CN104934513A - Organic field effect transistor biosafety flexible photosensitive sensor and preparation method - Google Patents

Organic field effect transistor biosafety flexible photosensitive sensor and preparation method Download PDF

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CN104934513A
CN104934513A CN201510341003.6A CN201510341003A CN104934513A CN 104934513 A CN104934513 A CN 104934513A CN 201510341003 A CN201510341003 A CN 201510341003A CN 104934513 A CN104934513 A CN 104934513A
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ofet
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CN104934513B (en
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黄佳
吴小晗
褚莹莉
杜鹃
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Tongji University
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Abstract

本发明涉及一种有机场效应晶体管(OFET)的生物安全柔性光敏传感器及制备方法,包括:作为介电层的聚乳酸(PLA)薄膜,在PLA薄膜底部蒸镀的金薄膜作为栅电极,在PLA薄膜顶部蒸镀有机半导体层作为导电层,在导电层顶部蒸镀相互隔绝的金薄膜作为源极和漏极。与现有技术相比,本发明中的OFET具有低成本、光敏性能优异且兼具柔性与生物安全性等优点。

The invention relates to a biosafety flexible photosensitive sensor of an organic field effect transistor (OFET) and a preparation method thereof, comprising: a polylactic acid (PLA) film as a dielectric layer, a gold film evaporated on the bottom of the PLA film as a gate electrode, and An organic semiconductor layer is evaporated on the top of the PLA film as a conductive layer, and gold films isolated from each other are evaporated on the top of the conductive layer as a source electrode and a drain electrode. Compared with the prior art, the OFET in the present invention has the advantages of low cost, excellent photosensitive performance, flexibility and biological safety.

Description

有机场效应晶体管的生物安全柔性光敏传感器及制备方法Organic field effect transistor biosafety flexible photosensitive sensor and preparation method

技术领域technical field

本发明涉及一种光敏传感器,尤其是涉及一种基于有机场效应晶体管的生物安全柔性光敏传感器及其制备方法。The invention relates to a photosensitive sensor, in particular to a biosafety flexible photosensitive sensor based on an organic field effect transistor and a preparation method thereof.

背景技术Background technique

基于有机场效应晶体管(OFET)的光敏传感器性能优异,应用广泛,包括光探测,光开关,光触发放大器以及图案成像等。然而传统的OFET光敏传感器要求有机半导体材料本身兼具较高的迁移率和良好的光敏性能,如此高的要求限制了OFET光敏传感器的大规模推广应用。另一方面,利用OFET器件的结构设计也可以得到具备优异性能的传感器,如美国斯坦福大学鲍哲南团队报道了一种基于具有复杂微结构的聚二甲基硅氧烷(PDMS介电层的OFET,该OFET具有非常高的压力敏感性能。我们团队也报道了一种利用OFET中介电层和有机半导体层界面作用制备的温敏传感器,能够应用于人工皮肤的温度感知。通过这些方式得到的传感器不再要求有机半导体本身对刺激或信号的敏感性能,因此具有广泛的材料适用性。而且,基于这种方式的光敏传感器还没有被报道过。Optical sensors based on organic field-effect transistors (OFETs) have excellent performance and are widely used in a wide range of applications, including photodetection, photoswitches, phototrigger amplifiers, and pattern imaging. However, traditional OFET photosensitive sensors require organic semiconductor materials to have both high mobility and good photosensitive performance, which limits the large-scale application of OFET photosensitive sensors. On the other hand, the structural design of OFET devices can also be used to obtain sensors with excellent performance. For example, Zhenan Bao’s team at Stanford University reported an OFET based on a polydimethylsiloxane (PDMS dielectric layer) with a complex microstructure. The OFET has very high pressure sensitivity. Our team also reported a temperature-sensitive sensor prepared by using the interface between the dielectric layer and the organic semiconductor layer in the OFET, which can be applied to the temperature sensing of artificial skin. The sensors obtained by these methods are not Furthermore, organic semiconductors are required to be sensitive to stimuli or signals, so they have a wide range of material applicability. Moreover, photosensitive sensors based on this method have not been reported.

