CN1049510C

CN1049510C - Method for producing heatable and refrigerable element for system handling small quantities of liquid, and element manufactured by method

Info

Publication number: CN1049510C
Application number: CN90104136A
Authority: CN
Inventors: 尼以洛·卡丁伦
Original assignee: Individual
Current assignee: Individual
Priority date: 1990-06-02
Filing date: 1990-06-02
Publication date: 2000-02-16
Anticipated expiration: 2005-06-02
Also published as: CN1057104A

Abstract

The present invention relates to a method for manufacturing elements which can be heated and refrigerated for a system in which a little amount of liquid can be used and the elements manufactured by the method. Each element is provided with a flow channel and a liquid space communicated with the flow channel, and the element is also connected with a refrigerator and a heater according to the functions of the element in a proper position. In the method, each element is manufactured by using a removable mould which serves as a deposition substrate to deposit one or more metallic materials so as to make the deposited metal form the shell of the element, removing the mould by dissolving or smelting, and connecting the shell to a refrigerator and a heater. The present invention is characterized in that the thermal conductivity of the connecting part of the shell and the heating and refrigerating element is higher than the that of the other parts of the shell.

Description

But handle heating and the element and the manufacture method thereof of refrigeration of small amount of liquid

The present invention relates to be suitable for controlling heating and the manufacture method of cooling element and the element made from the method for small amount of liquid system, described element is provided with some runners and at least one fluid space that is communicated with described runner, and is connected with a well heater with a refrigerator by function at some positions.

Finland's publication instructions 57850 has proposed a kind of device and technological procedure that is suitable for controlling small amount of liquid, operate according to this and be in one and comprise the space that is used to control or handle this liquid or the intrasystem liquid of chamber and some runners that are communicated with them, each runner is provided with a valve of closing by freezing at least.Each valve is connected in a refrigerator of running continuously, and is provided with independent electrical heating elements, and when heating element was worked, it made the temperature of valve remain on the freezing point that is higher than this liquid, thereby valve is cleared the way like this; And when heating element was not worked, it made liquid freezing in valve, thereby valve cuts out.The operation of liquid in this system like this based on by means of pressure differential liquid being moved to another space from a space, is that the heating element by electrically-controlled valve reaches.The device of being introduced in this instructions mainly is as an automatic analyzer, and wherein the operation of liquid automatically controlled based on pressure differential between two spaces and heating element uniquely do not adopted movable mechanical part.

According to the publication instructions 57850 of Finland, formation one valve forms between opposed surface facing to placing each other thereby the refrigeration valve is in this manner two block of material.One in this two block of material comprises the runner that leads to valve, and another piece that is connected in refrigerator is provided with the heating element that is loaded on the valve district and is used for open and close valve.For the heating and the cooling of variable valve, the valve district is provided with insulator, and the valve of some and row arrangement reaches heat insulation mutually by means of the liquid in the gap between valve body spare surface is freezing.

Finland's publication instructions 70331 has proposed a kind of improved solution of the principle based on above-mentioned formation valve, the principal feature of this solution is that this valve is to form by at least one surface in described opposed cutout being set, and the counter surface of these pieces is coated with the skim chemical inert material, as the coating and the insulator of heating element.In this solution, these valves also can be provided with the inertia circuit flowing element that is loaded in the described cutout, enter the liquid stream of valve to allow insantaneous break.According to the disclosure instructions, this inert material comprises the fluoropolymer such as teflon in first space, is a kind of possible substituent though mention noble metal.According to the principle of practicality, now adopted fluoropolymer.

Have found that the solution that proposes in Finland's publication instructions 70331 has its shortcoming, As time goes on, the polymeric layer that penetration by water is thin causes below this layer in standing freezing zone icing.In practice, because valve is by alternately heating and freezing, dissolving and freezing to have increased thermal load again of outer ice causes the slow and out of true of valve running.Be better than greatly constituting the fact of polymkeric substance of valve surface from the heat conduction of ice, also obtain similar effects.Therefore, when valve was closed, the deposition process of ice chocking limit layer was slowly.

In addition, the valve arrangement that is proposed by Finland's publication instructions 70331 also has other shortcoming, does not relate to as the material that forms the valve body coating of valve betwixt.One in these shortcomings is the structure heaviness, comprises big hot body and low heating and freezing capacity.Another shortcoming is the geometric configuration of valve and runner, and this is due to the fact that and causes: the valve body of limiting valve must take out from mold at this technology medium casting subsequently by being cast into mould manufacturing.As a result, light rib wedge angle appears in the runner of valve, because surface tension, they have preserved some liquid, the obstacle that this has constituted the cleaning runner and has made the very fast exsiccation of runner.This defective can cause ingredients sum of errors contaminated liquid.

