CN104953892B - A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch - Google Patents
A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch Download PDFInfo
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- CN104953892B CN104953892B CN201410115929.9A CN201410115929A CN104953892B CN 104953892 B CN104953892 B CN 104953892B CN 201410115929 A CN201410115929 A CN 201410115929A CN 104953892 B CN104953892 B CN 104953892B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 120
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- 230000007246 mechanism Effects 0.000 claims description 99
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Abstract
The invention discloses a kind of variable high precision closed loop micro-displacement driving device of step distance for carrying displacement sensing function, belong to field of electromechanical integration.The fixed length stepping of the distance variable of closed loop can be carried out, so as to reach the purpose of repetition high accuracy positioning, the big Stroke Displacement Transducer without costliness, it is possible to realize big stroke precise motion.With simple in construction, small volume, positioning and repetitive positioning accuracy are high, and displacement resolution is high, and fast response time, control characteristic is good, and energy consumption is low, noiseless, low cost and other advantages.
Description
Technical field
The present invention is both a kind of variable high precision closed loop Micro-displacement Driving dress of step distance for carrying displacement sensing function
Put, while be a kind of high accuracy displacement sensor measured in a stepwise manner again.The present invention
It is related to field of electromechanical integration and sensing measurement and control area, a kind of high precision closed loop straight line or twist motion machine can be used as
The driver of structure, but also as the sensing device of high precision position shift measurement.It can be applied to Ultra-precision Turning, precision engineering, microcomputer
Electric system（MEMS）, micro-robot, semiconductor manufacturing is biomedical, Aero-Space, laser high-speed sintering processing, high-resolution
The scientific domain manufacture field such as rate laser projection, and consumer electronics field.
Background technology
With the continuous development of modern science and technology, research of the mankind to microscopic fields is more and more deeper.Especially in ultraprecise
Processing, MEMS（MEMS）, the field such as micro-robot, to precision positioning, the requirement more and more higher of micro-displacement, tradition
Drive device, such as common electric machine, feed screw nut, macroscopical large scale drive device such as worm and gear can not meet its precision
It is required that compared to the device drive such as traditional drives, piezoelectricity, magnetostriction device because small volume, displacement resolution is high, rings
Answer speed fast, control characteristic is good, and energy consumption is low, the advantages that noiseless, is more and more applied to precision engineering, micro electronmechanical
System（MEMS）, the field such as micro-robot.With the development of the laser sintered manufacturing technology of new generation for representative, as laser
The high-precision positioning function of galvanometer and response time, it has also become an important technical bottleneck, traditional galvanometer mode can not carry
For high-resolution Angle Position, the drastic delimitations processing dimension and machining accuracy of laser sintering technology.Simultaneously with laser electricity
Depending on the development with Color Laser Projection Technology, laser in place conventional light source realizes high brightness, high reliability, and cost simple in construction is low
The features such as.But can the anaclasis galvanometer that an important limiting factors are exactly laser projection provide high-precision sprocket bit
Put, if high-precision position location and high response speed can be provided, the resolution ratio of laser projection and laser television technology and
The scope of application can then greatly promote.Current traditional drives often bring that physical dimension deviation is big, and not only precision is low, back and forth
The features such as motion positions precision is low, and stroke is small.Some are also deposited using the drive device of the Micro-displacement Techniques such as piezoelectricity and magnetostriction
Separated in driver and sensor, driver stroke is limited, and the displacement transducer of wide range is expensive, complicated integral structure
The defects of.The serious development that govern microtechnic field, and the utilization in precision engineering field.