兼具柔性和生物安全性的光敏传感器具有广泛的应用前景,如John A.Rogers报道了使用柔性光敏传感器仿照昆虫的复眼结构,制备出了具备宽视角、低像差等优异性能的柔性球面成像设备;他还报道了将生物安全的微型LED光源、光敏传感器等电子器件集成在一起介入到小鼠的大脑,从而开创性地研究了生物体神经系统的光遗传行为。然而,上述器件中使用的材料包括PDMS和无机硅基半导体材料,其生物安全性和柔性都有待提高。Photosensitive sensors with both flexibility and biosafety have broad application prospects. For example, John A.Rogers reported the use of flexible photosensitive sensors to imitate the compound eye structure of insects, and prepared flexible spherical imaging with excellent performance such as wide viewing angle and low aberration. equipment; he also reported the integration of biologically safe micro-LED light sources, photosensitive sensors and other electronic devices into the brains of mice, thus pioneering the study of optogenetic behavior of the nervous system of organisms. However, the materials used in the above devices include PDMS and inorganic silicon-based semiconductor materials, and their biosafety and flexibility need to be improved.

发明内容Contents of the invention

本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种具有优异的光敏性能且兼具生物安全性的有机场效应晶体管的生物安全柔性光敏传感器及制备方法。The object of the present invention is to provide a biosafety flexible photosensitive sensor and a preparation method of an organic field effect transistor with excellent photosensitive performance and biosafety in order to overcome the above-mentioned defects in the prior art.

本发明的目的可以通过以下技术方案来实现:The purpose of the present invention can be achieved through the following technical solutions:

一种有机场效应晶体管的生物安全柔性光敏传感器,包括:A biosafety flexible photosensitive sensor of an organic field effect transistor, comprising:

作为介电层的PLA薄膜,PLA film as a dielectric layer,

在PLA薄膜底部蒸镀的金薄膜作为栅电极,The gold film evaporated on the bottom of the PLA film is used as the gate electrode,

在PLA薄膜顶部蒸镀有机半导体层作为导电层,An organic semiconductor layer is evaporated on top of the PLA film as a conductive layer,

在导电层顶部蒸镀相互隔绝的金薄膜作为源极和漏极。On top of the conductive layer, isolated gold films are deposited as source and drain electrodes.

所述的PLA薄膜厚度为1-5μm。The thickness of the PLA film is 1-5 μm.

作为栅电极的金薄膜厚度为50-100nm。The thickness of the gold thin film used as the gate electrode is 50-100nm.

所述的有机半导体层的厚度为50-100nm,材质为二萘并噻吩酮。The thickness of the organic semiconductor layer is 50-100 nm, and the material is dinaphthothiophene.

所述的源极和漏极之间的距离为10-500μm。The distance between the source and the drain is 10-500 μm.

有机场效应晶体管的生物安全柔性光敏传感器的制备方法,采用以下步骤:The preparation method of the biosafety flexible photosensitive sensor of the organic field effect transistor adopts the following steps:

a)基底的清洁处理:使用丙酮,异丙醇依次超声清洗硅片基底,然后用无水乙醇和去离子水冲洗,最后用氮气吹干衬底表面;a) Cleaning of the substrate: use acetone and isopropanol to ultrasonically clean the silicon wafer substrate in sequence, then rinse with absolute ethanol and deionized water, and finally dry the substrate surface with nitrogen;

b)基底的表面防粘处理:将体积浓度为1-5%的(十三氟-1,1,2,2-四氢辛烷)-三氯硅烷(FOTS)在氯仿中的溶液旋涂到上述洗净的硅片表面作为防粘层;b) Surface anti-adhesive treatment of the substrate: spin coating a solution of (tridecafluoro-1,1,2,2-tetrahydrooctane)-trichlorosilane (FOTS) in chloroform with a volume concentration of 1-5% To the surface of the above-mentioned cleaned silicon chip as an anti-sticking layer;