The objective of the invention is to start the new technology that a kind of manufacturing comprises the element in some runners and one or more space that holds certain liquid or chamber, thereby eliminate and the previous relevant above-mentioned shortcoming of known technology.Method of the present invention, its characteristics are that described element is by adopting the mould that takes out as deposition substrate, deposit one or more metal materials with this sample loading mode, make and be deposited the shell that metal forms this element, take out mould, on described position, shell and a refrigerator and series of steps such as a well heater is connected are made, this product is done in such a way that at element shell and is connected to the coefficient of heat conductivity that the structure coefficient of heat conductivity that is obtained on some positions of a refrigeratory and a well heater significantly surpasses the shell district at contiguous described position.

Adopt method of the present invention can make a kind of hardware with minimum hot body and seal casinghousing.These characteristics allowable temperatures can accurately and promptly be aligned.Definition shows, comprise that element and the structure coefficient of heat conductivity that is connected bridge that is connected in heating and/or chiller at connecting portion obviously surpass the coefficient of heat conductivity in the shell district of contiguous described position device, in fact, since the hot-fluid that passes through described position that causes of the temperature difference preferably at least 5 times to hot-fluid by adjacent domain, and, even can reach 10 times or higher according to concrete condition.Between position that is connected in a refrigerator and a well heater and contiguous shell district, formed a kind of steep thermograde in other words.

A principal advantages of solution of the present invention is, the mould that is used to make element can be shaped at an easy rate according to desirable runner and fluid space shape.Therefore, can avoid undesirable cusped edge wedge angle.In addition, after metal deposition and mould taking-up, its runner can be rinsed and can guarantee with the element that hair-dryer dries up rapidly the ingredients error can not occur.

As what the present invention introduced,, can in this element, form the refrigeration valve by on relevant position, making fully narrow runner and this position is connected with a well heater and consistent refrigeratory along a direction at least.Except or replace this point, this element can be provided with some fluid spaces, they are connected in a well heater and a refrigerator directly or indirectly, so that the liquid in this space can carry out rapidly and the precise dose levelling.In liquid analysis device, these spaces are used as the purpose of mixing and being incubated.As an example of the application possibility of solution of the present invention is DNA method in the gene technology that is proposed by U.S.'s publication instructions 4,683,202, and the insulation that is included in the fluid sample in the rapid transformation temperature is to obtain certain reaction.According to this prospectus, these samples are to handle in the derby of a heaviness, and from reacting the angle of reliably finishing, wherein variation of temperature seems too slow.Employing can be avoided this shortcoming by the element that the present invention makes.In addition, the present invention can make the liquid handling process automation, thereby has avoided some pollution problems relevant with the artificial treatment method.

The deposition of metal can be finished by the electrical forming method, and wherein mould is arranged to as a negative electrode in comprising metal ion solution.On mould, deposit layer of metal, and when needed, this one deck can be used as the substrate of the other sedimentary deposit of identical or different metal.

Can be used for that another deposition technique comprises the autocatalysis electronation in the technology of the present invention, wherein metal mold is immersed in the solution of compound of a kind of metal that will be deposited that comprises described slaine for example and reductive agent.May require the chemical reaction of heated solution can make the layer metal deposition that is reduced on mould.Another technology that may be utilized is very similar chemical vapour reduction, but adopts the nascent metal organic compound that reduces in gas phase and be deposited on mould.

For another substitution technique of finishing this deposition is a (cathode) sputtering, wherein a slice metal material and a metal mold are positioned in the vacuum chamber, 1 kilovolt or higher voltage are added between described sheet metal and the mould.This voltage will make metallic ionization and it will be attracted on the mould, so just form a metal level.The special advantage of this method is that it is used to deposit any metal or alloy that may require.

The method of another replacement that is suitable for depositing is the gasification of the metal material in the chamber of placing mould.This metal will be deposited on the whole accessible surface in this chamber that comprises mold surface.In ion applied, gasification and above-mentioned (cathode) sputtering combined, and by means of this method, can obtain a kind of express deposition process.

In the method for the invention, the shell of element can be made by the two-stage, in the phase one, the ground floor metal is deposited on the whole surface of mould, then another layer metal is deposited on the first metal layer that will be connected on the ad-hoc location of heating and chiller.After first depositional phase, the zone outside those positions can be capped the protective seam that one deck for example paints, to prevent that metal is deposited on these zones in next stage.