The content of the invention
The variable high precision closed loop microbit of displacement sensing function step distance is carried it is an object of the invention to provide a kind of
Drive device is moved, while is also a kind of high accuracy displacement sensor measured in a stepwise manner.Solve current micro-displacement to drive
Dynamic device physical dimension is big, and complicated, delivery stroke is small, and positioning precision and repetitive positioning accuracy are low, driver during closed-loop control
Separated with sensor, the problems such as big Stroke Displacement Transducer is expensive.The present invention is declined using two groups or more stepping
Displacement drive mechanism unit, two groups or more stepping micro-displacement driving mechanism is consistent upwards in kinematic axis, and position
It is parallel.The displacement transducer of small stroke and high precision is installed on the crossbeam position of every group of mechanism unit, and two groups or two groups with
Upper step-by-step movement micro-displacement driving mechanism unit installs moved end and the static side of displacement transducer respectively.Two groups or more step-by-step movement
Micro-displacement driving mechanism chronologically drives successively respectively, the position data this moment of first tape deck, then drives one group therein
Mechanism unit is axially moved, and sensing data changes, then drives another group of micro-displacement mechanism unit to move in the same direction, make biography
Sensor data convert.The fixed length stepping of the distance variable of a closed loop is so just completed, so as to reach the high-precision of closed loop
Degree positioning, realizes big stroke motion, but without expensive big Stroke Displacement Transducer.As a kind of height measured in a stepwise manner
During Accuracy Displacement sensor, compared to other step-wise displacement sensors, the present invention has the property of resolution changable, for measuring
Journey, can quickly it be determined with big step distance, to using small step distance more accurate measurement when closing to an end instead, so as to
Both measurement accuracy is ensure that, improves measuring speed again.
Exemplified by using two groups of step-by-step movement drive mechanism units, above-mentioned purpose of the invention is by the following technical programs
Realize：
Drive device is divided into two mechanism units up and down, and two mechanism units all drive for traditional bidirectional-movement step piezoelectric
Dynamic device, i.e., using the hoop position piezoelectric stack of left and right two, the stroke piezoelectric stack of left and right two.Position piezoelectric stack is bound round perpendicular to guide rail,
And stroke piezoelectric stack is parallel to guide rail.For tight latch mechanism with minimum gap between guide rail be present, its gap is available for mechanism unit
On guide rail slidably, but no more than the stroke of hoop position piezoelectric stack, mounting ferrule position piezoelectric stack, makes it in tight latch mechanism
Can the free movement of controlling organization unit or locked and fixed are on guide rail as needed, and stroke piezoelectric stack then needs pretension
Installed in the crossbeam both ends of mechanism.Liang Zu mechanisms move on guide rail to be axially consistent, and position is parallel, and keeps a spacing
From.It is axially consistent with two mechanisms apart from the interior high-precision small-range displacement transducer of installation, its installation site at this.In upper machine
The moved end of structure fixed displacement sensor or static side, other end is fixed in lower mechanism.Upper and lower mechanism uses thin shelf flexible hinge
It is driven, existing certain intensity, motility can be kept again.Wherein displacement transducer can use LVDT formulas, condenser type,
The various kinds of sensors such as raster pattern, and have extremely strong adaptability for the less displacement transducer in the range of linearity, while avoid making
With the sensors of large measurement range of costliness.
Its course of work is briefly described as that electricity on the piezoelectric stacks of position all will be bound round in an initial condition, by upper mechanism unit
It is separately fixed at lower mechanism unit on guide rail, then records the numerical value of displacement transducer, and is set to origin.Motion starts
When first will be electric under the hoop position piezoelectric stack of one end, allow the retaining mechanism at this end and guide rail to unclamp, then give other end stroke pressure
Electricity stacks certain voltage, produces displacement.This causes the displacement transducer numerical value for being fixed on mechanism to change, and this numerical value is then
The step distance of driver, can voluntarily it be determined according to voltage-regulation.Then by electricity, locking on the hoop position piezoelectric stack of lower electricity
Mechanism is relocked on guide rail.Then will be electric under the hoop position piezoelectric stack of opposite direction, allow retaining mechanism to be separated with guide rail, so
Afterwards will be electric under the stroke piezoelectric stack having already powered on for causing to move just now, so upper mechanism will move to locked direction, so
Make retaining mechanism again locked with guide rail electricity on the hoop position piezoelectric stack of lower electricity just now again afterwards.So, upper mechanism then it is overall to
One direction moves a step distance.Then lower mechanism is moved in the same way, and Shi Xia mechanisms transport to same direction
Move the same step distance, you can complete a step motion of drive device.At the same time drive device restPoses,
So as to step motion next time, and need then only to need inverted repeat said process to another lateral movement.
When as displacement transducer, general operation mode is same as mentioned above, as long as the number of record stepping,
Each step-length is multiplied by, can be to draw the numerical value of measurement.