c)在7×10-4Pa的真空下将金热蒸镀到硅片上形成栅电极;c) thermally evaporating gold onto the silicon wafer under a vacuum of 7×10 -4 Pa to form a gate electrode;

d)将c)的产物竖直置于50g/L的PLA氯仿溶液中,以15μm/s的速率缓慢提拉离开溶液表面,得到作为OFET介电层的PLA薄膜;d) The product of c) is vertically placed in a 50 g/L PLA chloroform solution, and slowly pulled away from the solution surface at a rate of 15 μm/s to obtain a PLA film as an OFET dielectric layer;

e)在7×10-4Pa的真空下,将二萘并噻吩酮热蒸发到上述PLA薄膜上;e) thermally evaporating the dinaphthothiophene onto the above PLA film under a vacuum of 7×10 -4 Pa;

f)使用c)相同的方法,利用掩膜版遮挡的方式将金热蒸镀到e)的产物上,作为OFET的源极与漏极电极;f) Using the same method as c), thermally evaporate gold onto the product of e) by means of a mask, as the source and drain electrodes of the OFET;

g)将PLA薄膜从有FOTS处理的硅片上揭下,得到柔性光敏传感器。g) peeling off the PLA film from the FOTS-treated silicon wafer to obtain a flexible photosensitive sensor.

与现有技术相比,本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:

1、采用PLA和DNTT分别作为OFET的衬底暨介电层和有机半导体材料,由于PLA中的化学极性基团对DNTT中的载流子具有吸引捕获效应,而这种效应能受光照的影响,从而使得制备的OFET具备光敏性能,光开关比达到104倍,可用作光敏晶体管,并能应用于图案成像;1. PLA and DNTT are used as the substrate and dielectric layer and organic semiconductor material of OFET respectively. Because the chemical polar groups in PLA have an attraction and capture effect on the carriers in DNTT, this effect can be absorbed by light Influence, so that the prepared OFET has photosensitive performance, the optical switch ratio reaches 10 4 times, can be used as a photosensitive transistor, and can be applied to pattern imaging;

2、制备的OFET兼具柔性和生物相容性,将器件卷在半径小于800μm的物体上还能保持正常性能;PLA本身是生物相容性优异的高分子材料,而DNTT占OFET的质量分数不足1%,因此OFET整体的生物安全性良好,器件的萃取液与L929细胞的共培养实验中,细胞的成长率均高于80%;2. The prepared OFET has both flexibility and biocompatibility, and it can maintain normal performance when the device is rolled on an object with a radius of less than 800 μm; PLA itself is a polymer material with excellent biocompatibility, and DNTT accounts for the mass fraction of OFET It is less than 1%, so the overall biological safety of OFET is good. In the co-culture experiment of device extract and L929 cells, the growth rate of cells is higher than 80%;

3、本技术制备工艺简单,无需精密的制备仪器,成本低廉,便于大规模生产。3. The preparation process of this technology is simple, does not require sophisticated preparation instruments, is low in cost, and is convenient for large-scale production.

附图说明Description of drawings

图1为本发明制备的OFET工作性能,即其输出特性曲线。Fig. 1 is the OFET work performance prepared by the present invention, namely its output characteristic curve.

图2为本发明制备的OFET的柔性展示,其迁移率随卷曲半径的变化情况。Fig. 2 shows the flexibility of the OFET prepared in the present invention, and its mobility varies with the crimp radius.

图3为本发明制备的OFET的生物相容性展示,与其共培养细胞的成长率。Fig. 3 shows the biocompatibility of the OFET prepared in the present invention, and the growth rate of co-cultured cells with it.

图4为采用本技术制备柔性OFET的光敏性能,即其转移特性曲线随光强的变化。Figure 4 shows the photosensitive performance of the flexible OFET prepared by this technology, that is, the change of its transfer characteristic curve with light intensity.