For being suitable for continuous depositional stage, preferably select two kinds of metals for use with different coefficient of heat conductivity.In the phase one, deposition one deck has the metal of low thermal conductivity.This metal can be a nickel or such as certain nickel-containing alloys of the nickel cobalt (alloy) that contains a small amount of percent cobalt composition for example, or certain amorphous alloy of forming by nickel, cobalt and manganese, these alloys are compared with other metal has low coefficient of heat conductivity, therefore is particularly suitable for application scenario of the present invention.Yet, there is other metal, for example simple cobalt, iron, chromium and noble metal, they can be applied to for first depositional phase.In subordinate phase, adopt a kind of metal with high thermal conductivity.Certainly, pure red copper is best selection, though for example silver also may be utilized.

The metal layer thickness of for example nickel alloy that deposits in the phase one preferably is in the 10-100 micrometer range, and in subordinate phase, deposit, preferably the metal layer thickness of red copper is the 10-500 micron.In order to obtain desirable different coefficient of heat conductivity or heat flux, the metal level that is deposited in subordinate phase must be thick than the metal level that is deposited in the phase one at large.This more needs when particularly adopting identical metal in two depositional phases.In this case, what obtained is a kind of element of basic homogeneous, and its performance only depends on the different-thickness at the housing of different parts.

Because element housings is made, therefore in two stages, might adopt same deposition technique, for example the electrical forming technology in two stages.Yet, also might in the different stages, adopt different technology, as adopting the electrical forming technology, the deposition of second metal level is adopted the (cathode) sputtering technology for the deposition of the first metal layer.For related hereinbefore different technologies; unique restriction is that gasification is unsuitable for subordinate phase; because the more impossible metal deposition that makes only limits to specific non-protection position; in all other the technology that comprises that ion applies, protective finish works by preventing to deposit on coated side.

For mould can be taken out in metal deposition layer, mould can be made by the soluble substance such as aluminium.Aluminium is applicable to all different deposition techniques of having narrated.In the case, the solvent that is used to discharge mould can be for example a kind of strong and hot aqueous slkali.If mould is partly or entirely hollow, it can more promptly dissolve, and solvent can pass through it like this.

Another kind of scheme is that mould can be made with the enough low metal of fusing point, so that by fusing energy mould is discharged in betal can.This material comprises some metal alloy, and for example fusing point is in tin, some alloys bismuth and aluminium in 69～200 ℃ of scopes, and wax and plastics.Yet by some moulds that the latter makes, (except using vapor deposition) must metallizing before they are as the substrate of metal deposition.

In some cases, even might adopt the mould of being made up of several parts, behind depositional stage, they can be pulled out respectively and be reused in betal can.The difference of these technology and traditional metal pattern casting process is that this mould is to be made by separable several parts, it can be taken out.

In order at desirable position element shell to be connected with refrigerator, method of the present invention has adopted a kind of rod or tabular bridge of being made by for example red copper material with thermal conductive resin.A kind of basic consideration is that bridge has little quality, so it can be worked fast enough.The heating of housing can be by providing the heating resistor of suitable insulation to realize to the bridge that connects refrigerator and housing.One works as energized, and the heating effect of resistance has been eliminated the cooling effect of refrigerator effectively.In a kind of preferential structure, this bridge can comprise for example two layers of red copper, folder one deck plastic insulating layer between them, and resistance wire is loaded in the plastic layer.

Another kind method is that the available radiation of the heating of element housings is carried out.Can adopt the radiation automatically controlled radiation source of laser light beam for example that is loaded on the outer suitable position of housing.

The bridge of Connection Element housing and refrigerator can be connected in housing by such method: electrolytic deposition one deck fusible metal on housing, and for example indium melts this layer metal then, thus this metal material just can make bridge end and housing fuse together.In order to melt this layer metal, can utilize stove, but another kind of method is to utilize the resistor that is loaded in the bridge, it is connected to power supply network, and allows electric current pass through, till the heat that is produced makes material melts.When fusing, this material at first is paved into uniform one deck, and the osculatory between Xiang Qiaoduan and housing shrinks, and forms an annular boss, when solidified, bridge and housing is combined effectively.

For making the technological process in the element can be monitored, utilize and bridge identical technology in being connected the situation of refrigerator and housing, the temperature sensor that will have low specified temp is connected on the element shell on demand.By means of the indium or a kind of similar fusible material that are deposited on the housing, can be with these sensors and housing fusion, preferably while and described bridge fusion.Temperature sensor can provide the motion about liquid in the system continuously, the temperature variation of liquid or gas and the control information of freezing and dissolving of liquid in belonging to the valve of this system.

