CN104931191A - System for simultaneously detecting lower pressure of grinding pad smoother and pressure of gas generating lower pressure - Google Patents
System for simultaneously detecting lower pressure of grinding pad smoother and pressure of gas generating lower pressure Download PDFInfo
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- CN104931191A CN104931191A CN201410102148.6A CN201410102148A CN104931191A CN 104931191 A CN104931191 A CN 104931191A CN 201410102148 A CN201410102148 A CN 201410102148A CN 104931191 A CN104931191 A CN 104931191A
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- gas
- grinding pad
- connector
- smoother
- pad smoother
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Abstract
The invention discloses a system for simultaneously detecting a lower pressure of a grinding pad smoother and a pressure of gas generating the lower pressure. The system is connected in the grinding pad smoother and comprises a housing; a grinding pad smoother end connection joint, a gas source end connector and a gas manometer end connector which are arranged on the housing, wherein the gas manometer end connector is connected with an external gas manometer; transition connectors arranged in the housing, wherein the transition connectors are respectively connected with the grinding pad smoother end connection joint, the gas source end connector and the gas manometer end connector, mutual communication is realized among the grinding pad smoother end connection joint, the gas source end connector and the gas manometer end connector, and the gas manometer is enabled to measure gas pressures of the grinding pad smoother end connection joint and the gas source end connector. According to the invention, a gas conveying pipeline and gas turning connectors are communicated, the lower pressure of the grinding pad smoother and the pressure of gas generating the lower pressure can be simultaneously detected, and the fault removing time is shortened.
Description
Technical field
The present invention relates to semiconductor grinding field, particularly one detects grinding pad smoother downforce simultaneously and produces downforce gas pressure systems.
Background technology
In wafer grinding operation, when grinding pad thickness abnormity, normally caused by the change of grinding pad smoother downforce.The factor causing downforce to change presses down air pressure by barrier film quality, grinding pad smoother usually, many factors such as conveying Leakage Gas and grinding pad smoother quality abnormal etc. causes.
For the problem of Leakage Gas and gaseous tension shakiness, need the gaseous tension detecting conveying gas piping with gas gauge, but in prior art, because conveying gas piping is not communicated with gas turns connector, the gaseous tension of grinding pad smoother downforce and generation downforce can not be detected simultaneously, add the time of fixing a breakdown.
Summary of the invention
The object of this invention is to provide one detect grinding pad smoother downforce simultaneously and produce downforce gas pressure systems, cleverly conveying gas piping is communicated with gas turns connector, the gaseous tension detecting grinding pad smoother downforce simultaneously and produce downforce can be realized, shorten the time of fixing a breakdown.
In order to realize above object, the present invention is achieved by the following technical solutions:
One detects grinding pad smoother downforce simultaneously and produces downforce gas pressure systems, and it is connected in grinding pad smoother, is characterized in, this system comprises:
Housing;
Be arranged on grinding pad smoother end jointing, gas source connector and the gas gauge end connector on housing, described gas gauge end connector connects outside gas gauge;
Be arranged on the conversion connector in housing, described conversion connector interface connects grinding pad smoother end jointing, gas source connector and gas gauge end connector respectively, make it be interconnected, and make gaseous tension measure the gaseous tension of grinding pad smoother end jointing and gas source connector.
Described changes connector into three-way connection.
Described changes connector into T-shaped head.
The present invention compared with prior art, has the following advantages:
Conveying gas piping is communicated with gas turns connector by the present invention cleverly, can detect that grinding pad presses down air pressure and conveying gas atmosphere simultaneously, shorten the time of fixing a breakdown.
Accompanying drawing explanation
Fig. 1 is a kind of structural drawing detecting grinding pad smoother downforce simultaneously and produce downforce gas pressure systems of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the present invention is further elaborated.
As shown in Figure 1, one detects grinding pad smoother downforce simultaneously and produces downforce gas pressure systems, and it is connected in grinding pad smoother, and this system comprises: housing 5; Be arranged on grinding pad smoother end jointing 1, gas source connector 2 and the gas gauge end connector 3 on housing 5, gas gauge end connector 3 connects outside gas gauge; Be arranged on the conversion connector 4 in housing 5, wherein two interfaces of conversion connector 4 connect grinding pad smoother end jointing 1, gas source connector 2 in tubule road respectively, another interface of X-over connects gas gauge end connector 3 by extra heavy pipe road, make it be interconnected, and make gaseous tension measure the gaseous tension of grinding pad smoother end jointing 1 and gas source connector 2.Change connector 4 into three-way connection, change connector 4 into T-shaped head.