图5为采用本技术制备的柔性OFET在不加场电压时作为光敏晶体管的输出特性曲线。Figure 5 is the output characteristic curve of the flexible OFET prepared by this technology as a phototransistor when no field voltage is applied.

图6为采用本技术制备的柔性OFET光敏传感器对五角星图案的成像应用。Figure 6 shows the imaging application of the flexible OFET photosensor prepared by this technology to the five-pointed star pattern.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

实施例1Example 1

一种有机场效应晶体管的生物安全柔性光敏传感器,包括作为介电层,厚度为1-5μm的PLA薄膜,在PLA薄膜底部蒸镀厚度为50-100nm的金薄膜作为栅电极,在PLA薄膜顶部蒸镀厚度为50-100nm,材质为二萘并噻吩酮有机半导体层作为导电层,在导电层顶部蒸镀相互隔绝的金薄膜作为源极和漏极,源极和漏极之间的距离为10-500μm。A biosafety flexible photosensitive sensor of an organic field effect transistor, including a PLA film with a thickness of 1-5 μm as a dielectric layer, a gold film with a thickness of 50-100 nm evaporated on the bottom of the PLA film as a gate electrode, and a gold film on the top of the PLA film The evaporation thickness is 50-100nm, and the material is a dinaphthothiophenone organic semiconductor layer as the conductive layer, and a gold film isolated from each other is evaporated on the top of the conductive layer as the source and drain, and the distance between the source and the drain is 10-500μm.

Au栅电极通过掩膜版遮挡后热蒸镀,其宽度略大于顶部Au源极与漏极之间的沟道宽度,既保证沟道中的有机半导体都处于场电压中,又尽量减少底栅电极与顶部源极/漏极之间的重叠,减少OFET器件击穿漏电的风险。OFET中使用的介电材料PLA与有机半导体材料DNTT的分子式如图二所示。PLA分子量为10-20万,购置后使用溶解沉淀的方法提纯后使用,溶剂为氯仿,沉淀剂为甲醇。DNTT按下述步骤合成:The Au gate electrode is shielded by a mask and then thermally evaporated. Its width is slightly larger than the channel width between the top Au source and drain, which not only ensures that the organic semiconductor in the channel is in the field voltage, but also minimizes the bottom gate electrode. The overlap with the top source/drain reduces the risk of OFET device breakdown leakage. The molecular formulas of the dielectric material PLA and the organic semiconductor material DNTT used in the OFET are shown in Figure 2. The molecular weight of PLA is 100,000-200,000. After purchase, it is purified by dissolution and precipitation. The solvent is chloroform, and the precipitating agent is methanol. DNTT is synthesized according to the following steps:

步骤1,所有的化学试剂纯度均为分析纯。四氢呋喃在使用前都经过除水处理,所有反应均在无水无氧环境下进行,使用氩气保护。将2.87mL(21mmol)的三甲基乙二胺加入到35mL的四氢呋喃中,在零下30℃与正丁基锂的正己烷溶液(浓度1.59M,13.2mL)混合。在同样温度下搅拌混合溶液15分钟后,缓慢滴加(5分钟加完)2-萘甲醛的四氢呋喃溶液(2.0g 2-萘甲醛加入到10mL四氢呋喃中),之后再加入24.15mL浓度为38.4mmol的正丁基锂正己烷溶液,在零下30℃,搅拌混合液3.5小时。加入过量的二甲基二硫(5.67mL,64mmol)并在室温下搅拌2小时后,加入20mL盐酸(浓度为1M)。最终混合物搅拌10小时后使用60mL二氯甲烷进行萃取。萃取物使用MgSO4干燥后再真空干燥。将固体残渣使用层析柱进行提纯,得到黄色固体固体1a(1.49g),层析液是正己烷和乙酸乙酯的混合液(体积比为9:1)。In step 1, the purity of all chemical reagents is analytically pure. Tetrahydrofuran was subjected to dehydration treatment before use, and all reactions were carried out in an anhydrous and oxygen-free environment under the protection of argon. 2.87 mL (21 mmol) of trimethylethylenediamine was added to 35 mL of tetrahydrofuran, and mixed with n-butyl lithium in n-hexane (1.59 M concentration, 13.2 mL) at minus 30°C. After stirring the mixed solution at the same temperature for 15 minutes, slowly add dropwise (5 minutes to complete) the tetrahydrofuran solution of 2-naphthaldehyde (2.0g 2-naphthaldehyde is added in 10mL tetrahydrofuran), and then add 24.15mL concentration of 38.4mmol The n-butyllithium n-hexane solution was stirred at minus 30°C for 3.5 hours. After adding excess dimethyl disulfide (5.67 mL, 64 mmol) and stirring at room temperature for 2 hours, 20 mL of hydrochloric acid (1M concentration) was added. The final mixture was stirred for 10 hours and extracted with 60 mL of dichloromethane. The extract was dried over MgSO4 and then vacuum dried. The solid residue was purified using a chromatographic column to obtain a yellow solid 1a (1.49 g), and the chromatographic liquid was a mixture of n-hexane and ethyl acetate (volume ratio: 9:1).