As mentioned above, can be designed like this by the element of method manufacturing of the present invention: but it has one or more the heating and cooling space, narrow at least in one direction as to be enough to make these zones to be used as the valve that can block cavity by freezing at this place runner.These may be so-called high-level efficiency valves, and they can block the fluid passage of this valve of flowing through, and perhaps they may be some conventional valves, and their size is by selected like this: their refrigeration output is enough to make the inactive liquid in the valve to freeze.Especially, can make the high-level efficiency valve of high-quality by adopting the rod mould, this rod mould has the shape corresponding to the flow channel shape that will form, and flatten in such a way: at layer metal deposition and after taking out mould, the result obtains metal mold, wherein in the zone that mould flattens, the passage in it is the narrow groove of a formation valve.Direction that the rod mould flattens and corresponding narrow groove vertically preferably are in about 20～60 ° angle with respect to mould, and runner is formed by it.Such skewed slot, it in addition can oriented its endpiece flexible form, stop flow of liquid to have biggest advantage with regard to power through valve.

The invention still further relates to the said method manufacturing and design be applied to control the element of the system of small amount of liquid, it comprises some runners and at least one fluid space that is communicated with them, and described element is connected in a refrigerator and a well heater at many positions by function.The feature of element of the present invention is that it comprises one group of runner and one or more fluid space by the bulk metal shell sealing with basic hollow parts, and described housing is connected in a refrigerator and a well heater on many positions; Described position is to form like this together with the joint with refrigerator and well heater, significantly surpasses the coefficient of heat conductivity in contiguous shell district at the structure coefficient of heat conductivity at these positions.

According to element of the present invention, according to its simple form, can include only a fluid space and be connected in the runner in this space with two or more, each runner is provided with a valve that is formed by a certain position in the cavity that is connected in a refrigerator and a well heater at least.Therefore, these valves can make the liquid of a certain quantity by this fluid space, and are closed in therebetween by freezing these valves.Yet for ease of making bigger liquid control system, an element preferably comprises relatively large fluid space and/or runner and valve, depends on the needs of this system.

Element of the present invention can comprise one or more above-mentioned high-level efficiency type valves that can stop liquid stream expeditiously, and except these high-level efficiency valves, or replace these high-level efficiency valves, also can comprise also mention above one or more can the static freezing valve in the common valve of liquid, and except or replace these valves, can comprise also that one or more liquid therein are not frozen but still be connected in the space or the chamber of a refrigerator, and have at least one well heater, so that can make the fluid temperature in this space adjusted.In the analyser of control small amount of liquid, such space can need fast and accurate fluid temperature and change there as mixing or moist closet.

Tested an element of making by the present invention, one informal or prolong under the situation in reaction time, do not find that water vapour leaks through the plated metal runner.In this metal construction, under static state unexpectedly be in 1/10 watt magnitude, and in Finnish patent 70331, be one watt or several watts in the polymer architecture of narration through the thermal losses of valve.

The general open and close time of valve is tens to the hundreds of millisecond, is generally several seconds in the valve with respect to described patent.The volume error that causes from stop to flow is 1/10000 second divided by the tangible shut-in time of high-level efficiency valve that rate of discharge calculates, it is than the valve of described patent more than fast ten times, and than traditional solenoid valve more than fast hundred times (if they can detect input liquid).As an example improvement at the quantitative aspect of performance of handling the small amount of liquid volume is described, for example, in ingredients 0.0625 milliliters of liquid, the standard deviation of the repeatability of being surveyed is 0.00001 milliliter, than ten times of described patent or now traditional ingredients performance improvements.At 0.00022 milliliter, in another test of the automatic ingredients of actual small amount sample, its standard deviation is 0.0000007 milliliter, comprises that with regard to described patent, volume is too little owing to caused other all deviations of optical measurement.

Another benefit is by the absorption that detects heat of solution in each valve or releases the actual pass ETAD expected time of arrival and departure that detects each valve.What make us feeling surprised is when 0.0000 milliliter of water fluid in described system valve volume is freezing, cooling rate is such height, so that valve guide is as cold as-20 ℃, then when closing suddenly, in less than 0.02 second, its temperature raises suddenly and surpasses the 5-10 degree, and this is clear at every turn detected with described thermal sensing element.When valve is opened, absorb heat of solution, in each valve, also detect easily with thermodynamics method.By using or measure response and observation pressure stability or variation, can obtain the independently proof that valve switching or liquid entered or left a certain cavity or a certain space to pressure differential.When transporting liquid by means of pressure reduction, as extra benefit, this easily carries out.