Detailed execution sequence can refer to the embodiment of embodiment.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, forms the part of the application, this hair
Bright illustrative example and its illustrate to be used to explain the present invention, do not form inappropriate limitation of the present invention.
Fig. 1 is the overall structure diagram of the present invention.
In figure：1. guide rail, the left hoop position piezoelectric stack of mechanism on 2., the 3. upper mechanism lists being driven using thin shelf flexible hinges
Member, the left lateral journey piezoelectric stack of mechanism on 4., 5. displacement transducers are in the installation position of lower mechanism, and 6, displacement transducer, 7. displacements
The right lateral journey piezoelectric stack of sensor mechanism on the installation position of upper mechanism, 8., the right hoop position piezoelectric stack of mechanism on 9., 10,
The right retaining mechanism of upper mechanism, the right hoop position piezoelectric stack of 11. times mechanisms, the right retaining mechanism of 12. times mechanisms, 13. times mechanisms
Right lateral journey piezoelectric stack, the left lateral journey piezoelectric stack of 14. times mechanisms, 15. using thin shelf flexible hinges be driven lower mechanism lists
Member, retaining mechanism makees in 16. times mechanisms, the left piezoelectric stack of 17. times mechanisms, the left retaining mechanism of mechanism on 18..Machine on 19.
The displacement transducer alignment error alignment regulation piezoelectric stack of structure, the displacement transducer alignment error alignment of 20. times mechanisms
Adjust piezoelectric stack.
Embodiment
Face further illustrates the detailed content and embodiment of the present invention with reference to accompanying drawing.
During using two groups of step-by-step movement drive mechanism units as displacement driver：
Position piezoelectric stack will be bound round in an initial condition（2）（9）（17）（11）Upper electricity, by upper mechanism（3）With lower mechanism（15）
It is fixed on guide rail（1）On, then record displacement transducer（6）Numerical value, and be set to origin.Motion will first bind round position when starting
Piezoelectric stack（9）Lower electricity, retaining mechanism（10）And guide rail（1）Unclamp, then give stroke piezoelectric stack（4）Certain voltage, production
Raw displacement.This to be fixed on mechanism（3）Displacement transducer（6）Numerical value changes, and this numerical value is then the step of driver
Enter distance, can voluntarily be determined according to voltage-regulation.Then position piezoelectric stack will be bound round（9）Upper electricity, retaining mechanism（10）By upper mechanism
（3）It is locked in guide rail（1）On, it will then bind round position piezoelectric stack（2）Lower electricity, allows retaining mechanism（18）With guide rail（1）Separate, then
By stroke piezoelectric stack（4）Lower electricity, then position piezoelectric stack will be bound round（2）Upper electricity, allows retaining mechanism（18）With guide rail（1）It is locked.This
Sample, upper mechanism（3）It is then overall to move a step distance to a direction.Then lower mechanism is moved in the same way
（15）, will first bind round position piezoelectric stack（11）Lower electricity, allows retaining mechanism（12）With guide rail（1）Unclamp, then by stroke piezoelectric stack
（14）Appropriate voltage is given, allows displacement transducer（6）Reading come back to initial reading, then will bind round position piezoelectric stack（11）
Upper electricity, by locking mechanism（12）With guide rail（1）Locking, it will then bind round position piezoelectric stack（17）Lower electricity, allows locking mechanism（16）With
Guide rail（1）Unclamp, then by stroke piezoelectric stack（14）Lower electricity, position piezoelectric stack will be finally bound round again（17）Upper electricity, by the machine of locking
Structure（16）Relock in guide rail（1）On, then the overall one customized distance to direction stepping of whole mechanism.
Counter motion is following process.