步骤2,加入0.39g锌粉到10mL四氢呋喃中,缓慢加入0.66mL四氯化钛加热回流1.5小时。溶液降到室温后,缓慢加入1a的四氢呋喃溶液(0.405g 1a加入到10ml四氢呋喃中),混合液冷凝回流10小时。温度降到室温后,用30mL饱和碳酸氢钠水溶液和30mL二氯甲烷对其进行稀释,搅拌3.5小时。使用硅藻土进行过滤,滤液分为有机层和水层。使用60mL二氯甲烷对水层进行萃取,将有几层使用MgSO4干燥后再真空干燥。经过二氯甲烷清洗跑板(硅胶板)提纯,得到黄色晶体2a(0.299g)。Step 2, add 0.39g of zinc powder to 10mL of tetrahydrofuran, slowly add 0.66mL of titanium tetrachloride and heat to reflux for 1.5 hours. After the solution was lowered to room temperature, a tetrahydrofuran solution of 1a was slowly added (0.405g of 1a was added to 10ml of tetrahydrofuran), and the mixture was condensed and refluxed for 10 hours. After the temperature dropped to room temperature, it was diluted with 30 mL of saturated aqueous sodium bicarbonate solution and 30 mL of dichloromethane, and stirred for 3.5 hours. Filtration was performed using celite, and the filtrate was divided into an organic layer and an aqueous layer. The aqueous layer was extracted with 60 mL of dichloromethane, and several layers were dried with MgSO4 and then dried in vacuo. Purified by washing and running plate (silica gel plate) with dichloromethane to obtain 2a (0.299 g) as yellow crystals.

步骤3,0.2235g 2a和4.87g碘依次加入到15mL三氯甲烷中回流21小时。温度降到室温后,加入20mL饱和亚硫酸氢钠水溶液,过滤出沉淀使用水和三氯甲烷进行清洗。得到的粗产物再通过真空升华提纯得到黄色固体,即为DNTT。Step 3, 0.2235g 2a and 4.87g iodine were sequentially added to 15mL chloroform and refluxed for 21 hours. After the temperature dropped to room temperature, 20 mL of saturated aqueous sodium bisulfite solution was added, and the precipitate was filtered out and washed with water and chloroform. The obtained crude product was purified by vacuum sublimation to obtain a yellow solid, namely DNTT.

制备得到的OFET工作良好,其晶体管输出特性曲线如附图1所示。The prepared OFET works well, and its transistor output characteristic curve is shown in Fig. 1 .

