A kind of ranging based on laser interference and vibration measuring structure
Technical field
The present invention relates to a kind of ranging using laser interferometry and vibration measuring structure, more particularly to a kind of laser homodyne to do
Relate to the structure of ranging and laser heterodyne interference vibration measuring.
Background technology
At present, laser interference vibration measurement has been the technology of comparative maturity, and e.g., German polytec companies, U.S.'s light moves
Power company has carried out laser doppler vibration measuring instrument development, and its measurement accuracy can reach nm magnitudes, acceleration up to 1g with
On, and laser ranging is even more to have obtained universal application, the remote distance mearuring equipments of such as bosch.But either remote ranging
Also or laser doppler vibration measuring instrument, wherein all employing optical texture and LASER Light Source, the price of single device is equal for instrument
High, cost is not also low, but can not realize that same equipment can measure the displacement apart from and can measurement object of object, speed
And the vibration data such as acceleration, it is necessary to need two equipment when ranging simultaneously and vibration measuring, cumbersome, cost of investment is high.
The content of the invention
The purpose of the present invention is can not to reach remote and high-precision simultaneously to solve current laser ranging, laser ranging and
Vibration measuring equipment independently of each other and can not can be measured in an equipment object apart from and can measure object vibration, it is cumbersome
Technical problem.
In order to solve the above-mentioned technical problem, the present invention provides a kind of ranging based on laser interference and vibration measuring structure, laser
Device output end connect beam splitter input, beam splitter an output end connection bundling device an input, beam splitter it is another
One output end connects the first AOM optical signal input, and the first AOM electric signal input end connects the output of the first driver
End, the input of the first driver connect the output end of the first trigger;First AOM output end connects the 2nd AOM light letter
Number input, the 2nd AOM electric signal input end connect the output end of the second driver, the input connection of the second driver the
The output end of two triggers;For the laser projection of 2nd AOM outputs to measuring in target, measurement target reflects the laser light to bundling device
Another input, bundling device output end connection detector input, detector output end connection processor input;
During ranging, first driver works and the second driver does not work, and the first driver is in the described first triggering
Start work under the triggering of device and drive the first AOM to work, the first AOM modulates pulse strength signal, the strength signal
The measurement target is projected by the 2nd AOM and is reflected back the bundling device, the strength signal of the reflection with described point
The beam of laser that beam device separates is interfered in bundling device, and interference signal is transmitted to detector, by calculating triggered time and the spy
Survey the time delay that device detects and draw distance;
During vibration measuring, the second driver works and the first driver does not work, triggering of second driver in the second trigger
Lower to start work and drive the 2nd AOM to work, the 2nd AOM produces frequency-shift signaling and simultaneously projects measurement target, when measurement mesh
Doppler effect is produced during mark vibration, the frequency-shift signaling is reflected back bundling device by measurement target, and the frequency-shift signaling of the reflection is with dividing
The beam of laser that beam device separates is interfered in bundling device, and interference signal is transmitted to detector, the difference interference that detector will detect
Signal is transmitted to processor, and processor demodulates the displacement in vibration signal, speed and acceleration from heterodyne interference signal.
Further, the laser is narrow linewidth polarization-maintaining and frequency stabilized carbon dioxide laser, and line width is less than 1KHz, and wavelength is
1550nm。
Further, the first AOM serves as pulse acousto-optic modulator, modulating frequency 100MHz.
Further, the 2nd AOM serves as acousto-optic frequency shifters, shift frequency 100MHz.
Further, the beam splitter splitting ratio is 3db.
Further, the measurement target is glass or aluminium sheet.
Further, the frequency bandwidth of the detector>500MHz.
The present invention is designed by acousto-optic frequency translation device and optical interference circuit, during ranging, can meet that measurement distance reaches simultaneously
Thousands of rice, measurement accuracy are millimeter magnitude.This is not available for conventional phase ranging and pulsed laser ranging, breaches tradition
The problem of telemeasurement precision is low, realizes low-power, remote, precision distance measurement.In addition, the present invention can utilize ranging simultaneously
Identical optical texture is used to realize the vibration detections such as ohject displacement, speed and acceleration in structure, accomplishes a tractor serves several purposes, a machine
Multipotency, while switch simply, it is easy to operate, substantially increase measuring system operating efficiency.