During grinding pad thickness abnormity, grinding pad smoother end jointing 1 connects conveying gas piping, gas source connects gas turns connector, by conversion connector 4, conveying gas piping is communicated with gas turns connector, and be the gas gauge of RPM3 by model, detect grinding pad smoother downforce simultaneously and produce downforce gaseous tension, thus reducing to fix a breakdown the time.
In sum, a kind of system pressing down air pressure and conveying gas atmosphere for detecting grinding pad simultaneously of the present invention, cleverly conveying gas piping is communicated with gas turns connector, can detects that grinding pad presses down air pressure and conveying gas atmosphere simultaneously, shorten the time of fixing a breakdown.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (3)
1. detect grinding pad smoother downforce simultaneously and produce a downforce gas pressure systems, it is connected in grinding pad smoother, it is characterized in that, this system comprises:
Housing (5);
Be arranged on grinding pad smoother end jointing (1) on housing (5), gas source connector (2) and gas gauge end connector (3), described gas gauge end connector (3) connects outside gas gauge;
Be arranged on the conversion connector (4) in housing (5), described conversion connector (4) interface connects grinding pad smoother end jointing (1), gas source connector (2) and gas gauge end connector (3) respectively, make it be interconnected, and make gaseous tension measure the gaseous tension of grinding pad smoother end jointing (1) and gas source connector (2).
2. the grinding pad smoother downforce of detection simultaneously as claimed in claim 1 and generation downforce gas pressure systems, it is characterized in that, described connector (4) of changing is three-way connection.
3. the grinding pad smoother downforce of detection simultaneously as claimed in claim 1 and generation downforce gas pressure systems, it is characterized in that, described changes connector (4) into T-shaped head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410102148.6A CN104931191A (en) | 2014-03-19 | 2014-03-19 | System for simultaneously detecting lower pressure of grinding pad smoother and pressure of gas generating lower pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410102148.6A CN104931191A (en) | 2014-03-19 | 2014-03-19 | System for simultaneously detecting lower pressure of grinding pad smoother and pressure of gas generating lower pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104931191A true CN104931191A (en) | 2015-09-23 |
Family
ID=54118466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410102148.6A Pending CN104931191A (en) | 2014-03-19 | 2014-03-19 | System for simultaneously detecting lower pressure of grinding pad smoother and pressure of gas generating lower pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104931191A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2391188Y (en) * | 1999-10-15 | 2000-08-09 | 程远洋 | Tyre inflation pressure-measuring apparatus |
| CN102116695A (en) * | 2009-12-31 | 2011-07-06 | 北京谊安医疗系统股份有限公司 | Method and device for detecting transfusion pipeline |
| CN102680166A (en) * | 2012-05-22 | 2012-09-19 | 西安飞机工业（集团）有限责任公司 | Pressure measuring joint of liquid pipeline |
| CN203224325U (en) * | 2013-03-19 | 2013-10-02 | 洛阳新奥华油燃气有限公司 | A pressure tester of a fuel gas pressure regulating box |
| CN203376108U (en) * | 2013-06-24 | 2014-01-01 | 天津东丽湖能源科技有限公司 | Multi point measuring device applied to heating cycle loop |
-
2014
- 2014-03-19 CN CN201410102148.6A patent/CN104931191A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2391188Y (en) * | 1999-10-15 | 2000-08-09 | 程远洋 | Tyre inflation pressure-measuring apparatus |
| CN102116695A (en) * | 2009-12-31 | 2011-07-06 | 北京谊安医疗系统股份有限公司 | Method and device for detecting transfusion pipeline |
| CN102680166A (en) * | 2012-05-22 | 2012-09-19 | 西安飞机工业（集团）有限责任公司 | Pressure measuring joint of liquid pipeline |
| CN203224325U (en) * | 2013-03-19 | 2013-10-02 | 洛阳新奥华油燃气有限公司 | A pressure tester of a fuel gas pressure regulating box |
| CN203376108U (en) * | 2013-06-24 | 2014-01-01 | 天津东丽湖能源科技有限公司 | Multi point measuring device applied to heating cycle loop |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150923 |