实施例2Example 2

本技术制备的OFET具有优异的柔性,可卷曲折叠,并在卷曲的状态下仍能保持器件的电学性能。为表征本发明中OFET在卷曲状态下的工作情况,首先将OFET器件紧紧地缠绕在具有不同半径的圆柱形物体上,在此状态下测试OFET的晶体管性能,本实例中选取的半径参数从无穷大(即OFET处于平坦状态)到800чm。图2中展示了OFET的迁移率随其卷曲半径的变化,可见当器件卷曲到800чm的半径上时,其迁移率只降低了4%,说明本发明中的OFET器件具有优异的柔性。The OFET prepared by this technology has excellent flexibility, can be rolled and folded, and can still maintain the electrical properties of the device in the rolled state. In order to characterize the working situation of the OFET in the coiled state in the present invention, at first the OFET device is tightly wound on cylindrical objects with different radii, and the transistor performance of the OFET is tested in this state. The radius parameter selected in this example is from Infinity (i.e. the OFET is in a flat state) to 800чm. Fig. 2 shows the variation of the mobility of the OFET with its crimping radius. It can be seen that when the device is crimped to a radius of 800 чm, its mobility is only reduced by 4%, indicating that the OFET device in the present invention has excellent flexibility.

实施例3Example 3

将本发明制备的OFET样品浸泡在2mL的RPMI1640溶液中,于37℃保持24或48h,然后将溶液过滤,稀释至1至1/8倍,最后与体积分数10%的小牛血清溶液混合。将浓度为1×104个/mL的L929细胞与上述溶液混合培养7天,每24小时补充新鲜溶液。作为空白对照组的L929细胞置于不含OFET萃取物的细胞培养液中培养7天。将5mg/mL的MTT溶液加入上述细胞培养液体中,3.5小时后,将生成的沉淀滤出,溶于二甲基亚砜(DMSO),在570nm的光照下测试其光密度值(optical density,O.D.)。而OFET样品的细胞相容性可用共培养细胞的成长率(relative growth rations,RGR)来表示,其等于OFET样品的O.D.值除以空白对照组的O.D.值,其值越高,样品的细胞相容性越好。图3中展示了L929细胞在不同萃取时间、不同稀释倍数的OFET萃取液体中共培养实验的成长情况,RGR值在所有情况下都大于80%,说明本技术制备的OFET具有良好的生物安全性。Soak the OFET sample prepared by the present invention in 2 mL of RPMI1640 solution, keep it at 37°C for 24 or 48 hours, then filter the solution, dilute it to 1 to 1/8 times, and finally mix it with calf serum solution with a volume fraction of 10%. L929 cells at a concentration of 1×10 4 /mL were mixed with the above solution for 7 days, and fresh solution was added every 24 hours. The L929 cells used as the blank control group were cultured in the cell culture medium without OFET extract for 7 days. Add 5 mg/mL of MTT solution to the above cell culture liquid, after 3.5 hours, filter the generated precipitate, dissolve it in dimethyl sulfoxide (DMSO), and test its optical density (optical density, OD). The cytocompatibility of the OFET sample can be expressed by the relative growth ratios (RGR) of the co-cultured cells, which is equal to the OD value of the OFET sample divided by the OD value of the blank control group. The better the capacity. Figure 3 shows the growth of L929 cells in co-culture experiments with different extraction times and different dilutions of OFET extraction liquid. The RGR value is greater than 80% in all cases, indicating that the OFET prepared by this technology has good biological safety.

实施例4Example 4

使用广谱LED准直光源照射上述OFET,调节照射光强从0.5-100mW/cm2,用半导体参数仪测试OFET的输出特性曲线及转移特性曲线,得出OFET的电流、迁移率以及阈值电压等随光强的变化。图6中展示了不同光强照射下OFET的转移特性曲线,可知本发明制备的OFET光敏传感器的光开关比为102-104。图4中展示了器件在不加场电压的情况下源极/漏极电流-电压曲线随光强的变化,表面本发明所制备的器件同时可作为光敏晶体管。Use a broad-spectrum LED collimated light source to irradiate the above-mentioned OFET, adjust the irradiation light intensity from 0.5-100mW/cm2, test the output characteristic curve and transfer characteristic curve of OFET with a semiconductor parameter meter, and obtain the current, mobility and threshold voltage of OFET as a function of Changes in light intensity. Figure 6 shows the transfer characteristic curves of OFET under different light intensities, and it can be seen that the optical switch ratio of the OFET photosensor prepared by the present invention is 10 2 -10 4 . Fig. 4 shows the change of the source/drain current-voltage curve with the light intensity of the device under the condition of no field voltage, which shows that the device prepared by the present invention can be used as a photosensitive transistor at the same time.

