make aforementioned microparticle flow to aforementioned target side flow by aforementioned target surface.
In a word, unstripped gas adds water decomposition, forms the glass microparticle in oxyhydrogen flame, be attached on the target, the synthesizing optical fiber is during with the porous mother metal, from with direction level crossing, relative of central shaft that comprises target axle and glass microparticle stream on, to not be piled up in the front of target and glass microparticle that side remaining, that crossed target flows to venting port is pressed to the side of target and behind, make it be attached to these positions of target.
It seems that from the viewpoint of the distribution of feed glass microparticle above-mentioned rectification gas is preferably pressed to aforementioned glass microparticle from the direction that intersects with the aforementioned aforementioned glass microparticle that is blown to target.
And, the invention provides implement aforesaid method, optical fiber is with the synthesizer of porous mother metal, this device has in a word: be placed on the flame generating unit that adds water decomposition formation glass microparticle in the flame, this glass microparticle is flowed to the target injection as microparticle forming the unstripped gas of optical fiber with the porous mother metal; To relatively move with above-mentioned flame generating unit vertically, with the orthogonal direction of axle on rotating target be contained in the chamber, make from the ejection of aforementioned flame generating unit, be not piled up in the rectification gas generator that residual glass microparticle on the described target flows to aforementioned target surface, i.e. rectifying device.
Particularly, on the position that the side that aforementioned rectifying device is arranged at aforementioned cavities and described flame generating unit intersect, have and guide the rectification gas of introducing in the chamber into rectification part that aforementioned glass microparticle is blown to the part of aforementioned target.
And under the particular case, aforementioned rectifying device has: with the device in the rectification gas introducing chamber; Be disposed in the chamber bell jar that holds the part that may be ejected into by the glass microparticle of target at least and have the shape of restriction glass microparticle stream; And the rectification part that is arranged on the position that is orthogonal with the lateral flame generating unit of bell jar, the rectification gas in the introduction chamber is guided into the part that the glass microparticle in the bell jar sprays to target.
For suitable, aforementioned rectification part is adjusted rectification gas, changes aforementioned glass granules stream according to the variation of aforementioned target diameter, and makes the glass granules that left behind that is not piled up on the target often flow to the surface of target, more particularly, be flow to the side of target and behind, be deposited on the target.In a word, the diameter of target changes with the accumulation of glass microparticle, because the glass microparticle stream that blows to this target changes with the diameter variation of target, the direction that therefore makes the rectification gas stream changes with the size of target diameter.
For more suitable, also have: the device of measuring target diameter; By the device of this target diameter that records decision rectification part position with change the drive unit of the position of rectification part according to the rectification part position of this decision.
Under specific circumstances, aforementioned rectification part is the rotatable straightening vanes that changes aforementioned rectification gas direction with rotation.
Under specific circumstances another, aforementioned rectification part is the straightening vanes that the on position of insertion bell jar inside can change.
Under another particular case, aforementioned rectification part has the retractile parts that connect the gap between strainer and this strainer and bell jar; Can also move, the position that makes strainer is facing to described rectification gas.
For suitable, introducing rectification gas is to make the device that is negative pressure state in the chamber with respect to the outside to the device in the aforementioned cavities, and rectification gas is the aforementioned cavities air outside.
For more suitable, contain inflammable gas in the rectification gas of aforementioned rectifying device.In a single day aforementioned rectification gas contain inflammable gas, can improve the surface temperature of sintered glass mother metal, and the density of sintered glass mother metal is improved.
Below each figure and symbol are done simple declaration.
Fig. 1 is an orthographic plan of using the synthesizer of porous mother metal at the optical fiber of the present invention of first to file.
Fig. 2 is the side distribution plan that is illustrated in the glass microparticle (flame) of the air current A that is added with rectifying device generation of the present invention on Fig. 1 side-view basis.
The structural plan figure of the device of the 1st embodiment of the synthesizer of Fig. 3 optical fiber usefulness of the present invention porous mother metal.
Fig. 4 is the sectional side view of the X-X line of Fig. 1.
Fig. 5 is the optical fiber that in the past the used structural plan figure with the example of the synthesizer of porous mother metal.
Fig. 6 is the sectional side view of the X-X line of Fig. 5.
Fig. 7 is the structural plan figure of optical fiber of the present invention with the device of the 2nd embodiment of the synthesizer of porous mother metal.
Fig. 8 is the side elevational view on the Y-Y line of Fig. 7.
Fig. 9 is the X-X line sectional side view of Fig. 7 and Fig. 8.
Figure 10 is an optical fiber of the present invention sectional side view with the part of the device of the 3rd embodiment of the synthesizer of porous mother metal, and Figure 10 (A) is the synoptic diagram of expression core diameter straightening vanes obliquity little the time.Figure 10 (B) is the synoptic diagram of expression core diameter straightening vanes obliquity big the time.Figure 10 (C) is mobile model straightening vanes figure.
Figure 11 is the bell jar of the partial structure shown in Figure 10 (A), (B) and the location diagram of straightening vanes.
Figure 12 is a straightening vanes detail structure chart shown in Figure 10 (A), (B).
Figure 13 is the straightening vanes detail structure chart shown in Figure 10 (A), (B).