Brief description of the drawings
Fig. 1 is principle of the invention block diagram;
Fig. 2 is range measurement principle figure;
Fig. 3 is vibration measuring schematic diagram.
In figure:1. laser;2. beam splitter;3. the first AOM;4. the 2nd AOM;5. the first driver;6. the second driver;
7. the first trigger;8. the second trigger;9. bundling device;10. measure target;11. detector;12. processor.
Embodiment
Presently in connection with drawings and examples, the present invention is further detailed explanation.These accompanying drawings are simplified signal
Figure, only illustrate the basic structure of the present invention in a schematic way, therefore it only shows the composition relevant with the present invention, and it should not be managed
Solve as limitation of the present invention.
As shown in figure 1, the output end of laser 1 connects the input of beam splitter 2, laser 1 is that narrow linewidth polarization-maintaining and frequency stabilization swash
Light device, line width are less than 1KHz, wavelength 1550nm, frequency stability 10-7, power stability 1%;The splitting ratio of beam splitter 2
For 3db, an input of the output end connection bundling device 9 of beam splitter 2, another output end connection first of beam splitter 2
AOM3 optical signal input, the first AOM3 electric signal input end connect the output end of the first driver 5, the first driver 5
Input connect the first trigger 7 output end;First AOM3 output end connects the 2nd AOM4 optical signal input, the
Two AOM4 electric signal input end connects the output end of the second driver 6, and the input of the second driver 6 connects the second trigger
8 output end;For the laser projection of 2nd AOM4 outputs to measuring in target 10, measurement target 10 is that the reflections such as glass or aluminium sheet are situated between
Matter, measurement target 10 reflect the laser light to another input of bundling device 9, and the output end connection detector 11 of bundling device 9 inputs
End, the output end of the detector 11 connection input of processor 12, the frequency bandwidth of detector 11>500MHz;
During ranging, the first driver 5 works and the second driver 6 does not work, and the first driver 5 is in the first trigger 7
Triggering is lower to be started work and drives the first AOM3 to work, and the first AOM3 serves as pulse acousto-optic modulator, modulating frequency 100MHz,
The pulse strength signal that the AOM3 of Fig. 2 the first are modulated is produced to project measurement target 10 by the 2nd AOM4 and be reflected back bundling device
9, the strength signal of the reflection is interfered with the beam of laser that beam splitter 2 separates in bundling device 9, and interference signal is transmitted to detector
11, signal that detector 11 detects by calculating the time delay that the triggered time detects with detector 11 as shown in Fig. 2 obtained
Go out distance L;L=(1/2)* C*T, wherein, C is the light velocity, and T is time delay.
During vibration measuring, the second driver 6 works and the first driver 5 does not work, and the second driver 6 is in the second trigger 8
Triggering is lower to be started work and drives the 2nd AOM4 to work, and the 2nd AOM4 serves as acousto-optic frequency shifters, shift frequency 100MHz, the 2nd AOM4
Caused frequency-shift signaling projects measurement target 10, and Doppler effect is produced when measuring target 10 and vibrating, and measurement target 10 will
The frequency-shift signaling is reflected back bundling device 9, and the beam of laser that frequency-shift signaling and the beam splitter 2 of the reflection separate is done in bundling device 9
Relate to, interference signal is transmitted to detector 11, and the signal that detector 11 detects is as shown in figure 3, the heterodyne that detector 11 will detect
Interference signal is transmitted to processor 12, and processor 12 demodulates the displacement in vibration signal from heterodyne interference signal, speed and plus
Speed.
It is complete by above-mentioned description, relevant staff using the above-mentioned desirable embodiment according to the present invention as enlightenment
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.