将具有特定形状图案的物件(本实例中使用五角星形纸板)覆盖在10×10的OFET器件矩阵上,再将器件矩阵置于光照下测试每个器件元件的电学参数如电流、迁移率以及阈值电压等与没有物件覆盖时各元件电学参数的比值,给出OFET器件矩阵对于该物件的光敏成像。图5给出的OFET器件矩阵信号输出清晰地显示出五角星的图案,说明本发明制备的OFET光敏器件具有良好的图案成像能力。Cover the 10×10 OFET device matrix with an object with a specific shape pattern (in this example, a five-pointed star-shaped cardboard), and then place the device matrix under light to test the electrical parameters of each device element such as current, mobility and The ratio of the threshold voltage etc. to the electrical parameters of each element when there is no object coverage gives the photosensitive imaging of the OFET device matrix for the object. The matrix signal output of the OFET device shown in Figure 5 clearly shows the pattern of a five-pointed star, indicating that the OFET photosensitive device prepared by the present invention has good pattern imaging capability.

Claims (6)

1. a bio-safety flexible photosensitive transducer for organic field effect tube, is characterized in that, comprising:
As PLA (PLA) film of dielectric layer,
Bottom PLA film, the gold thin film of evaporation is as gate electrode,
At PLA film top evaporation organic semiconductor layer as conductive layer,
The gold thin film mutually completely cut off at conductive layer top evaporation is as source electrode and drain electrode.
2. the bio-safety flexible photosensitive transducer of a kind of organic field effect tube according to claim 1, is characterized in that, described PLA film thickness is 1-5 μm.
3. the bio-safety flexible photosensitive transducer of a kind of organic field effect tube according to claim 1, is characterized in that, the gold thin film thickness as gate electrode is 50-100nm.
4. the bio-safety flexible photosensitive transducer of a kind of organic field effect tube according to claim 1, is characterized in that, the thickness of described organic semiconductor layer is 50-100nm, and material is dinaphtho thienone.
5. the bio-safety flexible photosensitive transducer of a kind of organic field effect tube according to claim 1, is characterized in that, the distance between described source electrode and drain electrode is 10-500 μm.
6. the preparation method of the bio-safety flexible photosensitive transducer of the organic field effect tube according to any one of claim 1-5, is characterized in that, the method adopts following steps:
A) clean of substrate: use acetone, at the bottom of isopropyl alcohol ultrasonic cleaning silicon wafer-based successively, then use absolute ethyl alcohol and deionized water rinsing, finally dry up substrate surface with nitrogen;
B) the surface anti sticking process of substrate: be that (13 fluoro-1,1,2,2-tetrahydrochysene octane)-trichlorosilane (FOTS) solution in chloroform of 1-5% is spun to above-mentioned clean silicon chip surface as adherent layer by volumetric concentration;
C) 7 × 10 -4gate electrode is formed by hot for gold evaporation to silicon chip under the vacuum of Pa;
D) product c) is vertically placed in the PLA chloroformic solution of 50g/L, slowly lifts with the speed of 15 μm/s and leave solution surface, obtain the PLA film as OFET dielectric layer;
E) 7 × 10 -4under the vacuum of Pa, by the thermal evaporation of dinaphtho thienone on above-mentioned PLA film;
F) use c) identical method, the mode utilizing mask plate to block by hot for gold evaporation on product e), as source electrode and the drain electrode of OFET;
G) PLA film being taken off from there being the silicon chip of FOTS process, obtaining flexible photosensitive transducer.
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