Figure 14 be as optical fiber of the present invention with the 4th embodiment of the synthesizer of porous mother metal, measure the optical fiber mother metal diameter, carry out the apparatus structure synoptic diagram that the straightening vanes position is adjusted.
Figure 15 represents optical fiber of the present invention curve with the experimental result of the synthesizer of porous mother metal and method.
Figure 16 is the part sectional side view of optical fiber of the present invention with the device of the 5th embodiment of the synthesizer of porous mother metal.Figure 16 (A) is the obliquity synoptic diagram of the rectification grid of core diameter little the time.Figure 16 (B) is the front elevation of rectification grid shown in Figure 16 (A), and Figure 16 (C) is the obliquity synoptic diagram of the rectification grid of core diameter big the time.
Figure 17 is an optical fiber of the present invention with part sectional side view, Figure 17 (A) of the device of the 6th embodiment of the synthesizer of porous mother metal is the strainer obliquity synoptic diagram of core diameter little the time, and Figure 17 (B) is the synoptic diagram of the strainer obliquity of core diameter big the time.
2 ... core formation portion
4 ... spray gun
6 ... flame
8 ... tectum formation portion
10 ... target
12 ... the chamber
12A ... the loam cake in chamber
14 ... venting port
16 ... chuck
18 ... turning axle
20,22 ... fixing straightening vanes group
24 ... bell jar
26,28 ... air filter
29 ... the gap
30 ... inner bell jar
302 ... the spray gun open holes
304 ... the venting port connecting hole
34,36 ... fixing straightening vanes group
38 ... angular setting formula straightening vanes group
40 ... angular setting formula straightening vanes group
40A ... the 2nd angular setting formula straightening vanes
401 ... straightening vanes
402 ... pivot
42,44 ... angular setting formula straightening vanes group
46 ... spring
48 ... the towing device
49 ... fixed part
50 ... laser aid
52 ... the measuring diameter device
54 ... control device
56 ... CD-ROM drive motor
58 ... vane drive mechanism
60 ... bell jar
62,64,66,68 ... corrugated tube
70,72 ... the rectification grid
74 ... venting port
80 ... bell jar
82,84,86,88 ... corrugated tube
90,92 ... strainer
94 ... venting port
Narrate the optical fiber of the present invention synthetic method of porous mother metal and the 1st embodiment of device thereof below.
Fig. 3 is the plane structure chart of the optical fiber of the 1st embodiment with the synthesizer of porous mother metal, and Fig. 4 is the sectional side view on the X-X line of Fig. 3.
This optical fiber has with the synthesizer of porous mother metal: form portion 2 and the periphery that forms portion 2 at this core by means of chuck 16 clampings by core and adhere to the turning axle 18 that tectum that (accumulation) glass microparticle forms forms the target 10 that portion 8 forms; The chamber 12 that is holding target 10; Be disposed at the spray gun 4 and the venting port 14 of the sidewall in this chamber 12; Make the target 10 upward to-and-fro movement of T in the horizontal direction that is connected on the turning axle 18, the rotation of on sense of rotation R, rotating, reciprocating mechanism (not shown).Spray gun 4 relatively moves with target 10 and gets final product.
Argon gas and SiCl are introduced in triple tube spray gun 4 centers
4, its outer hydrogen of introducing, outside one deck is introduced oxygen again, forms the flame of glass microparticle.These glass microparticles are blown to target 10, are piled up on the target 10, and tectum formation portion 8 is increased.
Shown in Fig. 4 diagram, on symmetric position, chamber about in the of 12 (or about), set fixedly fixedly cowling panel group 22 of cowling panel group 20 and the 2nd.In this example, fixedly cowling panel group 20 and 22 is made of 4 pieces of cowling panels respectively.Up and down 4 pieces of cowling panels respectively with symmetric angle configurations on symmetric position.
Fixedly cowling panel group 20 and 22 has the center of the flame 6 (glass microparticle) that sends with the axle center, the spray gun 4 that comprise target 10 and the level crossing of venting port 14, can be on relative direction air attract, with the suction port of adjacent cowling panel separation.
The inside in chamber 12 is negative pressure with respect to the outside in chamber 12, and therefore, the atmosphere (air) around the chamber 12 is inhaled in the chamber by fixing cowling panel group 20 and 22.These air are used as rectification gas.
Fixedly cowling panel group 20 and each cowling panel of 22 are set its position and angle according to the side that inhaled air is blowed to target 10 and with the requirement facing to the behind of the target 10 of spray gun 4.Thereby, the glass microparticle that sprays to target 10 from spray gun be pressed towards by target 10 surfaces, when more specifically saying so by sidepiece target 10 on one side and, in the behind of target 10, also be pressed towards target 10 on one side.
The result is, except the front of collision target 10, be deposited in the glass particle on the target 10, residual glass microparticle is when passing through the side of target 10, diffusion, but pressed to target 10 1 sides by the rectification gas air, the distribution of shapes of the streamline of the glass microparticle of target 10 sidepieces is near target 10, and the adhesion amount of the glass microparticle of target 10 sidepieces increases.And even in the behind of target 10, the glass microparticle also is pressed towards target 10 on one side, even thereby target 10 behind the adhesion amount of glass microparticles on target 10 also increase.