About the preferential embodiment of element of the present invention, with reference to the above-mentioned explanation of the inventive method and following claims.

Below, with reference to appended accompanying drawing, the present invention is described by means of example, wherein:

But Fig. 1 represents to be used to form one to be heated and the local diagrammatic sketch of the mould of cooling element by provided by the present invention;

Fig. 2 represents the phase one of this element shell electrical forming, is in this stage, with electro-plating method plating layer of metal on mould;

Fig. 2 a is illustrated in the phase one in another technology of this element shell that is shaped, and wherein layer of metal is plated to layer of metal on the mould with the (cathode) sputtering method in vacuum tank;

Fig. 3 represents to get rid of mould by means of broad from the enclosure of being made up of layer of metal that so obtains;

Fig. 4 represents the metal shell that so obtains, and its some part is furnished with protective coating;

Fig. 5 represents the subordinate phase of this shell electrical forming, wherein electroplates second layer metal on the not protection coating of shell;

Fig. 6 represents the partial top view of mould, and it has been crushed so that form a kind of so-called high-level efficiency valve in the element that will be shaped;

Valve district after Fig. 7 is illustrated in the ground floor deposition of shell and gets rid of mould;

Fig. 8 represents the VII-VIII section by valve among Fig. 7;

Fig. 9 represents that wherein these valves are connected in refrigeration but by adding thermal bridge by the part of the finished product element of method manufacturing provided by the invention;

Figure 10 represents the cross section by an element, and wherein a temperature sensor and passes to refrigerator and can add thermal bridge and fused on the shell in the valve district;

Figure 11 represents the similar cross-section by another element of making by method provided by the invention.

Fig. 1 represents the quite part of soft, easily deformable mould made of aluminum 1.This mould has been crushed at two places 2, so that form some high-level efficiency valves in the element that will be formed.These parts that are crushed are also expressed again by Fig. 6, will describe these parts that is crushed subsequently in detail.Form by mould 1 at the fluid space that is crushed between the part 2, it has 3 strip branches 3 between two flat nips, to form the runner that some are communicated with fluid space in the element.This mould is whole to be a kind of hollow-core construction, therefore, utilizes the method that makes solvent streams pass through the pipeline 4 in the mould, and it can be got rid of from element internal later.

In the first plating stage of being represented by Fig. 2, as a negative electrode, one deck cobalt plating alloy is plated on the mould from cathodic electricity mould in amino strong acid salt, and formed this layer thickness is the 10-100 micron, is preferably 30 microns, and the little cobalt composition is arranged.In Fig. 2, this metal level label 5 marks.One when finishing plating, by means of getting rid of mould 1 in the pipeline 4 that the strong solution of NaOH of heat is input in it.This solution has dissolved aluminum dipping form, but inoperative to the nickel cobalt (alloy) of electroplating thereon.Consequently form the metal shell of a nickel cobalt (alloy) as shown in Figure 3, its inner existing shape corresponding to other profile of finished product.

As a kind of provision before the second plating stage be; some part of outside surface of the nickel cobalt (alloy) shell 5 of Huo Deing is capped the protective finish 6 that last layer for example paints like this; as shown in Figure 4, shell 5 soaks in the copper-bath that comprises sulfuric acid as a negative electrode as shown in Figure 5 then.One deck red copper 7 only is plated on those parts that do not covered by paint 6 on the shell now.The thickness of red copper layer can change in the 10-500 micrometer range.Because the coefficient of heat conductivity of red copper and nickel cobalt (alloy) is different, the coefficient of heat conductivity in the shell zone that is formed by red copper layer 7 exceeds about 10 times of the coefficient of heat conductivity in the shell zone of being made up of nickel cobalt (alloy), but only when described two electrodeposited coatings have identical thickness just like this.Second result who electroplates the stage forms element 12, and it is by a fluid space 8, valve 9 and three runner 11 compositions that are communicated with and have valve 10 with this fluid space at the two ends in this space.As illustrating together with Fig. 9 below, this element has been got ready and has been connected in refrigerator and well heater.If be ready, can remove protection paint 6 from the surface of this element, yet this be unnecessary.

Relate to the electric forming method together with Fig. 2-5 narration above and make element.This manufacturing also can be adopted by the chemical method reducing metal, by the non-electrolytic deposition technology of the catalysis of this metal (or alloy) own.According to the present invention, can under 90-92 ℃ of temperature, adopt NaH ₂PO ₂As reductive agent, by means of from NiSO ₄Or NiCl ₂In nickel is deposited on the aluminium core, thereby with the sulfur content of regulating in the nickel that the pH value controlling packet is contained in deposition, make element by autocatalysis by nickel and sulphur.The sulphur that is comprised has reduced sedimental coefficient of heat conductivity of first depositional phase highly beneficially.Under approximately+40 ℃, utilize CuSO ₄Can obtain the red copper that one deck autocatalysis is reduced equally with formaldehyde.