Normal condition hoop position piezoelectric stack（2）（9）（17）（11）For power-up state, by upper mechanism（3）With lower mechanism（15）
It is fixed on guide rail（1）On, then record displacement transducer（6）Numerical value, and be set to origin.Motion will first bind round position when starting
Piezoelectric stack（2）Lower electricity, retaining mechanism（18）And guide rail（1）Unclamp, then give stroke piezoelectric stack（8）Certain voltage, production
Raw displacement.This to be fixed on mechanism（3）Displacement transducer（6）Numerical value changes, and this numerical value is then the step of driver
Enter distance, can voluntarily be determined according to voltage-regulation.Then position piezoelectric stack will be bound round（2）Upper electricity, retaining mechanism（18）By upper mechanism
（3）It is locked in guide rail（1）On, it will then bind round position piezoelectric stack（9）Lower electricity, allows retaining mechanism（10）With guide rail（1）Separate, then
By stroke piezoelectric stack（8）Lower electricity, then position piezoelectric stack will be bound round（9）Upper electricity, allows retaining mechanism（10）With guide rail（1）It is locked.This
Sample, upper mechanism（3）It is then overall to move a step distance to a direction.Then lower mechanism is moved in the same way
（15）, will first bind round position piezoelectric stack（17）Lower electricity, allows retaining mechanism（16）With guide rail（1）Unclamp, then by stroke piezoelectric stack
（13）Appropriate voltage is given, allows displacement transducer（6）Reading come back to initial reading, then will bind round position piezoelectric stack（17）
Upper electricity, by locking mechanism（16）With guide rail（1）Locking, it will then bind round position piezoelectric stack（11）Lower electricity, allows locking mechanism（12）With
Guide rail（1）Unclamp, then by stroke piezoelectric stack（13）Lower electricity, position piezoelectric stack will be finally bound round again（11）Upper electricity, by the machine of locking
Structure（12）Relock in guide rail（1）On, then the overall one customized distance to another direction stepping of whole mechanism.
During as displacement transducer, the mode of operation of measurement is same as mentioned above, as long as the number of record stepping, is multiplied by
Each step-length, can be to draw the numerical value of measurement.
Preferred embodiment of the present invention is the foregoing is only, is not intended to limit the invention, for those skilled in the art, sheet
Invention can have various modifications and variations.Within the spirit and principles of the invention, any modification made, equivalent substitution,
Improve etc., it should be included in the scope of the protection.
Claims (11)
- A kind of 1. closed loop micro-displacement step drive device variable with displacement sensing function step pitch, it is characterised in that：Including two groups Or it is more than two, with the micro-displacement stepping mechanism unit that can carry out bidirectional-movement that can carry out microspur motor element, two Group or bidirectional-movement micro-displacement stepping mechanism unit more than two are with axially mounted, two groups or more the two-way fortune of same motion Certain space be present between dynamic micro-displacement stepping mechanism unit, for installing displacement transducer, and the moved end of displacement transducer It is separately mounted to static side on two groups or more bidirectional-movement micro-displacement stepping mechanism unit, the sensing shaft of displacement transducer It is axially consistent to the motion with two groups or more bidirectional-movement micro-displacement stepping mechanism unit, during operation two groups or two groups with Upper bidirectional-movement micro-displacement stepping mechanism unit carries out stepper drive according to certain sequence of movement during exercise.
- 2. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Described two groups or more, being capable of bidirectional-movement micro-displacement stepping with the element that can carry out microspur motion Mechanism unit, the element for referring to that microspur motion can be carried out carry out displacement transmission as executive component with thin shelf flexible hinge Mechanism unit.
- 3. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：The described element that can carry out microspur motion, is piezoelectric stack, magnetostrictive device, and other have it is controllable The material of micro-displacement feature processed or other mechanical structures with controllable micro-displacement feature, the position for device is consolidated It is fixed, the travel displacement of device, the alignment regulation of displacement transducer alignment error.
- 4. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Certain space be present between two groups or more described mechanism unit, refer to two groups or more mechanism The space that unit any direction is formed.
- 5. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Described displacement transducer is laser displacement sensor, capacitive displacement transducer, optical fiber type displacement transducer, light Grating displacement transducer, displacement sensor of variable capacitor, inductive frequency displacement transducer, inductance differential transformer type displacement sensing Device, and other can produce the sensing equipment that then change of physics gauge according to displacement state.