In a word because as the effect of the air of rectification gas, the streamline distribution of the side of target 10 and glass microparticle behind near target 10 on one side, therefore, the side of target 10 and behind the adhesion amount of glass microparticle increase.As a result, can form (synthesizing) desirable sintered glass mother metal at short notice.And the glass microparticle of discharging from venting port 14 tails off, and the loss of glass microparticle reduces, moreover the glass microparticle that is discharged to scourer has reduced, so the processing of scourer has reduced.
Following mask body is narrated the 1st experimental example of the present invention (the 1st embodiment)
The core formation portion 2 of external diameter 20mm, 1m is fixed in the rotating shaft 18 by means of chuck 16, by means of rotating shaft 18, makes the rotating speed rotation of target 10 with about 300RPM, and moves it with the speed of 500mm/min, makes it adhere to SiO in the periphery of core formation portion 2
2Microparticle reaches about external diameter 150mm as tectum formation portion 8.
At this moment, in the triple tube spray gun, import oxygen 30SLM, hydrogen 80SLM, argon gas 20SLM, SiCl
4Gas 10SLM.
Spray gun and target 10 are contained in airtight chamber 12, and the pressure maintenance-10mmAq in the chamber amounts to from the suction opening that forms between each cowling panel of fixing cowling panel group 20 and 22 and to suck about 3m
3The atmosphere of/min.The atmosphere that is inhaled into is controlled air flow line by cowling panel.Make glass microparticle stream (flame 6) not break away from behind and the sidepiece that target 10, particularly glass microparticle do not break away from target 10, and flow to the effect of target 10.
Do not use under the situation of retaining plate group 20 and 22, the deposition efficiency average out to 40% of glass microparticle on target 10 up to now, and bring up to 60% in this experiment.
In this 1st embodiment, in the chamber 12 is negative pressure, therefore, because attraction naturally from fixing cowling panel group 20 and 22, atmosphere around the chamber 12 is inhaled in the chamber 12, but also can replace gas blower, atmosphere is pressed in the chamber 12 by force, so that form the gas microparticle stream identical around the target 10 with above-mentioned situation with it.
Perhaps also can be not limited to atmosphere (air), the gas beyond the air, as above-mentioned same gas particles stream nature suction or with gas blower by force in the suction chamber 12.
Suck or be pressed into the gas in the chamber 12, with atmosphere (air) so the most cheap the most desirable, but also identical with other gas effects.If but use 100% inactive gas, be a unfavorable factor for burning from the flame 6 of spray gun 4 ejection, therefore, and need not 100% inactive gas, preferably mix during with inactive gas with inflammable gas.Particularly, make it contain inflammable gas, then the temperature on sintered glass mother metal surface uprises, and more promotes the synthetic of sintered glass mother metal, improves the density of sintered glass mother metal.To this, will be narrated in the back.
Below one of example of narration device in the past the diagram of Fig. 5 and Fig. 6 (for example Japan real open clear 62-97138 communique) and in view of the above the optical fiber of the present invention that forms of improvement with the synthetic method of porous mother metal and the 2nd embodiment of device thereof.
In the past in the example, bell jar 24 is set in the chamber 12 at this, the sidepiece in chamber 12 is provided with the 1st air filter 26 and the 2nd air filter 28.And the top in chamber 12 is provided with the chamber loam cake 12A that can open and close freely.Other structures are with the synthesizer of Fig. 3 diagrammatic optical fiber with the porous mother metal.
This is example in the past, sets bell jar 24 in the chamber 12 that chamber loam cake 12A is set, and scatters at target 10 in order to limit from the glass microparticle (flame 6) of spray gun 4 ejections, and bell jar 24 is set.
Under the situation of this spline structure, along with the plane of the axle of axle that comprises target 10 and spray gun 42 in opposite directions, the direction of intersecting suction gas is difficult, so should addresses this problem.Implemented as Fig. 7-improvement shown in Figure 9.
Narrate synthetic method and the device thereof of optical fiber of the present invention below with reference to Fig. 7-Fig. 9 with the porous mother metal.Fig. 7 is the orthographic plan of optical fiber with the synthesizer of porous mother metal, and Fig. 8 is the Y-Y line sectional side view of Fig. 7, and Fig. 9 is the X-X line sectional drawing of Fig. 7 and Fig. 8.
This 2nd embodiment is with reference to the 1st embodiment of Fig. 3 and Fig. 4 narration and with reference to the improvement example of the example of Fig. 5 and Fig. 6 narration.
In the 1st embodiment, there is not bell jar, therefore, the control that the correct streamline shape by target 10 lateral glass microparticles (flame 6) is distributed has some difficulties.
In Fig. 5 example shown in Figure 6, the air in air filter 26,28 suction chambers 12 further is inhaled in the bell jar 24 from gap 29.At this moment, with the direction of level crossing of the axle 10 that comprises target 10 and the axle of spray gun 42 on attract gas, be difficult with its importing, the side of target 10 or glass microparticle behind fail effectively to be pressed in target 10 on one side.