As mentioned above, always can obtain metal deposition layer according to autocatalysis electronation technology, comprise and get rid of core and the protective coating before second depositional phase with reference to Fig. 2-5.Basic difference is and need not finishes the metal deposition by electric current.

Fig. 2 a represents another technology, and wherein a metal level 5 is deposited on the metal pattern 1 by (cathode) sputtering, and metal pattern can be an aluminium.In discharge chamber A, one kilovolt of high direct voltage or high frequency to thousands of volts is connected on the metal B that will deposit by (cathode) sputtering in the ionization argon gas of partial vacuum, this derby B is as negative electrode, and mould 1 is as anode.Though the (cathode) sputtering deposition rate in liquid medium aforesaid deposition process slowly many, it has can be by the great advantages of any metal or alloy of special applications requirement deposition.

High vacuum is the environment of evaporation of metal deposition, because temperature is too high, the evaporation of metals deposition is not very suitable for used in the present invention mould, but it and (cathode) sputtering combine and have produced a deposition process that is called ion, it occurs in the suitable temperature, and even can have than speed higher in the liquid deposition process.

Formation at the voltage 9 at fluid space 8 two ends obtains explanation by Fig. 7 and 8.From the Fig. 6 in mould 1 zone that is illustrated in this formation voltage 9, this rod mould is crushed vertically becoming on the about 45 ° direction with it as can be seen.This flattening part is used label 13 marks in the drawings.From Fig. 7 and 8, as can be seen, in the flattening district of mould, a narrow groove 14 is arranged getting rid of the nickel cobalt (alloy) shell 5 that obtains behind the mould, also become about 45 ° angle with shell inner flow passage 11 vertical.As shown in the figure, the direction of liquid stream is tapered to an end 15 in this groove or the restriction 14 longshore current roads 11.This groove can be in about 200-30 micrometer range at the width that flows into end 16; At the width of outflow end 15 greatly in the 30-2 micrometer range.This structure of restriction 14 guarantees to arrive directly the do not flow through inflow end 16 of groove 14 broads of liquid stream in the valve of being made up of restriction 14 that is connected in a refrigerator as described below, but by means of surface tension, can stably flow to its narrower outflow end 15 along this groove, therefore, lagging of being comprised is enough to allow the liquid in restriction 14 to be frozen, thereby closes this valve.

Fig. 9 represents the element 12 by Fig. 1-5 explanation manufacturing.Valve 9,10 districts are connected in a refrigerator by plate shape bridge 17, and this bridge is equipped with resistance 18 by this sample loading mode, make this bridge equally as well heater.In the embodiment shown in this figure, bridge 17 is aimed at the tongue of single plate body 19, if need these thes tip of the tongue to be suitable for bending, is connected in the red copper floor that is covered with

valve

9,10 districts.Bridge 17 preferably is made up of two red copper films, and resistance wire 18 is included in one deck plastics 21 (referring to Figure 10 and 11) between the red copper layer 20.

Figure 10 has represented a kind of pattern, and its jackshaft end 17 is connected in the red copper layer 7 on element 12 shells.Skim indium 22 is deposited on red copper layer 7 and fusing subsequently, so it fuses together bridge 17 and red copper layer 7.This welding is owing to adopt the indium 23 of point format, and it shrank by the capillary effect around the tip of bridge 17 between melting stage, was firm.

As shown in Figure 10, a temperature sensor 24 is connected in the red copper layer 7 on the side of the valve 10 on bridge 17 opposites.Sensor 24 comprises a thermopair, and its lead two ends are fused to red copper 7 by the mode identical with bridge 17 ends.Thermopair 24 can be monitored the duty of valve and the state variation of the interior liquid of valve.

Figure 11 is equivalent to Figure 10 to a great extent except its expression is connected in the whole bridge 17 of a refrigerator 25 that turns round continuously.In addition, in the element shown in this figure, surround the red copper layer 7 of bulk fluid space 8, for example, it can be used as the quantity space in certain analyzer, be connected in the red copper layer 7 that surrounds the runner 11 pass to this space through a red copper bridge 26, the temperature that described bridge 26 is used for remaining in these parts of this element equates.The figure shows an ice cube 27 and closed valve 10 in the runner 11.Should be noted that the valve 10 shown in Figure 10 and 11 is a kind of so-called conventional valves, wherein, when heating resistor was inoperative, inactive liquid was freezing by the effect of refrigerator 25 by means of bridge 17.Yet under the situation that can dynamically be stoped this liquid stream by Fig. 7 and 8 represented high-level efficiency valves 9, the red copper layer 7 that surrounds this valve can add heat bridge 17 by same mode through one and be connected in a refrigerator 25.