- 6. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Described and displacement transducer moved end and static side are separately mounted to two groups or more bidirectional-movement microbit walk Enter on mechanism unit, refer to the moving part and fixed part of displacement transducer, be connected to two groups of micro-displacement stepping mechanisms On unit, any number of displacement transducer can be installed on two groups of bidirectional-movement micro-displacement stepping mechanism units, and can be Pacify on any two groups of bidirectional-movements micro-displacement stepping mechanism unit in bidirectional-movement micro-displacement stepping mechanism unit more than two Fill displacement transducer.
- 7. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Sensing axial direction and two groups or more bidirectional-movement micro-displacement stepping mechanism unit of described displacement transducer Motion is axially consistent, refers to motion axial direction and the displacement sensing of two groups or more bidirectional-movement micro-displacement stepping mechanism unit Direction when device can correctly detect displacement is consistent.
- 8. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：Two groups or more bidirectional-movement micro-displacement stepping mechanism unit is during exercise according to certain during described operation Sequence of movement carries out stepper drive, refers to two groups or more bidirectional-movement micro-displacement stepping mechanism unit during exercise with list Individual bidirectional-movement micro-displacement stepping mechanism unit is motor unit, the sequencing of motion be present, and is that motion is in the same direction.
- 9. the closed loop micro-displacement step drive device variable with displacement sensing function step pitch according to claim 1, it is special Sign is：It is adjustable that the described present apparatus is also used as a kind of step-by-step movement resolution ratio in addition to as micro-displacement step drive device High accuracy displacement sensor uses, and refers to the present apparatus except offer is with the variable closed loop micro-displacement stepping drive of displacement sensing function step pitch Outside dynamic function, measurement ohject displacement state is also provided, measures the function of object length.
- 10. a kind of micro-nano motion and detection machine, possess the band displacement sensing function that any one of claim 1~9 is recorded The variable closed loop micro-displacement step drive device of step pitch.
- 11. a kind of adjustable high accuracy displacement sensor of step-by-step movement resolution ratio, possesses the band that any one of claim 1 ~ 9 is recorded The variable closed loop micro-displacement step drive device of displacement sensing function step pitch.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410115929.9A CN104953892B (en) | 2014-03-26 | 2014-03-26 | A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch |
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| CN201410115929.9A CN104953892B (en) | 2014-03-26 | 2014-03-26 | A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch |
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| CN109751949B (en) * | 2019-01-10 | 2020-12-18 | 中国石油化工股份有限公司 | High-precision linear displacement measuring device for actuating mechanism and adjusting measuring method |
| CN113332109B (en) * | 2021-06-16 | 2023-03-10 | 温振杰 | Recovered device of taking exercise of orthopedics of angularly adjustable |
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| CN1474504A (en) * | 2003-07-16 | 2004-02-11 | 沈阳工业大学 | Magnetic control shape memery alloy crawling type linea motor |
| CN2692626Y (en) * | 2004-03-30 | 2005-04-13 | 宝鸡市渭滨区金陵小学 | Rolling distometer |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
| CN102291041A (en) * | 2011-08-25 | 2011-12-21 | 苏州海兹思纳米科技有限公司 | Nano motor based on inchworm motion |
| CN203148413U (en) * | 2013-04-06 | 2013-08-21 | 蔡心雨 | Single-person operation gauge for straight length measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6285681A (en) * | 1985-10-07 | 1987-04-20 | Nec Corp | Piezoelectric drive mechanism |
| JPH04140073A (en) * | 1990-09-28 | 1992-05-14 | Toshiba Corp | Micro movement driver |
| JP2006288165A (en) * | 2005-04-05 | 2006-10-19 | Yaskawa Electric Corp | Inchworm actuator and method for computing its position |
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- 2014-03-26 CN CN201410115929.9A patent/CN104953892B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1474504A (en) * | 2003-07-16 | 2004-02-11 | 沈阳工业大学 | Magnetic control shape memery alloy crawling type linea motor |
| CN2692626Y (en) * | 2004-03-30 | 2005-04-13 | 宝鸡市渭滨区金陵小学 | Rolling distometer |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
| CN102291041A (en) * | 2011-08-25 | 2011-12-21 | 苏州海兹思纳米科技有限公司 | Nano motor based on inchworm motion |
| CN203148413U (en) * | 2013-04-06 | 2013-08-21 | 蔡心雨 | Single-person operation gauge for straight length measurement |
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