The 2nd embodiment is intended to solve the above-mentioned problem that the 1st embodiment and Fig. 5, example shown in Figure 6 exist, be with reference to the cowling panel of the 1st embodiment of Fig. 3 and Fig. 4 narration with reference to Fig. 5 and the bell jar of Fig. 6 narration and the embodiment of usefulness.
Among Fig. 7, the interior bell jar 30 of the some that surrounds target 10, chuck 16 and rotating shaft 18 is set in chamber 12, air filter 26,28 is set on the sidewall in chamber 12.Because chamber 12 is negative pressure, air is inhaled in the chamber 12 through air filter 26,28.In the present embodiment, interior bell jar 30 is vertically being done longly, and this is in order to suppress about synthetic point that flame 6 blows to target 10 flow velocity of (target axially) direction.
Among Fig. 8, with the orthogonal direction of sensing of the flame 6 of spray gun 4 ejection on.Clip target 10, on the sidewall of interior bell jar 30, relatively set the 1st fixing fixing straightening vanes group 36 of straightening vanes group 34 and the 2nd.
In Fig. 9, the flame 6 of spray gun ejection is deposited on the target 10.Be not deposited on the target 10 and the glass microparticle that left behind by the sidepiece of target 10, again by the behind of target 10, discharge from venting port 14.Be subjected to the restriction of interior bell shape by the glass microparticle of target 10 sidepieces.Flow to target 10 on one side.Moreover suck through air filter 26,28 air in the chamber 12 that is negative pressure be inhaled into through the suction port between each cowling panel of the fixedly straightening vanes group 34 that sets in opposite directions and 36 in the bell jar 30.Fixing straightening vanes group 34 and 36, because consistent with the sensing of the flame 6 (glass microparticle) of spray gun 4 ejections, air is concentrated in the interior bell jar 30 that closely is close to that sucks flame 6, the air in being inhaled in the bell jar 30 more help to control the distribution of shapes of flame 6.The result is pressed to target 10 with the glass microparticle especially.Therefore, increased attached to target 10 sides and glass microparticle behind.
In the present embodiment, the constraint of bell jar 30 in being subjected to from target 10 axial leaked-in airs, comparatively speaking, the inspiratory capacity of coming from the cowling panel direction is big.Moreover in the present embodiment, scattering of 30 pairs of glass microparticles of bell jar (flame 6) limited in this.
(B) narrate optical fiber of the present invention with the synthetic method of porous mother metal and the 3rd embodiment of device thereof below with reference to Figure 10 (A).
In case the glass microparticle is piled up to target 10, the sintered glass mother metal, just the diameter of this target 10 just becomes big.Owing to the diameter of target 10 is to change along with synthetic like this, original in order to improve the efficient of synthesizing porous base glass material, the distributions and the glass microparticle stream of the streamline of flame 6 are also changed with the diameter of target 10.
Thereby in the present embodiment, according to the size of target 10 diameters, control rectification gas reaches the purpose that the feed glass microparticle flows.
For this reason, in the present embodiment,, on relative position, the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40 are set in the side of interior bell jar 30 with the center of the axle that links spray gun 4, target 10 and the level crossing of venting port 14.Each blade of the 1st angular setting formula straightening vanes group 38, for example angular setting formula straightening vanes 38A has the straightening vanes 381 with pivot 382 supportings.Equally, each blade of the 2nd angular setting formula straightening vanes group 48, for example angular setting formula straightening vanes 40A has by pivot 402 and is supported on straightening vanes 401 on the inner bell jar 30.Structurally, straightening vanes 381 can be that rotate freely at the center with pivot 382; Equally, structurally straightening vanes 410 can be that rotate freely at the center with pivot 402 also.Each vane group of angular setting formula straightening vanes group 38 is rotated symmetrically with each blade that is in the angular setting formula vane group 40 of symmetric position.
The turned position of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula vane group 40 when the diameter of Figure 10 (A) expression target 10 is little.
Because the diameter of target 10 is little, the glass microparticle of spray gun 10 ejections directly hits on target 10, and is low attached to the probability on the target 10, many by target 10 lateral amounts.Therefore, in this case, adjust the direction of each blade of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40, with these air in the bell jar 30 in be inhaled between blade, the glass microparticle is pressed to more on the target 10 of minor diameter, make the glass microparticle attached on the target 10.
With this, with the glass particle adhesion amount that increases under the little situation of target 10 diameters.
The position of rotation of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40 when the diameter of Figure 10 (B) expression target 10 is big.
Because target diameter is big, the glass microparticle of spray gun 4 ejections is quite a lot of attached to the amount on the target 10, thereby, just few by the amount of target 10 lateral glass microparticles, but because the diameter of target 10 is big, target 10 glass microparticle behind is very chaotic.Therefore, in this case, also to adjust the direction of each blade of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40, to pass through to suck between these blades the air in the interior bell jar 30, the glass microparticle is pressed to the side of large diameter target 10, simultaneously, make at target 10 glass microparticle behind and do not peel off from target 10.With this, when the diameter of target 10 is big, target 10 behind peel off minimizing, the much less side of target 10 is even the adhesion amount of the behind glass microparticle of target 10 also increases.
As mentioned above,, can often keep high adhesive rate, not be subjected to the influence of target 10 diameter by the present invention.Thereby the combined coefficient of sintered glass mother metal is improved.