Depend on this circuit elements design purposes, the fluid space 8 that may need to adopt a kind of chemical inertness precious metal may exist with the inside surface that constitutes runner 11 and this element.In the case, above-mentioned manufacture process can be revised, and for example by at first the nickel dam of several microns of one decks being deposited on the mould 1, the about equal thickness noble metal of one deck, as gold, is deposited on this nickel dam.Then, as mentioned above, one deck is the metal shell layer 5 of nickel cobalt (alloy) for example, is deposited on this noble metal by mode shown in Figure 2.Adopt the strength hydrochloric acid solvent can realize the continuous discharge of mould 1, strength hydrochloric acid dissolution with solvents aluminum dipping form and deposition first nickel dam thereon, therefore, layer of precious metal just constitutes the inside surface of this element.After this, manufacturing process is proceeded in a manner described.

The element of being applied for 12 be design come as a control or handle small amount of liquid intrasystem, especially be subjected to parts in the automatic analyzer of Electronic Control operation.Like this, suitably be connected in basically this element of other element of making by Same Way, can constitute the parts of large equipment assembly.Yet, even also can be enough to finish some operation to small amount of liquid as a kind of instrument by having simple components that fluid space that the runner of valve is communicated with forms with minority.

Different embodiments of the invention are not limited to more above-mentioned examples, and they can change in the scope of following claims, and this is conspicuous for being proficient in those skilled in the art.For example one by in the element of manufacturing shown in Figure 11, fluid space 8 can by be directly connected in a refrigeratory 25 as the bridge that is provided with a heating resistor 18 17 that is connected in valve 10 same types.In the case, the temperature in this space can be conditioned, so that can make this space as an incubation cavity, and the termination of bridge 17 can be connected to the red copper layer 7 that surrounds fluid space 8 by means of indium as illustrating together with Figure 10.Also may replace thermopair as temperature sensor, for example thermistor with some sensors with other pattern of suitable low heat capacity.In addition, available suitable material manufacturing such as nickel is installed in the heating resistor 18 in the bridge 17, can make this resistor as temperature sensor like this.

Claims

1, but a kind of manufacturing is used for handling the method for heating of small amount of liquid system and cooling element (12), described element is provided with runner (11) and fluid space (8) that at least one is communicated with described runner, described element is on some positions (9,10) be connected in refrigerator (25) and well heater (18) by its function, it is characterized in that element (12) is by utilizing the mould got rid of (1) as deposition substrate, depositing one or more metal materials makes the metal that is deposited form the shell (5 of element, 7), get rid of mould, and in described position (9,10) go up and shell to be connected in a refrigerator (25) and a well heater make, this manufacture process is so finished, and promptly the structural thermal coefficient at the position that links to each other with well heater with refrigerator on the element shell is greater than the heat transfer coefficient of the shell at contiguous described position.

2, by the described method of claim 1, it is characterized in that described element utilizes the electrical forming method to make.

3, by the described method of claim 1, it is characterized in that described element utilizes autocatalysis electronation manufacturing, wherein at least a metal material is reduced and deposits from a certain liquid phase.

4, by the described method of claim 1, it is characterized in that described element utilizes chemical vapour deposition to make, wherein at least a metal is from vapour phase reduction and deposition.

5, by the described method of claim 1, it is characterized in that described element utilizes (cathode) sputtering manufacturing, wherein metal material is ionized in a vacuum chamber, and attracted on the mould by means of voltage.

6, by the described method of claim 1, it is characterized in that this method adopts evaporation technique, wherein metal material evaporates in a chamber and can be deposited on the mould that is in this chamber.

7, by the described method of claim 1, the shell (5,7) that it is characterized in that element formed in two stages, at first the ground floor metal is deposited on the whole surface of mould (1), then second layer metal only is deposited on some positions that will be connected to a well heater (18) and a refrigerator (25) on the ground floor.

8, by the described method of claim 7, it is characterized in that after first depositional phase, but can heat and refrigeration position (9,10) outside the zone be capped a protective finish (6), paint for example is to prevent that metal is deposited on these zones in the next stage.

9, by claim 7 or 8 described methods, it is characterized in that in subordinate phase the metal level that is deposited is thinner than what deposit haply in the phase one.