Figure 10 (C) and Figure 10 (A), Figure 10 (B) difference, straightening vanes group 38A, 40A make and can move in arrow side.That is to say,, the straightening vanes 381 of straightening vanes group 38A, the straightening vanes of straightening vanes group 40A outwards can be pulled out from interior bell jar 10 along with target 10 becomes big.As a result, can obtain and the identical effect shown in Figure 10 (A), Figure 10 (B).Also the textural association shown in the structure shown in Figure 10 (A), (B) and Figure 10 (C) can be got up.
Figure 11 represents the configuration relation of the interior bell jar 30 shown in Figure 10 (A), (B) and the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40.Configuration the 1st angular setting formula rectiblock group 38 and the 2nd angular setting formula rectiblock group 40 in the dotted line part.
The spray gun open holes 302 that spray gun 4 is installed is in same level attitude with the venting port connecting hole 304 that is connected venting port 14.
Figure 12 is the expanded view of an example of the structure of the 1st angular setting formula straightening vanes group 38 shown in Figure 10 (A), (B) (or the 2nd angular setting formula straightening vanes group 40).Each blade of angular setting formula straightening vanes 38A～38F is made of for example pivot 382 and straightening vanes 381, and these frame axle rotations are installed on the fixing part 380 freely.This fixing part 380 is fixed on the window of interior bell jar 30.
Around the 1st tie 393 and the 2nd tie 394, these ties 393,394 are tight at the 1st turning unit 391 and 392 towings of the 2nd turning unit on each frame axle.
The 1st turning unit 391 is a rotation on the R direction, and tie 393 promptly is involved in the 1st turning unit one side, and each pivot is to right rotation, and the direction of leaving target 10 is pointed in the end of each blade, can realize the state shown in Figure 10 (B) with this.
On the other hand, in case the 2nd turning unit 392 rotates towards the L direction, then tie 394 is involved in the 2nd turning unit 392 1 sides, and each pivot is to anticlockwise, and target 10 1 sides are pointed in the end of each blade.Can realize the state shown in Figure 10 (A) with this.
And the rectiblock 381 of each angular setting formula straightening vanes 38A-39F is adjusted angle according to the requirement of " pointing to the tangential direction of target 10 ".
Above-mentioned turning unit 391 and 392 spinning movement can be used manually while the shape of observing target with the operator of the synthesizer of porous mother metal by optical fiber of the present invention and carry out, and also can measure target 10 diameters automatically and control operation automatically as described below.
Figure 13 is the sketch chart of other structure example of the 1st angular setting formula straightening vanes group 38 (or 2nd angular setting formula straightening vanes group 40) of Figure 10 (A) shown in (B).
Angular setting formula straightening vanes 38A～38F constitutes with for example frame axle 382 and straightening vanes 381 respectively, and these frame axle rotations are installed on the fixing part (not shown) freely.This fixing part is fixed on the window of interior bell jar 30.
One end of each straightening vanes is connecting with metal wire 395, and the other end is connecting with metal wire 396, and the end of metal wire 396 is connected with fixed part 49 by means of spring, and the end of metal wire 395 is connected on the towing device 48 again.
Towing device 48 with certain force of strain, is lived the medial end of straightening vanes by metal wire 396 towings, with the position of the uniform tension in order of the metal wire 395 of towing device 48 towings on stipulated the angle (position) of each straightening vanes.
It is big that the tension force of the state towing device shown in Figure 10 (A) becomes, and the tension force of towing device 48 weakens under the state shown in Figure 10 (B).
The control of above-mentioned towing device 48 can be carried out with manual mode while the shape of observing target 10 by the operator of optical fiber of the present invention with the synthesizer of porous mother metal, also can measure the diameter of target 10 automatically and control automatically as hereinafter described.
As mentioned above, can adjust the angle position of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40, carry out the adjustment of glass microparticle stream according to the size of the diameter of target 10.
Figure 14 is as the optical fiber of the present invention synthetic method of porous mother metal and the 4th embodiment of device thereof, carries out the automatic regulating device structure iron of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40.
12 outer wall forms light hole 12B in the chamber, and light hole 30B also is set on the wall of interior bell jar 30.These light holes clip target 10 configurations point-blank.
Set laser aid 50, make its laser can inject chamber 12 one side light hole 12B and the measuring diameter device is set, make its can be from the chamber light hole 12B of 12 the other side accept laser.
Connect control device 54 on the measuring diameter device 52, follow CD-ROM drive motor 56 on the control device 54, also follow vane drive mechanism 58.Vane drive mechanism 58 rotates the pivot of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40.
The laser of injecting light hole 12B on one side from laser aid 50 is subjected to blocking of target 10, and blocks relevantly with diameter, and the laser of accepting with measuring diameter device 52 changes.Thereby the signal that measuring diameter device 52 will change with the diameter of target 10 outputs to control device 54.Control device 54 decisions are with the 1st angular setting formula straightening vanes group 38 of target 10 vary in diameter and the angle of the 2nd angular setting formula straightening vanes group 40, and only the size according to this angle drives CD-ROM drive motor 56.Rotation by this CD-ROM drive motor 56 drives, and vane drive mechanism 58 is driven, and each pivot of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group is rotated, and shown in the diagram of Figure 10 (A), (B), straightening vanes is rotated.
So just may carry out the rectification of best glass microparticle stream automatically according to the vary in diameter of target 10.
Figure 15 is the variation of expression adhesion amount and the relation curve of generated time.
Curve C V1 is rectification, the usefulness method synthetic situation in the past of not carrying out the glass microparticle, and average combined coefficient is about 30%.
Compare therewith, shown in Figure 10 (B), when the external diameter of target 10 is 100mm, can obtain only glass microparticle stream, the straightening vanes position (angle) of adjusting the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40 according to this is fixed under the situation of this position, the synthetic curve C V2 that the results are shown in.When the diameter 10 of synthetic initial stage target was little, the raising of deposit efficiency and less seeing drew, and final average combined coefficient is 43%.
In contrast to this, the angle (position) of each straightening vanes of controlling the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40 according to the vary in diameter of target 10 is when only position, shown in curve C V3, between whole synthesis phase, can see the raising of combined coefficient (adhesion amount), on average be higher than 65% result.
Below with reference to Figure 16 (A), (B), (C) narration optical fiber of the present invention synthetic method of porous mother metal and the 5th embodiment of device thereof.
With above-mentioned in the identical bell jar 60 of bell jar 30 the 1st corrugated tube the 62, the 1st rectification grid 70, the 2 corrugated tubes 64 and the 3rd corrugated tube the 66, the 2nd rectification grid the 72, the 4th corrugated tube 68 are installed.
The 1st rectification grid 70 shown in Figure 16 (B), partly constitutes by being distinguished into cancellate rectification.As the air of rectification gas, by each rectification partly, help rectification by the glass microparticle of target 10 sidepieces.
The 1st rectification grid 70 and the 2nd rectification grid 72 are benchmark with the line that connects spray gun 4 and venting port 74, are moved symmetrically.
This moves, and is shortened by 62 elongations of the 1st corrugated tube, the 2nd corrugated tube 64 at Figure 16 (A), and is same, 66 elongations of the 3rd corrugated tube, and the shortening of the 4th corrugated tube is achieved.Under Figure 16 (A) diagrammatic state, the direction of the 1st rectification grid 70 is pointed to target 10 distant place behind by the side of target 10, and is identical with Fig. 8 (A) diagrammatic, the state the when diameter of expression target 10 is little.
Otherwise, the state the when diameter of the target 10 shown in the location tables diagrammatic sketch 10 (B) of the 1st rectification grid 70 shown in Figure 16 (B) and the 2nd rectification grid 72 is big.
With the structure shown in Figure 16 (A), (B), also can obtain in fact the result who comes to the same thing with reference Figure 10 (A), (B), (C) narration.
Embodiment 3
The size of the 1st rectification grid 70, shown in Figure 16 (B), the thickness D=100mm on length L=200mm, the wide W=100mm direction of insertion, the size of each grid is 20mm * 20mm, thickness 100mm.
The 1st rectification grid 70 and the 2nd rectification grid 72 have used the automated location adjustment with reference to Figure 14 narration.Vane drive mechanism 58 shown in Figure 14 has in this case adjusted the position of the 1st rectification grid 70 and the 2nd rectification grid 72.Each gap between bell jar 60 and the 1st rectification grid 70 and the 2nd rectification grid 72 prevents to flow into atmosphere from unnecessary place with heat-resisting corrugated tube 62,64,66,68 sealings.
In the synthetic initial stage, in a word, when the diameter of target 10 is little, the 1st rectification grid 70 and the 2nd rectification grid 72 are moved to spray gun 4 one sides, the grain flow that scatters facing to target diameter is pressed towards target 10.
In the synthetic later stage, adjust the position of the 1st rectification grid 70 and the 2nd rectification grid 72 automatically, on the glass microparticle stream of concentrating the behind that acts on target 10 to exert all one's strength.
At this embodiment, with reference to Figure 10 (A), (B) narration, use under the situation of the 1st angular setting formula straightening vanes group 38 and the 2nd angular setting formula straightening vanes group 40, quite thin position control is difficult.Even but such combined coefficient that also is easy to reach more than 50%.
Below with reference to Figure 17 (A), (B) narration optical fiber of the present invention synthetic method of porous mother metal and the 6th embodiment of device thereof.
With above-mentioned in the 1st corrugated tube the 82, the 1st strainer the 90, the 2nd corrugated tube 84 and the 3rd corrugated tube the 86, the 2nd strainer the 92, the 4th corrugated tube 88 are installed on the identical bell jar 80 of bell jar 30.
The 1st strainer 90 and the 2nd strainer 92 are benchmark with the line of spray gun 4 and venting port 94, are moved symmetrically.
Inflammable gas, for example hydrogen is introduced in the bell jar 80 through the 1st strainer 90 and the 2nd strainer 92.
The 1st strainer 90 and the 2nd strainer 92, the same with the 1st rectification grid 70 and the 2nd rectification grid 72, according to the vary in diameter of target 10, move their position.