10, by the described method of claim 7, it is characterized in that the metal that in the phase one, deposits, nickel for example, than the metal that deposits in subordinate phase, for example red copper has lower coefficient of heat conductivity.

11, by the described method of claim 7, it is characterized in that after first depositional phase mould (1) is excluded.

12, in accordance with the method for claim 7, it is characterized in that it adopts a solvable mould (1), is hollow to small part structurally, by coming it is discharged by a solvent streams.

13, in accordance with the method for claim 12, it is characterized in that mould (1) is made of aluminum, the solution that is used to get rid of it is a kind of aqueous slkali.

14, in accordance with the method for claim 1, it is characterized in that the shell (5,7) of element (12) is connected to a refrigerator through a rod or tabular bridge (17), this bridge has high coefficient of heat conductivity by such as the red copper made.

15, by the described method of claim 14, it is characterized in that bridge (17) is provided with an insulation resistance (18) by this quadrat method, make this bridge also can be used as a well heater.

16,, it is characterized in that by the fusible metal of an appropriate amount (2), as indium by claim 14 or 15 described methods, deposit on the shell (7) of element, melt it then, thereby material (22,23) fuses together the end and the shell of this bridge, bridge (17) is connected with this element.

17, in accordance with the method for claim 1, it is characterized in that element (12) but be provided with one can heating and cooling space (9), it is too narrow at least in one direction is enough to allow it to block the valve of runner (11) as one by means of freezing liquid therebetween.

18, by the described method of claim 17, it is characterized in that valve (9) flattens a rod mould (1) by such manner and makes, at layer metal deposition and after getting rid of mould, the result has a narrow groove (14) in the runner in the metal shell (5) in mould flattens the district.

19, in accordance with the method for claim 14, it is characterized in that rod mould (1) is along approximately becoming 20-60 ° direction to be crushed with respect to the mould longitudinal axis.

20, the element of making by the method for claim 1 (12), this element (12) design is used for handling the system of small amount of liquid, comprise the fluid space (8) that some runners (11) and at least one and these runners are communicated with, described element is on some positions (9,10) be connected in a refrigerator (25) and a well heater (18) by function, it is characterized in that element (12) comprises one group of runner and one or more by the bulk metal shell (5 that has some hollow parts substantially, 7) Mi Feng fluid space, described shell is at some positions (9,10) be connected in refrigerator (25) and well heater (18) on, and described position and so constitute with the joint of refrigerator and well heater is promptly at the structural thermal coefficient at these positions heat transfer coefficient greater than the shell that is adjacent.

21,, it is characterized in that the thickness of shell in housing (5, the 7) thickness that housing is connected in the position (9,10) of refrigerator (25) and well heater (18) significantly surpasses contiguous described position regional by the described element of claim 20.

22,, it is characterized in that element (12) comprises a thin solid metal shell (5) that extends and another shell (7) of upward being made by the different metal with high thermal conductivity at the position (9,10) that is connected in refrigerator (25) and well heater (18) on the whole surface of element by claim 20 or 21 described elements.

23,, it is characterized in that betal can (5) made by nickel or nickel alloy, and make by red copper at second shell (7) that can heat with cooling off position (9,10) by the described element of claim 22.

24, by the described element of claim 20, it is characterized in that the shell (7) of element (12) is connected in refrigerator (25) by a rod or the tabular bridge of being made by the material of high heat transfer coefficient (17).

25, by the described element of claim 24, it is characterized in that described material is a red copper.

26, by the described element of claim 24, it is characterized in that bridge (17) is provided with insulation resistance (18) by this sample loading mode, makes bridge also can be used as a well heater.

27,, it is characterized in that bridge (17) fuses the shell (7) that is connected in element by the fusible material with a kind of for example indium (22,23) by claim 24 or 26 described elements.

28, by the described element of claim 20, it is characterized in that element (12) but heat and cooling space (9) narrow at least in one direction as to be enough to allow it to be used as blocking the valve of runner (11) by the liquid that freezes in it.

29, by the described element of claim 28, it is characterized in that valve (9) comprises a groove runner (11) in, described groove is with respect to vertical angle orientation with about 20-60 ° of this runner.

30,, it is characterized in that valve (9,10) is provided with the temperature sensor (24) that can monitor the valve operation by claim 28 or 29 described elements.

31, by the described element of claim 20, it is characterized in that element (12) comprises at least one mixing or keeping warmth space (8), it is connected in a refrigerator and at least one well heater (18) is set, and fluid temperature can be adjusted in this space so that make.