This moves, and in Figure 17 (A), is shortened by 82 elongations of the 1st corrugated tube, the 2nd corrugated tube 84, and is same, and 86 elongations of the 3rd corrugated tube, the 4th corrugated tube 88 shorten to be realized.Figure 17 (A) diagrammatic state, the direction of the 1st strainer 90 is pointed to target 10 distant place behind by the side of target 10, and is identical with the diagram of Figure 10, the state the when diameter of expression target 10 is little.
Otherwise, the state when target 10 diameters shown in the location tables diagrammatic sketch 10 (B) of the 1st strainer 90 shown in Figure 17 (B) and the 2nd strainer 92 are big.
With the structure shown in Figure 17 (A), (B), also can carry out in fact with reference Figure 10 (A), (B) narration identical, to the rectification of glass microparticle.
Particularly, at embodiment from the 1st strainer 90 and the 2nd strainer 92 H
2Introduce in the bell jar 80.
In the above-described embodiments, be to suck air, as rectification gas, to use air that cheap advantage is arranged, but sintered glass mother metal surface temperature is descended, the situation that has density to become littler than target value takes place.
In this, use hydrogen, the heat that can utilize burning to take place.Thereby, can improve deposit efficiency with the method for the suction inflammable gas of present embodiment, seek optimizing, and can carry out the density adjustment.
As inflammable gas, except that hydrogen, can also use methane etc.
In the present embodiment, make with each side shown in Figure 10 (A)～Figure 10 (C) each cowling panel of 6 pieces, in 5 layers the air-flow, from the venting port number in the past the 2nd layer pass to 3m
3The atmosphere of/min, and correspondingly, add the H of 200l/min
2With this, make the surface temperature of sintered glass mother metal (tectum formation portion 8) rise to 30 ℃, mother metal meets the requirements of density, can make the sintered glass mother metal with 60% combined coefficient.
During the invention process, be not limited to the foregoing description, additive method same as the previously described embodiments and device, or all can adopt the embodiment of the foregoing description appropriate combination.
Again, above-mentioned numerical example etc. are examples, and the present invention is not the invention that is defined to these numerical value.
As mentioned above, use the present invention, can control suitably, improve the adhesive rate of sintered glass mother metal from the rectification of lance ejection to the glass microparticle of target.Because improve adhesive rate, the generated time of the porous mother metal that optical fiber is used also can shorten.
Again, use the present invention, reduced not attached on the target and the glass microparticle that is discharged from has reduced the loss of glass microparticle.
Moreover the treatment capacity of brushing and cleaning device reduces, to the contribution that lowered the price.
And, use the present invention, can improve the density of sintered glass mother metal.
Claims (14)
1. the synthesizer of the porous mother metal used of an optical fiber comprises: in flame, add the flame generating unit that water decomposition is made the unstripped gas of the porous mother metal that optical fiber uses, formed the glass microparticle, this glass granules is sprayed to target as particle flux,
Described target be a kind of its can relatively move with described flame generating unit on axially, with the axle orthogonal directions on rotatable target, it is characterized in that, further comprise,
On the position of the level crossing that constitutes at the center of the described flame that axle center, described flame generating unit with described target send, having with symmetric angle configurations provides the rectifying device that makes the residual glass microparticle that is not piled up in from described flame generating unit ejection on the aforementioned target flow to the rectification gas on aforementioned target surface.
2. the synthesizer of the porous mother metal that optical fiber as claimed in claim 1 is used, it is characterized in that, further comprise the chamber of accommodating described target, on the position of the level crossing that described rectifying device constitutes at the center of the described flame that axle center, described flame generating unit described chamber and described target send with symmetric angle configurations.
3. the synthesizer of the porous mother metal that optical fiber as claimed in claim 1 is used, it is characterized in that, further comprise the chamber, with the bell jar that is arranged on the shape in the described chamber, on the position of the level crossing that described rectifying device constitutes at the center of the described flame that described bell jar and axle described target center, the described generating unit of described flame send with symmetric angle configurations with the described glass microparticle of restriction stream.
4. use the synthesizer of porous mother metal as the optical fiber of claim 3 record, it is characterized in that, its aforementioned rectification part is adjusted rectification gas, changes aforementioned glass microparticle stream by the variation of aforementioned target diameter, and makes the glass microparticle that left behind often point to aforementioned target surface.
5. the synthesizer of the porous mother metal that optical fiber as claimed in claim 4 is used, it is characterized in that, on the outer wall relative position in described chamber, form light hole, form light hole on the corresponding position of light hole on described bell jar and the described cavity outer wall, these light holes clip described target configuration point-blank; One side in described chamber sets laser aid, makes its laser can inject chamber described light hole on one side and also can penetrate from the described light hole of the other side; The other side in described chamber is provided with the measuring diameter device of the laser of accepting the described light hole ejaculation of the other side, and this measuring diameter device is blocked the laser of variation according to what receive with described target diameter, and the signal that output changes with target diameter; The signal that changes with target diameter that one control device receives described determinator output produces the control signal of the described rectifying device of control position; By this control signal CD-ROM drive motor, drive driving mechanism again, change the position of described rectifying device.
6. use the synthesizer of porous mother metal as the optical fiber of claim 5 record, it is characterized in that its aforementioned rectification part is the rotatable straightening vanes that available rotating manner changes aforementioned rectification gas direction.
7. the optical fiber of putting down in writing as claim 5 is characterized in that with the synthesizer of porous mother metal, and its aforementioned rectification part is the blade along its slotting position changeable from bell jar of the direction of insertion of aforementioned bell jar.
8. the optical fiber of putting down in writing as claim 5 is with the synthesizer of porous mother metal, it is characterized in that, its aforementioned rectification part has the retractile parts that connect the gap between strainer and this strainer and bell jar, and this strainer position-movable is to change the direction of aforementioned rectification gas.
9. use the synthesizer of porous mother metal as the optical fiber of claim 2 record, it is characterized in that it is to make the device that is in negative pressure state in the aforementioned cavities with respect to the outside with the device that aforementioned rectification gas imports in the aforementioned cavities; And the air outside that aforementioned rectification gas is aforementioned cavities.
10. use the synthesizer of porous mother metal as the optical fiber of claim 9 record, it is characterized in that its described rectifying device makes aforementioned rectification gas contain inflammable gas.
11. one kind is carried out flame at the flame that optical fiber is produced with the flame generating unit with the unstripped gas of porous mother metal and adds water decomposition, form the glass microparticle, with this glass microparticle be microparticle stream spray to the orthogonal direction of axle on rotate, the target that is moving with respect to aforementioned flame generating unit makes it use the synthetic method of porous mother metal attached to employed optical fiber in the method for the manufacturing optical fiber on the target with the porous mother metal in the axial direction, it is characterized in that, this method is from the level crossing at the center of the rotation center that comprises aforementioned target and aforementioned microparticle stream, add rectification gas on the direction in opposite directions, make aforementioned microparticle flow to aforementioned target side flow by aforementioned target surface.
12. the optical fiber of putting down in writing as claim 11 is characterized in that with the synthetic method of porous mother metal, makes aforementioned rectification gas blow to aforementioned glass microparticle from the direction of intersecting with the aforementioned glass microparticle that is blown to aforementioned target.
13. the optical fiber of putting down in writing as claim 11 with the synthetic method of porous mother metal, is characterized in that:, change the direction of aforementioned rectification air-flow according to the size of the diameter of aforementioned target.
14. the optical fiber of putting down in writing as claim 13 is characterized in that with the synthetic method of porous mother metal, makes aforementioned rectification gas comprise inflammable gas.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP244519/93 | 1993-09-30 | ||
| JP244519/1993 | 1993-09-30 | ||
| JP24451993A JP3599362B2 (en) | 1993-09-30 | 1993-09-30 | Method and apparatus for synthesizing porous preform for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1104185A CN1104185A (en) | 1995-06-28 |
| CN1049641C true CN1049641C (en) | 2000-02-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN94116713A Expired - Fee Related CN1049641C (en) | 1993-09-30 | 1994-09-30 | Process of synthesizing porous preform for optical fiber and apparatus thereof |
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| Country | Link |
|---|---|
| JP (1) | JP3599362B2 (en) |
| CN (1) | CN1049641C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3521250B1 (en) * | 2017-01-11 | 2024-03-27 | Shin-Etsu Quartz Products Co., Ltd. | Method for producing hollow porous quartz glass base material |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85101855A (en) * | 1984-03-07 | 1987-01-17 | 住友电气工业株式会社 | The production method of highly pure glass preform for optical fiber |
| CN85101869A (en) * | 1984-03-01 | 1987-01-24 | 住友电气工业株式会社 | The manufacture method of glass preform for optical fiber |
| EP0539198A1 (en) * | 1991-10-25 | 1993-04-28 | The Furukawa Electric Co., Ltd. | Process and apparatus for production of optical fiber preform |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155538A (en) * | 1984-01-26 | 1985-08-15 | Furukawa Electric Co Ltd:The | Production of porous preform for optical use |
| JPS6297138U (en) * | 1985-12-09 | 1987-06-20 | ||
| JPH02164735A (en) * | 1988-12-20 | 1990-06-25 | Furukawa Electric Co Ltd:The | Quartz glass soot production device |
| JPH0322028U (en) * | 1989-07-10 | 1991-03-06 | ||
| JPH04193730A (en) * | 1990-11-26 | 1992-07-13 | Fujikura Ltd | Production of base material for optical fiber and hood for oxyhydrogen burner |
| JPH04275937A (en) * | 1991-03-01 | 1992-10-01 | Fujikura Ltd | Production of optical fiber preform |
-
1993
- 1993-09-30 JP JP24451993A patent/JP3599362B2/en not_active Expired - Lifetime
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1994
- 1994-09-30 CN CN94116713A patent/CN1049641C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85101869A (en) * | 1984-03-01 | 1987-01-24 | 住友电气工业株式会社 | The manufacture method of glass preform for optical fiber |
| CN85101855A (en) * | 1984-03-07 | 1987-01-17 | 住友电气工业株式会社 | The production method of highly pure glass preform for optical fiber |
| EP0539198A1 (en) * | 1991-10-25 | 1993-04-28 | The Furukawa Electric Co., Ltd. | Process and apparatus for production of optical fiber preform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3599362B2 (en) | 2004-12-08 |
| JPH07101744A (en) | 1995-04-18 |
| CN1104185A (en) | 1995-06-28 |
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